JP6868982B2 - 隆起部が設けられている半導体を基板の基板位置に取り付けるための方法 - Google Patents
隆起部が設けられている半導体を基板の基板位置に取り付けるための方法 Download PDFInfo
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- JP6868982B2 JP6868982B2 JP2016156305A JP2016156305A JP6868982B2 JP 6868982 B2 JP6868982 B2 JP 6868982B2 JP 2016156305 A JP2016156305 A JP 2016156305A JP 2016156305 A JP2016156305 A JP 2016156305A JP 6868982 B2 JP6868982 B2 JP 6868982B2
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- 239000004065 semiconductor Substances 0.000 title claims description 25
- 238000000034 method Methods 0.000 title claims description 19
- 230000003287 optical effect Effects 0.000 claims description 42
- 238000012546 transfer Methods 0.000 claims description 20
- 230000004907 flux Effects 0.000 claims description 16
- 238000013459 approach Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 10
- 238000009736 wetting Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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- H01L2924/0001—Technical content checked by a classifier
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH12482015 | 2015-08-31 | ||
CH01248/15 | 2015-08-31 | ||
CH01404/15 | 2015-09-28 | ||
CH01404/15A CH711536B1 (de) | 2015-08-31 | 2015-09-28 | Verfahren für die Montage von mit Bumps versehenen Halbleiterchips auf Substratplätzen eines Substrats. |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017050533A JP2017050533A (ja) | 2017-03-09 |
JP2017050533A5 JP2017050533A5 (enrdf_load_stackoverflow) | 2019-09-05 |
JP6868982B2 true JP6868982B2 (ja) | 2021-05-12 |
Family
ID=58264157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016156305A Active JP6868982B2 (ja) | 2015-08-31 | 2016-08-09 | 隆起部が設けられている半導体を基板の基板位置に取り付けるための方法 |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP6868982B2 (enrdf_load_stackoverflow) |
KR (1) | KR102597252B1 (enrdf_load_stackoverflow) |
CN (1) | CN106486400B (enrdf_load_stackoverflow) |
CH (1) | CH711536B1 (enrdf_load_stackoverflow) |
MY (1) | MY176667A (enrdf_load_stackoverflow) |
SG (1) | SG10201606167WA (enrdf_load_stackoverflow) |
TW (1) | TWI700767B (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7164314B2 (ja) * | 2017-04-28 | 2022-11-01 | ベシ スウィッツァーランド エージー | 部品を基板上に搭載する装置及び方法 |
CN109079367B (zh) * | 2018-07-23 | 2020-07-24 | 中电科技(合肥)博微信息发展有限责任公司 | 一种芯片智能焊接方法 |
JP7582928B2 (ja) * | 2021-11-25 | 2024-11-13 | キヤノン株式会社 | 接合装置および接合方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
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US5372294A (en) * | 1994-01-27 | 1994-12-13 | Motorola, Inc. | Method of preparing a component for automated placement |
JP2833996B2 (ja) * | 1994-05-25 | 1998-12-09 | 日本電気株式会社 | フレキシブルフィルム及びこれを有する半導体装置 |
JPH10209208A (ja) * | 1997-01-23 | 1998-08-07 | Hitachi Ltd | 半導体製造方法および装置 |
US7842599B2 (en) * | 1997-05-27 | 2010-11-30 | Wstp, Llc | Bumping electronic components using transfer substrates |
JP2001060795A (ja) * | 1999-08-20 | 2001-03-06 | Matsushita Electric Ind Co Ltd | 電子部品実装装置 |
US7033842B2 (en) * | 2002-03-25 | 2006-04-25 | Matsushita Electric Industrial Co., Ltd. | Electronic component mounting apparatus and electronic component mounting method |
JP4334892B2 (ja) * | 2003-03-20 | 2009-09-30 | パナソニック株式会社 | 部品実装方法 |
JP4516354B2 (ja) * | 2004-05-17 | 2010-08-04 | パナソニック株式会社 | 部品供給方法 |
JP2007173801A (ja) * | 2005-12-22 | 2007-07-05 | Unaxis Internatl Trading Ltd | フリップチップを基板に取り付ける方法 |
JP2008168225A (ja) * | 2007-01-12 | 2008-07-24 | Fujifilm Corp | スリット塗布方法及び装置、並びにカラーフィルタの製造方法 |
CH698718B1 (de) * | 2007-01-31 | 2009-10-15 | Oerlikon Assembly Equipment Ag | Vorrichtung für die Montage eines Flipchips auf einem Substrat. |
CH698720B1 (de) * | 2007-02-14 | 2009-10-15 | Oerlikon Assembly Equipment Ag | Verfahren und Montageautomat für die Montage von Halbleiterchips als Flipchip auf einem Substrat. |
CH698334B1 (de) * | 2007-10-09 | 2011-07-29 | Esec Ag | Verfahren für die Entnahme und Montage von auf einem Wafertisch bereitgestellten Halbleiterchips auf einem Substrat. |
JP5030843B2 (ja) * | 2008-04-14 | 2012-09-19 | 芝浦メカトロニクス株式会社 | 電子部品の実装装置及び実装方法 |
JP4983737B2 (ja) * | 2008-06-30 | 2012-07-25 | 株式会社日立プラントテクノロジー | ハンダボール検査リペア装置およびハンダボール検査リペア方法 |
JP4766144B2 (ja) * | 2009-04-08 | 2011-09-07 | パナソニック株式会社 | 電子部品実装装置 |
KR101120129B1 (ko) * | 2009-08-31 | 2012-03-23 | (주) 에스에스피 | 기준값을 응용한 작업위치 자동 조정방법 및 이를 위한 자동화 장비 |
JP2011181675A (ja) * | 2010-03-01 | 2011-09-15 | Nec Corp | 回路部品の実装装置 |
CH705802B1 (de) * | 2011-11-25 | 2016-04-15 | Esec Ag | Einrichtung für die Montage von Halbleiterchips. |
JP6000626B2 (ja) * | 2012-05-01 | 2016-10-05 | 新光電気工業株式会社 | 電子装置の製造方法及び電子部品搭載装置 |
JP6391225B2 (ja) | 2013-09-13 | 2018-09-19 | ファスフォードテクノロジ株式会社 | フリップチップボンダ及びフリップチップボンディング方法 |
JP6200737B2 (ja) * | 2013-09-17 | 2017-09-20 | ファスフォードテクノロジ株式会社 | ダイボンダ用ディッピング機構及びフリップチップボンダ |
JP2015076411A (ja) * | 2013-10-04 | 2015-04-20 | 株式会社日立ハイテクインスツルメンツ | ダイボンダ |
JP6324772B2 (ja) * | 2014-03-14 | 2018-05-16 | ファスフォードテクノロジ株式会社 | ダイボンダ用ディッピング機構及びフリップチップボンダ |
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- 2016-08-18 CN CN201610754833.6A patent/CN106486400B/zh active Active
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JP2017050533A (ja) | 2017-03-09 |
TW201735227A (zh) | 2017-10-01 |
CH711536B1 (de) | 2019-02-15 |
MY176667A (en) | 2020-08-19 |
CN106486400A (zh) | 2017-03-08 |
TWI700767B (zh) | 2020-08-01 |
KR102597252B1 (ko) | 2023-11-01 |
CN106486400B (zh) | 2021-10-29 |
CH711536A1 (de) | 2017-03-15 |
SG10201606167WA (en) | 2017-03-30 |
KR20170026136A (ko) | 2017-03-08 |
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