JP7157822B2 - 試料保持具 - Google Patents
試料保持具 Download PDFInfo
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- JP7157822B2 JP7157822B2 JP2020557832A JP2020557832A JP7157822B2 JP 7157822 B2 JP7157822 B2 JP 7157822B2 JP 2020557832 A JP2020557832 A JP 2020557832A JP 2020557832 A JP2020557832 A JP 2020557832A JP 7157822 B2 JP7157822 B2 JP 7157822B2
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- hole
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- 230000002093 peripheral effect Effects 0.000 claims description 45
- 229920005989 resin Polymers 0.000 claims description 29
- 239000011347 resin Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- 239000007789 gas Substances 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
1a 第1面
1b 第2面
2 支持体
2a 第1面
2b 第2面
3 接合材
4 環状部材
5 多孔質部材
6 吸着電極
7 孔部
7a 内周面
8 凹所
9 貫通孔
10 スリーブ
10a 外周面
11 凹部
12 樹脂部材
100 試料保持具
Claims (7)
- 一方の主面が試料保持面であって、該一方の主面から他方の主面まで繋がる流路を有する板状の基体と、
一方の主面が前記基体の前記他方の主面に接合されて、該一方の主面に開口する孔部を有する支持体と、
該孔部に位置し、前記流路に連続する貫通孔を有する筒状部材と、
該筒状部材の外周面と前記孔部の内周面との間に位置する環状部材と、を備えており、
該環状部材は、前記筒状部材を囲み、該筒状部材を前記支持体に固定しており、
前記孔部の前記内周面は、前記支持体の前記一方の主面に開口する部位から前記環状部材に接する部位まで、樹脂部材で覆われていることを特徴とする試料保持具。 - 前記環状部材は、前記筒状部材および前記支持体よりも弾性率が小さいことを特徴とする請求項1に記載の試料保持具。
- 前記筒状部材は、前記外周面に凹部を有し、
前記環状部材は、前記凹部に位置していることを特徴とする請求項1または請求項2に記載の試料保持具。 - 前記孔部の前記内周面と前記筒状部材の前記外周面との間には隙間があることを特徴とする請求項1~請求項3のいずれかに記載の試料保持具。
- 前記孔部の前記内周面は、全体が前記樹脂部材で覆われていることを特徴とする請求項1~請求項4のいずれかに記載の試料保持具。
- 前記基体と前記支持体とは、前記樹脂部材と同じ材料からなる接合材によって接合されていることを特徴とする請求項1~請求項5のいずれかに記載の試料保持具。
- 前記筒状部材および前記環状部材は、前記樹脂部材によって固定されており、
該樹脂部材は、前記筒状部材および前記環状部材よりも弾性率が小さいことを特徴とする請求項1~請求項6のいずれかに記載の試料保持具。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018225129 | 2018-11-30 | ||
JP2018225129 | 2018-11-30 | ||
PCT/JP2019/046640 WO2020111194A1 (ja) | 2018-11-30 | 2019-11-28 | 試料保持具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020111194A1 JPWO2020111194A1 (ja) | 2021-10-07 |
JP7157822B2 true JP7157822B2 (ja) | 2022-10-20 |
Family
ID=70853847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020557832A Active JP7157822B2 (ja) | 2018-11-30 | 2019-11-28 | 試料保持具 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220028719A1 (ja) |
JP (1) | JP7157822B2 (ja) |
KR (1) | KR102564196B1 (ja) |
CN (1) | CN113169108A (ja) |
WO (1) | WO2020111194A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230170241A1 (en) * | 2021-11-29 | 2023-06-01 | Applied Materials, Inc. | Porous plug for electrostatic chuck gas delivery |
WO2023189954A1 (ja) * | 2022-03-29 | 2023-10-05 | 京セラ株式会社 | 試料保持具 |
JP7356620B1 (ja) | 2022-08-12 | 2023-10-04 | 日本碍子株式会社 | 半導体製造装置用部材 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002313781A (ja) | 2001-04-11 | 2002-10-25 | Sumitomo Electric Ind Ltd | 基板処理装置 |
JP2016028448A (ja) | 2015-10-22 | 2016-02-25 | 東京エレクトロン株式会社 | 載置台、プラズマ処理装置及び載置台の製造方法 |
WO2016132909A1 (ja) | 2015-02-18 | 2016-08-25 | 住友大阪セメント株式会社 | 静電チャック装置及び半導体製造装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4095842B2 (ja) | 2002-06-26 | 2008-06-04 | 日本特殊陶業株式会社 | 静電チャック |
KR101132632B1 (ko) * | 2004-12-07 | 2012-04-02 | 주성엔지니어링(주) | 정전척 |
CN2912837Y (zh) * | 2005-12-19 | 2007-06-20 | 林珍如 | 晶片清洗设备的清洗刷夹持装置 |
JP4951536B2 (ja) | 2007-03-27 | 2012-06-13 | 東京エレクトロン株式会社 | 基板載置台及び基板処理装置 |
JP3155802U (ja) * | 2009-09-17 | 2009-12-03 | 日本碍子株式会社 | ウエハー載置装置 |
JP5734173B2 (ja) * | 2011-12-16 | 2015-06-10 | 株式会社コスメック | クランプ装置 |
JP5829509B2 (ja) * | 2011-12-20 | 2015-12-09 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
US9412635B2 (en) | 2012-02-08 | 2016-08-09 | Tokyo Electron Limited | Electrostatic chuck device |
JP6006972B2 (ja) * | 2012-04-26 | 2016-10-12 | 新光電気工業株式会社 | 静電チャック |
JP6056673B2 (ja) * | 2013-06-14 | 2017-01-11 | 東京エレクトロン株式会社 | ガス処理装置 |
JP6584832B2 (ja) * | 2014-06-27 | 2019-10-02 | 株式会社堀場製作所 | グロー放電発光分析装置、試料ホルダ及びグロー放電発生方法 |
US10923381B2 (en) * | 2016-01-19 | 2021-02-16 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck device |
WO2023189954A1 (ja) * | 2022-03-29 | 2023-10-05 | 京セラ株式会社 | 試料保持具 |
-
2019
- 2019-11-28 US US17/296,719 patent/US20220028719A1/en active Pending
- 2019-11-28 CN CN201980077521.8A patent/CN113169108A/zh active Pending
- 2019-11-28 WO PCT/JP2019/046640 patent/WO2020111194A1/ja active Application Filing
- 2019-11-28 JP JP2020557832A patent/JP7157822B2/ja active Active
- 2019-11-28 KR KR1020217015771A patent/KR102564196B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002313781A (ja) | 2001-04-11 | 2002-10-25 | Sumitomo Electric Ind Ltd | 基板処理装置 |
WO2016132909A1 (ja) | 2015-02-18 | 2016-08-25 | 住友大阪セメント株式会社 | 静電チャック装置及び半導体製造装置 |
JP2016028448A (ja) | 2015-10-22 | 2016-02-25 | 東京エレクトロン株式会社 | 載置台、プラズマ処理装置及び載置台の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN113169108A (zh) | 2021-07-23 |
US20220028719A1 (en) | 2022-01-27 |
KR102564196B1 (ko) | 2023-08-07 |
JPWO2020111194A1 (ja) | 2021-10-07 |
WO2020111194A1 (ja) | 2020-06-04 |
KR20210082217A (ko) | 2021-07-02 |
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