JP6451004B2 - 基板の対称面取り方法および装置 - Google Patents
基板の対称面取り方法および装置 Download PDFInfo
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- JP6451004B2 JP6451004B2 JP2014109285A JP2014109285A JP6451004B2 JP 6451004 B2 JP6451004 B2 JP 6451004B2 JP 2014109285 A JP2014109285 A JP 2014109285A JP 2014109285 A JP2014109285 A JP 2014109285A JP 6451004 B2 JP6451004 B2 JP 6451004B2
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- JP
- Japan
- Prior art keywords
- chamfering
- substrate
- wheel
- edge
- chamfer
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Surface Treatment Of Glass (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
20:面取りホイール
30:面取り作業台
Claims (7)
- 面取りホイールを使用して基板の端縁を面取りするステップと、
面取りされた前記基板の端縁の非対称面取偏移(x)を測定するステップと、
f(x)(ここで、f(x)は、xを変数とする関数)の大きさ分だけ前記基板に対する前記面取りホイールの相対位置を制御するステップと、
を含むサイクルを少なくとも複数回繰り返し、
各回次に異なる基板が面取りされ、
各回次に、以前に設定された前記面取りホイールの相対位置が、前記各回次に生成される前記関数f(x)の値を累積することによって修正され、
各回次に、前記基板の端縁の複数の点ごとに、前記非対称面取偏移を各々測定し、前記基板の端縁の複数の点を面取りしたときの前記面取りホイールの相対位置を各々制御することを特徴とする基板の対称面取り方法。 - 前記非対称面取偏移は、前記基板の上面の面取り幅と前記基板の下面の面取り幅の差であることを特徴とする、請求項1に記載の基板の対称面取り方法。
- 前記基板の上面の面取り幅が前記基板の下面の面取り幅よりも大きい場合、前記基板に対する前記面取りホイールの相対位置を上方へ制御し、
前記基板の上面の面取り幅が前記基板の下面の面取り幅よりも小さい場合、前記基板に対する前記面取りホイールの相対位置を下方へ制御することを特徴とする、請求項2に記載の基板の対称面取り方法。 - 前記面取りホイールの相対位置は、前記基板に対する前記面取りホイールの相対高さであることを特徴とする、請求項1に記載の基板の対称面取り方法。
- 前記f(x)は、前記非対称面取偏移(x)に制御定数を乗じた大きさを有することを特徴とする、請求項1に記載の基板の対称面取り方法。
- 前記基板は、ディスプレイ装置用ガラス基板であることを特徴とする、請求項1に記載の基板の対称面取り方法。
- 前記面取りホイールの外周面には、周方向に沿って凹形グルーブが形成されることを特徴とする、請求項1に記載の基板の対称面取り方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020130060306A KR101452250B1 (ko) | 2013-05-28 | 2013-05-28 | 기판 대칭 면취 방법 및 장치 |
KR10-2013-0060306 | 2013-05-28 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018000615A Division JP2018100216A (ja) | 2013-05-28 | 2018-01-05 | 基板の対称面取り方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014231471A JP2014231471A (ja) | 2014-12-11 |
JP6451004B2 true JP6451004B2 (ja) | 2019-01-16 |
Family
ID=51985634
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014109285A Active JP6451004B2 (ja) | 2013-05-28 | 2014-05-27 | 基板の対称面取り方法および装置 |
JP2018000615A Pending JP2018100216A (ja) | 2013-05-28 | 2018-01-05 | 基板の対称面取り方法および装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018000615A Pending JP2018100216A (ja) | 2013-05-28 | 2018-01-05 | 基板の対称面取り方法および装置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US20140357160A1 (ja) |
JP (2) | JP6451004B2 (ja) |
KR (1) | KR101452250B1 (ja) |
CN (1) | CN104209836B (ja) |
TW (1) | TWI560027B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101395055B1 (ko) * | 2013-05-28 | 2014-05-14 | 삼성코닝정밀소재 주식회사 | 면취 작업대 평탄도 측정 방법 |
KR101452250B1 (ko) * | 2013-05-28 | 2014-10-22 | 코닝정밀소재 주식회사 | 기판 대칭 면취 방법 및 장치 |
CN107848863B (zh) * | 2015-07-08 | 2021-02-26 | 康宁股份有限公司 | 玻璃基材支承设备及提供挠性玻璃基材支承的方法 |
CN113211235A (zh) * | 2021-05-10 | 2021-08-06 | 山西光兴光电科技有限公司 | 研磨设备以及研磨方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08243891A (ja) * | 1995-03-07 | 1996-09-24 | Kao Corp | 基板のチャンファ加工装置 |
