JPH10189912A5 - - Google Patents

Info

Publication number
JPH10189912A5
JPH10189912A5 JP1997185263A JP18526397A JPH10189912A5 JP H10189912 A5 JPH10189912 A5 JP H10189912A5 JP 1997185263 A JP1997185263 A JP 1997185263A JP 18526397 A JP18526397 A JP 18526397A JP H10189912 A5 JPH10189912 A5 JP H10189912A5
Authority
JP
Japan
Prior art keywords
forming
conductive film
pillar
region
dielectric film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997185263A
Other languages
English (en)
Japanese (ja)
Other versions
JP4056588B2 (ja
JPH10189912A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP18526397A priority Critical patent/JP4056588B2/ja
Priority claimed from JP18526397A external-priority patent/JP4056588B2/ja
Priority to US08/965,010 priority patent/US6576527B2/en
Publication of JPH10189912A publication Critical patent/JPH10189912A/ja
Priority to US10/410,293 priority patent/US6861694B2/en
Publication of JPH10189912A5 publication Critical patent/JPH10189912A5/ja
Application granted granted Critical
Publication of JP4056588B2 publication Critical patent/JP4056588B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP18526397A 1996-11-06 1997-07-10 半導体装置及びその製造方法 Expired - Fee Related JP4056588B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18526397A JP4056588B2 (ja) 1996-11-06 1997-07-10 半導体装置及びその製造方法
US08/965,010 US6576527B2 (en) 1996-11-06 1997-11-05 Semiconductor device and method for fabricating the same
US10/410,293 US6861694B2 (en) 1996-11-06 2003-04-10 Semiconductor device and method for fabricating the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-293593 1996-11-06
JP29359396 1996-11-06
JP18526397A JP4056588B2 (ja) 1996-11-06 1997-07-10 半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JPH10189912A JPH10189912A (ja) 1998-07-21
JPH10189912A5 true JPH10189912A5 (enExample) 2005-02-10
JP4056588B2 JP4056588B2 (ja) 2008-03-05

Family

ID=26503002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18526397A Expired - Fee Related JP4056588B2 (ja) 1996-11-06 1997-07-10 半導体装置及びその製造方法

Country Status (2)

Country Link
US (2) US6576527B2 (enExample)
JP (1) JP4056588B2 (enExample)

Families Citing this family (72)

