TWI785212B - 用於電漿環境中的腔室部件的氧化釔-二氧化鋯耐蝕材料 - Google Patents

用於電漿環境中的腔室部件的氧化釔-二氧化鋯耐蝕材料 Download PDF

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TWI785212B
TWI785212B TW108107570A TW108107570A TWI785212B TW I785212 B TWI785212 B TW I785212B TW 108107570 A TW108107570 A TW 108107570A TW 108107570 A TW108107570 A TW 108107570A TW I785212 B TWI785212 B TW I785212B
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mol
chamber
inches
ceramic material
ceramic
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TW108107570A
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TW201945321A (zh
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語南 孫
大衛 芬威克
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美商應用材料股份有限公司
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