JPS5491083A - Integrated-circuit device - Google Patents
Integrated-circuit deviceInfo
- Publication number
- JPS5491083A JPS5491083A JP15794577A JP15794577A JPS5491083A JP S5491083 A JPS5491083 A JP S5491083A JP 15794577 A JP15794577 A JP 15794577A JP 15794577 A JP15794577 A JP 15794577A JP S5491083 A JPS5491083 A JP S5491083A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- poly
- covered
- transistor
- matching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To fulfill the reduction of occupied area and the enlargement of storage capacity by overlapping or matching each other formation regions for a switching transistor and for information storing capacity making use of the multilayer electrode structure. CONSTITUTION:The passivation region of P-type Si substrate 101 is covered with thick oxidized film 102, and digit line 104 of poly-Si via N-type layer 105 and capacitor electrode 109 of poly-Si via N-type layer 108 are connected to the source and drain of the switching transistor respectively. Word line 107 of poly-Si is formed on gate oxidized film 106. The transistor formation region is covered with Si3N4 film 110 and electrode 109 is also formed by self-matching. Further, the entire cell part is covered with Al electrode 111 and electrode 111 is held at a constant potential. In this way, the area occupied by one transistor RAM cell can be reduced and the storage capacity can also be enlarged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15794577A JPS5491083A (en) | 1977-12-28 | 1977-12-28 | Integrated-circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15794577A JPS5491083A (en) | 1977-12-28 | 1977-12-28 | Integrated-circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5491083A true JPS5491083A (en) | 1979-07-19 |
Family
ID=15660897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15794577A Pending JPS5491083A (en) | 1977-12-28 | 1977-12-28 | Integrated-circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5491083A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59125652A (en) * | 1982-12-20 | 1984-07-20 | Fujitsu Ltd | Semiconductor memory device |
JPS59231851A (en) * | 1983-06-14 | 1984-12-26 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor memory cell |
JPS60149160A (en) * | 1983-07-11 | 1985-08-06 | ナシヨナル・セミコンダクタ−・コ−ポレ−シヨン | High efficiency dynamic random access memory and method of producing same |
JPH08288475A (en) * | 1996-05-20 | 1996-11-01 | Hitachi Ltd | Manufacture of semiconductor memory |
JPH09107085A (en) * | 1996-09-17 | 1997-04-22 | Hitachi Ltd | Semiconductor memory |
-
1977
- 1977-12-28 JP JP15794577A patent/JPS5491083A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59125652A (en) * | 1982-12-20 | 1984-07-20 | Fujitsu Ltd | Semiconductor memory device |
JPS602784B2 (en) * | 1982-12-20 | 1985-01-23 | 富士通株式会社 | semiconductor storage device |
JPS59231851A (en) * | 1983-06-14 | 1984-12-26 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor memory cell |
JPS60149160A (en) * | 1983-07-11 | 1985-08-06 | ナシヨナル・セミコンダクタ−・コ−ポレ−シヨン | High efficiency dynamic random access memory and method of producing same |
JPH08288475A (en) * | 1996-05-20 | 1996-11-01 | Hitachi Ltd | Manufacture of semiconductor memory |
JPH09107085A (en) * | 1996-09-17 | 1997-04-22 | Hitachi Ltd | Semiconductor memory |
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