JP7199381B2 - リソグラフィにおける確率的な歩留まりへの影響の排除 - Google Patents
リソグラフィにおける確率的な歩留まりへの影響の排除 Download PDFInfo
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- JP7199381B2 JP7199381B2 JP2019563508A JP2019563508A JP7199381B2 JP 7199381 B2 JP7199381 B2 JP 7199381B2 JP 2019563508 A JP2019563508 A JP 2019563508A JP 2019563508 A JP2019563508 A JP 2019563508A JP 7199381 B2 JP7199381 B2 JP 7199381B2
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Images
Classifications
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0338—Process specially adapted to improve the resolution of the mask
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0335—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by their behaviour during the process, e.g. soluble masks, redeposited masks
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- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02115—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material being carbon, e.g. alpha-C, diamond or hydrogen doped carbon
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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Description
本願は、2017年5月16日出願の米国仮特許出願第62/506,803号「ELIMINATING YIELD IMPACT OF STOCHASTICS IN EUV LITHOGRAPHY」に基づく優先権を主張する2018年5月14日出願の米国特許出願第15/979,340号「ELIMINATING YIELD IMPACT OF STOCHASTICS IN LITHOGRAPHY」に基づく優先権を主張する。これらの出願は参照によって本明細書にその全体が全ての目的で組み込まれる。
開示されている実施形態は、任意の適切なエッチングチャンバまたは装置(カリフォルニア州フレモントのLam Research社製のKiyo(登録商標)FXなど)で実行されてよい。利用可能なプラズマエッチングチャンバの別の例は、カリフォルニア州フレモントのLamResearch社製のFlex(商標)Flex(商標)反応性イオンエッチングツールである。プラズマエッチングチャンバのさらなる説明が、米国特許第6,841,943号および第8,552,334号に記載されており、それらの全体が参照によって本明細書に組み込まれる。
パターン上に材料を蒸着した後に、対象膜への転写エッチングを行うことにより、EUVリソグラフィによって以前にエッチングされた基板に、技術1を実行した。この処理は、サイクル処理ではない。ローカルクリティカルディメンション均一性(LCDU)の低下は、図8に示すように、クリティカルディメンション(CD)の減少に比例し、アスペクト比には依存しない。より多くのトリムが、より大きいLCDU低下につながる。この処理は、LCDUを低下させるクリティカルディメンションを減少させるが、リソグラフィからの入力ウエハからのフィーチャ(特に、蒸着がフィーチャを閉じるので、より小さいクリティカルディメンションのフィーチャ)のクリティカルディメンションの分布を扱わず、これらのフィーチャの回復は困難でありうる。技術1は、フィーチャのCDを成長させるが、ピッチ限界に達する可能性があり、ピッチの密なフィーチャは、2つのフィーチャ間の空間が非常に小さいので、リソグラフィで規定されない。
理解を深めるために、本実施形態について、ある程度詳しく説明したが、本開示の範囲内でいくらかの変更および変形を行ってもよいことは明らかである。さらなる開示が、いくつかの特定の実施形態に向けられた添付の請求項によって提供されるが、限定の意図はない。本発明の処理、システム、および、装置を実施する多くの他の方法が存在することに注意されたい。したがって、本実施形態は、例示的なものであって、限定的なものではないとみなされ、実施形態は、本明細書に示した詳細に限定されない。
Claims (33)
- 半導体基板を処理する方法であって、
リソグラフィによって第1ハードマスク材料に形成された第1フィーチャおよび第2フィーチャを有する基板を提供し、
前記第1フィーチャは、前記リソグラフィによって部分的に形成され、底部を備え、前記第1ハードマスク材料は、前記第1フィーチャのフィーチャ開口部および前記第2フィーチャのフィーチャ開口部の間にフィールド領域を備え、
前記第1フィーチャ内の第2ハードマスク材料の厚さよりも大きい厚さまで前記第2フィーチャ内における前記第2ハードマスク材料を選択的に形成するのに十分な期間にわたって、前記第1ハードマスク材料の上に前記第2ハードマスク材料を蒸着させ、
前記第1フィーチャの前記底部の材料および前記第2フィーチャの前記底部の材料を除去するために、前記第2ハードマスク材料を方向性エッチングし、前記第1フィーチャの前記底部の前記材料は、前記第1ハードマスク材料または前記第2ハードマスク材料であり、前記第2フィーチャの前記底部の前記材料は、前記第2ハードマスク材料であること、
を備える、方法。 - 請求項1に記載の方法であって、前記第2フィーチャの底部は、前記第1ハードマスク材料の下の第3ハードマスク材料を含み、前記方向性エッチングは、前記第2ハードマスク材料を貫通エッチングして、前記第1フィーチャの前記底部の前記第1ハードマスク材料の下の前記第3ハードマスク材料を露出させるために実行される、方法。
- 請求項1に記載の方法であって、前記第1フィーチャおよび第2フィーチャ内に蒸着される前記第2ハードマスク材料の量は、前記第1フィーチャのアスペクト比および前記第2フィーチャのアスペクト比によって決まる、方法。
- 請求項1に記載の方法であって、方向性エッチングは、前記第1および第2フィーチャのアスペクト比とは無関係に実行される、方法。
- 請求項1に記載の方法であって、前記第1フィーチャのアスペクト比は、前記第2フィーチャのアスペクト比と異なる、方法。
- 請求項1に記載の方法であって、前記第1フィーチャの深さは、前記第2フィーチャの深さと異なる、方法。
- 請求項1に記載の方法であって、前記第1フィーチャは、リソグラフィ中に露光不足となる、方法。
- 請求項1に記載の方法であって、前記蒸着および前記方向性エッチングの後の前記第1フィーチャのクリティカルディメンションは、前記蒸着および前記方向性エッチングの前の前記第2フィーチャのクリティカルディメンションの0.5%~1%の範囲内である、方法。
- 請求項1に記載の方法であって、前記蒸着および前記方向性エッチングの後の前記第1フィーチャのアスペクト比は、前記蒸着および前記方向性エッチングの前の前記第2フィーチャのアスペクト比の1%~10%の範囲内である、方法。
- 請求項1に記載の方法であって、蒸着および方向性エッチングの後の前記第1および第2フィーチャの平均クリティカルディメンションは、少なくとも15nmである、方法。
