JP5302386B2 - ゲッタポンプ及びイオンポンプを具備する複合排気システム - Google Patents
ゲッタポンプ及びイオンポンプを具備する複合排気システム Download PDFInfo
- Publication number
- JP5302386B2 JP5302386B2 JP2011501237A JP2011501237A JP5302386B2 JP 5302386 B2 JP5302386 B2 JP 5302386B2 JP 2011501237 A JP2011501237 A JP 2011501237A JP 2011501237 A JP2011501237 A JP 2011501237A JP 5302386 B2 JP5302386 B2 JP 5302386B2
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- JP
- Japan
- Prior art keywords
- pump
- getter
- flange
- ion
- exhaust system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
Claims (5)
- ゲッタポンプ(12)及びイオンポンプ(13)を具備する複合排気システム(10)であって、
前記ゲッタポンプ(12)及び前記イオンポンプ(13)が、同じフランジ(11)に取り付けられ、フランジの同じ側の2つの異なる箇所に配置される、
複合排気システム(10)。 - イオンポンプ(13)の作用のために必要とされる磁石(136)が、排気システムが真空室に接続されたときに、フランジ(11)内であり真空室に対して外側のフランジ(11)の側に形成される座部に配置される、
請求項1に記載のシステム。 - イオンポンプ(13)の作用のために必要とされる磁石(236)が、排気システム(10)が真空室に接続されたときに、真空室に対して内側のフランジの側に配置される、
請求項1に記載のシステム。 - 磁石(236)が、永久型の磁石であり、350℃よりも高いキュリー温度を有する、
請求項3に記載のシステム。 - ゲッタポンプ(12)が、中央サポート(122)に積み重ねられる非蒸発性ゲッタ材料で作られる一連のディスク(121、121’……)から形成される
請求項1〜4のいずれか1項に記載のシステム。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI20080112 ITMI20080112U1 (it) | 2008-03-28 | 2008-03-28 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
ITMI2008U000112 | 2008-03-28 | ||
ITMI2008U000250 | 2008-08-01 | ||
ITMI20080250 ITMI20080250U1 (it) | 2008-08-01 | 2008-08-01 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
PCT/EP2009/053634 WO2009118398A1 (en) | 2008-03-28 | 2009-03-26 | Combined pumping system comprising a getter pump and an ion pump |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011517836A JP2011517836A (ja) | 2011-06-16 |
JP2011517836A5 JP2011517836A5 (ja) | 2012-02-02 |
JP5302386B2 true JP5302386B2 (ja) | 2013-10-02 |
Family
ID=40848542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011501237A Active JP5302386B2 (ja) | 2008-03-28 | 2009-03-26 | ゲッタポンプ及びイオンポンプを具備する複合排気システム |
Country Status (10)
Country | Link |
---|---|
US (1) | US8342813B2 (ja) |
EP (1) | EP2260502B1 (ja) |
JP (1) | JP5302386B2 (ja) |
KR (1) | KR101455044B1 (ja) |
CN (1) | CN101978463B (ja) |
BR (1) | BRPI0910238A2 (ja) |
CA (1) | CA2714274A1 (ja) |
IL (1) | IL208238A (ja) |
RU (1) | RU2495510C2 (ja) |
WO (1) | WO2009118398A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20090402A1 (it) | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
CN102938356B (zh) * | 2012-10-23 | 2015-03-04 | 北京市北分仪器技术有限责任公司 | 用于真空器件的真空保持系统 |
TWI660125B (zh) | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
CN107076133B (zh) * | 2014-06-26 | 2019-06-18 | 工程吸气公司 | 吸气剂泵送系统 |
JP7008976B2 (ja) * | 2017-11-13 | 2022-01-25 | 国立研究開発法人情報通信研究機構 | 真空作成装置 |
US10264634B2 (en) * | 2018-04-20 | 2019-04-16 | Advanced Regulated Power Technology, Inc. | Adaptive power regulation of LED driver module for emergency lighting |
CN108757380B (zh) * | 2018-05-18 | 2019-11-19 | 南京华东电子真空材料有限公司 | 结构简单便于安装的组合泵 |
GB2578293A (en) * | 2018-10-18 | 2020-05-06 | Edwards Ltd | A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment |
CN111377081A (zh) * | 2018-12-27 | 2020-07-07 | 云南全控机电有限公司 | 一种抽真空的封装设备 |
GB2576968B (en) | 2019-05-24 | 2021-12-08 | Edwards Ltd | A vacuum pumping system having multiple pumps |
US11454229B1 (en) | 2019-09-16 | 2022-09-27 | Wavefront Research, Inc. | Dewar vacuum maintenance systems for intermittently powered sensors |