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KR100285698B1 (ko) * 1998-07-13 2001-04-02 윤종용 반도체장치의제조방법
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US6312988B1 (en) * 1999-09-02 2001-11-06 Micron Technology, Inc. Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions
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JP2003023070A (ja) * 2001-07-05 2003-01-24 Mitsubishi Electric Corp 半導体装置およびその製造方法
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US20030235995A1 (en) * 2002-06-21 2003-12-25 Oluseyi Hakeem M. Method of increasing selectivity to mask when etching tungsten or tungsten nitride
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US7125781B2 (en) * 2003-09-04 2006-10-24 Micron Technology, Inc. Methods of forming capacitor devices
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JP2006032574A (ja) * 2004-07-14 2006-02-02 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
US7387939B2 (en) * 2004-07-19 2008-06-17 Micron Technology, Inc. Methods of forming semiconductor structures and capacitor devices
US7126182B2 (en) * 2004-08-13 2006-10-24 Micron Technology, Inc. Memory circuitry
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US7439152B2 (en) * 2004-08-27 2008-10-21 Micron Technology, Inc. Methods of forming a plurality of capacitors
US20060046055A1 (en) * 2004-08-30 2006-03-02 Nan Ya Plastics Corporation Superfine fiber containing grey dope dyed component and the fabric made of the same
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US7320911B2 (en) * 2004-12-06 2008-01-22 Micron Technology, Inc. Methods of forming pluralities of capacitors
JP4446179B2 (ja) * 2005-02-02 2010-04-07 エルピーダメモリ株式会社 半導体装置の製造方法
US7557015B2 (en) 2005-03-18 2009-07-07 Micron Technology, Inc. Methods of forming pluralities of capacitors
JP4569924B2 (ja) * 2005-04-08 2010-10-27 エルピーダメモリ株式会社 半導体装置の製造方法
US7517753B2 (en) 2005-05-18 2009-04-14 Micron Technology, Inc. Methods of forming pluralities of capacitors
US7544563B2 (en) * 2005-05-18 2009-06-09 Micron Technology, Inc. Methods of forming a plurality of capacitors
US7282401B2 (en) 2005-07-08 2007-10-16 Micron Technology, Inc. Method and apparatus for a self-aligned recessed access device (RAD) transistor gate
US7199005B2 (en) * 2005-08-02 2007-04-03 Micron Technology, Inc. Methods of forming pluralities of capacitors
US7867851B2 (en) 2005-08-30 2011-01-11 Micron Technology, Inc. Methods of forming field effect transistors on substrates
US7633167B2 (en) 2005-09-29 2009-12-15 Nec Electronics Corporation Semiconductor device and method for manufacturing same
JP4698427B2 (ja) * 2006-01-12 2011-06-08 エルピーダメモリ株式会社 半導体装置の製造方法
US7700441B2 (en) 2006-02-02 2010-04-20 Micron Technology, Inc. Methods of forming field effect transistors, methods of forming field effect transistor gates, methods of forming integrated circuitry comprising a transistor gate array and circuitry peripheral to the gate array, and methods of forming integrated circuitry comprising a transistor gate array including first gates and second grounded isolation gates
US7557013B2 (en) 2006-04-10 2009-07-07 Micron Technology, Inc. Methods of forming a plurality of capacitors
US7602001B2 (en) * 2006-07-17 2009-10-13 Micron Technology, Inc. Capacitorless one transistor DRAM cell, integrated circuitry comprising an array of capacitorless one transistor DRAM cells, and method of forming lines of capacitorless one transistor DRAM cells
US7772632B2 (en) 2006-08-21 2010-08-10 Micron Technology, Inc. Memory arrays and methods of fabricating memory arrays
US7589995B2 (en) 2006-09-07 2009-09-15 Micron Technology, Inc. One-transistor memory cell with bias gate
US7902081B2 (en) 2006-10-11 2011-03-08 Micron Technology, Inc. Methods of etching polysilicon and methods of forming pluralities of capacitors
JP4545133B2 (ja) * 2006-11-09 2010-09-15 富士通株式会社 半導体記憶装置及びその製造方法
US7785962B2 (en) 2007-02-26 2010-08-31 Micron Technology, Inc. Methods of forming a plurality of capacitors
FR2914781B1 (fr) * 2007-04-03 2009-11-20 Commissariat Energie Atomique Procede de realisation de depots localises
