JPWO2016063744A1 - パワーモジュール - Google Patents
パワーモジュール Download PDFInfo
- Publication number
- JPWO2016063744A1 JPWO2016063744A1 JP2016555175A JP2016555175A JPWO2016063744A1 JP WO2016063744 A1 JPWO2016063744 A1 JP WO2016063744A1 JP 2016555175 A JP2016555175 A JP 2016555175A JP 2016555175 A JP2016555175 A JP 2016555175A JP WO2016063744 A1 JPWO2016063744 A1 JP WO2016063744A1
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- Prior art keywords
- copper
- aluminum
- electrode
- wire
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 61
- 239000004065 semiconductor Substances 0.000 claims abstract description 52
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 50
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052802 copper Inorganic materials 0.000 claims abstract description 47
- 239000010949 copper Substances 0.000 claims abstract description 47
- 239000000463 material Substances 0.000 claims abstract description 24
- 229910000765 intermetallic Inorganic materials 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 20
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 10
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 16
- 239000004020 conductor Substances 0.000 description 13
- 239000000919 ceramic Substances 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000005304 joining Methods 0.000 description 7
- 239000011888 foil Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000275 quality assurance Methods 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- ABJSOROVZZKJGI-OCYUSGCXSA-N (1r,2r,4r)-2-(4-bromophenyl)-n-[(4-chlorophenyl)-(2-fluoropyridin-4-yl)methyl]-4-morpholin-4-ylcyclohexane-1-carboxamide Chemical compound C1=NC(F)=CC(C(NC(=O)[C@H]2[C@@H](C[C@@H](CC2)N2CCOCC2)C=2C=CC(Br)=CC=2)C=2C=CC(Cl)=CC=2)=C1 ABJSOROVZZKJGI-OCYUSGCXSA-N 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
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Abstract
Description
また、動作温度が高く、効率に優れている点で、今後の主流となる可能性の高いSiC半導体に適用できるパッケージ形態であることも同時に求められている。
基板と、
この基板に配置されたパワー半導体素子と、
このパワー半導体素子の表面に形成された電極と、
この電極に接合された積層金属板と、
この積層金属板と前記基板とを接続するワイヤと、を備えたパワーモジュールであって、
前記積層金属板は、前記電極と対向する部材が前記電極と主たる材質が同じであり、前記ワイヤと対向する部材が前記ワイヤと主たる材質が同じである構成にされるとともに、
前記積層金属板の間に金属間化合物層が5μm以上、100μm以下の厚さで形成されている、
ことを特徴とするものである。
図1〜図5、図7は実施の形態1によるパワーモジュールの概念図である。図1に示すように、パワー半導体素子1が、セラミック基板2(厚さ0.635mmのアルミナ基材21)の導体層22(銅製で厚さ0.4mm。図1のセラミック基板2を構成する下側の導体層23ではなく、上側の導体層)上に、はんだ5で接合されている。積層金属板であるアルミ銅クラッドリボン3(アルミ箔32(厚さ0.2mm)に銅箔31(厚さ0.05mm)が重ね合わされたリボン、幅10mm)を用い、パワー半導体素子(Si製ダイオード12mm×12mm×0.3mm)の主電極(アルミ製、11mm×11mm×0.01mm)11上に位置決めされ、超音波接合ツール4(先端2mm×2mm×20mm)によって超音波が印加されて接合部33を形成する。すなわち、アルミと銅を重ね合わせて圧接したクラッド材を用い、パワー半導体素子の電極表面に、このクラッド材のアルミ側を超音波接合などによって接合しておき、クラッド材の銅側にワイヤボンドを行うことで電気回路を形成する。
また通常使用されるワイヤボンド用の最大径のアルミワイヤが0.5mmであり、電流容量的にそれを置き換えるのに必要なアルミ銅クラッドリボンの厚さは0.2mmとなる。厚さの1/2を越える金属間化合物が存在すると、脆くなることで、ループ形成時に割れなどが発生すると考えられる。
つまり、パワー半導体素子の電極表面にクラッド材のアルミ側を超音波接合などによって接合後、さらに、クラッド材をあらかじめパワーモジュールの動作温度よりも高温で熱処理しておくことで、接合プロセス後にこれ以上膜厚が成長しないようにアルミ及び銅との各々の界面に金属間化合物を十分に形成しておく。
