BRPI0910238A2 - sistema de bombeamento combinado. - Google Patents
sistema de bombeamento combinado.Info
- Publication number
- BRPI0910238A2 BRPI0910238A2 BRPI0910238A BRPI0910238A BRPI0910238A2 BR PI0910238 A2 BRPI0910238 A2 BR PI0910238A2 BR PI0910238 A BRPI0910238 A BR PI0910238A BR PI0910238 A BRPI0910238 A BR PI0910238A BR PI0910238 A2 BRPI0910238 A2 BR PI0910238A2
- Authority
- BR
- Brazil
- Prior art keywords
- pumping system
- combined pumping
- combined
- pumping
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI20080112 ITMI20080112U1 (it) | 2008-03-28 | 2008-03-28 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
ITMI20080250 ITMI20080250U1 (it) | 2008-08-01 | 2008-08-01 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
PCT/EP2009/053634 WO2009118398A1 (en) | 2008-03-28 | 2009-03-26 | Combined pumping system comprising a getter pump and an ion pump |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0910238A2 true BRPI0910238A2 (pt) | 2015-09-29 |
Family
ID=40848542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0910238A BRPI0910238A2 (pt) | 2008-03-28 | 2009-03-26 | sistema de bombeamento combinado. |
Country Status (10)
Country | Link |
---|---|
US (1) | US8342813B2 (pt) |
EP (1) | EP2260502B1 (pt) |
JP (1) | JP5302386B2 (pt) |
KR (1) | KR101455044B1 (pt) |
CN (1) | CN101978463B (pt) |
BR (1) | BRPI0910238A2 (pt) |
CA (1) | CA2714274A1 (pt) |
IL (1) | IL208238A (pt) |
RU (1) | RU2495510C2 (pt) |
WO (1) | WO2009118398A1 (pt) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20090402A1 (it) | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
CN102938356B (zh) * | 2012-10-23 | 2015-03-04 | 北京市北分仪器技术有限责任公司 | 用于真空器件的真空保持系统 |
TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
US9685308B2 (en) * | 2014-06-26 | 2017-06-20 | Saes Getters S.P.A. | Getter pumping system |
JP7008976B2 (ja) * | 2017-11-13 | 2022-01-25 | 国立研究開発法人情報通信研究機構 | 真空作成装置 |
US10264634B2 (en) * | 2018-04-20 | 2019-04-16 | Advanced Regulated Power Technology, Inc. | Adaptive power regulation of LED driver module for emergency lighting |
CN108757380B (zh) * | 2018-05-18 | 2019-11-19 | 南京华东电子真空材料有限公司 | 结构简单便于安装的组合泵 |
GB2578293A (en) * | 2018-10-18 | 2020-05-06 | Edwards Ltd | A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment |
CN111377081A (zh) * | 2018-12-27 | 2020-07-07 | 云南全控机电有限公司 | 一种抽真空的封装设备 |
GB2576968B (en) * | 2019-05-24 | 2021-12-08 | Edwards Ltd | A vacuum pumping system having multiple pumps |
US11454229B1 (en) | 2019-09-16 | 2022-09-27 | Wavefront Research, Inc. | Dewar vacuum maintenance systems for intermittently powered sensors |
GB2592653B (en) * | 2020-03-05 | 2022-12-28 | Edwards Vacuum Llc | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump |
GB2592654B (en) * | 2020-03-05 | 2022-12-14 | Edwards Vacuum Llc | Pump module |
GB2592655B (en) * | 2020-03-05 | 2023-01-11 | Edwards Vacuum Llc | Pump module |
GB2627459A (en) * | 2023-02-22 | 2024-08-28 | Edwards Vacuum Llc | Sputter Ion pump module and vacuum pump |
GB2627462A (en) * | 2023-02-22 | 2024-08-28 | Edwards Vacuum Llc | Magnetic assembly for a sputter Ion pump |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