- 請求項1に記載の方法であって、前記蒸着および前記方向性エッチングの後の前記基板上の前記第1および第2フィーチャにおけるクリティカルディメンションの変動は、リソグラフィによって規定された後の前記第1および第2フィーチャにおけるクリティカルディメンションの変動よりも小さい、方法。
- 請求項1に記載の方法であって、前記第1フィーチャの前記底部の前記第1ハードマスク材料を除去するために、前記第2ハードマスク材料の蒸着と、前記第2ハードマスク材料の方向性エッチングとを、十分なサイクルだけ繰り返す、方法。
- 請求項12に記載の方法であって、前記第2フィーチャに各サイクルで蒸着された前記第2ハードマスク材料は、前記第1ハードマスク材料の下層の材料をエッチングから保護し、各サイクルの前記方向性エッチングは、前記第1フィーチャの深さと前記第2フィーチャの深さとの間の差が0に近づくように、前記第1フィーチャの前記底部の第1ハードマスク材料を除去する、方法。
- 請求項1に記載の方法であって、前記第2ハードマスク材料に対する方向性エッチングは、改質表面を形成するために前記第2ハードマスク材料をエッチング種に暴露し、前記改質表面を除去するためにバイアスを印加しつつ前記エッチング種なしに不活性ガス環境でプラズマを点火することによって実行される、方法。
- 請求項14に記載の方法であって、前記第2ハードマスク材料は、前記プラズマに暴露された時に、前記第2ハードマスク材料の前記改質表面において5nm~10nmの間の材料を除去するために十分な期間にわたって、前記エッチング種に暴露される、方法。
- 請求項1ないし15のいずれかに記載の方法であって、前記第2ハードマスク材料の蒸着は、化学蒸着によって形成される、方法。
- 請求項1ないし15のいずれかに記載の方法であって、前記第2ハードマスク材料の蒸着は、プラズマ強化化学蒸着によって形成される、方法。
- 請求項1ないし15のいずれかに記載の方法であって、前記第2ハードマスク材料は、炭素含有材料である、方法。
- 請求項18に記載の方法であって、前記炭素含有材料は、III族、IV族、V族、VI族、または、VII族、もしくは、それらの組み合わせから選択された元素でドープされた非晶質炭素である、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2ハードマスク材料は、シリコン含有材料およびスズ含有材料からなる群より選択される、方法。
- 請求項20に記載の方法であって、前記シリコン含有材料は、二酸化シリコンおよび窒化シリコンからなる群より選択される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2ハードマスク材料は、前記第1ハードマスク材料とは異なる組成を有する、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2ハードマスク材料は、前記第1ハードマスク材料とは異なる格子構造を有する、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記基板は、前記第1ハードマスク材料の下層に第3ハードマスク材料を備える、方法。
- 請求項24に記載の方法であって、前記第2ハードマスク材料は、前記第2ハードマスク材料のエッチング速度が前記第3ハードマスク材料の少なくとも3倍になるような、前記第3ハードマスク材料に対するエッチング選択比を有する、方法。
- 請求項25に記載の方法であって、前記第3ハードマスク材料は、酸窒化シリコン、シリコン含有反射防止コーティング材料、スピンオンガラス、底部反射防止コーティング、酸化スズ、窒化スズ、硫化スズ、酸化鉛、窒化鉛、硫化鉛、および、それらの組み合わせ、からなる群より選択される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2フィーチャのフィーチャ開口部の幅は、15nm~100nmの間である、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記フィールド領域に蒸着された前記第2ハードマスク材料は、前記第2ハードマスク材料の前記方向性エッチング中に前記第1ハードマスク材料を保護する、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2ハードマスク材料の蒸着および前記方向性エッチングは、同じツール内で実行される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第2ハードマスク材料の蒸着および前記方向性エッチングは、真空を中断することなしに実行される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第1ハードマスク材料は、フォトレジストおよびスピンオン炭素からなる群より選択される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第1および第2フィーチャは、極紫外線リソグラフィによって形成される、方法。
- 請求項1から15のいずれか一項に記載の方法であって、前記第1および第2フィーチャは、液浸リソグラフィによって形成される、方法。
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US10115601B2 (en) * | 2016-02-03 | 2018-10-30 | Tokyo Electron Limited | Selective film formation for raised and recessed features using deposition and etching processes |
US10269566B2 (en) | 2016-04-29 | 2019-04-23 | Lam Research Corporation | Etching substrates using ale and selective deposition |
US10566212B2 (en) | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
US10832909B2 (en) | 2017-04-24 | 2020-11-10 | Lam Research Corporation | Atomic layer etch, reactive precursors and energetic sources for patterning applications |
US10494715B2 (en) | 2017-04-28 | 2019-12-03 | Lam Research Corporation | Atomic layer clean for removal of photoresist patterning scum |
US10796912B2 (en) | 2017-05-16 | 2020-10-06 | Lam Research Corporation | Eliminating yield impact of stochastics in lithography |
US10795270B2 (en) * | 2017-08-25 | 2020-10-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods of defect inspection |
US10727045B2 (en) * | 2017-09-29 | 2020-07-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for manufacturing a semiconductor device |
US10763083B2 (en) | 2017-10-06 | 2020-09-01 | Lam Research Corporation | High energy atomic layer etching |