JPH10289413A (ja) * | 1997-04-10 | 1998-10-27 | Fujitsu Ltd | 磁気ヘッドの製造方法 |
JP3625685B2 (ja) * | 1999-04-15 | 2005-03-02 | 富士通株式会社 | ラッピング装置及びラッピング方法 |
JP2001246539A (ja) * | 2000-03-03 | 2001-09-11 | Inst Of Physical & Chemical Res | 非軸対称非球面ミラーの研削加工方法 |
JP4441823B2 (ja) * | 2003-11-26 | 2010-03-31 | 株式会社東京精密 | 面取り砥石のツルーイング方法及び面取り装置 |
JP2006026845A (ja) * | 2004-07-20 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | 面取機の工具位置の調整方法 |
EP1872392B1 (en) * | 2005-04-19 | 2012-02-22 | Ebara Corporation | Substrate processing apparatus |
JP4742845B2 (ja) * | 2005-12-15 | 2011-08-10 | 信越半導体株式会社 | 半導体ウエーハの面取り部の加工方法及び砥石の溝形状の修正方法 |
JP4915146B2 (ja) * | 2006-06-08 | 2012-04-11 | 信越半導体株式会社 | ウェーハの製造方法 |
WO2008093488A1 (ja) * | 2007-01-31 | 2008-08-07 | Shin-Etsu Handotai Co., Ltd. | シリコンウエーハの面取り装置およびシリコンウエーハの製造方法ならびにエッチドシリコンウエーハ |
WO2008093584A1 (ja) * | 2007-01-31 | 2008-08-07 | Hoya Corporation | 磁気ディスク用ガラス基板の製造方法および磁気ディスク用ガラス基板の製造システム |
JP5301818B2 (ja) * | 2007-11-26 | 2013-09-25 | 中村留精密工業株式会社 | ガラス基板の側辺加工装置における補正値の登録方法 |
JP2009283650A (ja) * | 2008-05-22 | 2009-12-03 | Sumco Corp | 半導体ウェーハの再生方法 |
JP5352331B2 (ja) * | 2009-04-15 | 2013-11-27 | ダイトエレクトロン株式会社 | ウェーハの面取り加工方法 |
JP5439066B2 (ja) * | 2009-07-06 | 2014-03-12 | 中村留精密工業株式会社 | 硬質脆性板の面取加工方法及び装置 |
WO2011162163A1 (ja) * | 2010-06-21 | 2011-12-29 | 旭硝子株式会社 | ガラス基板及びガラス基板の製造方法 |
CN102985386B (zh) * | 2010-07-08 | 2015-09-02 | 旭硝子株式会社 | 玻璃基板端面的评价方法及玻璃基板端面的加工方法以及玻璃基板 |
US8986072B2 (en) * | 2011-05-26 | 2015-03-24 | Corning Incorporated | Methods of finishing an edge of a glass sheet |
CN202212831U (zh) * | 2011-08-18 | 2012-05-09 | 北京京东方光电科技有限公司 | 磨边装置 |
JP6050086B2 (ja) * | 2012-10-30 | 2016-12-21 | AvanStrate株式会社 | ガラス基板の製造方法 |
CN103111922B (zh) * | 2013-01-31 | 2015-04-01 | 广东富山玻璃机械有限公司 | 一种多功能快速四边磨边机 |
KR101452250B1 (ko) * | 2013-05-28 | 2014-10-22 | 코닝정밀소재 주식회사 | 기판 대칭 면취 방법 및 장치 |
JP6007889B2 (ja) * | 2013-12-03 | 2016-10-19 | 信越半導体株式会社 | 面取り加工装置及びノッチレスウェーハの製造方法 |
-
2013
- 2013-05-28 KR KR1020130060306A patent/KR101452250B1/ko active IP Right Grant
-
2014
- 2014-05-27 US US14/287,799 patent/US20140357160A1/en not_active Abandoned
- 2014-05-27 JP JP2014109285A patent/JP6451004B2/ja active Active
- 2014-05-28 CN CN201410230538.1A patent/CN104209836B/zh active Active
- 2014-05-28 TW TW103118707A patent/TWI560027B/zh active
-
2018
- 2018-01-05 JP JP2018000615A patent/JP2018100216A/ja active Pending
- 2018-06-29 US US16/023,291 patent/US20180304430A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2018100216A (ja) | 2018-06-28 |
JP2014231471A (ja) | 2014-12-11 |
US20180304430A1 (en) | 2018-10-25 |
CN104209836A (zh) | 2014-12-17 |
CN104209836B (zh) | 2017-01-11 |
TWI560027B (en) | 2016-12-01 |
TW201515773A (zh) | 2015-05-01 |
KR101452250B1 (ko) | 2014-10-22 |
US20140357160A1 (en) | 2014-12-04 |
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