US3596123A (en) * | 1969-09-18 | 1971-07-27 | Varian Associates | Anode structure for a magnetically confined glow discharge getter ion pump |
GB2026231B (en) * | 1978-05-30 | 1982-10-27 | Emi Ltd | Mass spectrometers |
SU943920A1 (ru) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
JPS58117371A (ja) | 1981-12-30 | 1983-07-12 | Ulvac Corp | バルクゲツタポンプとスパツタイオンポンプを組合わせた超高真空ポンプ |
SU1034100A1 (ru) * | 1982-01-29 | 1983-08-07 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
DE3434787A1 (de) * | 1984-09-21 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Getter-ionenzerstaeuber-kombinationspumpe fuer hoch- und ultrahochvakuumanlagen |
JPH0334046Y2 (pt) * | 1984-10-02 | 1991-07-18 | ||
JPS62218834A (ja) * | 1986-03-20 | 1987-09-26 | Seiko Instr & Electronics Ltd | 気体圧力計 |
JPH03222876A (ja) * | 1990-01-26 | 1991-10-01 | Jeol Ltd | 複合ポンプ |
DE4110588A1 (de) * | 1991-04-02 | 1992-10-08 | Leybold Ag | Ionenzerstaeuberpumpe mit gettermodul |
IT1255438B (it) | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
JPH06140193A (ja) | 1992-10-21 | 1994-05-20 | Mitsubishi Electric Corp | Sr装置用ビームチェンバ |
JPH07263198A (ja) | 1994-03-18 | 1995-10-13 | Hitachi Ltd | 加速器及び真空排気装置 |
TW287117B (pt) | 1994-12-02 | 1996-10-01 | Getters Spa | |
IT1290548B1 (it) * | 1997-02-24 | 1998-12-10 | Getters Spa | Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli |
IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
JP2006066267A (ja) * | 2004-08-27 | 2006-03-09 | Canon Inc | 画像表示装置 |
JP2006098898A (ja) * | 2004-09-30 | 2006-04-13 | Tdk Corp | 真空装置用フランジ及び該フランジを用いた真空装置 |
JP4751635B2 (ja) | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
-
2009
- 2009-03-26 BR BRPI0910238A patent/BRPI0910238A2/pt not_active IP Right Cessation
- 2009-03-26 KR KR1020107024101A patent/KR101455044B1/ko active IP Right Grant
- 2009-03-26 EP EP09726197.8A patent/EP2260502B1/en active Active
- 2009-03-26 RU RU2010144064/07A patent/RU2495510C2/ru active
- 2009-03-26 CA CA2714274A patent/CA2714274A1/en not_active Abandoned
- 2009-03-26 WO PCT/EP2009/053634 patent/WO2009118398A1/en active Application Filing
- 2009-03-26 JP JP2011501237A patent/JP5302386B2/ja active Active
- 2009-03-26 CN CN200980109641.8A patent/CN101978463B/zh active Active
- 2009-03-26 US US12/920,797 patent/US8342813B2/en active Active
-
2010
- 2010-09-19 IL IL208238A patent/IL208238A/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CA2714274A1 (en) | 2009-10-01 |
IL208238A0 (en) | 2010-12-30 |
US20110014063A1 (en) | 2011-01-20 |
IL208238A (en) | 2014-05-28 |
EP2260502A1 (en) | 2010-12-15 |
RU2010144064A (ru) | 2012-05-10 |
CN101978463B (zh) | 2013-02-13 |
RU2495510C2 (ru) | 2013-10-10 |
JP2011517836A (ja) | 2011-06-16 |
WO2009118398A1 (en) | 2009-10-01 |
US8342813B2 (en) | 2013-01-01 |
JP5302386B2 (ja) | 2013-10-02 |
KR20110004399A (ko) | 2011-01-13 |
KR101455044B1 (ko) | 2014-10-27 |
CN101978463A (zh) | 2011-02-16 |
EP2260502B1 (en) | 2023-05-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE AS 4A, 5A E 6A ANUIDADES. |
|
B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2344 DE 08-12-2015 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |