JPWO2019013300A1 - ボンディング装置及びボンディング方法 - Google Patents
ボンディング装置及びボンディング方法 Download PDFInfo
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- JPWO2019013300A1 JPWO2019013300A1 JP2019529791A JP2019529791A JPWO2019013300A1 JP WO2019013300 A1 JPWO2019013300 A1 JP WO2019013300A1 JP 2019529791 A JP2019529791 A JP 2019529791A JP 2019529791 A JP2019529791 A JP 2019529791A JP WO2019013300 A1 JPWO2019013300 A1 JP WO2019013300A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
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Abstract
Description
以下、添付図面を参照しながら本開示のボンディング装置及びボンディング方法を実施するための形態を詳細に説明する。図面の説明において同一の要素には同一の符号を付す。また、重複する説明は、省略する。
次に、図8を参照しつつ、ボンディング装置1を利用したボンディング方法について説明する。本開示に係るボンディング方法は、図1に示すボンディング装置1を用いて行う。本開示のボンディング方法によって半導体装置100(図2参照)を製造する。
Claims (6)
- 電子部品を基板又はその他の電子部品に実装するボンディング装置であって、
フィルムを介して前記電子部品を着脱可能に保持するボンディング面と、前記ボンディング面に熱を供給する熱源と、を有するボンディング部と、
前記フィルムを前記ボンディング面に沿って供給するフィルム供給部と、
前記フィルムと前記ボンディング面との間に進入可能な剥離部材と、
前記剥離部材を前記フィルムと前記ボンディング面との間に移動させて前記フィルムを前記ボンディング面から離間させる駆動部と、を備える、ボンディング装置。 - 前記フィルム供給部は、前記ボンディング部を挟み且つ前記フィルムに張力を付与する一対のリールを有し、
一方の前記リールから供給された前記フィルムは、前記ボンディング面を介して他方の前記リールに巻き取られ、
前記駆動部は、前記剥離部材を、一方の前記リールと前記ボンディング部との間、又は、他方の前記リールと前記ボンディング部との間であって、前記ボンディング面よりも上方に配置する第1の形態と、前記剥離部材を、前記ボンディング面の下方において、前記フィルムに接触させながら前記フィルムの延在方向に移動させる第2の形態と、を相互に切り替える、請求項1に記載のボンディング装置。 - 前記駆動部は、前記第1の形態から前記第2の形態へ切り替えるときに、前記剥離部材が前記フィルムに接触するまで前記ボンディング面よりも上方から前記ボンディング面よりも下方へ向けて移動させ、前記剥離部材を前記フィルムに接触させた後に、前記剥離部材を前記フィルムを押し下げながらさらに前記ボンディング面よりも下方へ移動させる、請求項2に記載のボンディング装置。
- 一対の前記リール及び前記駆動部の動作を制御する制御部を更に備え、
前記制御部は、前記第1の形態であるときに、一方の前記リールから前記ボンディング面に張り渡された前記フィルムの部分に張力が生じないように一方の前記リールを制御すると共に、前記ボンディング面から他方の前記リールに張り渡された前記フィルムの部分に張力が生じるように他方の前記リールを制御する第1動作と、前記第1動作の後に、前記第1の形態から前記第2の形態へ切り替えるように前記駆動部を制御する第2動作と、を行う、請求項3に記載のボンディング装置。 - 前記ボンディング部及び前記フィルム供給部が取り付けられると共に、前記ボンディング面の法線方向のまわりに回動可能なベースをさらに備える、
請求項1〜4の何れか一項に記載のボンディング装置。 - 電子部品を基板又はその他の電子部品に実装するボンディング方法であって、
前記電子部品を着脱可能に保持するボンディング部のボンディング面に、フィルム供給部からフィルムを供給した後に、前記フィルムを介して前記ボンディング面に前記電子部品を保持する工程と、
前記ボンディング面に保持された前記電子部品を前記基板又はその他の前記電子部品に実装する工程と、
前記フィルムと前記ボンディング面との間に進入可能な剥離部材を駆動する駆動部を動作させて、前記剥離部材を前記フィルムと前記ボンディング面との間に進入させることにより前記フィルムを前記ボンディング面から離間させる工程と、を有する、ボンディング方法。
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CN111095507A (zh) | 2020-05-01 |
TW201909295A (zh) | 2019-03-01 |
US11393700B2 (en) | 2022-07-19 |
WO2019013300A1 (ja) | 2019-01-17 |
KR102398971B1 (ko) | 2022-08-04 |
CN111095507B (zh) | 2023-12-01 |
SG11202002003QA (en) | 2020-04-29 |
JP6902292B2 (ja) | 2021-07-14 |
US20200388507A1 (en) | 2020-12-10 |
TWI685905B (zh) | 2020-02-21 |
KR20200022033A (ko) | 2020-03-02 |
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