JP6394171B2 - 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム - Google Patents

電界効果型トランジスタ、表示素子、画像表示装置、及びシステム Download PDF

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JP6394171B2
JP6394171B2 JP2014164080A JP2014164080A JP6394171B2 JP 6394171 B2 JP6394171 B2 JP 6394171B2 JP 2014164080 A JP2014164080 A JP 2014164080A JP 2014164080 A JP2014164080 A JP 2014164080A JP 6394171 B2 JP6394171 B2 JP 6394171B2
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Japan
Prior art keywords
protective layer
field effect
effect transistor
coating solution
forming coating
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JP2014164080A
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Japanese (ja)
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JP2015111653A (ja
Inventor
遼一 早乙女
遼一 早乙女
植田　尚之
尚之 植田
中村　有希
有希 中村
由希子 安部
由希子 安部
真二 松本
真二 松本
雄司 曽根
雄司 曽根
定憲 新江
定憲 新江
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Ricoh Co Ltd
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Ricoh Co Ltd
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Priority to JP2014164080A priority Critical patent/JP6394171B2/ja
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to RU2016120847A priority patent/RU2630708C1/ru
Priority to KR1020187012510A priority patent/KR102137664B1/ko
Priority to CN201910211585.4A priority patent/CN110047938A/zh
Priority to SG11201603456VA priority patent/SG11201603456VA/en
Priority to BR112016009806-4A priority patent/BR112016009806B1/pt
Priority to CN201480059693.XA priority patent/CN105684135B/zh
Priority to PCT/JP2014/078842 priority patent/WO2015064670A1/en
Priority to KR1020167013994A priority patent/KR101856078B1/ko
Priority to EP14856937.9A priority patent/EP3063783B1/en
Priority to US15/032,192 priority patent/US9972274B2/en
Priority to TW103137055A priority patent/TWI568000B/zh
Publication of JP2015111653A publication Critical patent/JP2015111653A/ja
Priority to US15/939,665 priority patent/US10565954B2/en
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Publication of JP6394171B2 publication Critical patent/JP6394171B2/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3674—Details of drivers for scan electrodes
    • G09G3/3677—Details of drivers for scan electrodes suitable for active matrices only
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3685—Details of drivers for data electrodes
    • G09G3/3688—Details of drivers for data electrodes suitable for active matrices only
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3696—Generation of voltages supplied to electrode drivers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809—Several active elements per pixel in active matrix panels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G09G2300/0809—Several active elements per pixel in active matrix panels
    • G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0264—Details of driving circuits
    • G09G2310/0278—Details of driving circuits arranged to drive both scan and data electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
JP2014164080A 2013-10-30 2014-08-12 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム Active JP6394171B2 (ja)

Priority Applications (13)

Application Number Priority Date Filing Date Title
JP2014164080A JP6394171B2 (ja) 2013-10-30 2014-08-12 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
US15/032,192 US9972274B2 (en) 2013-10-30 2014-10-23 Field-effect transistor, display element, image display device, and system
CN201910211585.4A CN110047938A (zh) 2013-10-30 2014-10-23 场效应晶体管、显示元件、图像显示装置和系统
SG11201603456VA SG11201603456VA (en) 2013-10-30 2014-10-23 Field-effect transistor, display element, image display device, and system
BR112016009806-4A BR112016009806B1 (pt) 2013-10-30 2014-10-23 Transistor de efeito de campo, elemento de exibição, dispositivo de exibição de imagem, e sistema
CN201480059693.XA CN105684135B (zh) 2013-10-30 2014-10-23 场效应晶体管、显示元件、图像显示装置和系统
RU2016120847A RU2630708C1 (ru) 2013-10-30 2014-10-23 Полевой транзистор, элемент отображения, устройство отображения изображений и система
KR1020167013994A KR101856078B1 (ko) 2013-10-30 2014-10-23 전계 효과형 트랜지스터, 표시 소자, 영상 표시 장치 및 시스템
EP14856937.9A EP3063783B1 (en) 2013-10-30 2014-10-23 Field-effect transistor, display element, image display device, and system
KR1020187012510A KR102137664B1 (ko) 2013-10-30 2014-10-23 전계 효과형 트랜지스터, 표시 소자, 영상 표시 장치 및 시스템
PCT/JP2014/078842 WO2015064670A1 (en) 2013-10-30 2014-10-23 Field-effect transistor, display element, image display device, and system
TW103137055A TWI568000B (zh) 2013-10-30 2014-10-27 場效電晶體、顯示元件、影像顯示裝置、及系統
US15/939,665 US10565954B2 (en) 2013-10-30 2018-03-29 Field-effect transistor, display element, image display device, and system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013225182 2013-10-30
JP2013225182 2013-10-30
JP2014164080A JP6394171B2 (ja) 2013-10-30 2014-08-12 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム

