KR100209121B1 - 고 다공도의 비휘발성 게터재료의 제조방법 및 그 게터재료 - Google Patents

고 다공도의 비휘발성 게터재료의 제조방법 및 그 게터재료 Download PDF

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Publication number
KR100209121B1
KR100209121B1 KR1019950046953A KR19950046953A KR100209121B1 KR 100209121 B1 KR100209121 B1 KR 100209121B1 KR 1019950046953 A KR1019950046953 A KR 1019950046953A KR 19950046953 A KR19950046953 A KR 19950046953A KR 100209121 B1 KR100209121 B1 KR 100209121B1
Authority
KR
South Korea
Prior art keywords
getter
getter material
sample
mixture
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019950046953A
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English (en)
Korean (ko)
Other versions
KR960021130A (ko
Inventor
콘떼 안드레아
카렐라 서지오
Original Assignee
파오로 델라 폴라
사에스 게터스 에스.페.아.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT94MI002449A external-priority patent/IT1276898B1/it
Priority claimed from ITMI950779A external-priority patent/IT1273571B/it
Application filed by 파오로 델라 폴라, 사에스 게터스 에스.페.아. filed Critical 파오로 델라 폴라
Publication of KR960021130A publication Critical patent/KR960021130A/ko
Application granted granted Critical
Publication of KR100209121B1 publication Critical patent/KR100209121B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/1003—Use of special medium during sintering, e.g. sintering aid
    • B22F3/1007—Atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/11—Making porous workpieces or articles
    • B22F3/1121—Making porous workpieces or articles by using decomposable, meltable or sublimatable fillers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0259—Physical processing only by adsorption on solids
    • C01B13/0281—Physical processing only by adsorption on solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0052—Physical processing only by adsorption in solids
    • C01B23/0084—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/508—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by selective and reversible uptake by an appropriate medium, i.e. the uptake being based on physical or chemical sorption phenomena or on reversible chemical reactions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/045—Alloys based on refractory metals
    • C22C1/0458—Alloys based on titanium, zirconium or hafnium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/10—Inert gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/20—Use of vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/042—Purification by adsorption on solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C01B2203/047—Composition of the impurity the impurity being carbon monoxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Combustion & Propulsion (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Powder Metallurgy (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas Separation By Absorption (AREA)
KR1019950046953A 1994-12-02 1995-12-02 고 다공도의 비휘발성 게터재료의 제조방법 및 그 게터재료 Expired - Lifetime KR100209121B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
ITMI94A002449 1994-12-02
IT94MI002449A IT1276898B1 (it) 1994-12-02 1994-12-02 Processo per la produzione di materiali getter non evaporabili ad elevata porosita' e materiali cosi' ottenuti
ITMI950779A IT1273571B (it) 1995-04-14 1995-04-14 Processo per la produzione di materiali getter non evaporabili ad elevata porosita' e capacita' di assorbimento di idrogeno e materiali cosi' ottenuti
ITMI95A000779 1995-04-14

Publications (2)

Publication Number Publication Date
KR960021130A KR960021130A (ko) 1996-07-18
KR100209121B1 true KR100209121B1 (ko) 1999-07-15

Family

ID=26331215

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950046953A Expired - Lifetime KR100209121B1 (ko) 1994-12-02 1995-12-02 고 다공도의 비휘발성 게터재료의 제조방법 및 그 게터재료

Country Status (10)

Country Link
US (2) US6027986A (cg-RX-API-DMAC10.html)
EP (1) EP0719609B1 (cg-RX-API-DMAC10.html)
JP (1) JP2785119B2 (cg-RX-API-DMAC10.html)
KR (1) KR100209121B1 (cg-RX-API-DMAC10.html)
CN (1) CN1074697C (cg-RX-API-DMAC10.html)
AT (1) ATE189637T1 (cg-RX-API-DMAC10.html)
BR (1) BR9505627A (cg-RX-API-DMAC10.html)
DE (1) DE69515014T2 (cg-RX-API-DMAC10.html)
MY (1) MY114207A (cg-RX-API-DMAC10.html)
TW (1) TW287117B (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011118883A1 (ko) * 2010-03-26 2011-09-29 주식회사 엑스엘 비확산 게터가 장착된 엑스선관
KR101848969B1 (ko) 2011-10-14 2018-04-13 사에스 게터스 에스.페.아. 고온에서 반응성 가스에 노출 후 저온에서 재활성화될 수 있는 비-증발성 게터 조성물

