JP6849368B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP6849368B2 JP6849368B2 JP2016194722A JP2016194722A JP6849368B2 JP 6849368 B2 JP6849368 B2 JP 6849368B2 JP 2016194722 A JP2016194722 A JP 2016194722A JP 2016194722 A JP2016194722 A JP 2016194722A JP 6849368 B2 JP6849368 B2 JP 6849368B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
- F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Description
空気が上方から下方に流れる処理室と、
前記処理室内に設けられ、被処理面を有する基板を支持する支持部と、
前記支持部の上方を避けて設けられ、加熱用の光を出射する加熱部と、
前記加熱部に対し、前記支持部を挟んで反対側に、かつ前記支持部の上方を避けて設けられ、前記加熱部により出射されて前記支持部の上方を通過した前記光を、前記支持部により支持された前記基板の被処理面に導く光学部材と、
を備え、
前記処理室は複数設けられ、隣接する二つの処理室には、前記加熱部から出射された前記光を通過させる透過部がそれぞれ設けられ、一方の前記処理室に設けられる前記透過部と、他方の前記処理室に設けられる前記透過部との間に、前記二つの処理室で共用される前記加熱部が配置されていることを特徴とする。
第1の実施形態について図1から図3を参照して説明する。
図1に示すように、第1の実施形態に係る基板処理装置10は、複数の開閉ユニット11と、第1の搬送ロボット12と、バッファユニット13と、第2の搬送ロボット14と、複数の基板処理部15と、装置付帯ユニット16とを備えている。
図2に示すように、基板処理部15は、処理室20と、カップ30と、支持部40と、回転機構50と、処理液供給部60と、溶媒供給部70と、加熱部80と、光学部材90とを備えている。
次に、前述の基板処理装置10が行う基板処理の流れについて説明する。なお、各処理室20では、同じ基板処理(薬液処理、リンス処理及び乾燥処理)が行われる。
第2の実施形態について図4及び図5を参照して説明する。なお、第2の実施形態では、第1の実施形態との相違点(隣接する二つの基板処理部による加熱部の共用)について説明し、その他の説明は省略する。
第3の実施形態について図6を参照して説明する。なお、第3の実施形態では、第1の実施形態との相違点(光学部材移動機構)について説明し、その他の説明は省略する。
第4の実施形態について図7を参照して説明する。なお、第4の実施形態では、第3の実施形態との相違点(光学部材移動機構)について説明し、その他の説明は省略する。
第5の実施形態について図8を参照して説明する。なお、第5の実施形態では、第1の実施形態との相違点(清掃部)について説明し、その他の説明は省略する。
第6の実施形態について図9を参照して説明する。なお、第6の実施形態では、第1の実施形態との相違点(光量抑制部材)について説明し、その他の説明は省略する。
次に、前述の光量抑制部材21aの変形例である光量抑制部材21bについて図10を参照して説明する。
前述の各実施形態においては、加熱部80を処理室20外に設けることを例示したが、これに限るものではなく、例えば、加熱部80を処理室20内の支持部40の上方を避けて処理室20内に設けるようにしても良い。この場合には、加熱部80を洗浄する洗浄部を設けることも可能である。また、加熱部80を移動させる移動機構を設けることも可能である。例えば、加熱部80による加熱処理を行わない場合には、加熱部80を移動させて支持部40上の基板Wの被処理面Waよりも低い位置に待機させることもできる。
15 基板処理部
20 処理室
21 フィルタ
21a 光量抑制部材
21b 光量抑制部材
23 光遮断部材
40 支持部
80 加熱部
90 光学部材
92 光学部材移動機構
93 光学部材移動機構
94 清掃部
W 基板
Wa 被処理面
Claims (9)
- 空気が上方から下方に流れる処理室と、
前記処理室内に設けられ、被処理面を有する基板を支持する支持部と、
前記支持部の上方を避けて設けられ、加熱用の光を出射する加熱部と、
前記加熱部に対し、前記支持部を挟んで反対側に、かつ前記支持部の上方を避けて設けられ、前記加熱部により出射されて前記支持部の上方を通過した前記光を、前記支持部により支持された前記基板の被処理面に導く光学部材と、
を備え、
前記処理室は複数設けられ、隣接する二つの処理室には、前記加熱部から出射された前記光を通過させる透過部がそれぞれ設けられ、一方の前記処理室に設けられる前記透過部と、他方の前記処理室に設けられる前記透過部との間に、前記二つの処理室で共用される前記加熱部が配置されていることを特徴とする基板処理装置。 - 前記光学部材を移動させる光学部材移動機構をさらに備えることを特徴とする請求項1に記載の基板処理装置。
- 前記光学部材移動機構は、前記支持部により支持された前記基板の被処理面の端から端まで前記光を照射するように前記光学部材を移動させることを特徴とする請求項2記載の基板処理装置。