KR102642011B1 (ko) | 2018-03-30 | 2024-02-27 | 램 리써치 코포레이션 | 내화성 금속들 및 다른 고 표면 결합 에너지 재료들의 원자 층 에칭 및 평활화 (smoothing) |
US10566194B2 (en) | 2018-05-07 | 2020-02-18 | Lam Research Corporation | Selective deposition of etch-stop layer for enhanced patterning |
CN109411415B (zh) * | 2018-09-07 | 2021-04-30 | 上海集成电路研发中心有限公司 | 一种半导体结构的形成方法 |
US11921427B2 (en) | 2018-11-14 | 2024-03-05 | Lam Research Corporation | Methods for making hard masks useful in next-generation lithography |
JP7229750B2 (ja) * | 2018-12-14 | 2023-02-28 | 東京エレクトロン株式会社 | プラズマ処理方法およびプラズマ処理装置 |
EP3719576A1 (en) * | 2019-04-04 | 2020-10-07 | IMEC vzw | Resistless pattering mask |
US11837471B2 (en) | 2019-12-17 | 2023-12-05 | Tokyo Electron Limited | Methods of patterning small features |
KR102431292B1 (ko) | 2020-01-15 | 2022-08-09 | 램 리써치 코포레이션 | 포토레지스트 부착 및 선량 감소를 위한 하부층 |
CN113078043A (zh) * | 2021-03-24 | 2021-07-06 | 长鑫存储技术有限公司 | 非晶碳膜的形成方法及半导体结构 |
US11550229B1 (en) * | 2021-06-18 | 2023-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Enhancing lithography operation for manufacturing semiconductor devices |
US20220415648A1 (en) * | 2021-06-28 | 2022-12-29 | Applied Materials, Inc. | Selective carbon deposition on top and bottom surfaces of semiconductor substrates |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010016083A (ja) | 2008-07-02 | 2010-01-21 | Fujitsu Microelectronics Ltd | 半導体装置の製造方法 |
JP2013526061A (ja) | 2010-04-30 | 2013-06-20 | アプライド マテリアルズ インコーポレイテッド | スタック欠陥率を改善するアモルファスカーボン堆積法 |
JP2013145874A (ja) | 2011-12-21 | 2013-07-25 | Imec | Euvフォトレジスト封入 |
JP2016131238A (ja) | 2015-01-12 | 2016-07-21 | ラム リサーチ コーポレーションLam Research Corporation | 原子スケールのald(原子層堆積)プロセスとale(原子層エッチング)プロセスとの統合 |
US20160293405A1 (en) | 2015-04-02 | 2016-10-06 | Tokyo Electron Limited | Trench and hole patterning with euv resists using dual frequency capacitively coupled plasma (ccp) |
JP2016208027A (ja) | 2015-04-24 | 2016-12-08 | ラム リサーチ コーポレーションLam Research Corporation | コバルトのエッチバック |
US20160379824A1 (en) | 2015-06-23 | 2016-12-29 | Lam Research Corporation | Low roughness euv lithography |
US20170069462A1 (en) | 2015-09-04 | 2017-03-09 | Lam Research Corporation | Ale smoothness: in and outside semiconductor industry |
Family Cites Families (145)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3576755A (en) | 1964-09-24 | 1971-04-27 | American Cyanamid Co | Photochromism in plastic film containing inorganic materials |
US3442648A (en) | 1965-06-16 | 1969-05-06 | American Cyanamid Co | Photographic dodging method |
US3513010A (en) | 1966-07-11 | 1970-05-19 | Kalvar Corp | Conversion foil |
US3529963A (en) | 1966-08-23 | 1970-09-22 | Du Pont | Image-yielding elements and processes |
US3720515A (en) | 1971-10-20 | 1973-03-13 | Trw Inc | Microelectronic circuit production |
US4241165A (en) | 1978-09-05 | 1980-12-23 | Motorola, Inc. | Plasma development process for photoresist |
US4328298A (en) | 1979-06-27 | 1982-05-04 | The Perkin-Elmer Corporation | Process for manufacturing lithography masks |
JPS60115222A (ja) | 1983-11-28 | 1985-06-21 | Tokyo Ohka Kogyo Co Ltd | 微細パタ−ン形成方法 |
US5077085A (en) | 1987-03-06 | 1991-12-31 | Schnur Joel M | High resolution metal patterning of ultra-thin films on solid substrates |
US4756794A (en) | 1987-08-31 | 1988-07-12 | The United States Of America As Represented By The Secretary Of The Navy | Atomic layer etching |
US4834834A (en) | 1987-11-20 | 1989-05-30 | Massachusetts Institute Of Technology | Laser photochemical etching using surface halogenation |
US4845053A (en) | 1988-01-25 | 1989-07-04 | John Zajac | Flame ashing process for stripping photoresist |
