JP2020076998A5 - - Google Patents
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- Publication number
- JP2020076998A5 JP2020076998A5 JP2020002430A JP2020002430A JP2020076998A5 JP 2020076998 A5 JP2020076998 A5 JP 2020076998A5 JP 2020002430 A JP2020002430 A JP 2020002430A JP 2020002430 A JP2020002430 A JP 2020002430A JP 2020076998 A5 JP2020076998 A5 JP 2020076998A5
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- electro
- low refractive
- interface
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims 53
- 239000002131 composite material Substances 0.000 claims 22
- 239000013078 crystal Substances 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 5
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims 4
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 claims 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000005693 optoelectronics Effects 0.000 claims 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 229910019142 PO4 Inorganic materials 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims 1
- 229910001195 gallium oxide Inorganic materials 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 238000009499 grossing Methods 0.000 claims 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229910000484 niobium oxide Inorganic materials 0.000 claims 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims 1
- 239000010452 phosphate Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 239000006104 solid solution Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2018/041548 WO2020095421A1 (ja) | 2018-11-08 | 2018-11-08 | 電気光学素子のための複合基板とその製造方法 |
| JPPCT/JP2018/041548 | 2018-11-08 | ||
| JP2019549494A JP6646187B1 (ja) | 2018-11-08 | 2019-07-11 | 電気光学素子のための複合基板とその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019549494A Division JP6646187B1 (ja) | 2018-11-08 | 2019-07-11 | 電気光学素子のための複合基板とその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020076998A JP2020076998A (ja) | 2020-05-21 |
| JP2020076998A5 true JP2020076998A5 (https=) | 2022-07-20 |
| JP7337713B2 JP7337713B2 (ja) | 2023-09-04 |
Family
ID=70611851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020002430A Active JP7337713B2 (ja) | 2018-11-08 | 2020-01-09 | 電気光学素子のための複合基板とその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11150497B2 (https=) |
| EP (1) | EP3879336B1 (https=) |
| JP (1) | JP7337713B2 (https=) |
| WO (2) | WO2020095421A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3798718B1 (en) * | 2018-05-22 | 2023-05-10 | NGK Insulators, Ltd. | Composite substrate for electro-optical element and method for manufacturing same |
| WO2020194763A1 (ja) * | 2019-03-28 | 2020-10-01 | 日本碍子株式会社 | 半導体膜 |
| TWI884167B (zh) | 2020-05-20 | 2025-05-21 | 日商日本碍子股份有限公司 | 電光元件用複合基板 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09211404A (ja) * | 1996-01-29 | 1997-08-15 | Tokin Corp | 光導波路素子 |
| US6069729A (en) * | 1999-01-20 | 2000-05-30 | Northwestern University | High speed electro-optic modulator |
| JP4064564B2 (ja) * | 1999-03-29 | 2008-03-19 | 住友大阪セメント株式会社 | 光導波路素子 |
| JP4354100B2 (ja) * | 2000-07-27 | 2009-10-28 | 日本碍子株式会社 | 光導波路素子 |
| JP3963313B2 (ja) | 2001-09-05 | 2007-08-22 | 日本碍子株式会社 | 光導波路デバイス、光変調器および光変調器の実装構造 |
| US7295742B2 (en) | 2002-05-31 | 2007-11-13 | Matsushita Electric Industrial Co., Ltd. | Optical element and method for producing the same |
| JP4174377B2 (ja) * | 2002-05-31 | 2008-10-29 | 松下電器産業株式会社 | 光学素子 |
| JP4545380B2 (ja) * | 2003-01-16 | 2010-09-15 | パナソニック株式会社 | 光導波路デバイスならびにそれを用いたコヒーレント光源およびそれを備えた光学装置 |
| EP2237105A3 (en) * | 2003-08-21 | 2011-01-26 | NGK Insulators, Ltd. | Optical waveguide devices and travelling wave type optical modulators |
| JP4658658B2 (ja) * | 2005-03-29 | 2011-03-23 | 住友大阪セメント株式会社 | 光変調器 |
| JP4667932B2 (ja) * | 2005-03-31 | 2011-04-13 | 住友大阪セメント株式会社 | 光変調器 |
| JP2006293022A (ja) * | 2005-04-11 | 2006-10-26 | Rohm Co Ltd | 光変調装置の製造方法、光変調装置および光変調システム |
| JP2007101641A (ja) * | 2005-09-30 | 2007-04-19 | Sumitomo Osaka Cement Co Ltd | 光変調器及びその製造方法 |
| JP5041714B2 (ja) * | 2006-03-13 | 2012-10-03 | 信越化学工業株式会社 | マイクロチップ及びマイクロチップ製造用ｓｏｉ基板 |
| JP4847177B2 (ja) * | 2006-03-30 | 2011-12-28 | 住友大阪セメント株式会社 | 光変調素子 |
| US20070297732A1 (en) * | 2006-06-07 | 2007-12-27 | Collinear Corporation | Efficient nonlinear optical waveguide using single-mode, high v-number structure |
| JP5688203B2 (ja) * | 2007-11-01 | 2015-03-25 | 株式会社半導体エネルギー研究所 | 半導体基板の作製方法 |
| JP2010085789A (ja) | 2008-09-30 | 2010-04-15 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
| FR2981204B1 (fr) * | 2011-10-05 | 2014-07-04 | Centre Nat Rech Scient | Resonateurs a ondes de volume sur structures verticales micro-usinees. |
| EP2653908A1 (en) * | 2012-04-16 | 2013-10-23 | Leica Geosystems AG | Electro-optic modulator and electro-optic distance-measuring device |
| JP6033196B2 (ja) * | 2013-10-08 | 2016-11-30 | 日本碍子株式会社 | 光学部品の製造方法 |
| JP6609965B2 (ja) * | 2015-03-31 | 2019-11-27 | 住友大阪セメント株式会社 | 光変調器モジュール |
| JP2018093329A (ja) * | 2016-12-01 | 2018-06-14 | 日本碍子株式会社 | 弾性波素子 |
-
2018
- 2018-11-08 WO PCT/JP2018/041548 patent/WO2020095421A1/ja not_active Ceased
-
2019
- 2019-07-11 EP EP19881111.9A patent/EP3879336B1/en active Active
- 2019-07-11 WO PCT/JP2019/027570 patent/WO2020095478A1/ja not_active Ceased
-
2020
- 2020-01-09 JP JP2020002430A patent/JP7337713B2/ja active Active
-
2021
- 2021-03-30 US US17/217,360 patent/US11150497B2/en active Active
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