JP5154285B2 - 弾性境界波機能素子 - Google Patents

弾性境界波機能素子 Download PDF

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Publication number
JP5154285B2
JP5154285B2 JP2008098723A JP2008098723A JP5154285B2 JP 5154285 B2 JP5154285 B2 JP 5154285B2 JP 2008098723 A JP2008098723 A JP 2008098723A JP 2008098723 A JP2008098723 A JP 2008098723A JP 5154285 B2 JP5154285 B2 JP 5154285B2
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JP
Japan
Prior art keywords
film
thin film
substrate
aln
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008098723A
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English (en)
Japanese (ja)
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JP2009010927A (ja
JP2009010927A5 (https=
Inventor
和彦 山之内
悠介 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008098723A priority Critical patent/JP5154285B2/ja
Priority to US12/601,687 priority patent/US8508101B2/en
Priority to PCT/JP2008/001329 priority patent/WO2008146489A1/ja
Publication of JP2009010927A publication Critical patent/JP2009010927A/ja
Publication of JP2009010927A5 publication Critical patent/JP2009010927A5/ja
Application granted granted Critical
Publication of JP5154285B2 publication Critical patent/JP5154285B2/ja
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2008098723A 2007-05-28 2008-03-09 弾性境界波機能素子 Active JP5154285B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008098723A JP5154285B2 (ja) 2007-05-28 2008-03-09 弾性境界波機能素子
US12/601,687 US8508101B2 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate
PCT/JP2008/001329 WO2008146489A1 (ja) 2007-05-28 2008-05-28 弾性境界波基板とその基板を用いた弾性境界波機能素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007166939 2007-05-28
JP2007166939 2007-05-28
JP2008098723A JP5154285B2 (ja) 2007-05-28 2008-03-09 弾性境界波機能素子

Publications (3)

Publication Number Publication Date
JP2009010927A JP2009010927A (ja) 2009-01-15
JP2009010927A5 JP2009010927A5 (https=) 2011-04-21
JP5154285B2 true JP5154285B2 (ja) 2013-02-27

Family

ID=40325493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008098723A Active JP5154285B2 (ja) 2007-05-28 2008-03-09 弾性境界波機能素子

Country Status (2)

Country Link
US (1) US8508101B2 (https=)
JP (1) JP5154285B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088730A (ja) * 2007-09-28 2009-04-23 Samsung Electronics Co Ltd 弾性境界波装置
CN102017407B (zh) 2008-04-30 2014-03-19 株式会社村田制作所 弹性边界波装置
JPWO2010116783A1 (ja) * 2009-03-30 2012-10-18 株式会社村田製作所 弾性波装置
JPWO2010122993A1 (ja) * 2009-04-22 2012-10-25 株式会社村田製作所 弾性境界波装置及びその製造方法
JP2011041127A (ja) * 2009-08-17 2011-02-24 Hitachi Media Electoronics Co Ltd 弾性波装置
DE102011119660B4 (de) * 2011-11-29 2014-12-11 Epcos Ag Mikroakustisches Bauelement mit Wellenleiterschicht
US11673352B2 (en) * 2016-09-20 2023-06-13 United States Of America As Represented By The Administrator Of Nasa Automated wave guide system for in-process monitoring of carbon fiber reinforced polymer (CFRP) composite laminates with hanning window tone-bursts of center frequencies from 100-225 kHz and 100-350 kHz
CN109891612A (zh) * 2016-10-20 2019-06-14 天工方案公司 具有亚波长厚度的压电层的弹性波器件
US12494766B2 (en) 2022-03-02 2025-12-09 Skyworks Solutions, Inc. Acoustic wave device with interdigital transducer electrode having buffer layer

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5111100A (en) * 1990-01-12 1992-05-05 Clarion Co., Ltd. Surface acoustic wave device and method for fabricating same
CN1143431C (zh) * 1996-06-05 2004-03-24 三洋电机株式会社 弹性表面波元件
WO1998052279A1 (fr) * 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique
US7105980B2 (en) * 2002-07-03 2006-09-12 Sawtek, Inc. Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics
JP3815424B2 (ja) * 2002-11-08 2006-08-30 株式会社村田製作所 弾性境界波装置
KR100850861B1 (ko) * 2004-01-19 2008-08-06 가부시키가이샤 무라타 세이사쿠쇼 탄성 경계파 장치
KR100804407B1 (ko) * 2004-03-29 2008-02-15 가부시키가이샤 무라타 세이사쿠쇼 탄성 경계파 장치의 제조방법
CN1829082B (zh) * 2005-03-04 2010-05-26 鸿富锦精密工业（深圳）有限公司 声表面波器件及多频移动电话
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ
WO2006114930A1 (ja) 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置
US7446453B1 (en) * 2006-07-05 2008-11-04 Triquint, Inc. Surface acoustic wave devices using surface acoustic waves with strong piezoelectric coupling

Also Published As

Publication number Publication date
US20100171389A1 (en) 2010-07-08
US8508101B2 (en) 2013-08-13
JP2009010927A (ja) 2009-01-15

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