GEP20002074B (en) | 1992-05-19 | 2000-05-10 | Westaim Tech Inc Ca | Modified Material and Method for its Production |
JPH06326060A (ja) | 1993-05-12 | 1994-11-25 | Hitachi Ltd | 固体表面加工方法 |
EP0635884A1 (de) * | 1993-07-13 | 1995-01-25 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Grabens in einem Substrat und dessen Verwendung in der Smart-Power-Technologie |
TW276353B (ja) | 1993-07-15 | 1996-05-21 | Hitachi Seisakusyo Kk | |
US5534312A (en) | 1994-11-14 | 1996-07-09 | Simon Fraser University | Method for directly depositing metal containing patterned films |
US6007963A (en) | 1995-09-21 | 1999-12-28 | Sandia Corporation | Method for extreme ultraviolet lithography |
US6261938B1 (en) | 1997-02-12 | 2001-07-17 | Quantiscript, Inc. | Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography |
US6348239B1 (en) | 2000-04-28 | 2002-02-19 | Simon Fraser University | Method for depositing metal and metal oxide films and patterned films |
WO2001059825A1 (en) * | 2000-02-08 | 2001-08-16 | Matrix Integrated Systems, Inc. | Method for removing photoresist and residues from semiconductor device surfaces |
US6517602B2 (en) | 2000-03-14 | 2003-02-11 | Hitachi Metals, Ltd | Solder ball and method for producing same |
US20040191423A1 (en) | 2000-04-28 | 2004-09-30 | Ruan Hai Xiong | Methods for the deposition of silver and silver oxide films and patterned films |
US20060001064A1 (en) | 2000-04-28 | 2006-01-05 | Hill Ross H | Methods for the lithographic deposition of ferroelectric materials |
JP2002015971A (ja) | 2000-06-27 | 2002-01-18 | Matsushita Electric Ind Co Ltd | パターン形成方法及び半導体装置の製造装置 |
US6797439B1 (en) | 2001-03-30 | 2004-09-28 | Schott Lithotec Ag | Photomask with back-side anti-reflective layer and method of manufacture |
US6933673B2 (en) | 2001-04-27 | 2005-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Luminescent device and process of manufacturing the same |
US6562700B1 (en) | 2001-05-31 | 2003-05-13 | Lsi Logic Corporation | Process for removal of resist mask over low k carbon-doped silicon oxide dielectric material of an integrated circuit structure, and removal of residues from via etch and resist mask removal |
US6926957B2 (en) | 2001-06-29 | 2005-08-09 | 3M Innovative Properties Company | Water-based ink-receptive coating |
JP2003213001A (ja) | 2001-11-13 | 2003-07-30 | Sekisui Chem Co Ltd | 光反応性組成物 |
WO2003085709A1 (en) | 2002-04-11 | 2003-10-16 | Hoya Corporation | Reflection type mask blank and reflection type mask and production methods for them |
JP3806702B2 (ja) | 2002-04-11 | 2006-08-09 | Hoya株式会社 | 反射型マスクブランクス及び反射型マスク及びそれらの製造方法並びに半導体の製造方法 |
DE10219173A1 (de) | 2002-04-30 | 2003-11-20 | Philips Intellectual Property | Verfahren zur Erzeugung von Extrem-Ultraviolett-Strahlung |
JP2006504136A (ja) | 2002-10-21 | 2006-02-02 | ナノインク インコーポレーティッド | ナノメートル・スケール設計構造、その製造方法および装置、マスク修復、強化、および製造への適用 |
JP4153783B2 (ja) | 2002-12-09 | 2008-09-24 | 株式会社東芝 | X線平面検出器 |
US7067407B2 (en) | 2003-08-04 | 2006-06-27 | Asm International, N.V. | Method of growing electrical conductors |
US7018469B2 (en) | 2003-09-23 | 2006-03-28 | Micron Technology, Inc. | Atomic layer deposition methods of forming silicon dioxide comprising layers |
GB0323805D0 (en) | 2003-10-10 | 2003-11-12 | Univ Southampton | Synthesis of germanium sulphide and related compounds |
US7126128B2 (en) | 2004-02-13 | 2006-10-24 | Kabushiki Kaisha Toshiba | Flat panel x-ray detector |
JP2006253282A (ja) | 2005-03-09 | 2006-09-21 | Ebara Corp | 金属膜のパターン形成方法 |
US20060068173A1 (en) | 2004-09-30 | 2006-03-30 | Ebara Corporation | Methods for forming and patterning of metallic films |
