JP4390018B2 - 圧電磁器および圧電素子 - Google Patents
圧電磁器および圧電素子 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims description 77
- 238000005204 segregation Methods 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052725 zinc Inorganic materials 0.000 claims description 9
- 230000005684 electric field Effects 0.000 description 37
- 238000010304 firing Methods 0.000 description 33
- 238000006467 substitution reaction Methods 0.000 description 21
- 239000000843 powder Substances 0.000 description 20
- 239000000203 mixture Substances 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 239000012298 atmosphere Substances 0.000 description 13
- 239000002994 raw material Substances 0.000 description 13
- 230000007423 decrease Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 229910001316 Ag alloy Inorganic materials 0.000 description 5
- 229910001252 Pd alloy Inorganic materials 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000002003 electrode paste Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Description
2 内部電極
3 外部電極
Pbx-a-dBiaM3d{M1b(M21/3Nb2/3)yZr1-b-y-zTiz}O3
......(A)
一般式(A)において、M1およびM2は各々NiまたはZnのうち少なくとも一種であり、M1とM2は同じ元素であっても異なる元素であってもよい。好ましくは、M1がNiであり、M2がNiまたはZnのうち少なくとも一種である。
また、M3は、BaおよびSrの少なくとも一種である。
まず出発原料として、Pb3O4、Bi2O3、ZrO2、TiO2、NiO、ZnO、Nb2O5、SrCO3、およびBaCO3を準備し、これらの原料粉末を前記の一般式(A)を満たすように秤量して混合する。この混合原料を750℃〜930℃で仮焼し、仮焼粉末を得る。仮焼粉末と溶剤とバインダーを混合してセラミックスラリーを作製し、このセラミックスラリーを用いてドクターブレード法などの周知の方法によってセラミックグリーンシートを作製する。セラミックグリーンシートの厚みは、10μm〜100μm程度の間で適宜設定することが可能である。
まず出発原料として、Pb3O4、Bi2O3、ZrO2、TiO2、NiO、ZnOおよびNb2O5を準備し、これらの原料粉末を一般式(B)の範囲で所定の組成を満たすように秤量して混合した。
Pbx-aBia{Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3......(B)
この混合原料を800℃〜850℃で仮焼し、仮焼粉末を得た。仮焼粉末と溶剤としての水とバインダーとを混合してセラミックスラリーを作製し、このセラミックスラリーを用いてドクターブレードによって厚さ約50μmのセラミックグリーンシートを作製した。
なお、表1において試料番号に*が付されているものは本発明の範囲外の比較例である(表2においても同じ)。
また、Bサイトの成分のモル比率zに注目して試料1〜27の特性を見た場合、zの値を0.398≦z≦0.512の範囲とすることにより、高い|d31|×Ecが得られていることがわかる。
まず、実施例1と同様の方法で、前述の一般式(B)の範囲で所定の組成比率となるように原料粉末を秤量して混合および仮焼を行い、仮焼粉末を作製した。さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子を作製した。その際、焼成温度は900℃とし、各組成について1気圧の空気中(酸素濃度20%)、窒素中(酸素濃度0.5%)および酸素中(酸素濃度100%)でそれぞれ焼成を行った試料を用意した。
また、本発明の範囲内の試料29の場合、空気中で焼成したときの圧電定数|d31|が313pm/Vと高いことが確認された。ただし、Ni偏析が生じていない試料29の場合、焼成雰囲気を窒素雰囲気としたときの|d31|変化率が−21%と、焼成雰囲気中の酸素分圧が低下することによって圧電定数|d31|が大きく低下することが確認された。
