JP7292060B2 - プラズマ環境にあるチャンバ構成要素のためのＹ２Ｏ３－ＺｒＯ２耐エロージョン性材料 - Google Patents

プラズマ環境にあるチャンバ構成要素のためのＹ２Ｏ３－ＺｒＯ２耐エロージョン性材料 Download PDF

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JP7292060B2
JP7292060B2 JP2019042015A JP2019042015A JP7292060B2 JP 7292060 B2 JP7292060 B2 JP 7292060B2 JP 2019042015 A JP2019042015 A JP 2019042015A JP 2019042015 A JP2019042015 A JP 2019042015A JP 7292060 B2 JP7292060 B2 JP 7292060B2
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ceramic material
chamber component
sintered ceramic
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JP2019194351A5 (https=
JP2019194351A (ja
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ワイ サン ジェニファー
フェンウィック デービッド
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
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