JP6636570B2 - 薄膜トランジスタ、それを含むゲート駆動部、およびそれを含む表示装置 - Google Patents
薄膜トランジスタ、それを含むゲート駆動部、およびそれを含む表示装置 Download PDFInfo
- Publication number
- JP6636570B2 JP6636570B2 JP2018103146A JP2018103146A JP6636570B2 JP 6636570 B2 JP6636570 B2 JP 6636570B2 JP 2018103146 A JP2018103146 A JP 2018103146A JP 2018103146 A JP2018103146 A JP 2018103146A JP 6636570 B2 JP6636570 B2 JP 6636570B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- oxide semiconductor
- thin film
- film transistor
- indium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010409 thin film Substances 0.000 title claims description 99
- 239000010410 layer Substances 0.000 claims description 462
- 239000004065 semiconductor Substances 0.000 claims description 442
- 239000010408 film Substances 0.000 claims description 114
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 94
- 229910052738 indium Inorganic materials 0.000 claims description 86
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 83
- 229910052733 gallium Inorganic materials 0.000 claims description 74
- 239000011701 zinc Substances 0.000 claims description 60
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 49
- 229910052718 tin Inorganic materials 0.000 claims description 49
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 44
- 229910052725 zinc Inorganic materials 0.000 claims description 31
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 27
- 230000000149 penetrating effect Effects 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 10
- 230000001154 acute effect Effects 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 42
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 40
- 239000000463 material Substances 0.000 description 36
- 238000005530 etching Methods 0.000 description 29
- 239000000203 mixture Substances 0.000 description 27
- 229910052814 silicon oxide Inorganic materials 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 230000008859 change Effects 0.000 description 19
- 229910001887 tin oxide Inorganic materials 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 239000011787 zinc oxide Substances 0.000 description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 14
- 238000004458 analytical method Methods 0.000 description 13
- 230000000704 physical effect Effects 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- 229910004205 SiNX Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 239000011651 chromium Substances 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000010931 gold Substances 0.000 description 10
- 239000010936 titanium Substances 0.000 description 10
- 229910001195 gallium oxide Inorganic materials 0.000 description 9
- 229910003437 indium oxide Inorganic materials 0.000 description 8
- 239000002356 single layer Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 229910052779 Neodymium Inorganic materials 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
