JPWO2022050260A5 - - Google Patents
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- Publication number
- JPWO2022050260A5 JPWO2022050260A5 JP2022546332A JP2022546332A JPWO2022050260A5 JP WO2022050260 A5 JPWO2022050260 A5 JP WO2022050260A5 JP 2022546332 A JP2022546332 A JP 2022546332A JP 2022546332 A JP2022546332 A JP 2022546332A JP WO2022050260 A5 JPWO2022050260 A5 JP WO2022050260A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- region
- density
- idt electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229910016570 AlCu Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020148279 | 2020-09-03 | ||
| JP2020148279 | 2020-09-03 | ||
| PCT/JP2021/031896 WO2022050260A1 (ja) | 2020-09-03 | 2021-08-31 | 弾性波装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022050260A1 JPWO2022050260A1 (https=) | 2022-03-10 |
| JPWO2022050260A5 true JPWO2022050260A5 (https=) | 2023-04-19 |
| JP7582315B2 JP7582315B2 (ja) | 2024-11-13 |
Family
ID=80490990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022546332A Active JP7582315B2 (ja) | 2020-09-03 | 2021-08-31 | 弾性波装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20230208391A1 (https=) |
| JP (1) | JP7582315B2 (https=) |
| KR (1) | KR102820054B1 (https=) |
| CN (1) | CN115989637A (https=) |
| WO (1) | WO2022050260A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102851822B1 (ko) * | 2023-10-13 | 2025-08-28 | (주)와이솔 | 표면 탄성파 소자 및 그 제조 방법 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3163679B2 (ja) * | 1991-09-27 | 2001-05-08 | 株式会社村田製作所 | 弾性表面波基板 |
| JP3880150B2 (ja) * | 1997-06-02 | 2007-02-14 | 松下電器産業株式会社 | 弾性表面波素子 |
| JP3829644B2 (ja) * | 2000-05-01 | 2006-10-04 | 株式会社村田製作所 | 表面波装置、横波トランスデューサー及び縦波トランスデューサーの製造方法 |
| US7687971B2 (en) * | 2006-08-15 | 2010-03-30 | Northrop Grumman Corporation | Electric field control of surface acoustic wave velocity |
| US8513863B2 (en) * | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
| CN103262410B (zh) | 2010-12-24 | 2016-08-10 | 株式会社村田制作所 | 弹性波装置及其制造方法 |
| JP2013214954A (ja) * | 2012-03-07 | 2013-10-17 | Taiyo Yuden Co Ltd | 共振子、周波数フィルタ、デュプレクサ、電子機器及び共振子の製造方法 |
| US9331666B2 (en) * | 2012-10-22 | 2016-05-03 | Qualcomm Mems Technologies, Inc. | Composite dilation mode resonators |
| CN102946236B (zh) * | 2012-10-22 | 2016-04-20 | 华中科技大学 | 一种可调薄膜体声波谐振器及其制备方法 |
| JP6360847B2 (ja) * | 2016-03-18 | 2018-07-18 | 太陽誘電株式会社 | 弾性波デバイス |
| JP2018182615A (ja) * | 2017-04-18 | 2018-11-15 | 株式会社村田製作所 | 弾性波装置 |
| WO2019116897A1 (ja) * | 2017-12-13 | 2019-06-20 | 株式会社村田製作所 | 電子部品 |
| JP6835038B2 (ja) * | 2018-06-18 | 2021-02-24 | 株式会社村田製作所 | 弾性波装置及び高周波フロントエンド回路 |
-
2021
- 2021-08-31 JP JP2022546332A patent/JP7582315B2/ja active Active
- 2021-08-31 CN CN202180052339.4A patent/CN115989637A/zh active Pending
- 2021-08-31 WO PCT/JP2021/031896 patent/WO2022050260A1/ja not_active Ceased
- 2021-08-31 KR KR1020237005531A patent/KR102820054B1/ko active Active
-
2023
- 2023-02-23 US US18/113,228 patent/US20230208391A1/en active Pending
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