図8〜図11は、実施の形態2によるパワーモジュールの概念図である。図8に示すように、パワー半導体素子1が、セラミック基板2(厚さ0.657mmのアルミナ基材21)の導体層22(銅製厚さ0.4mm)上に、はんだ5で接合されている。アルミ銅クラッドリボン3(アルミ箔32(厚さ0.2mmで幅2mm)上に、幅2mm、スリット3mmのストライプ状の銅箔31が重ね合わされた幅10mmのリボン)を用い、パワー半導体素子(Si製ダイオード12mm×12mm×0.3mm)の主電極(アルミ製、11mm×11mm×0.01mm)11上に位置決めされ、超音波接合ツール4(先端2mm×2mm×20mm)によって超音波印加されて、銅パターンのない部分に接合部33を形成する。
Claims (6)
- 基板と、
この基板に配置されたパワー半導体素子と、
このパワー半導体素子の表面に形成された電極と、
この電極に接合された積層金属板と、
この積層金属板と前記基板とを接続するワイヤと、を備えたパワーモジュールであって、
前記積層金属板は、前記電極と対向する部材が前記電極と主たる材質が同じであり、前記ワイヤと対向する部材が前記ワイヤと主たる材質が同じである構成にされるとともに、
前記積層金属板の間に金属間化合物層が5μm以上、100μm以下の厚さで形成されている、
ことを特徴とするパワーモジュール。 - 前記積層金属板は、前記電極に接合される前に、予め前記パワーモジュールの動作温度よりも高温で熱処理されていることを特徴とする請求項1に記載のパワーモジュール。
- 前記積層金属板の前記ワイヤと対向する部材が、前記電極と対向する部材に部分的に積層されていることを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記ワイヤは、前記パワー半導体素子の電極と同等の幅のリボン形状、あるいは前記パワー半導体素子の電極よりも小さい幅の薄板状であることを特徴とする請求項1から3のいずれか1項に記載のパワーモジュール。
- 前記積層金属板の前記電極と対向する部材がアルミを主とする組成で、前記ワイヤと対向する部材が銅を主とする組成であることを特徴とする請求項1から4のいずれか1項に記載のパワーモジュール。
- 前記積層金属板の前記電極と対向する部材の材質は、マグネシウム、錫、インジウムのうちのいずれかであることを特徴とする請求項1から5のいずれか1項に記載のパワーモジュール。
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DE112016002608T5 (de) * | 2015-06-11 | 2018-03-08 | Mitsubishi Electric Corporation | Verfahren zur Herstellung einer Leistungs-Halbleitervorrichtung und Leistungs-Halbleitervorrichtung |
US10052713B2 (en) * | 2015-08-20 | 2018-08-21 | Ultex Corporation | Bonding method and bonded structure |
JP6931869B2 (ja) * | 2016-10-21 | 2021-09-08 | 国立研究開発法人産業技術総合研究所 | 半導体装置 |
CN109244057B (zh) * | 2018-07-13 | 2020-07-14 | 北京大学深圳研究生院 | 一种共源共栅级联结构的氮化镓器件 |
US10804236B2 (en) | 2018-10-25 | 2020-10-13 | Toyota Motor Engineering & Manufacturing North America, Inc. | Power electronic assemblies with high purity aluminum plated substrates |
JP7383881B2 (ja) * | 2019-01-16 | 2023-11-21 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
US11393780B2 (en) | 2019-07-26 | 2022-07-19 | Sandisk Technologies Llc | Bonded assembly containing oxidation barriers, hybrid bonding, or air gap, and methods of forming the same |
US11515273B2 (en) | 2019-07-26 | 2022-11-29 | Sandisk Technologies Llc | Bonded assembly containing oxidation barriers, hybrid bonding, or air gap, and methods of forming the same |
US11139272B2 (en) | 2019-07-26 | 2021-10-05 | Sandisk Technologies Llc | Bonded assembly containing oxidation barriers and/or adhesion enhancers and methods of forming the same |
US11545460B2 (en) | 2020-01-10 | 2023-01-03 | Fuji Electric Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device having first and second wires in different diameter |
JP7335610B2 (ja) * | 2020-01-29 | 2023-08-30 | 株式会社アルテクス | めっき金属接合方法 |
JP6952824B2 (ja) * | 2020-04-06 | 2021-10-27 | 三菱電機株式会社 | パワーモジュール及びこれを用いた電力用半導体装置 |
CN112002645B (zh) * | 2020-06-24 | 2022-12-09 | 西安理工大学 | 一种提高SiC功率芯片键合线功率循环能力的方法 |
CN112201628A (zh) * | 2020-08-24 | 2021-01-08 | 株洲中车时代半导体有限公司 | 一种功率模块封装结构及其制备方法 |
JP7088421B1 (ja) * | 2021-06-14 | 2022-06-21 | 三菱電機株式会社 | 半導体装置および電力変換装置 |
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US9224665B2 (en) * | 2011-08-04 | 2015-12-29 | Mitsubishi Electric Corporation | Semiconductor device and method for producing the same |
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