US7885387B2 (en) | 2004-12-17 | 2011-02-08 | Osaka University | Extreme ultraviolet light and X-ray source target and manufacturing method thereof |
KR100607201B1 (ko) | 2005-01-04 | 2006-08-01 | 삼성전자주식회사 | 극자외선 리소그래피 공정에서 웨이퍼 상의 임계 치수편차를 보정하는 방법 |
US7365026B2 (en) | 2005-02-01 | 2008-04-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | CxHy sacrificial layer for cu/low-k interconnects |
US7868304B2 (en) | 2005-02-07 | 2011-01-11 | Asml Netherlands B.V. | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
US7829471B2 (en) * | 2005-07-29 | 2010-11-09 | Applied Materials, Inc. | Cluster tool and method for process integration in manufacturing of a photomask |
US7482280B2 (en) | 2005-08-15 | 2009-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming a lithography pattern |
US20070087581A1 (en) | 2005-09-09 | 2007-04-19 | Varian Semiconductor Equipment Associates, Inc. | Technique for atomic layer deposition |
US20070095367A1 (en) | 2005-10-28 | 2007-05-03 | Yaxin Wang | Apparatus and method for atomic layer cleaning and polishing |
US8664124B2 (en) | 2005-10-31 | 2014-03-04 | Novellus Systems, Inc. | Method for etching organic hardmasks |
US20070117040A1 (en) * | 2005-11-21 | 2007-05-24 | International Business Machines Corporation | Water castable-water strippable top coats for 193 nm immersion lithography |
JP2007207530A (ja) | 2006-01-31 | 2007-08-16 | Toshiba Corp | 異方性導電膜及びこれを用いたx線平面検出器、赤外線平面検出器及び表示装置 |
US7662718B2 (en) * | 2006-03-09 | 2010-02-16 | Micron Technology, Inc. | Trim process for critical dimension control for integrated circuits |
US7416989B1 (en) | 2006-06-30 | 2008-08-26 | Novellus Systems, Inc. | Adsorption based material removal process |
US8465991B2 (en) | 2006-10-30 | 2013-06-18 | Novellus Systems, Inc. | Carbon containing low-k dielectric constant recovery using UV treatment |
US8481423B2 (en) | 2007-09-19 | 2013-07-09 | International Business Machines Corporation | Methods to mitigate plasma damage in organosilicate dielectrics |
EP2203943A4 (en) | 2007-10-12 | 2015-10-14 | Omnipv Inc | SOLAR MODULES WITH INCREASED EFFICIENCIES THROUGH THE USE OF SPECTRAL CONCENTRATORS |
KR100921932B1 (ko) | 2007-10-25 | 2009-10-15 | 포항공과대학교 산학협력단 | 다원자분자를 이용한 패터닝방법 |
US8153348B2 (en) | 2008-02-20 | 2012-04-10 | Applied Materials, Inc. | Process sequence for formation of patterned hard mask film (RFP) without need for photoresist or dry etch |
US7985513B2 (en) | 2008-03-18 | 2011-07-26 | Advanced Micro Devices, Inc. | Fluorine-passivated reticles for use in lithography and methods for fabricating the same |
US20090286402A1 (en) * | 2008-05-13 | 2009-11-19 | Applied Materials, Inc | Method for critical dimension shrink using conformal pecvd films |
JP2009294439A (ja) | 2008-06-05 | 2009-12-17 | Toshiba Corp | レジストパターン形成方法 |
JP5171422B2 (ja) | 2008-06-19 | 2013-03-27 | ルネサスエレクトロニクス株式会社 | 感光性組成物、これを用いたパターン形成方法、半導体素子の製造方法 |
US20090321707A1 (en) | 2008-06-25 | 2009-12-31 | Matthew Metz | Intersubstrate-dielectric nanolaminate layer for improved temperature stability of gate dielectric films |
WO2010007955A1 (ja) | 2008-07-14 | 2010-01-21 | 旭硝子株式会社 | Euvリソグラフィ用反射型マスクブランク、および、euvリソグラフィ用反射型マスク |
US20100022078A1 (en) | 2008-07-24 | 2010-01-28 | Joerg Rockenberger | Aluminum Inks and Methods of Making the Same, Methods for Depositing Aluminum Inks, and Films Formed by Printing and/or Depositing an Aluminum Ink |
JP5085595B2 (ja) | 2008-09-08 | 2012-11-28 | 株式会社東芝 | コアシェル型磁性材料、コアシェル型磁性材料の製造方法、デバイス装置、およびアンテナ装置。 |
