JP7337713B2 - 電気光学素子のための複合基板とその製造方法 - Google Patents

電気光学素子のための複合基板とその製造方法 Download PDF

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Publication number
JP7337713B2
JP7337713B2 JP2020002430A JP2020002430A JP7337713B2 JP 7337713 B2 JP7337713 B2 JP 7337713B2 JP 2020002430 A JP2020002430 A JP 2020002430A JP 2020002430 A JP2020002430 A JP 2020002430A JP 7337713 B2 JP7337713 B2 JP 7337713B2
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Prior art keywords
electro
substrate
refractive index
low refractive
interface
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Japanese (ja)
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JP2020076998A (ja
JP2020076998A5 (https=
Inventor
雄大 鵜野
知義 多井
順悟 近藤
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NGK Insulators Ltd
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NGK Insulators Ltd
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Priority claimed from JP2019549494A external-priority patent/JP6646187B1/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2020002430A 2018-11-08 2020-01-09 電気光学素子のための複合基板とその製造方法 Active JP7337713B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2018/041548 WO2020095421A1 (ja) 2018-11-08 2018-11-08 電気光学素子のための複合基板とその製造方法
JPPCT/JP2018/041548 2018-11-08
JP2019549494A JP6646187B1 (ja) 2018-11-08 2019-07-11 電気光学素子のための複合基板とその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2019549494A Division JP6646187B1 (ja) 2018-11-08 2019-07-11 電気光学素子のための複合基板とその製造方法

Publications (3)

Publication Number Publication Date
JP2020076998A JP2020076998A (ja) 2020-05-21
JP2020076998A5 JP2020076998A5 (https=) 2022-07-20
JP7337713B2 true JP7337713B2 (ja) 2023-09-04

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JP2020002430A Active JP7337713B2 (ja) 2018-11-08 2020-01-09 電気光学素子のための複合基板とその製造方法

Country Status (4)

Country Link
US (1) US11150497B2 (https=)
EP (1) EP3879336B1 (https=)
JP (1) JP7337713B2 (https=)
WO (2) WO2020095421A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3798718B1 (en) * 2018-05-22 2023-05-10 NGK Insulators, Ltd. Composite substrate for electro-optical element and method for manufacturing same
WO2020194763A1 (ja) * 2019-03-28 2020-10-01 日本碍子株式会社 半導体膜
TWI884167B (zh) 2020-05-20 2025-05-21 日商日本碍子股份有限公司 電光元件用複合基板

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002040502A (ja) 2000-07-27 2002-02-06 Ngk Insulators Ltd 光導波路素子
JP2004145261A (ja) 2002-05-31 2004-05-20 Matsushita Electric Ind Co Ltd 光学素子およびその製造方法
JP2004219845A (ja) 2003-01-16 2004-08-05 Matsushita Electric Ind Co Ltd 光導波路デバイスならびにそれを用いたコヒーレント光源およびそれを備えた光学装置
JP2006284963A (ja) 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd 光変調器
JP2007264548A (ja) 2006-03-30 2007-10-11 Sumitomo Osaka Cement Co Ltd 光変調素子
JP2018093329A (ja) 2016-12-01 2018-06-14 日本碍子株式会社 弾性波素子

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09211404A (ja) * 1996-01-29 1997-08-15 Tokin Corp 光導波路素子
US6069729A (en) * 1999-01-20 2000-05-30 Northwestern University High speed electro-optic modulator
JP4064564B2 (ja) * 1999-03-29 2008-03-19 住友大阪セメント株式会社 光導波路素子
JP3963313B2 (ja) 2001-09-05 2007-08-22 日本碍子株式会社 光導波路デバイス、光変調器および光変調器の実装構造
US7295742B2 (en) 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
EP2237105A3 (en) * 2003-08-21 2011-01-26 NGK Insulators, Ltd. Optical waveguide devices and travelling wave type optical modulators
JP4658658B2 (ja) * 2005-03-29 2011-03-23 住友大阪セメント株式会社 光変調器
JP2006293022A (ja) * 2005-04-11 2006-10-26 Rohm Co Ltd 光変調装置の製造方法、光変調装置および光変調システム
JP2007101641A (ja) * 2005-09-30 2007-04-19 Sumitomo Osaka Cement Co Ltd 光変調器及びその製造方法
JP5041714B2 (ja) * 2006-03-13 2012-10-03 信越化学工業株式会社 マイクロチップ及びマイクロチップ製造用ｓｏｉ基板
US20070297732A1 (en) * 2006-06-07 2007-12-27 Collinear Corporation Efficient nonlinear optical waveguide using single-mode, high v-number structure
JP5688203B2 (ja) * 2007-11-01 2015-03-25 株式会社半導体エネルギー研究所 半導体基板の作製方法
JP2010085789A (ja) 2008-09-30 2010-04-15 Sumitomo Osaka Cement Co Ltd 光導波路素子
FR2981204B1 (fr) * 2011-10-05 2014-07-04 Centre Nat Rech Scient Resonateurs a ondes de volume sur structures verticales micro-usinees.
EP2653908A1 (en) * 2012-04-16 2013-10-23 Leica Geosystems AG Electro-optic modulator and electro-optic distance-measuring device
JP6033196B2 (ja) * 2013-10-08 2016-11-30 日本碍子株式会社 光学部品の製造方法
JP6609965B2 (ja) * 2015-03-31 2019-11-27 住友大阪セメント株式会社 光変調器モジュール

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002040502A (ja) 2000-07-27 2002-02-06 Ngk Insulators Ltd 光導波路素子
JP2004145261A (ja) 2002-05-31 2004-05-20 Matsushita Electric Ind Co Ltd 光学素子およびその製造方法
JP2004219845A (ja) 2003-01-16 2004-08-05 Matsushita Electric Ind Co Ltd 光導波路デバイスならびにそれを用いたコヒーレント光源およびそれを備えた光学装置
JP2006284963A (ja) 2005-03-31 2006-10-19 Sumitomo Osaka Cement Co Ltd 光変調器
JP2007264548A (ja) 2006-03-30 2007-10-11 Sumitomo Osaka Cement Co Ltd 光変調素子
JP2018093329A (ja) 2016-12-01 2018-06-14 日本碍子株式会社 弾性波素子

Also Published As

Publication number Publication date
JP2020076998A (ja) 2020-05-21
WO2020095478A1 (ja) 2020-05-14
EP3879336A1 (en) 2021-09-15
EP3879336A4 (en) 2022-09-14
WO2020095421A1 (ja) 2020-05-14
EP3879336B1 (en) 2026-04-29
US20210215955A1 (en) 2021-07-15
US11150497B2 (en) 2021-10-19

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