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- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000005286 illumination Methods 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
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- 238000005259 measurement Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- ABSLPMVAERBQRO-UHFFFAOYSA-N [Zn][Zn]O[Sn] Chemical compound [Zn][Zn]O[Sn] ABSLPMVAERBQRO-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
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- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
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- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
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- 238000004627 transmission electron microscopy Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- 229920006255 plastic film Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
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- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
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- H01L29/772—Field effect transistors
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- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
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- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3275—Details of drivers for data electrodes
- G09G3/3291—Details of drivers for data electrodes in which the data driver supplies a variable data voltage for setting the current through, or the voltage across, the light-emitting elements
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
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Description
また、もし、第2の酸化物半導体層132をIGZOで形成する場合、第2の酸化物半導体層132のIGZの組成比は、以下の条件を満足する必要がある。第2の酸化物半導体層132において、インジウム(In)対比ガリウム(Ga)の含有量は2≦Ga/In≦4であり、インジウム(In)対比亜鉛(Zn)の含有量は2≦Zn/In≦8であり得る。ここで、各元素の含有量は、原子パーセント(atomic percent)を指す。
110:ゲート電極
120:ゲート絶縁膜
130:酸化物半導体層
131:第1酸化物半導体層
132:第2酸化物半導体層
140:ソース電極
150:ドレイン電極
160:保護膜
170:層間絶縁膜
CT1:第1コンタクトホール
CT2:第2コンタクトホール
1000:表示装置
1100:表示パネル
1200:ゲート駆動部
1300:ソースドライブIC
1400:軟性フィルム
1500:回路基板
1600:タイミング制御部
Claims (20)
- インジウム(In)、ガリウム(Ga)、亜鉛(Zn)、スズ(Sn)および酸素(O)を含む第1酸化物半導体層と、前記インジウム(In)、ガリウム(Ga)、亜鉛(Zn)、および酸素(O)を含む第2酸化物半導体層を備え、
前記第2酸化物半導体層のインジウム対比ガリウムの含有量(Ga/In)は、前記第1酸化物半導体層のインジウム対比ガリウムの含有量(Ga/In)より高く、
前記第2酸化物半導体層のインジウム対比亜鉛の含有量(Zn/In)は、前記第1酸化物半導体層のインジウム対比亜鉛の含有量(Zn/In)よりも高く、
前記第1酸化物半導体層のスズ(Sn)対比インジウム(In)の含有量は2.5≦In/Sn≦5を満たし、
スズ(Sn)対比ガリウム(Ga)の含有量は1≦Ga/Sn≦2を満たし、
スズ(Sn)対比亜鉛(Zn)の含有量は2.5≦Zn/Sn≦5を満たす、
ことを特徴とする、薄膜トランジスタ。 - 前記第1酸化物半導体層の一側面の傾斜角度が鋭角であり、
前記第2酸化物半導体層の一側面の傾斜角度は90度または鋭角である、
ことを特徴とする、請求項1に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層のインジウム対比亜鉛の含有量(Zn/In)が、5よりも小さいことを特徴とする、請求項1に記載の薄膜トランジスタ。
- 前記第2酸化物半導体層の厚さが、前記第1酸化物半導体層の厚さの1/3よりも厚く、
前記第1酸化物半導体層の厚さの5/3よりも薄い、
ことを特徴とする、請求項1に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層よりも前記第1酸化物半導体層に近接して配置されるゲート電極をさらに具備する、請求項1に記載の薄膜トランジスタ。
- 前記第1酸化物半導体層が、ゲート絶縁膜を間に置いて前記ゲート電極と重畳することを特徴とする、請求項5に記載の薄膜トランジスタ。