US7923373B2 (en) 2007-06-04 2011-04-12 Micron Technology, Inc. Pitch multiplication using self-assembling materials
JP4637872B2 (ja) * 2007-06-12 2011-02-23 シャープ株式会社 配線構造およびその製造方法
US7682924B2 (en) 2007-08-13 2010-03-23 Micron Technology, Inc. Methods of forming a plurality of capacitors
JP5613363B2 (ja) * 2007-09-20 2014-10-22 ピーエスフォー ルクスコ エスエイアールエルＰＳ４ Ｌｕｘｃｏ Ｓ．ａ．ｒ．ｌ． 半導体記憶装置及びその製造方法
US7759201B2 (en) * 2007-12-17 2010-07-20 Sandisk 3D Llc Method for fabricating pitch-doubling pillar structures
US8388851B2 (en) 2008-01-08 2013-03-05 Micron Technology, Inc. Capacitor forming methods
US8274777B2 (en) 2008-04-08 2012-09-25 Micron Technology, Inc. High aspect ratio openings
US7981592B2 (en) * 2008-04-11 2011-07-19 Sandisk 3D Llc Double patterning method
US7713818B2 (en) 2008-04-11 2010-05-11 Sandisk 3D, Llc Double patterning method
US7786015B2 (en) * 2008-04-28 2010-08-31 Sandisk 3D Llc Method for fabricating self-aligned complementary pillar structures and wiring
US20090302477A1 (en) * 2008-06-06 2009-12-10 Yakov Shor Integrated circuit with embedded contacts
US7732235B2 (en) 2008-06-30 2010-06-08 Sandisk 3D Llc Method for fabricating high density pillar structures by double patterning using positive photoresist
US7781269B2 (en) * 2008-06-30 2010-08-24 Sandisk 3D Llc Triangle two dimensional complementary patterning of pillars
US7759193B2 (en) 2008-07-09 2010-07-20 Micron Technology, Inc. Methods of forming a plurality of capacitors
US8455298B2 (en) * 2008-08-18 2013-06-04 Contour Semiconductor, Inc. Method for forming self-aligned phase-change semiconductor diode memory
US8076056B2 (en) * 2008-10-06 2011-12-13 Sandisk 3D Llc Method of making sub-resolution pillar structures using undercutting technique
JP2010245374A (ja) * 2009-04-08 2010-10-28 Elpida Memory Inc 半導体装置及びその製造方法
US7923305B1 (en) 2010-01-12 2011-04-12 Sandisk 3D Llc Patterning method for high density pillar structures
US8026178B2 (en) 2010-01-12 2011-09-27 Sandisk 3D Llc Patterning method for high density pillar structures
US8518788B2 (en) 2010-08-11 2013-08-27 Micron Technology, Inc. Methods of forming a plurality of capacitors
KR101742176B1 (ko) * 2011-01-31 2017-05-31 삼성전자주식회사 반도체 소자 및 그 제조 방법
US9076680B2 (en) 2011-10-18 2015-07-07 Micron Technology, Inc. Integrated circuitry, methods of forming capacitors, and methods of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the array
US8946043B2 (en) 2011-12-21 2015-02-03 Micron Technology, Inc. Methods of forming capacitors
US8652926B1 (en) 2012-07-26 2014-02-18 Micron Technology, Inc. Methods of forming capacitors
KR102516880B1 (ko) * 2016-07-12 2023-03-31 삼성전자주식회사 반도체 기억 소자
US10636675B2 (en) * 2017-09-27 2020-04-28 Applied Materials, Inc. Methods of etching metal-containing layers
US10957741B2 (en) * 2019-05-01 2021-03-23 Micron Technology, Inc. Multitier arrangements of integrated devices, and methods of forming sense/access lines
WO2021260792A1 (ja) 2020-06-23 2021-12-30 キオクシア株式会社 半導体記憶装置
US11901405B2 (en) 2020-09-11 2024-02-13 Changxin Memory Technologies, Inc. Semiconductor structure and method for manufacturing semiconductor structure
EP4195252A4 (en) * 2020-09-11 2024-01-17 Changxin Memory Technologies, Inc. Semiconductor structure and manufacturing method therefor
CN114883271A (zh) * 2021-02-05 2022-08-09 长鑫存储技术有限公司 半导体结构及其形成方法

Family Cites Families (17)

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JPH06105774B2 (ja) * 1987-11-17 1994-12-21 富士通株式会社 半導体記憶装置及びその製造方法
JP2519569B2 (ja) * 1990-04-27 1996-07-31 三菱電機株式会社 半導体記憶装置およびその製造方法
JPH06260609A (ja) * 1992-06-10 1994-09-16 Mitsubishi Electric Corp 筒型キャパシタを有する半導体記憶装置およびその製造方法
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US5539230A (en) * 1995-03-16 1996-07-23 International Business Machines Corporation Chimney capacitor
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EP0740347B1 (de) * 1995-04-24 2002-08-28 Infineon Technologies AG Halbleiter-Speichervorrichtung unter Verwendung eines ferroelektrischen Dielektrikums und Verfahren zur Herstellung
JP2755243B2 (ja) * 1996-01-23 1998-05-20 日本電気株式会社 半導体記憶装置およびその製造方法
KR100213209B1 (ko) * 1996-07-29 1999-08-02 윤종용 반도체장치의 제조방법
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