JPS5519820A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5519820A
JPS5519820A JP9212478A JP9212478A JPS5519820A JP S5519820 A JPS5519820 A JP S5519820A JP 9212478 A JP9212478 A JP 9212478A JP 9212478 A JP9212478 A JP 9212478A JP S5519820 A JPS5519820 A JP S5519820A
Authority
JP
Japan
Prior art keywords
layer
capacity
information
oxide film
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9212478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138620B2 (enrdf_load_stackoverflow
Inventor
Mitsuru Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9212478A priority Critical patent/JPS5519820A/ja
Publication of JPS5519820A publication Critical patent/JPS5519820A/ja
Publication of JPS6138620B2 publication Critical patent/JPS6138620B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP9212478A 1978-07-27 1978-07-27 Semiconductor device Granted JPS5519820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9212478A JPS5519820A (en) 1978-07-27 1978-07-27 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9212478A JPS5519820A (en) 1978-07-27 1978-07-27 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5519820A true JPS5519820A (en) 1980-02-12
JPS6138620B2 JPS6138620B2 (enrdf_load_stackoverflow) 1986-08-30

Family

ID=14045673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9212478A Granted JPS5519820A (en) 1978-07-27 1978-07-27 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5519820A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107571A (en) * 1980-01-30 1981-08-26 Fujitsu Ltd Semiconductor memory storage device
JPS57176757A (en) * 1981-04-22 1982-10-30 Nec Corp Semiconductor device
JPS5982761A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 半導体メモリ
JPS59129461A (ja) * 1983-01-13 1984-07-25 Fujitsu Ltd 半導体装置とその製造方法
JPS59222959A (ja) * 1983-06-01 1984-12-14 Hitachi Ltd 半導体メモリ
JPS61113271A (ja) * 1984-11-08 1986-05-31 Matsushita Electronics Corp 半導体記憶素子
JPS6344755A (ja) * 1987-08-10 1988-02-25 Chiyou Lsi Gijutsu Kenkyu Kumiai 半導体集積回路装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107571A (en) * 1980-01-30 1981-08-26 Fujitsu Ltd Semiconductor memory storage device
JPS57176757A (en) * 1981-04-22 1982-10-30 Nec Corp Semiconductor device
JPS5982761A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 半導体メモリ
JPS59129461A (ja) * 1983-01-13 1984-07-25 Fujitsu Ltd 半導体装置とその製造方法
JPS59222959A (ja) * 1983-06-01 1984-12-14 Hitachi Ltd 半導体メモリ
JPS61113271A (ja) * 1984-11-08 1986-05-31 Matsushita Electronics Corp 半導体記憶素子
JPS6344755A (ja) * 1987-08-10 1988-02-25 Chiyou Lsi Gijutsu Kenkyu Kumiai 半導体集積回路装置

Also Published As

Publication number Publication date
JPS6138620B2 (enrdf_load_stackoverflow) 1986-08-30

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