CN110240481A - 用于等离子体环境中的腔室部件的氧化钇-二氧化锆耐蚀材料 - Google Patents

用于等离子体环境中的腔室部件的氧化钇-二氧化锆耐蚀材料 Download PDF

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Publication number
CN110240481A
CN110240481A CN201910173809.7A CN201910173809A CN110240481A CN 110240481 A CN110240481 A CN 110240481A CN 201910173809 A CN201910173809 A CN 201910173809A CN 110240481 A CN110240481 A CN 110240481A
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ceramic
moles
chamber part
mol
main body
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CN201910173809.7A
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Chinese (zh)
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J·Y·孙
D·芬威克
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Applied Materials Inc
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Applied Materials Inc
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Priority to CN202510878986.0A priority Critical patent/CN120698794A/zh
Publication of CN110240481A publication Critical patent/CN110240481A/zh
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