JP2009010927A5 - - Google Patents
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- Publication number
- JP2009010927A5 JP2009010927A5 JP2008098723A JP2008098723A JP2009010927A5 JP 2009010927 A5 JP2009010927 A5 JP 2009010927A5 JP 2008098723 A JP2008098723 A JP 2008098723A JP 2008098723 A JP2008098723 A JP 2008098723A JP 2009010927 A5 JP2009010927 A5 JP 2009010927A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- substrate
- acoustic wave
- boundary acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 94
- 239000010408 film Substances 0.000 claims 52
- 239000000758 substrate Substances 0.000 claims 52
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims 12
- 229910052751 metal Inorganic materials 0.000 claims 11
- 239000002184 metal Substances 0.000 claims 11
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 3
- 238000006073 displacement reaction Methods 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010897 surface acoustic wave method Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008098723A JP5154285B2 (ja) | 2007-05-28 | 2008-03-09 | 弾性境界波機能素子 |
| US12/601,687 US8508101B2 (en) | 2007-05-28 | 2008-05-28 | Elastic boundary wave substrate and elastic boundary wave functional element using the substrate |
| PCT/JP2008/001329 WO2008146489A1 (ja) | 2007-05-28 | 2008-05-28 | 弾性境界波基板とその基板を用いた弾性境界波機能素子 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007166939 | 2007-05-28 | ||
| JP2007166939 | 2007-05-28 | ||
| JP2008098723A JP5154285B2 (ja) | 2007-05-28 | 2008-03-09 | 弾性境界波機能素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009010927A JP2009010927A (ja) | 2009-01-15 |
| JP2009010927A5 true JP2009010927A5 (https=) | 2011-04-21 |
| JP5154285B2 JP5154285B2 (ja) | 2013-02-27 |
Family
ID=40325493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008098723A Active JP5154285B2 (ja) | 2007-05-28 | 2008-03-09 | 弾性境界波機能素子 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8508101B2 (https=) |
| JP (1) | JP5154285B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009088730A (ja) * | 2007-09-28 | 2009-04-23 | Samsung Electronics Co Ltd | 弾性境界波装置 |
| CN102017407B (zh) | 2008-04-30 | 2014-03-19 | 株式会社村田制作所 | 弹性边界波装置 |
| JPWO2010116783A1 (ja) * | 2009-03-30 | 2012-10-18 | 株式会社村田製作所 | 弾性波装置 |
| JPWO2010122993A1 (ja) * | 2009-04-22 | 2012-10-25 | 株式会社村田製作所 | 弾性境界波装置及びその製造方法 |
| JP2011041127A (ja) * | 2009-08-17 | 2011-02-24 | Hitachi Media Electoronics Co Ltd | 弾性波装置 |
| DE102011119660B4 (de) * | 2011-11-29 | 2014-12-11 | Epcos Ag | Mikroakustisches Bauelement mit Wellenleiterschicht |
| US11673352B2 (en) * | 2016-09-20 | 2023-06-13 | United States Of America As Represented By The Administrator Of Nasa | Automated wave guide system for in-process monitoring of carbon fiber reinforced polymer (CFRP) composite laminates with hanning window tone-bursts of center frequencies from 100-225 kHz and 100-350 kHz |
| CN109891612A (zh) * | 2016-10-20 | 2019-06-14 | 天工方案公司 | 具有亚波长厚度的压电层的弹性波器件 |
| US12494766B2 (en) | 2022-03-02 | 2025-12-09 | Skyworks Solutions, Inc. | Acoustic wave device with interdigital transducer electrode having buffer layer |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5111100A (en) * | 1990-01-12 | 1992-05-05 | Clarion Co., Ltd. | Surface acoustic wave device and method for fabricating same |
| CN1143431C (zh) * | 1996-06-05 | 2004-03-24 | 三洋电机株式会社 | 弹性表面波元件 |
| WO1998052279A1 (fr) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Dispositif a onde elastique |
| US7105980B2 (en) * | 2002-07-03 | 2006-09-12 | Sawtek, Inc. | Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics |
| JP3815424B2 (ja) * | 2002-11-08 | 2006-08-30 | 株式会社村田製作所 | 弾性境界波装置 |
| KR100850861B1 (ko) * | 2004-01-19 | 2008-08-06 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성 경계파 장치 |
| KR100804407B1 (ko) * | 2004-03-29 | 2008-02-15 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성 경계파 장치의 제조방법 |
| CN1829082B (zh) * | 2005-03-04 | 2010-05-26 | 鸿富锦精密工业（深圳）有限公司 | 声表面波器件及多频移动电话 |
| JP2006279609A (ja) * | 2005-03-29 | 2006-10-12 | Fujitsu Media Device Kk | 弾性境界波素子、共振子およびラダー型フィルタ |
| WO2006114930A1 (ja) | 2005-04-25 | 2006-11-02 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
| US7446453B1 (en) * | 2006-07-05 | 2008-11-04 | Triquint, Inc. | Surface acoustic wave devices using surface acoustic waves with strong piezoelectric coupling |
-
2008
- 2008-03-09 JP JP2008098723A patent/JP5154285B2/ja active Active
- 2008-05-28 US US12/601,687 patent/US8508101B2/en active Active
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