JPWO2021090861A5 - - Google Patents
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- Publication number
- JPWO2021090861A5 JPWO2021090861A5 JP2021554959A JP2021554959A JPWO2021090861A5 JP WO2021090861 A5 JPWO2021090861 A5 JP WO2021090861A5 JP 2021554959 A JP2021554959 A JP 2021554959A JP 2021554959 A JP2021554959 A JP 2021554959A JP WO2021090861 A5 JPWO2021090861 A5 JP WO2021090861A5
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- sic
- litao
- sio
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019201522 | 2019-11-06 | ||
| JP2019201522 | 2019-11-06 | ||
| JP2019201524 | 2019-11-06 | ||
| JP2019201524 | 2019-11-06 | ||
| PCT/JP2020/041292 WO2021090861A1 (ja) | 2019-11-06 | 2020-11-05 | 弾性波装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021090861A1 JPWO2021090861A1 (https=) | 2021-05-14 |
| JPWO2021090861A5 true JPWO2021090861A5 (https=) | 2022-05-31 |
| JP7380703B2 JP7380703B2 (ja) | 2023-11-15 |
Family
ID=75849943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021554959A Active JP7380703B2 (ja) | 2019-11-06 | 2020-11-05 | 弾性波装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12587162B2 (https=) |
| JP (1) | JP7380703B2 (https=) |
| KR (1) | KR102709465B1 (https=) |
| CN (1) | CN114641931A (https=) |
| WO (1) | WO2021090861A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102844652B1 (ko) * | 2023-07-14 | 2025-08-11 | (주)와이솔 | 스퓨리어스의 여진이 억제된 표면탄성파 소자 |
| CN117013984B (zh) * | 2023-08-21 | 2024-05-28 | 天通瑞宏科技有限公司 | 一种键合晶圆及薄膜声表面波器件 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08310900A (ja) * | 1995-05-10 | 1996-11-26 | Sumitomo Electric Ind Ltd | 窒化物薄膜単結晶及びその製造方法 |
| US7898047B2 (en) * | 2003-03-03 | 2011-03-01 | Samsung Electronics Co., Ltd. | Integrated nitride and silicon carbide-based devices and methods of fabricating integrated nitride-based devices |
| WO2005060094A1 (ja) * | 2003-12-16 | 2005-06-30 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
| JP2007182335A (ja) | 2006-01-05 | 2007-07-19 | Toshiba Ceramics Co Ltd | 単結晶薄膜およびその形成方法 |
| JP2007228225A (ja) | 2006-02-23 | 2007-09-06 | Seiko Epson Corp | 弾性表面波デバイス |
| KR101082201B1 (ko) | 2009-01-09 | 2011-11-09 | 울산대학교 산학협력단 | 표면탄성파 소자 |
| JP5354020B2 (ja) | 2009-10-13 | 2013-11-27 | 株式会社村田製作所 | 弾性表面波装置 |
| CN106209007B (zh) | 2010-12-24 | 2019-07-05 | 株式会社村田制作所 | 弹性波装置 |
| CN103891139B (zh) * | 2011-10-24 | 2016-08-24 | 株式会社村田制作所 | 弹性表面波装置 |
| JP5811785B2 (ja) | 2011-11-08 | 2015-11-11 | セイコーエプソン株式会社 | センサー素子、力検出装置およびロボット |
| WO2017068828A1 (ja) * | 2015-10-23 | 2017-04-27 | 株式会社村田製作所 | 弾性波装置 |
| JP2019114986A (ja) | 2017-12-25 | 2019-07-11 | 株式会社村田製作所 | 弾性波装置 |
| JP2019146143A (ja) | 2018-02-21 | 2019-08-29 | 住友金属鉱山株式会社 | 表面弾性波素子用複合基板とその製造方法 |
-
2020
- 2020-11-05 CN CN202080076647.6A patent/CN114641931A/zh active Pending
- 2020-11-05 WO PCT/JP2020/041292 patent/WO2021090861A1/ja not_active Ceased
- 2020-11-05 KR KR1020227014803A patent/KR102709465B1/ko active Active
- 2020-11-05 JP JP2021554959A patent/JP7380703B2/ja active Active
-
2022
- 2022-04-28 US US17/731,547 patent/US12587162B2/en active Active
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