US7977235B2 (en) | 2009-02-02 | 2011-07-12 | Tokyo Electron Limited | Method for manufacturing a semiconductor device with metal-containing cap layers |
JP5193121B2 (ja) | 2009-04-17 | 2013-05-08 | 東京エレクトロン株式会社 | レジスト塗布現像方法 |
US7759239B1 (en) | 2009-05-05 | 2010-07-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of reducing a critical dimension of a semiconductor device |
US8114306B2 (en) * | 2009-05-22 | 2012-02-14 | International Business Machines Corporation | Method of forming sub-lithographic features using directed self-assembly of polymers |
US20100304027A1 (en) | 2009-05-27 | 2010-12-02 | Applied Materials, Inc. | Substrate processing system and methods thereof |
JP5813303B2 (ja) | 2009-11-20 | 2015-11-17 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法および基板処理装置 |
US8247332B2 (en) * | 2009-12-04 | 2012-08-21 | Novellus Systems, Inc. | Hardmask materials |
US20110139748A1 (en) | 2009-12-15 | 2011-06-16 | University Of Houston | Atomic layer etching with pulsed plasmas |
US9257274B2 (en) * | 2010-04-15 | 2016-02-09 | Lam Research Corporation | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method |
US8138097B1 (en) | 2010-09-20 | 2012-03-20 | Kabushiki Kaisha Toshiba | Method for processing semiconductor structure and device based on the same |
US8524612B2 (en) | 2010-09-23 | 2013-09-03 | Novellus Systems, Inc. | Plasma-activated deposition of conformal films |
TW201224190A (en) | 2010-10-06 | 2012-06-16 | Applied Materials Inc | Atomic layer deposition of photoresist materials and hard mask precursors |
US20120100308A1 (en) | 2010-10-25 | 2012-04-26 | Asm America, Inc. | Ternary metal alloys with tunable stoichiometries |
US8470711B2 (en) | 2010-11-23 | 2013-06-25 | International Business Machines Corporation | Tone inversion with partial underlayer etch for semiconductor device formation |
US8836082B2 (en) | 2011-01-31 | 2014-09-16 | Brewer Science Inc. | Reversal lithography approach by selective deposition of nanoparticles |
US8778816B2 (en) | 2011-02-04 | 2014-07-15 | Applied Materials, Inc. | In situ vapor phase surface activation of SiO2 |
JP5708522B2 (ja) | 2011-02-15 | 2015-04-30 | 信越化学工業株式会社 | レジスト材料及びこれを用いたパターン形成方法 |
WO2012118847A2 (en) | 2011-02-28 | 2012-09-07 | Inpria Corportion | Solution processible hardmarks for high resolusion lithography |
CN103502506B (zh) | 2011-04-29 | 2016-06-08 | 应用材料公司 | 用于在涂覆工艺中钝化柔性基板的装置和方法 |
FR2975823B1 (fr) * | 2011-05-27 | 2014-11-21 | Commissariat Energie Atomique | Procede de realisation d'un motif a la surface d'un bloc d'un substrat utilisant des copolymeres a bloc |
EP2729844B1 (en) | 2011-07-08 | 2021-07-28 | ASML Netherlands B.V. | Lithographic patterning process and resists to use therein |
US8617411B2 (en) | 2011-07-20 | 2013-12-31 | Lam Research Corporation | Methods and apparatus for atomic layer etching |
US8741775B2 (en) * | 2011-07-20 | 2014-06-03 | Applied Materials, Inc. | Method of patterning a low-K dielectric film |
TWI541377B (zh) | 2011-11-04 | 2016-07-11 | Asm國際股份有限公司 | 形成摻雜二氧化矽薄膜的方法 |
US8808561B2 (en) | 2011-11-15 | 2014-08-19 | Lam Research Coporation | Inert-dominant pulsing in plasma processing systems |
US8809994B2 (en) * | 2011-12-09 | 2014-08-19 | International Business Machines Corporation | Deep isolation trench structure and deep trench capacitor on a semiconductor-on-insulator substrate |
US20130177847A1 (en) | 2011-12-12 | 2013-07-11 | Applied Materials, Inc. | Photoresist for improved lithographic control |
US8883028B2 (en) | 2011-12-28 | 2014-11-11 | Lam Research Corporation | Mixed mode pulsing etching in plasma processing systems |