GB2592655B (en) * | 2020-03-05 | 2023-01-11 | Edwards Vacuum Llc | Pump module |
GB2592653B (en) * | 2020-03-05 | 2022-12-28 | Edwards Vacuum Llc | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump |
GB2592654B (en) * | 2020-03-05 | 2022-12-14 | Edwards Vacuum Llc | Pump module |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
US3596123A (en) * | 1969-09-18 | 1971-07-27 | Varian Associates | Anode structure for a magnetically confined glow discharge getter ion pump |
GB2026231B (en) * | 1978-05-30 | 1982-10-27 | Emi Ltd | Mass spectrometers |
SU943920A1 (ru) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
JPS58117371A (ja) | 1981-12-30 | 1983-07-12 | Ulvac Corp | バルクゲツタポンプとスパツタイオンポンプを組合わせた超高真空ポンプ |
SU1034100A1 (ru) * | 1982-01-29 | 1983-08-07 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
DE3434787A1 (de) * | 1984-09-21 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Getter-ionenzerstaeuber-kombinationspumpe fuer hoch- und ultrahochvakuumanlagen |
JPH0334046Y2 (ja) * | 1984-10-02 | 1991-07-18 | ||
JPS62218834A (ja) * | 1986-03-20 | 1987-09-26 | Seiko Instr & Electronics Ltd | 気体圧力計 |
JPH03222876A (ja) * | 1990-01-26 | 1991-10-01 | Jeol Ltd | 複合ポンプ |
DE4110588A1 (de) * | 1991-04-02 | 1992-10-08 | Leybold Ag | Ionenzerstaeuberpumpe mit gettermodul |
IT1255438B (it) | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
JPH06140193A (ja) | 1992-10-21 | 1994-05-20 | Mitsubishi Electric Corp | Sr装置用ビームチェンバ |
JPH07263198A (ja) | 1994-03-18 | 1995-10-13 | Hitachi Ltd | 加速器及び真空排気装置 |
TW287117B (ja) | 1994-12-02 | 1996-10-01 | Getters Spa | |
IT1290548B1 (it) * | 1997-02-24 | 1998-12-10 | Getters Spa | Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli |
IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
JP2006066267A (ja) * | 2004-08-27 | 2006-03-09 | Canon Inc | 画像表示装置 |
JP2006098898A (ja) * | 2004-09-30 | 2006-04-13 | Tdk Corp | 真空装置用フランジ及び該フランジを用いた真空装置 |
JP4751635B2 (ja) | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
-
2009
- 2009-03-26 BR BRPI0910238A patent/BRPI0910238A2/pt not_active IP Right Cessation
- 2009-03-26 RU RU2010144064/07A patent/RU2495510C2/ru active
- 2009-03-26 CA CA2714274A patent/CA2714274A1/en not_active Abandoned
- 2009-03-26 US US12/920,797 patent/US8342813B2/en active Active
- 2009-03-26 WO PCT/EP2009/053634 patent/WO2009118398A1/en active Application Filing
- 2009-03-26 KR KR1020107024101A patent/KR101455044B1/ko active IP Right Grant
- 2009-03-26 JP JP2011501237A patent/JP5302386B2/ja active Active
- 2009-03-26 EP EP09726197.8A patent/EP2260502B1/en active Active
- 2009-03-26 CN CN200980109641.8A patent/CN101978463B/zh active Active
-
2010
- 2010-09-19 IL IL208238A patent/IL208238A/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
IL208238A0 (en) | 2010-12-30 |
IL208238A (en) | 2014-05-28 |
US20110014063A1 (en) | 2011-01-20 |
US8342813B2 (en) | 2013-01-01 |
EP2260502B1 (en) | 2023-05-03 |
RU2495510C2 (ru) | 2013-10-10 |
CN101978463A (zh) | 2011-02-16 |
JP2011517836A (ja) | 2011-06-16 |
KR101455044B1 (ko) | 2014-10-27 |
CA2714274A1 (en) | 2009-10-01 |
EP2260502A1 (en) | 2010-12-15 |
BRPI0910238A2 (pt) | 2015-09-29 |
CN101978463B (zh) | 2013-02-13 |
WO2009118398A1 (en) | 2009-10-01 |
KR20110004399A (ko) | 2011-01-13 |
RU2010144064A (ru) | 2012-05-10 |
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