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110807A (en) * 1995-06-07 2000-08-29 Saes Getters S.P.A. Process for producing high-porosity non-evaporable getter materials
AU4248897A (en) * 1996-09-04 1998-03-26 Saes Getters S.P.A. Thin-film phosphors for field emission displays
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
EP0993047A1 (fr) * 1998-10-06 2000-04-12 Koninklijke Philips Electronics N.V. Dispositif semi-conducteur avec des éléments de circuits intégrés du groupe III-V ayant des moyens pour prévenir la pollution par l'hydrogène
JP3420520B2 (ja) 1999-01-13 2003-06-23 キヤノン株式会社 非蒸発性ゲッターの製造方法及び画像形成装置
EP1101237B2 (en) * 1999-06-02 2017-08-16 SAES GETTERS S.p.A. Composite materials capable of hydrogen sorption independently from activating treatments and methods for the production thereof
US6420002B1 (en) 1999-08-18 2002-07-16 Guardian Industries Corp. Vacuum IG unit with spacer/pillar getter
IT1318061B1 (it) * 2000-06-28 2003-07-21 Getters Spa Catodi per deposizione catodica di leghe getter e processo per la loro produzione.
US6956268B2 (en) * 2001-05-18 2005-10-18 Reveo, Inc. MEMS and method of manufacturing MEMS
JP2003022744A (ja) 2001-07-06 2003-01-24 Sony Corp 非蒸発型ゲッター、表示装置およびこれらの製造方法
JP3998948B2 (ja) * 2001-10-31 2007-10-31 セイコーインスツル株式会社 圧電振動子及びその製造方法
TWI245308B (en) * 2002-09-13 2005-12-11 Getters Spa Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature
ITMI20031178A1 (it) * 2003-06-11 2004-12-12 Getters Spa Depositi multistrato getter non evaporabili ottenuti per
US20050069475A1 (en) * 2003-09-30 2005-03-31 Hage Daniel B. System and process for reducing impurities
JP2009522104A (ja) * 2006-12-15 2009-06-11 ビ−エイイ− システムズ パブリック リミテッド カンパニ− 薄膜ゲッタ装置に関する改善
ITMI20070301A1 (it) * 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
BRPI0910238A2 (pt) 2008-03-28 2015-09-29 Getters Spa sistema de bombeamento combinado.
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
ITMI20120872A1 (it) 2012-05-21 2013-11-22 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e azoto
US10046544B2 (en) 2013-03-04 2018-08-14 Panasonic Intellectual Property Management Co., Ltd. Multiple pane and production method of multiple pane
JP2015110214A (ja) * 2013-11-01 2015-06-18 大学共同利用機関法人 高エネルギー加速器研究機構 非蒸発型ゲッタ材、非蒸発型ゲッタモジュール、及び非蒸発型ゲッタポンプ
ITMI20131921A1 (it) * 2013-11-20 2015-05-21 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio
DK3176135T3 (da) * 2014-07-30 2019-07-29 Agc Inc Flerlagsvakuumglas
CN105783296B (zh) * 2014-12-24 2018-06-15 北京有色金属研究总院 多孔吸氢元件及其在太阳能集热管中的安装方法
ITUA20163861A1 (it) 2016-05-27 2017-11-27 Getters Spa Non-evaporable getter alloys particularly suitable for hydrogen and carbon monoxide sorption
JP6843380B2 (ja) * 2016-12-13 2021-03-17 有限会社真空実験室 非蒸発型ゲッター粉末材料、非蒸発型ゲッター粉末材料の製造方法、非蒸発型ゲッター及び非蒸発型ゲッターポンプ
WO2019045126A1 (ko) * 2017-08-28 2019-03-07 한양대학교에리카산학협력단 박막 게터, 및 그 제조 방법
GB202103659D0 (en) 2021-03-17 2021-04-28 Johnson Matthey Plc Getter activation and use
CN114749144A (zh) * 2022-04-27 2022-07-15 中山金石新材料科技有限公司 用于维持高真空环境的可再生复合吸气剂及其制作方法
CN116275106A (zh) * 2023-02-28 2023-06-23 上海联泰科技股份有限公司 一种多孔结构锆钒铁吸气剂及其制备方法

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DE2204714C3 (de) 1972-02-01 1979-10-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Getterkörpern
IT1198325B (it) 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
US4671889A (en) * 1982-08-10 1987-06-09 Horst Schreiner Molded getter bodies and method of producing the same
US4428856A (en) 1982-09-30 1984-01-31 Boyarina Maya F Non-evaporable getter
IT1255438B (it) 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011118883A1 (ko) * 2010-03-26 2011-09-29 주식회사 엑스엘 비확산 게터가 장착된 엑스선관
KR101151859B1 (ko) * 2010-03-26 2012-05-31 주식회사엑스엘 비확산 게터가 장착된 엑스선관
KR101848969B1 (ko) 2011-10-14 2018-04-13 사에스 게터스 에스.페.아. 고온에서 반응성 가스에 노출 후 저온에서 재활성화될 수 있는 비-증발성 게터 조성물

Also Published As

Publication number Publication date
ATE189637T1 (de) 2000-02-15
TW287117B (cg-RX-API-DMAC10.html) 1996-10-01
BR9505627A (pt) 1997-09-16
EP0719609A3 (en) 1997-06-25
EP0719609A2 (en) 1996-07-03
CN1132655A (zh) 1996-10-09
KR960021130A (ko) 1996-07-18
DE69515014D1 (de) 2000-03-16
JP2785119B2 (ja) 1998-08-13
US5879583A (en) 1999-03-09
MY114207A (en) 2002-08-30
EP0719609B1 (en) 2000-02-09
DE69515014T2 (de) 2000-07-20
JPH08225806A (ja) 1996-09-03
US6027986A (en) 2000-02-22
CN1074697C (zh) 2001-11-14

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