JP2012044071A - 電子部品実装装置および電子部品実装方法 - Google Patents
電子部品実装装置および電子部品実装方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/73201—Location after the connecting process on the same surface
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- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H01L2224/81001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving a temporary auxiliary member not forming part of the bonding apparatus
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/83001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector involving a temporary auxiliary member not forming part of the bonding apparatus
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
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- H01L2924/3025—Electromagnetic shielding
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
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- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
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- Wire Bonding (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
【解決手段】ボンディングツール10は、防着テープ30を介してチップ41を吸着する。ボンディングツール10は、チップ41を吸着する電子部品吸着穴11と、電子部品吸着穴11の周囲に設けられ、防着テープ30を吸収する溝13を有する。チップ41をアンダーフィル材70に押し付けて加熱し、アンダーフィル材70をチップ41からはみ出させて上段チップの実装面を形成する際に、防着テープ30が加熱を受けて膨張した分が溝13に入り込むので、アンダーフィル材の上面にシワが発生しない。
【選択図】図1
Description
(5b)防着テープを送り出す。
(5c)剣山様の針で防着テープに穴あけする。
(5d)チップ41を吸着する。
(5e)チップ41を加熱および加圧し、チップ41を実装する。
(5f)実装完了
以上5つの手順を含む。
(11b)防着テープを送り出す。
(11c)剣山様の針で防着テープに穴あけする。
(11d)チップ41を吸着する。
(11e)チップ41を加熱および加圧し、チップ41を実装する。
(11f)実装完了
以上5つの手順を含む。
11 チップ吸着穴
12 テープ吸着穴
13 溝
14 排気経路
16,17 判定部
30 防着テープ
40 バンプ
41,42 チップ
43 接着剤
50 連結部
60 昇降部
70 アンダーフィル材
80 基板
90 ボンディングステージ
91 針部
100 テーブル
110a 送りリール
110b 巻き取りリール
120a,120b ガイドローラ
130 受け皿
150 主制御部
151 温度制御部
152 駆動制御部
153 吸着制御部
154 巻き取り制御部
155 認識制御部
156 照明制御部
157 駆動制御部
158 カメラ駆動部
159 カメラ
160 吸着制御部
161 温度制御部
162 駆動制御部
Claims (10)
- 電子部品を基板に実装する電子部品実装装置であって、
防着テープを介して前記電子部品を吸着するボンディングツールを有し、
前記ボンディングツールには、前記電子部品を吸着する吸着穴と、前記吸着穴の周囲に前記防着テープを吸収する溝が設けられており、
前記溝は、前記電子部品と前記基板との間に配置される接着剤の外形よりも外側に設けられることを特徴とする電子部品実装装置。 - 前記溝は、前記ボンディングツールの端面形状に合わせて延在することを特徴とする請求項1に記載の電子部品実装装置。
- 前記溝は、前記第1の吸着穴を囲む形状であることを特徴とする請求項1または2に記載の電子部品実装装置。
- 前記溝は、互いに平行する直線形状を有することを特徴とする請求項1または2に記載の電子部品実装装置。
- 前記電子部品上に前記電子部品の実装面よりも大きい実装面を有する第2の電子部品が搭載され、前記溝は、前記第2の電子部品の実装位置よりも外側であることを特徴する請求項1〜4のいずれか一つに記載の電子部品実装装置。
- 前記ボンディングツールには、前記溝の奥側から前記防着テープを吸着する第2の吸着穴をさらに設けられることを特徴とする請求項1〜5のいずれか一つに記載の電子部品実装装置。
- 前記ボンディングツールが取り付けられるボンディングヘッドをさらに備え、
前記ボンディングヘッドには、前記吸着穴と前記第2の吸着穴から排気する共通の排気経路が設けられることを特徴とする請求項6に記載の電子部品実装装置。 - 前記溝は前記防着テープが加熱を受けて膨張した場合の寸法変化分を吸収することを特徴とする請求項1〜7のいずれか一つに記載の電子部品実装装置。
- 前記防着テープには、前記電子部品を吸着する吸着穴に対向する位置に穴が設けられていることを特徴とする請求項1〜8のいずれか一つに記載の電子部品実装装置。
- 電子部品を基板に実装する電子部品実装方法であって、
基板上に樹脂製の接着剤を供給する工程と、
防着テープを介してボンディングツールに電子部品を吸着する工程と、
前記電子部品を前記接着剤に向かって移動させる工程と、
