JPWO2016067590A1 - 薄膜トランジスタおよびその製造方法 - Google Patents
薄膜トランジスタおよびその製造方法 Download PDFInfo
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- JPWO2016067590A1 JPWO2016067590A1 JP2016556353A JP2016556353A JPWO2016067590A1 JP WO2016067590 A1 JPWO2016067590 A1 JP WO2016067590A1 JP 2016556353 A JP2016556353 A JP 2016556353A JP 2016556353 A JP2016556353 A JP 2016556353A JP WO2016067590 A1 JPWO2016067590 A1 JP WO2016067590A1
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- drain electrode
- source electrode
- electrode
- thin film
- film transistor
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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Abstract
Description
基板1として厚さ0.7mmの無アルカリガラスを使用した。ガラス基板上に、DCマグネトロンスパッタ法を用いてMo合金を200nmの膜厚で成膜し、フォトリソグラフィ法により所望の形状にパターニングを行った。具体的には、感光性ポジ型フォトレジストを塗布後、マスク露光、アルカリ現像液による現像を行い、所望の形状のレジストパターンを形成した。さらにエッチング液によりエッチングを行い、不要なMo合金を溶解させた。その後、レジスト剥離液によりフォトレジストを除去し、所望の形状のMo合金の電極を形成し、ゲート電極2を形成した。
比較例として、以下に説明する薄膜トランジスタを作成した。
2 ゲート電極
3 ゲート絶縁層
4 ソース電極
5 ドレイン電極
6 半導体層
7 保護層
Claims (9)
- 基板上に少なくともゲート電極と、ゲート絶縁層と、ソース電極と、ドレイン電極と、前記ソース電極および前記ドレイン電極に接続された半導体層と、保護層とを有する薄膜トランジスタであって、前記ソース電極および前記ドレイン電極表面が凹凸構造を有している、薄膜トランジスタ。
- 前記半導体層が、半導体材料または半導体材料の前駆体を溶解させた溶液を用いて、インクジェット法、凸版印刷法、平版印刷法、凹版印刷法のいずれかの方法によって形成される、請求項1に記載の薄膜トランジスタ。
- 前記ソース電極および前記ドレイン電極表面の少なくとも前記半導体層と接触する箇所の表面粗さRaが3nm以上50nm以下である、請求項1または2に記載の薄膜トランジスタ。
- 前記ソース電極および前記ドレイン電極が、インクジェット法、凸版印刷法、平版印刷法、凹版印刷法、スクリーン印刷法のいずれかの方法によって形成される、請求項1ないし3のいずれかに記載の薄膜トランジスタ。
- 前記ソース電極および前記ドレイン電極の少なくとも半導体層と接触する箇所が、金属材料からなる、請求項1ないし4のいずれかに記載の薄膜トランジスタ。
- 前記ソース電極および前記ドレイン電極表面の少なくとも半導体層と接触する箇所に表面処理が施されている、請求項1ないし5のいずれかに記載の薄膜トランジスタ。
- 前記保護層が、保護層材料またはその前駆体を溶解または分散させた溶液を用いて、インクジェット法、凸版印刷法、平版印刷法、凹版印刷法、スクリーン印刷法のいずれかの方法によって形成される、請求項1ないし6のいずれかに記載の薄膜トランジスタ。
- 基板上にゲート電極と、ゲート絶縁層と、ソース電極およびドレイン電極とを順次形成する工程と、前記ソース電極と前記ドレイン電極表面に凹凸を形成する工程と、前記ソース電極、前記ドレイン電極およびその間に、半導体材料を塗布して、前記ソース電極および前記ドレイン電極に接続された半導体層を形成する工程と、保護層を形成する工程とを有する、薄膜トランジスタの製造方法。
- 基板上にソース電極およびドレイン電極を形成する工程と、前記ソース電極および前記ドレイン電極に凹凸を形成する工程と、前記ソース電極、前記ドレイン電極およびその間に、半導体材料を塗布して、前記ソース電極および前記ドレイン電極に接続された半導体層を形成する工程と、ゲート絶縁層と、ゲート電極とを順次形成する工程とを有する、薄膜トランジスタの製造方法。
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CN109643659B (zh) * | 2016-08-23 | 2022-07-26 | 凸版印刷株式会社 | 有机薄膜晶体管及其制造方法以及图像显示装置 |
CN107611025A (zh) * | 2017-08-30 | 2018-01-19 | 华南理工大学 | 一种堆栈式薄膜晶体管电极的喷墨打印制备方法 |
CN107579006B (zh) * | 2017-09-13 | 2019-08-06 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、阵列基板及其制备方法 |
KR20220072107A (ko) * | 2020-11-24 | 2022-06-02 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조방법 |
CN113991019B (zh) * | 2021-12-27 | 2022-03-11 | 天津大学 | 一种增强有机半导体薄膜形貌稳定性的方法 |
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