JPWO2008096761A1 - 圧電磁器および圧電素子 - Google Patents
圧電磁器および圧電素子 Download PDFInfo
- Publication number
- JPWO2008096761A1 JPWO2008096761A1 JP2008557127A JP2008557127A JPWO2008096761A1 JP WO2008096761 A1 JPWO2008096761 A1 JP WO2008096761A1 JP 2008557127 A JP2008557127 A JP 2008557127A JP 2008557127 A JP2008557127 A JP 2008557127A JP WO2008096761 A1 JPWO2008096761 A1 JP WO2008096761A1
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- ceramic
- piezoelectric ceramic
- sample
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 78
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 11
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 11
- 238000005204 segregation Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 abstract description 38
- 238000010304 firing Methods 0.000 abstract description 34
- 239000000203 mixture Substances 0.000 abstract description 20
- 238000006467 substitution reaction Methods 0.000 description 21
- 239000000843 powder Substances 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 239000012298 atmosphere Substances 0.000 description 13
- 239000002994 raw material Substances 0.000 description 13
- 230000007423 decrease Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 229910001316 Ag alloy Inorganic materials 0.000 description 5
- 229910001252 Pd alloy Inorganic materials 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000002003 electrode paste Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3213—Strontium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3215—Barium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3279—Nickel oxides, nickalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3298—Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6025—Tape casting, e.g. with a doctor blade
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
- C04B2235/6584—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage below that of air
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
- C04B2235/6585—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage above that of air
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/768—Perovskite structure ABO3
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
2 内部電極
3 外部電極
Pbx-a-dBiaM3d{M1b(M21/3Nb2/3)yZr1-b-y-zTiz}O3
......(A)
一般式(A)において、M1およびM2は各々NiまたはZnのうち少なくとも一種であり、M1とM2は同じ元素であっても異なる元素であってもよい。好ましくは、M1がNiであり、M2がNiまたはZnのうち少なくとも一種である。
また、M3は、BaおよびSrの少なくとも一種である。
まず出発原料として、Pb3O4、Bi2O3、ZrO2、TiO2、NiO、ZnO、Nb2O5、SrCO3、およびBaCO3を準備し、これらの原料粉末を前記の一般式(A)を満たすように秤量して混合する。この混合原料を750℃〜930℃で仮焼し、仮焼粉末を得る。仮焼粉末と溶剤とバインダーを混合してセラミックスラリーを作製し、このセラミックスラリーを用いてドクターブレード法などの周知の方法によってセラミックグリーンシートを作製する。セラミックグリーンシートの厚みは、10μm〜100μm程度の間で適宜設定することが可能である。