前記防着テープを介して前記ボンディングツールの端面を前記接着剤に押し当てる工程と
を備えることを特徴とする電子部品実装方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010185610A JP5612963B2 (ja) | 2010-08-20 | 2010-08-20 | 電子部品実装装置および電子部品実装方法 |
US13/117,584 US8720519B2 (en) | 2010-08-20 | 2011-05-27 | Electronic packaging apparatus and electronic packaging method |
TW100119034A TWI437669B (zh) | 2010-08-20 | 2011-05-31 | 電子封裝裝置及電子封裝方法 |
EP11168304.1A EP2421035A3 (en) | 2010-08-20 | 2011-05-31 | Electronic packaging apparatus and electronic packaging method |
KR1020110062547A KR101286393B1 (ko) | 2010-08-20 | 2011-06-27 | 전자 부품 실장 장치 및 전자 부품 실장 방법 |
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JP2010185610A JP5612963B2 (ja) | 2010-08-20 | 2010-08-20 | 電子部品実装装置および電子部品実装方法 |
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JP2012044071A true JP2012044071A (ja) | 2012-03-01 |
JP5612963B2 JP5612963B2 (ja) | 2014-10-22 |
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US (1) | US8720519B2 (ja) |
EP (1) | EP2421035A3 (ja) |
JP (1) | JP5612963B2 (ja) |
KR (1) | KR101286393B1 (ja) |
TW (1) | TWI437669B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6307729B1 (ja) * | 2016-11-30 | 2018-04-11 | 株式会社新川 | ボンディング装置及びボンディング方法 |
WO2018180881A1 (ja) * | 2017-03-30 | 2018-10-04 | 株式会社新川 | ボンディング装置及びボンディング方法 |
WO2019013300A1 (ja) * | 2017-07-12 | 2019-01-17 | 株式会社新川 | ボンディング装置及びボンディング方法 |
WO2019107419A1 (ja) * | 2017-11-30 | 2019-06-06 | 株式会社新川 | ダイの実装に用いられる這い上がり防止用のptfeシート及びダイの実装方法 |
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US20140069989A1 (en) * | 2012-09-13 | 2014-03-13 | Texas Instruments Incorporated | Thin Semiconductor Chip Mounting |
KR101955335B1 (ko) * | 2012-11-14 | 2019-03-07 | 삼성전자주식회사 | 스탬프 구조체 및 이를 이용한 전사 방법 |
CN203114816U (zh) * | 2012-12-27 | 2013-08-07 | 鸿准精密模具(昆山)有限公司 | 贴合装置 |
KR102168070B1 (ko) | 2013-11-29 | 2020-10-21 | 삼성전자주식회사 | 반도체 제조 장치 및 방법 |
US9136243B2 (en) * | 2013-12-03 | 2015-09-15 | Kulicke And Soffa Industries, Inc. | Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements |
KR102367265B1 (ko) * | 2014-12-02 | 2022-02-24 | 세메스 주식회사 | 다이 본딩 장치 |
SG11201910017WA (en) * | 2017-03-28 | 2019-11-28 | Shinkawa Kk | Electronic component mounting device |
KR102572669B1 (ko) | 2017-08-14 | 2023-08-31 | 삼성전자주식회사 | 전기 소자 이송 장치 |
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Also Published As
Publication number | Publication date |
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TW201209967A (en) | 2012-03-01 |
TWI437669B (zh) | 2014-05-11 |
US20120043005A1 (en) | 2012-02-23 |
KR20120023515A (ko) | 2012-03-13 |
EP2421035A2 (en) | 2012-02-22 |
JP5612963B2 (ja) | 2014-10-22 |
KR101286393B1 (ko) | 2013-07-15 |
US8720519B2 (en) | 2014-05-13 |
EP2421035A3 (en) | 2014-02-19 |
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