SG193093A1 (en) | 2012-02-13 | 2013-09-30 | Novellus Systems Inc | Method for etching organic hardmasks |
CN104284776B (zh) | 2012-05-14 | 2016-01-06 | 柯尼卡美能达株式会社 | 气体阻隔性膜、气体阻隔性膜的制造方法及电子设备 |
SG195494A1 (en) | 2012-05-18 | 2013-12-30 | Novellus Systems Inc | Carbon deposition-etch-ash gap fill process |
SG2013083241A (en) | 2012-11-08 | 2014-06-27 | Novellus Systems Inc | Conformal film deposition for gapfill |
JP6035117B2 (ja) | 2012-11-09 | 2016-11-30 | 東京エレクトロン株式会社 | プラズマエッチング方法及びプラズマエッチング装置 |
US8969997B2 (en) * | 2012-11-14 | 2015-03-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Isolation structures and methods of forming the same |
JP5918108B2 (ja) | 2012-11-16 | 2016-05-18 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
US8927989B2 (en) | 2012-11-28 | 2015-01-06 | International Business Machines Corporation | Voltage contrast inspection of deep trench isolation |
US9362133B2 (en) | 2012-12-14 | 2016-06-07 | Lam Research Corporation | Method for forming a mask by etching conformal film on patterned ashable hardmask |
US9337068B2 (en) * | 2012-12-18 | 2016-05-10 | Lam Research Corporation | Oxygen-containing ceramic hard masks and associated wet-cleans |
JP5913077B2 (ja) | 2012-12-18 | 2016-04-27 | 信越化学工業株式会社 | ポジ型レジスト材料及びこれを用いたパターン形成方法 |
US9304396B2 (en) * | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
US9607904B2 (en) | 2013-03-11 | 2017-03-28 | Intermolecular, Inc. | Atomic layer deposition of HfAlC as a metal gate workfunction material in MOS devices |
US9632411B2 (en) | 2013-03-14 | 2017-04-25 | Applied Materials, Inc. | Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor |
US8940646B1 (en) | 2013-07-12 | 2015-01-27 | Lam Research Corporation | Sequential precursor dosing in an ALD multi-station/batch reactor |
US9362163B2 (en) | 2013-07-30 | 2016-06-07 | Lam Research Corporation | Methods and apparatuses for atomic layer cleaning of contacts and vias |
KR102399752B1 (ko) | 2013-09-04 | 2022-05-20 | 도쿄엘렉트론가부시키가이샤 | 유도 자기 조립용 화학 템플릿을 생성하기 위한 경화 포토레지스트의 자외선을 이용한 박리 |
US9372402B2 (en) | 2013-09-13 | 2016-06-21 | The Research Foundation For The State University Of New York | Molecular organometallic resists for EUV |
US9405204B2 (en) | 2013-09-18 | 2016-08-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of overlay in extreme ultra-violet (EUV) lithography |
US9257431B2 (en) | 2013-09-25 | 2016-02-09 | Micron Technology, Inc. | Memory cell with independently-sized electrode |
JP6347695B2 (ja) | 2013-11-20 | 2018-06-27 | 東京エレクトロン株式会社 | 被エッチング層をエッチングする方法 |
KR102306612B1 (ko) | 2014-01-31 | 2021-09-29 | 램 리써치 코포레이션 | 진공-통합된 하드마스크 프로세스 및 장치 |
WO2015146749A1 (ja) | 2014-03-26 | 2015-10-01 | 東レ株式会社 | 半導体装置の製造方法及び半導体装置 |
US10685846B2 (en) | 2014-05-16 | 2020-06-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor integrated circuit fabrication with pattern-reversing process |
US9773683B2 (en) | 2014-06-09 | 2017-09-26 | American Air Liquide, Inc. | Atomic layer or cyclic plasma etching chemistries and processes |
GB201412201D0 (en) | 2014-07-09 | 2014-08-20 | Isis Innovation | Two-step deposition process |
US9768033B2 (en) | 2014-07-10 | 2017-09-19 | Tokyo Electron Limited | Methods for high precision etching of substrates |
US9520294B2 (en) | 2014-08-29 | 2016-12-13 | Applied Materials, Inc. | Atomic layer etch process using an electron beam |
EP3230294B1 (en) | 2014-10-23 | 2021-06-30 | Inpria Corporation | Organometallic solution based high resolution patterning compositions |
US9609730B2 (en) * | 2014-11-12 | 2017-03-28 | Lam Research Corporation | Adjustment of VUV emission of a plasma via collisional resonant energy transfer to an energy absorber gas |