まず出発原料として、Pb3O4、Bi2O3、ZrO2、TiO2、NiO、ZnOおよびNb2O5を準備し、これらの原料粉末を一般式(B)の範囲で所定の組成を満たすように秤量して混合した。
Pbx-aBia{Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3......(B)
この混合原料を800℃〜850℃で仮焼し、仮焼粉末を得た。仮焼粉末と溶剤としての水とバインダーとを混合してセラミックスラリーを作製し、このセラミックスラリーを用いてドクターブレードによって厚さ約50μmのセラミックグリーンシートを作製した。
なお、表1において試料番号に*が付されているものは本発明の範囲外の比較例である(表2においても同じ)。
また、Bサイトの成分のモル比率zに注目して試料1〜27の特性を見た場合、zの値を0.398≦z≦0.512の範囲とすることにより、高い|d31|×Ecが得られていることがわかる。
まず、実施例1と同様の方法で、前述の一般式(B)の範囲で所定の組成比率となるように原料粉末を秤量して混合および仮焼を行い、仮焼粉末を作製した。さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子を作製した。その際、焼成温度は900℃とし、各組成について1気圧の空気中(酸素濃度20%)、窒素中(酸素濃度0.5%)および酸素中(酸素濃度100%)でそれぞれ焼成を行った試料を用意した。
また、本発明の範囲内の試料29の場合、空気中で焼成したときの圧電定数|d31|が313pm/Vと高いことが確認された。ただし、Ni偏析が生じていない試料29の場合、焼成雰囲気を窒素雰囲気としたときの|d31|変化率が−21%と、焼成雰囲気中の酸素分圧が低下することによって圧電定数|d31|が大きく低下することが確認された。
(Pbx-a-dBiaSrd){Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3 ......(C)
なお、表5において試料番号に*を付した試料34は本発明の範囲外の比較例である。
さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子(試料)を作製した。
(Pbx-a-dBiaBad){Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3 ......(D)
さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子(試料)を作製した。
その結果を表7に示す。
なお、表7において試料番号に*を付した試料34は本発明の範囲外の比較例である。
Srの置換量を5mol%(d=0.05)とした試料32は、Srを置換していない試料31と比較すると、|d31|×Ecが大きく変化していないにもかかわらず、|d31|が約20%以上向上していることが確認された。
以上の結果より、高い|d31|を実現するためには、Sr置換量を0mol%〜10mol%(d=0〜0.10)の範囲とすることが望ましいことがわかる。
試料37および試料38のように、Aサイトの一部をBa置換した場合にも、Sr置換の場合と同様に、|d31|が約20%以上向上することがわかった。この結果より、Ba置換の場合にも、Sr置換の場合と同様の効果が得られることが確認された。
また本発明の圧電磁器を圧電素子に用いることにより、交流電界下での大きな歪み量を得ることが可能で、経済性に優れた圧電素子を提供することができる。
したがって、本発明は、圧電磁器やそれを用いた圧電素子の分野に広く適用することができる。
Claims (5)
- 一般式Pbx-a-dBiaM3d{M1b(M21/3Nb2/3)yZr1-b-y-zTiz}O3(M1およびM2はそれぞれNiおよびZnの少なくとも一種、M3はBaおよびSrの少なくとも一種)で表わされ、前記a,b,d,x,y,zが、
0.05≦a≦0.15
0<b≦0.075
0≦(a−2b)
0≦d≦0.1
0.97≦x≦1.00
0.020≦y≦0.250
0.398≦z≦0.512
を満たすことを特徴とする圧電磁器。 - 請求項1記載の圧電磁器であって、前記a,bが、
0.015≦b≦0.075
0≦(a−2b)≦0.02
を満たすことを特徴とする圧電磁器。 - 請求項1または請求項2記載の圧電磁器であって、前記M1はNiであり、前記M2はNiまたはZnの少なくとも一種であることを特徴とする圧電磁器。
- 請求項3に記載の圧電磁器であって、Niの偏析が生じていることを特徴とする圧電磁器。
- 請求項1ないし請求項4のいずれか一項に記載の圧電磁器からなる圧電磁器素体と、該圧電磁器素体に内蔵された内部電極と、を有する圧電素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007027990 | 2007-02-07 | ||
JP2007027990 | 2007-02-07 | ||
PCT/JP2008/051872 WO2008096761A1 (ja) | 2007-02-07 | 2008-02-05 | 圧電磁器および圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4390018B2 JP4390018B2 (ja) | 2009-12-24 |
JPWO2008096761A1 true JPWO2008096761A1 (ja) | 2010-05-20 |
Family
ID=39681669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008557127A Active JP4390018B2 (ja) | 2007-02-07 | 2008-02-05 | 圧電磁器および圧電素子 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7965020B2 (ja) |