- 前記ゲート電極が、前記第1酸化物半導体層の下に配置され、
前記第2酸化物半導体層は、前記第1酸化物半導体層上に配置される、
ことを特徴とする、請求項5に記載の薄膜トランジスタ。 - 前記第1酸化物半導体層の一側と前記第2酸化物半導体層の一側に接触したソース電極と、
前記第1酸化物半導体層の他側と前記第2酸化物半導体層の他側に接触したドレイン電極と、
をさらに具備する、請求項7に記載の薄膜トランジスタ。 - 前記ゲート電極は、前記第1酸化物半導体層上に配置され、
前記第2酸化物半導体層は、前記第1酸化物半導体層の下に配置される、
ことを特徴とする、請求項5に記載の薄膜トランジスタ。 - 前記第1酸化物半導体層を覆う層間絶縁膜を貫通する第1コンタクトホールを介して前記第1酸化物半導体層の一側に接触したソース電極と、
前記層間絶縁膜を貫通する第2コンタクトホールを介して前記第1酸化物半導体層の他側に接触したドレイン電極と、
をさらに具備する、請求項9に記載の薄膜トランジスタ。 - 前記ソース電極が、前記第1酸化物半導体層を貫通する前記第1コンタクトホールを介して前記第2酸化物半導体層の一側に接触し、
前記ドレイン電極は、前記第1酸化物半導体層を貫通する前記第2コンタクトホールを介して前記第2酸化物半導体層の他側に接触する、
ことを特徴とする、請求項10に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層は、スズ(Sn)をさらに含むことを特徴とする、請求項1に記載の薄膜トランジスタ。
- 前記第2酸化物半導体層のスズ対比インジウムの含有量(In/Sn)が、前記第1酸化物半導体層のスズ対比インジウムの含有量(In/Sn)よりも高いか、または同じであることを特徴とする、請求項12に記載の薄膜トランジスタ。
- 前記第2酸化物半導体層のガリウム(Ga)の含有量比が、前記第1酸化物半導体層のガリウム(Ga)の含有量比よりも高く、
前記第2酸化物半導体層の亜鉛(Zn)の含有量比は、前記第1酸化物半導体層の亜鉛(Zn)の含有量比よりも高い、
ことを特徴とする、請求項1に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層のインジウム(In)の含有量比は、前記第1酸化物半導体層のインジウム(In)の含有量比よりも低く、
前記第2酸化物半導体層のスズ(Sn)の含有量比は、第1酸化物半導体層131のスズ(Sn)の含有量比よりも低い、
ことを特徴とする、請求項12に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層のインジウム(In)対比ガリウム(Ga)の含有量は2≦Ga/In≦4を満たし、
インジウム(In)対比亜鉛(Zn)の含有量は2≦Zn/In≦8を満たす、
ことを特徴とする、請求項12に記載の薄膜トランジスタ。 - 前記第2酸化物半導体層のインジウム(In)対比ガリウム(Ga)の含有量は2≦Ga/In≦4を満たし、
インジウム(In)対比亜鉛(Zn)の含有量は2≦Zn/In≦8を満たし、
インジウム(In)対比スズ(Sn)の含有量は0.1≦Sn/In≦0.5を満たす、
ことを特徴とする、請求項12に記載の薄膜トランジスタ。 - ゲート信号を出力する複数のステージを備え、
前記複数のステージのそれぞれは、請求項1乃至17のいずれか一項に記載の薄膜トランジスタを含む、
ことを特徴とする、ゲート駆動部。 - データライン、ゲートライン、前記データラインと前記ゲートラインの交差領域に配置された画素を含む表示パネルを備え、
画素の各々は、請求項1乃至17のいずれか一項に記載の薄膜トランジスタを含む、
ことを特徴とする、表示装置。 - 前記表示パネルが、前記ゲートラインにゲート信号を出力するゲート駆動部をさらに含み、
前記ゲート駆動部は、請求項1乃至17のいずれか一項に記載の薄膜トランジスタを含む、
ことを特徴とする、請求項19に記載の表示装置。
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KR102329159B1 (ko) | 2016-10-31 | 2021-11-23 | 엘지디스플레이 주식회사 | 이중층 산화물 반도체 물질을 구비한 박막 트랜지스터 기판 |
KR101898186B1 (ko) | 2016-11-24 | 2018-09-12 | 현대오트론 주식회사 | Isg 시스템에서 시동모터 동력을 활용한 etc 밸브 구동 제어 장치 및 그 제어 방법 |
CN108735762B (zh) | 2017-04-24 | 2021-06-15 | 瀚宇彩晶股份有限公司 | 画素结构 |
CN108987482B (zh) | 2017-05-31 | 2022-05-17 | 乐金显示有限公司 | 薄膜晶体管、包括其的栅极驱动器、以及包括该栅极驱动器的显示装置 |
KR102418493B1 (ko) | 2017-10-24 | 2022-07-06 | 엘지디스플레이 주식회사 | 이차원 반도체를 포함하는 박막 트랜지스터 및 이를 포함하는 표시장치 |
KR102393552B1 (ko) | 2017-11-09 | 2022-05-02 | 엘지디스플레이 주식회사 | 수소 차단막을 갖는 박막 트랜지스터 및 이를 포함하는 표시장치 |
JP6706638B2 (ja) * | 2018-03-07 | 2020-06-10 | シャープ株式会社 | 半導体装置およびその製造方法 |
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US20230420572A1 (en) | 2023-12-28 |
DE102018112532A1 (de) | 2018-12-06 |
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US11417774B2 (en) | 2022-08-16 |
US20210143279A1 (en) | 2021-05-13 |
US20220344512A1 (en) | 2022-10-27 |
CN108987482B (zh) | 2022-05-17 |
US20180350995A1 (en) | 2018-12-06 |
DE102018112532B4 (de) | 2022-09-22 |
US11791418B2 (en) | 2023-10-17 |
TW201904073A (zh) | 2019-01-16 |
US10930790B2 (en) | 2021-02-23 |
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