JP7034706B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7034706B2 JP7034706B2 JP2017250328A JP2017250328A JP7034706B2 JP 7034706 B2 JP7034706 B2 JP 7034706B2 JP 2017250328 A JP2017250328 A JP 2017250328A JP 2017250328 A JP2017250328 A JP 2017250328A JP 7034706 B2 JP7034706 B2 JP 7034706B2
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- General Physics & Mathematics (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
第1の実施形態の半導体装置は、配線板と、配線板に固定され、表面に第1の表面膜を有する第1の半導体チップと、配線板との間に第1の半導体チップを挟んで設けられ、表面に第2の表面膜を有する第2の半導体チップと、第1の半導体チップと第2の半導体チップとの間に設けられ、第1の面と第1の面の反対側に位置する第2の面とを有し、第2の面が第1の半導体チップに対向し、第1の面の側に第2の半導体チップを支持する支持板と、配線板と支持板との間に設けられたスペーサーと、第1の面の上に設けられ、第2の表面膜と同一材料の表面層と、第2の半導体チップ、及び、支持板を覆い、第2の表面膜及び表面層に接する封止樹脂と、を備える。
第2の実施形態の半導体装置は、支持板の第1の面の側に支持され、表面に第2の表面膜と同一材料の第3の表面膜を有する第3の半導体チップを、更に有し、表面層は、第2の半導体チップと第3の半導体チップとの間の領域に設けられ、封止樹脂は第3の表面膜に接する点で、第1の実施形態の半導体装置と異なっている。以下、第1の実施形態と重複する内容については一部記述を省略する。
第3の実施形態の半導体装置は、支持板と第2の半導体チップとの間に設けられ、支持板の第1の面の側に支持された第4の半導体チップと、支持板と第3の半導体チップとの間に設けられ、支持板の第1の面の側に支持された第5の半導体チップと、を更に備え、第4の半導体チップと第5の半導体チップとの距離は、第2の半導体チップと第3の半導体チップとの距離よりも大きい点で、第2の実施形態の半導体装置と異なっている。以下、第2の実施形態と重複する内容については一部記述を省略する。
第4の実施形態の半導体装置は、支持板と表面層との間に窒化シリコン膜を更に備え、支持板の材料はシリコンであり、表面層の材料はポリイミドである点で、第3の実施形態の半導体装置と異なっている。以下、第3の実施形態と重複する内容については一部記述を省略する。
第5の実施形態の半導体装置は、表面層が支持板の第1の面、第2の面、及び、側面を覆う点で、第3の実施形態の半導体装置と異なっている。以下、第3の実施形態と重複する内容については一部記述を省略する。
第6の実施形態の半導体装置は、スペーサーが第1の半導体チップを覆う点で、第3の実施形態の半導体装置と異なっている。以下、第3の実施形態と重複する内容については一部記述を省略する。
10a 第1の表面膜
11 第1のメモリチップ(第2の半導体チップ)
11a 第2の表面膜
12 第2のメモリチップ(第3の半導体チップ)
12a 第3の表面膜
13 第3のメモリチップ(第4の半導体チップ)
13a 第4の表面膜
14 第4のメモリチップ(第5の半導体チップ)
14a 第5の表面膜
20 プリント基板(配線板)
22 支持板
22a 第1の面
22b 第2の面
24 スペーサー
26 表面層
28 封止樹脂
31 第1のボンディングワイヤ
32 第2のボンディングワイヤ
70 窒化シリコン膜
100 半導体メモリ(半導体装置)
200 半導体メモリ(半導体装置)
300 半導体メモリ(半導体装置)
400 半導体メモリ(半導体装置)
500 半導体メモリ(半導体装置)
600 半導体メモリ(半導体装置)
Claims (10)
- 配線板と、
前記配線板に固定され、表面に第1の表面膜を有する第1の半導体チップと、
前記配線板との間に前記第1の半導体チップを挟んで設けられ、表面に第2の表面膜を有する第2の半導体チップと、
前記第2の半導体チップと前記配線板とを接続するボンディングワイヤと、
前記第1の半導体チップと前記第2の半導体チップとの間に設けられ、第1の面と前記第1の面の反対側に位置する第2の面とを有し、前記第2の面が前記第1の半導体チップに対向し、前記第1の面の側に前記第2の半導体チップを支持し、前記ボンディングワイヤが接続されていない支持板と、
前記配線板と前記支持板との間に設けられたスペーサーと、
前記第1の面の上に設けられ、前記第2の表面膜と同一材料の表面層と、
前記第2の半導体チップ、及び、前記支持板を覆い、前記第2の表面膜及び前記表面層に接する封止樹脂と、
を備える半導体装置。 - 配線板と、
前記配線板に固定され、表面に第1の表面膜を有する第1の半導体チップと、
前記配線板との間に前記第1の半導体チップを挟んで設けられ、表面に第2の表面膜を有する第2の半導体チップと、
前記第1の半導体チップと前記第2の半導体チップとの間に設けられ、第1の面と前記第1の面の反対側に位置する第2の面とを有し、前記第2の面が前記第1の半導体チップに対向し、前記第1の面の側に前記第2の半導体チップを支持する支持板と、
前記配線板と前記支持板との間に設けられたスペーサーと、
前記第1の面の上に設けられ、前記第2の表面膜と同一材料の表面層と、
前記第2の半導体チップ、及び、前記支持板を覆い、前記第2の表面膜及び前記表面層に接する封止樹脂と、
前記支持板の前記第1の面の側に支持され、表面に前記第2の表面膜と同一材料の第3の表面膜を有する第3の半導体チップと、
前記支持板と前記第2の半導体チップとの間に設けられ、前記支持板の前記第1の面の側に支持された第4の半導体チップと、
前記支持板と前記第3の半導体チップとの間に設けられ、前記支持板の前記第1の面の側に支持された第5の半導体チップと、
を備え、
前記表面層は、前記第2の半導体チップと前記第3の半導体チップとの間の領域に設けられ、
前記封止樹脂は前記第3の表面膜に接し、
前記第4の半導体チップと前記第5の半導体チップとの距離は、前記第2の半導体チップと前記第3の半導体チップとの距離よりも大きい、半導体装置。 - 前記第1の表面膜と前記表面層とが同一材料である請求項1又は請求項2記載の半導体装置。
- 前記支持板の前記第1の面の側に支持され、表面に前記第2の表面膜と同一材料の第3の表面膜を有する第3の半導体チップを、更に有し、
前記表面層は、前記第2の半導体チップと前記第3の半導体チップとの間の領域に設けられ、
前記封止樹脂は前記第3の表面膜に接する請求項1記載の半導体装置。 - 前記第1の半導体チップと前記配線板とを電気的に接続する第1のボンディングワイヤと、
前記第2の半導体チップと前記配線板とを電気的に接続する第2のボンディングワイヤと、
を更に備える請求項2記載の半導体装置。 - 前記第1の半導体チップのサイズは、前記第2の半導体チップのサイズよりも小さい請求項1ないし請求項5いずれか一項記載の半導体装置。
- 前記表面層の材料はポリイミド又は窒化シリコンである請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記支持板と前記表面層との間に窒化シリコン膜を更に備え、前記支持板の材料はシリコンであり、前記表面層の材料はポリイミドである請求項1ないし請求項7いずれか一項記載の半導体装置。
- 前記スペーサーが前記第1の半導体チップを覆う請求項1ないし請求項8いずれか一項記載の半導体装置。
- 前記スペーサーの材料は、前記封止樹脂と異なる材料の樹脂である請求項9記載の半導体装置。
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