JP2020098345A5 - - Google Patents
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- Publication number
- JP2020098345A5 JP2020098345A5 JP2020006927A JP2020006927A JP2020098345A5 JP 2020098345 A5 JP2020098345 A5 JP 2020098345A5 JP 2020006927 A JP2020006927 A JP 2020006927A JP 2020006927 A JP2020006927 A JP 2020006927A JP 2020098345 A5 JP2020098345 A5 JP 2020098345A5
- Authority
- JP
- Japan
- Prior art keywords
- electro
- layer
- refractive index
- substrate
- optical crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 46
- 239000013078 crystal Substances 0.000 claims 19
- 239000002131 composite material Substances 0.000 claims 18
- 238000004519 manufacturing process Methods 0.000 claims 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 2
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000005693 optoelectronics Effects 0.000 claims 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims 1
- 229910001195 gallium oxide Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052863 mullite Inorganic materials 0.000 claims 1
- 230000003472 neutralizing effect Effects 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020006927A JP7098666B2 (ja) | 2020-01-20 | 2020-01-20 | 電気光学素子のための複合基板とその製造方法 |
| JP2022104444A JP7331208B2 (ja) | 2020-01-20 | 2022-06-29 | 電気光学素子のための複合基板とその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020006927A JP7098666B2 (ja) | 2020-01-20 | 2020-01-20 | 電気光学素子のための複合基板とその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019528149A Division JP6650551B1 (ja) | 2018-05-22 | 2018-05-22 | 電気光学素子のための複合基板とその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022104444A Division JP7331208B2 (ja) | 2020-01-20 | 2022-06-29 | 電気光学素子のための複合基板とその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020098345A JP2020098345A (ja) | 2020-06-25 |
| JP2020098345A5 true JP2020098345A5 (https=) | 2021-03-25 |
| JP7098666B2 JP7098666B2 (ja) | 2022-07-11 |
Family
ID=71105913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020006927A Active JP7098666B2 (ja) | 2020-01-20 | 2020-01-20 | 電気光学素子のための複合基板とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7098666B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6935573B1 (ja) | 2020-12-23 | 2021-09-15 | 日本碍子株式会社 | 複合基板および弾性表面波素子 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2574606B2 (ja) * | 1992-09-01 | 1997-01-22 | 松下電器産業株式会社 | 誘電体光導波路素子およびその製造方法 |
| JP3963313B2 (ja) * | 2001-09-05 | 2007-08-22 | 日本碍子株式会社 | 光導波路デバイス、光変調器および光変調器の実装構造 |
| US6593212B1 (en) * | 2001-10-29 | 2003-07-15 | The United States Of America As Represented By The Secretary Of The Navy | Method for making electro-optical devices using a hydrogenion splitting technique |
| JP4851122B2 (ja) * | 2005-06-13 | 2012-01-11 | 住友大阪セメント株式会社 | 光学素子及びその製造方法 |
| WO2007114367A1 (ja) * | 2006-03-31 | 2007-10-11 | Sumitomo Osaka Cement Co., Ltd. | 光制御素子 |
| JP6033196B2 (ja) * | 2013-10-08 | 2016-11-30 | 日本碍子株式会社 | 光学部品の製造方法 |
| KR102257664B1 (ko) * | 2016-09-20 | 2021-05-31 | 엔지케이 인슐레이터 엘티디 | 복합 기판, 그 제조법 및 전자 디바이스 |
| JP6245587B1 (ja) * | 2016-10-28 | 2017-12-13 | 大学共同利用機関法人自然科学研究機構 | レーザー部品 |
-
2020
- 2020-01-20 JP JP2020006927A patent/JP7098666B2/ja active Active
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