- 前記光学部材を清掃する清掃部をさらに備えることを特徴とする請求項1から請求項3のいずれか一項に記載の基板処理装置。
- 前記清掃部は、前記光学部材の表面に流体を吐出することを特徴とする請求項4に記載の基板処理装置。
- 前記処理室の上面に設けられ、前記処理室内に清浄空気を取り込むためのフィルタと、
前記加熱部により出射された前記光が前記フィルタに入射する光量を抑制する光量抑制部材と、
をさらに備えることを特徴とする請求項1から請求項5のいずれか一項に記載の基板処理装置。 - 前記光量抑制部材は、空気が通過することが可能に、前記フィルタの下面全体を覆う板であることを特徴とする請求項6に記載の基板処理装置。
- 前記複数の処理室に個別に設けられ、前記加熱部により出射されて前記光学部材に進む前記光を遮る位置に移動することが可能に形成された光遮断部材をさらに備えることを特徴とする請求項1から請求項7のいずれか一項に記載の基板処理装置。
- 前記光遮断部材は、前記光を遮る位置において前記加熱部に対向して、前記加熱部により出射された前記光を前記加熱部側に反射するリフレクタであることを特徴とする請求項8に記載の基板処理装置。
Priority Applications (6)
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JP2016194722A JP6849368B2 (ja) | 2016-09-30 | 2016-09-30 | 基板処理装置 |
TW106130930A TWI677018B (zh) | 2016-09-30 | 2017-09-11 | 基板處理裝置 |
CN201710879504.9A CN107887300B (zh) | 2016-09-30 | 2017-09-26 | 基板处理装置 |
KR1020170125882A KR101988127B1 (ko) | 2016-09-30 | 2017-09-28 | 기판 처리 장치 |
EP17193691.7A EP3301707A1 (en) | 2016-09-30 | 2017-09-28 | Substrate processing apparatus |
US15/720,928 US10460961B2 (en) | 2016-09-30 | 2017-09-29 | Substrate processing apparatus |
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JP2016194722A JP6849368B2 (ja) | 2016-09-30 | 2016-09-30 | 基板処理装置 |
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JP2018056529A5 JP2018056529A5 (ja) | 2020-05-07 |
JP6849368B2 true JP6849368B2 (ja) | 2021-03-24 |
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US (1) | US10460961B2 (ja) |
EP (1) | EP3301707A1 (ja) |
JP (1) | JP6849368B2 (ja) |
KR (1) | KR101988127B1 (ja) |
CN (1) | CN107887300B (ja) |
TW (1) | TWI677018B (ja) |
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JP6849368B2 (ja) * | 2016-09-30 | 2021-03-24 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
JP2019054112A (ja) * | 2017-09-15 | 2019-04-04 | 株式会社Screenホールディングス | 基板乾燥方法および基板乾燥装置 |
KR102187631B1 (ko) | 2018-03-29 | 2020-12-07 | 현대모비스 주식회사 | 차량의 제동 장치 및 제동 제어 방법 |
CN111250455A (zh) * | 2018-11-30 | 2020-06-09 | 夏泰鑫半导体(青岛)有限公司 | 晶圆清洗装置 |
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US10460961B2 (en) | 2019-10-29 |
JP2018056529A (ja) | 2018-04-05 |
TWI677018B (zh) | 2019-11-11 |
US20180096864A1 (en) | 2018-04-05 |
EP3301707A1 (en) | 2018-04-04 |
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TW201814779A (zh) | 2018-04-16 |
CN107887300B (zh) | 2021-09-14 |
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