US9551924B2 (en) | 2015-02-12 | 2017-01-24 | International Business Machines Corporation | Structure and method for fixing phase effects on EUV mask |
US9806252B2 (en) | 2015-04-20 | 2017-10-31 | Lam Research Corporation | Dry plasma etch method to pattern MRAM stack |
US20160314964A1 (en) | 2015-04-21 | 2016-10-27 | Lam Research Corporation | Gap fill using carbon-based films |
SG10201604524PA (en) | 2015-06-05 | 2017-01-27 | Lam Res Corp | ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS |
US9659771B2 (en) * | 2015-06-11 | 2017-05-23 | Applied Materials, Inc. | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning |
US9620376B2 (en) | 2015-08-19 | 2017-04-11 | Lam Research Corporation | Self limiting lateral atomic layer etch |
EP4273625A3 (en) | 2015-10-13 | 2024-02-28 | Inpria Corporation | Organotin oxide hydroxide patterning compositions, precursors, and patterning |
KR20170050056A (ko) | 2015-10-29 | 2017-05-11 | 삼성전자주식회사 | 반도체 소자의 패턴 형성 방법 |
US9996004B2 (en) | 2015-11-20 | 2018-06-12 | Lam Research Corporation | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks |
US9633838B2 (en) | 2015-12-28 | 2017-04-25 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Vapor deposition of silicon-containing films using penta-substituted disilanes |
US9991128B2 (en) | 2016-02-05 | 2018-06-05 | Lam Research Corporation | Atomic layer etching in continuous plasma |
US10269566B2 (en) | 2016-04-29 | 2019-04-23 | Lam Research Corporation | Etching substrates using ale and selective deposition |
US9824893B1 (en) | 2016-06-28 | 2017-11-21 | Lam Research Corporation | Tin oxide thin film spacers in semiconductor device manufacturing |
US10566212B2 (en) | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
US9997371B1 (en) | 2017-04-24 | 2018-06-12 | Lam Research Corporation | Atomic layer etch methods and hardware for patterning applications |
US10832909B2 (en) | 2017-04-24 | 2020-11-10 | Lam Research Corporation | Atomic layer etch, reactive precursors and energetic sources for patterning applications |
US20180308687A1 (en) | 2017-04-24 | 2018-10-25 | Lam Research Corporation | Euv photopatterning and selective deposition for negative pattern mask |
US10494715B2 (en) | 2017-04-28 | 2019-12-03 | Lam Research Corporation | Atomic layer clean for removal of photoresist patterning scum |
US10796912B2 (en) | 2017-05-16 | 2020-10-06 | Lam Research Corporation | Eliminating yield impact of stochastics in lithography |
TW202016279A (zh) | 2018-10-17 | 2020-05-01 | 美商英培雅股份有限公司 | 圖案化有機金屬光阻及圖案化的方法 |
-
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010016083A (ja) | 2008-07-02 | 2010-01-21 | Fujitsu Microelectronics Ltd | 半導体装置の製造方法 |
JP2013526061A (ja) | 2010-04-30 | 2013-06-20 | アプライド マテリアルズ インコーポレイテッド | スタック欠陥率を改善するアモルファスカーボン堆積法 |
JP2013145874A (ja) | 2011-12-21 | 2013-07-25 | Imec | Euvフォトレジスト封入 |
JP2016131238A (ja) | 2015-01-12 | 2016-07-21 | ラム リサーチ コーポレーションLam Research Corporation | 原子スケールのald(原子層堆積)プロセスとale(原子層エッチング)プロセスとの統合 |
US20160293405A1 (en) | 2015-04-02 | 2016-10-06 | Tokyo Electron Limited | Trench and hole patterning with euv resists using dual frequency capacitively coupled plasma (ccp) |
JP2016208027A (ja) | 2015-04-24 | 2016-12-08 | ラム リサーチ コーポレーションLam Research Corporation | コバルトのエッチバック |
US20160379824A1 (en) | 2015-06-23 | 2016-12-29 | Lam Research Corporation | Low roughness euv lithography |
US20170069462A1 (en) | 2015-09-04 | 2017-03-09 | Lam Research Corporation | Ale smoothness: in and outside semiconductor industry |
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