EP (1) | EP2090556B1 (ja) |
JP (1) | JP4390018B2 (ja) |
KR (1) | KR101051527B1 (ja) |
CN (1) | CN101547875B (ja) |
WO (1) | WO2008096761A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5337513B2 (ja) * | 2008-03-18 | 2013-11-06 | 日本碍子株式会社 | 圧電/電歪磁器組成物 |
US8871111B2 (en) * | 2008-03-18 | 2014-10-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive ceramic composition |
JP5597368B2 (ja) * | 2009-07-29 | 2014-10-01 | 京セラ株式会社 | 積層型電子部品およびその製法 |
JP5903578B2 (ja) * | 2010-01-21 | 2016-04-13 | 株式会社ユーテック | Pbnzt強誘電体膜及び強誘電体膜の製造方法 |
CN102555478B (zh) * | 2010-12-28 | 2015-06-17 | 精工爱普生株式会社 | 液体喷射头和液体喷射装置以及压电元件 |
JP6381246B2 (ja) * | 2014-03-25 | 2018-08-29 | 日本特殊陶業株式会社 | 圧電素子およびその製造方法 |
WO2016031995A1 (ja) * | 2014-08-29 | 2016-03-03 | 京セラ株式会社 | 圧電磁器およびその製法、ならびに電子部品 |
USD857020S1 (en) * | 2016-05-25 | 2019-08-20 | Tdk Corporation | Piezoelectric element |
JP6728260B2 (ja) * | 2018-03-22 | 2020-07-22 | 株式会社東芝 | 積層型超音波トランスデューサ及び超音波検査装置 |
CN109836150A (zh) * | 2019-04-12 | 2019-06-04 | 南方科技大学 | 一种基于织构化高温压电陶瓷的多层陶瓷致动器 |
JP1649916S (ja) * | 2019-05-20 | 2020-01-20 | ||
CN114874009B (zh) * | 2022-06-09 | 2022-12-13 | 郑州轻工业大学 | 一种近室温弛豫铁电材料Ba4SrBiTi3Nb7O30及其制备方法和应用 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3519567A (en) * | 1967-08-11 | 1970-07-07 | Nippon Electric Co | Piezoelectric ceramics |
US3595795A (en) * | 1967-11-08 | 1971-07-27 | Nippon Electric Co | Piezoelectric ceramic |
US3594321A (en) * | 1968-11-05 | 1971-07-20 | Nippon Electric Co | Piezoelectric ceramic |
JPS4819476B1 (ja) * | 1969-06-30 | 1973-06-13 | ||
US3767579A (en) * | 1971-02-25 | 1973-10-23 | Nippon Electric Co | Piezoelectirc ceramics |
JPS60215568A (ja) * | 1984-04-09 | 1985-10-28 | 財団法人 小林理学研究所 | 強誘電体磁器組成物 |
JPS6289372A (ja) | 1985-10-16 | 1987-04-23 | Seiko Epson Corp | 圧電性磁器 |
JPH02301174A (ja) * | 1989-05-16 | 1990-12-13 | Tokin Corp | 圧電磁器組成物 |
JPH0340965A (ja) * | 1989-07-06 | 1991-02-21 | Inax Corp | 強誘電性セラミックス |
DE4127829C2 (de) | 1991-08-22 | 1994-05-19 | Renate Prof Dr Ing Gesemann | PZT - Werkstoffe und deren Verwendung |
JPH0558729A (ja) | 1991-08-30 | 1993-03-09 | Tosoh Corp | 圧電磁器組成物 |
JP3384048B2 (ja) | 1993-07-29 | 2003-03-10 | 株式会社村田製作所 | 圧電磁器組成物 |
JPH10287469A (ja) * | 1997-04-11 | 1998-10-27 | Sony Corp | 圧電材料 |
JP2001181037A (ja) | 1999-12-28 | 2001-07-03 | Matsushita Electric Ind Co Ltd | 圧電磁器組成物及び圧電トランス |
JP4100847B2 (ja) | 1999-12-28 | 2008-06-11 | Tdk株式会社 | 圧電セラミック組成物 |
JP2001328864A (ja) | 2000-05-16 | 2001-11-27 | Matsushita Electric Ind Co Ltd | 低温焼成圧電磁器組成物及び圧電トランス |
JP4298232B2 (ja) * | 2002-07-25 | 2009-07-15 | 株式会社村田製作所 | 圧電磁器組成物、及び圧電素子 |