(Pbx-a-dBiaSrd){Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3 ......(C)
なお、表5において試料番号に*を付した試料34は本発明の範囲外の比較例である。
さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子(試料)を作製した。
(Pbx-a-dBiaBad){Nib(Nic/3Zn(1-c)/3Nb2/3)yZr1-b-y-zTiz}O3 ......(D)
さらにこの仮焼粉末を用いて、実施例1と同様の方法で、圧電素子(試料)を作製した。
その結果を表7に示す。
なお、表7において試料番号に*を付した試料34は本発明の範囲外の比較例である。
Srの置換量を5mol%(d=0.05)とした試料32は、Srを置換していない試料31と比較すると、|d31|×Ecが大きく変化していないにもかかわらず、|d31|が約20%以上向上していることが確認された。
以上の結果より、高い|d31|を実現するためには、Sr置換量を0mol%〜10mol%(d=0〜0.10)の範囲とすることが望ましいことがわかる。
試料37および試料38のように、Aサイトの一部をBa置換した場合にも、Sr置換の場合と同様に、|d31|が約20%以上向上することがわかった。この結果より、Ba置換の場合にも、Sr置換の場合と同様の効果が得られることが確認された。
また本発明の圧電磁器を圧電素子に用いることにより、交流電界下での大きな歪み量を得ることが可能で、経済性に優れた圧電素子を提供することができる。
したがって、本発明は、圧電磁器やそれを用いた圧電素子の分野に広く適用することができる。
Claims (5)
- 一般式Pbx-a-dBiaM3d{M1b(M21/3Nb2/3)yZr1-b-y-zTiz}O3(M1およびM2はそれぞれNiおよびZnの少なくとも一種、M3はBaおよびSrの少なくとも一種)で表わされ、前記a,b,d,x,y,zが、
0.05≦a≦0.15
0<b≦0.075
0≦(a−2b)
0≦d≦0.1
0.97≦x≦1.00
0.020≦y≦0.250
0.398≦z≦0.512
を満たすことを特徴とする圧電磁器。 - 請求項1記載の圧電磁器であって、前記a,bが、
0.015≦b≦0.075
0≦(a−2b)≦0.02
を満たすことを特徴とする圧電磁器。 - 請求項1または請求項2記載の圧電磁器であって、前記M1はNiであり、前記M2はNiまたはZnの少なくとも一種であることを特徴とする圧電磁器。
- 請求項3に記載の圧電磁器であって、Niの偏析が生じていることを特徴とする圧電磁器。
- 請求項1ないし請求項4のいずれか一項に記載の圧電磁器からなる圧電磁器素体と、該圧電磁器素体に内蔵された内部電極と、を有する圧電素子。
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JP5337513B2 (ja) * | 2008-03-18 | 2013-11-06 | 日本碍子株式会社 | 圧電/電歪磁器組成物 |
US8871111B2 (en) * | 2008-03-18 | 2014-10-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive ceramic composition |
JP5597368B2 (ja) * | 2009-07-29 | 2014-10-01 | 京セラ株式会社 | 積層型電子部品およびその製法 |
JP5903578B2 (ja) * | 2010-01-21 | 2016-04-13 | 株式会社ユーテック | Pbnzt強誘電体膜及び強誘電体膜の製造方法 |
CN102555478B (zh) * | 2010-12-28 | 2015-06-17 | 精工爱普生株式会社 | 液体喷射头和液体喷射装置以及压电元件 |
JP6381246B2 (ja) * | 2014-03-25 | 2018-08-29 | 日本特殊陶業株式会社 | 圧電素子およびその製造方法 |
WO2016031995A1 (ja) * | 2014-08-29 | 2016-03-03 | 京セラ株式会社 | 圧電磁器およびその製法、ならびに電子部品 |
USD857020S1 (en) * | 2016-05-25 | 2019-08-20 | Tdk Corporation | Piezoelectric element |
JP6728260B2 (ja) * | 2018-03-22 | 2020-07-22 | 株式会社東芝 | 積層型超音波トランスデューサ及び超音波検査装置 |
CN109836150A (zh) * | 2019-04-12 | 2019-06-04 | 南方科技大学 | 一种基于织构化高温压电陶瓷的多层陶瓷致动器 |
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CN114874009B (zh) * | 2022-06-09 | 2022-12-13 | 郑州轻工业大学 | 一种近室温弛豫铁电材料Ba4SrBiTi3Nb7O30及其制备方法和应用 |
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