JPWO2021085465A5 - - Google Patents
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- Publication number
- JPWO2021085465A5 JPWO2021085465A5 JP2021553647A JP2021553647A JPWO2021085465A5 JP WO2021085465 A5 JPWO2021085465 A5 JP WO2021085465A5 JP 2021553647 A JP2021553647 A JP 2021553647A JP 2021553647 A JP2021553647 A JP 2021553647A JP WO2021085465 A5 JPWO2021085465 A5 JP WO2021085465A5
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- film
- alcu film
- alcu
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910016570 AlCu Inorganic materials 0.000 description 10
- 239000000758 substrate Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019197792 | 2019-10-30 | ||
| JP2019197792 | 2019-10-30 | ||
| PCT/JP2020/040408 WO2021085465A1 (ja) | 2019-10-30 | 2020-10-28 | 弾性波装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021085465A1 JPWO2021085465A1 (https=) | 2021-05-06 |
| JPWO2021085465A5 true JPWO2021085465A5 (https=) | 2022-06-27 |
| JP7545404B2 JP7545404B2 (ja) | 2024-09-04 |
Family
ID=75716027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021553647A Active JP7545404B2 (ja) | 2019-10-30 | 2020-10-28 | 弾性波装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12519453B2 (https=) |
| JP (1) | JP7545404B2 (https=) |
| CN (1) | CN114600373A (https=) |
| WO (1) | WO2021085465A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12483221B2 (en) | 2021-07-15 | 2025-11-25 | Skyworks Solutions, Inc. | Multilayer piezoelectric substrate device with partially recessed passivation layer |
| US12081199B2 (en) * | 2022-01-13 | 2024-09-03 | Rf360 Singapore Pte. Ltd. | Surface acoustic wave (SAW) device with one or more intermediate layers for self-heating improvement |
| US20230327630A1 (en) * | 2022-04-08 | 2023-10-12 | Skyworks Solutions, Inc. | Method of manufacture of acoustic wave device with trench portions for transverse mode suppression |
| CN115567027B (zh) * | 2022-11-03 | 2023-07-07 | 常州承芯半导体有限公司 | 换能装置、声表面波谐振装置及其形成方法、滤波装置 |
| WO2024117061A1 (ja) * | 2022-11-28 | 2024-06-06 | 京セラ株式会社 | 弾性波装置および通信装置 |
| US20250373229A1 (en) * | 2024-05-29 | 2025-12-04 | Rf360 Singapore Pte. Ltd. | Surface acoustic wave (saw) device with barrier layers between aluminum-copper layers |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3379049B2 (ja) * | 1993-10-27 | 2003-02-17 | 富士通株式会社 | 表面弾性波素子とその製造方法 |
| JP3445971B2 (ja) * | 2000-12-14 | 2003-09-16 | 富士通株式会社 | 弾性表面波素子 |
| US7148610B2 (en) | 2002-02-01 | 2006-12-12 | Oc Oerlikon Balzers Ag | Surface acoustic wave device having improved performance and method of making the device |
| JP2005151063A (ja) * | 2003-11-13 | 2005-06-09 | Fujitsu Media Device Kk | 弾性表面波装置の製造方法 |
| JP2007013815A (ja) | 2005-07-01 | 2007-01-18 | Sanyo Electric Co Ltd | 弾性表面波素子およびその製造方法 |
| WO2017212774A1 (ja) * | 2016-06-07 | 2017-12-14 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
| JP2018014715A (ja) * | 2016-07-06 | 2018-01-25 | 京セラ株式会社 | 弾性波素子、フィルタ素子および通信装置 |
| CN110024286B (zh) * | 2016-11-22 | 2024-02-06 | 株式会社村田制作所 | 弹性波装置、前端电路以及通信装置 |
| WO2019009373A1 (ja) * | 2017-07-06 | 2019-01-10 | 京セラ株式会社 | 弾性波素子、フィルタ素子および通信装置 |
| JP2019114986A (ja) * | 2017-12-25 | 2019-07-11 | 株式会社村田製作所 | 弾性波装置 |
| US10700662B2 (en) * | 2017-12-28 | 2020-06-30 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and multiplexer |
-
2020
- 2020-10-28 CN CN202080074325.8A patent/CN114600373A/zh active Pending
- 2020-10-28 JP JP2021553647A patent/JP7545404B2/ja active Active
- 2020-10-28 WO PCT/JP2020/040408 patent/WO2021085465A1/ja not_active Ceased
-
2022
- 2022-04-20 US US17/724,754 patent/US12519453B2/en active Active
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