JP2004307320A (ja) * | 2003-03-24 | 2004-11-04 | Kyocera Corp | 圧電磁器組成物およびその製造方法 |
JP4665456B2 (ja) * | 2004-08-11 | 2011-04-06 | ソニー株式会社 | 圧電セラミックス、その製造方法、圧電アクチュエータ |
KR100843067B1 (ko) | 2005-01-14 | 2008-07-01 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 자기 조성물 및 압전 액츄에이터 |
CN101189743B (zh) | 2005-06-03 | 2011-04-13 | 株式会社村田制作所 | 压电元件 |
JP4803354B2 (ja) * | 2005-08-04 | 2011-10-26 | セイコーエプソン株式会社 | 画像形成装置 |
-
2008
- 2008-02-05 WO PCT/JP2008/051872 patent/WO2008096761A1/ja active Application Filing
- 2008-02-05 EP EP08710804.9A patent/EP2090556B1/en active Active
- 2008-02-05 KR KR1020097007520A patent/KR101051527B1/ko active IP Right Grant
- 2008-02-05 CN CN2008800009672A patent/CN101547875B/zh active Active
- 2008-02-05 JP JP2008557127A patent/JP4390018B2/ja active Active
-
2009
- 2009-04-20 US US12/426,469 patent/US7965020B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7965020B2 (en) | 2011-06-21 |
KR20090069294A (ko) | 2009-06-30 |
EP2090556B1 (en) | 2016-09-21 |
KR101051527B1 (ko) | 2011-07-22 |
JP4390018B2 (ja) | 2009-12-24 |
EP2090556A4 (en) | 2011-03-09 |
WO2008096761A1 (ja) | 2008-08-14 |
CN101547875B (zh) | 2012-08-22 |
CN101547875A (zh) | 2009-09-30 |
EP2090556A1 (en) | 2009-08-19 |
US20090200898A1 (en) | 2009-08-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4390018B2 (ja) | 圧電磁器および圧電素子 | |
US7754095B2 (en) | Piezoelectric ceramic composition and piezoelectric ceramic electronic component | |
JP4547632B2 (ja) | 圧電磁器組成物および圧電アクチュエータ | |
WO2006095716A1 (ja) | 圧電/電歪磁器組成物及びその製造方法 | |
JP5929640B2 (ja) | 圧電磁器および圧電素子 | |
JP4650695B2 (ja) | 圧電体磁器組成物及び圧電セラミック電子部品 | |
JP4298232B2 (ja) | 圧電磁器組成物、及び圧電素子 | |
JP4537212B2 (ja) | 圧電/電歪素子の製造方法 | |
JP4780530B2 (ja) | 圧電磁器組成物および圧電アクチュエータ | |
JPWO2006018930A1 (ja) | 圧電磁器組成物、及び圧電素子 | |
JP5597368B2 (ja) | 積層型電子部品およびその製法 | |
JP5392603B2 (ja) | 圧電セラミック電子部品の製造方法 | |
JP4355665B2 (ja) | 圧電磁器および圧電素子 | |
JPWO2008078487A1 (ja) | 圧電磁器組成物及び圧電素子 | |
JP2015171964A (ja) | 圧電セラミックス | |
JPWO2006001109A1 (ja) | 圧電磁器組成物、及び圧電素子 | |
JP5894222B2 (ja) | 積層型電子部品およびその製法 | |
JP5115342B2 (ja) | 圧電磁器、圧電素子及び積層型圧電素子 | |
JP5018602B2 (ja) | 圧電磁器組成物、並びにこれを用いた圧電磁器及び積層型圧電素子 | |
JP5935187B2 (ja) | 圧電セラミックスおよびこれを用いた圧電アクチュエータ | |
JP5035076B2 (ja) | 圧電磁器及びこれを用いた積層型圧電素子 | |
JP2005219992A (ja) | 圧電磁器組成物および圧電素子 | |
JP2010059008A (ja) | 圧電セラミック組成物及びこれを用いたアクチュエータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090915 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090928 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121016 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4390018 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131016 Year of fee payment: 4 |