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JP2018160960A Division JP6642657B2 (ja) 2013-10-30 2018-08-30 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム

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JP2015111653A JP2015111653A (ja) 2015-06-18
JP6394171B2 true JP6394171B2 (ja) 2018-09-26

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US (2) US9972274B2 (enExample)
EP (1) EP3063783B1 (enExample)
JP (1) JP6394171B2 (enExample)
KR (2) KR101856078B1 (enExample)
CN (2) CN105684135B (enExample)
BR (1) BR112016009806B1 (enExample)
RU (1) RU2630708C1 (enExample)
SG (1) SG11201603456VA (enExample)
TW (1) TWI568000B (enExample)
WO (1) WO2015064670A1 (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6015389B2 (ja) 2012-11-30 2016-10-26 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6394171B2 (ja) * 2013-10-30 2018-09-26 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6582655B2 (ja) * 2015-07-14 2019-10-02 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6794706B2 (ja) * 2015-10-23 2020-12-02 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6878820B2 (ja) * 2015-11-17 2021-06-02 株式会社リコー 電界効果型トランジスタ、表示素子、表示装置、システム、及び電界効果型トランジスタの製造方法
JP2017105013A (ja) 2015-12-08 2017-06-15 株式会社リコー ガスバリア性積層体、半導体装置、表示素子、表示装置、システム
US10600916B2 (en) 2015-12-08 2020-03-24 Ricoh Company, Ltd. Field-effect transistor, display element, image display device, and system
JP6607013B2 (ja) 2015-12-08 2019-11-20 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
US10170635B2 (en) 2015-12-09 2019-01-01 Ricoh Company, Ltd. Semiconductor device, display device, display apparatus, and system
JP6907512B2 (ja) * 2015-12-15 2021-07-21 株式会社リコー 電界効果型トランジスタの製造方法
CN106952948A (zh) * 2016-01-06 2017-07-14 中华映管股份有限公司 主动元件及其制作方法
JP6665536B2 (ja) 2016-01-12 2020-03-13 株式会社リコー 酸化物半導体
RU2692401C1 (ru) 2016-02-01 2019-06-24 Рикох Компани, Лтд. Полевой транзистор, способ его изготовления, элемент отображения, устройство отображения и система
JP6701835B2 (ja) 2016-03-11 2020-05-27 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6607309B2 (ja) 2016-03-18 2019-11-20 株式会社リコー 電界効果型トランジスタの製造方法
US10818705B2 (en) 2016-03-18 2020-10-27 Ricoh Company, Ltd. Method for manufacturing a field effect transistor, method for manufacturing a volatile semiconductor memory element, method for manufacturing a non-volatile semiconductor memory element, method for manufacturing a display element, method for manufacturing an image display device, and method for manufacturing a system
JP6855848B2 (ja) * 2016-03-18 2021-04-07 株式会社リコー 電界効果型トランジスタの製造方法、揮発性半導体メモリ素子の製造方法、不揮発性半導体メモリ素子の製造方法、表示素子の製造方法、画像表示装置の製造方法、システムの製造方法
US20180016678A1 (en) 2016-07-15 2018-01-18 Applied Materials, Inc. Multi-layer coating with diffusion barrier layer and erosion resistant layer
KR20180033352A (ko) 2016-09-23 2018-04-03 삼성디스플레이 주식회사 캡핑층을 포함하는 유기발광 표시장치
JP6848405B2 (ja) * 2016-12-07 2021-03-24 株式会社リコー 電界効果型トランジスタの製造方法
JP2018148145A (ja) * 2017-03-08 2018-09-20 株式会社リコー 電界効果型トランジスタ、表示素子、表示装置、システム
JP2018156963A (ja) * 2017-03-15 2018-10-04 株式会社リコー 電界効果型トランジスタ、表示素子、表示装置、システム、及びそれらの製造方法
WO2018209250A1 (en) * 2017-05-11 2018-11-15 Baylor University Field-effect tunable epsilon-near-zero absorber
US10688811B2 (en) 2018-02-27 2020-06-23 Ricoh Company, Ltd. Air blower, drying device, liquid discharge apparatus, and treatment-liquid application device
US11204533B2 (en) * 2018-03-06 2021-12-21 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
JP6986231B2 (ja) 2018-03-16 2021-12-22 株式会社リコー 塗布装置及び画像形成システム
EP3544047A3 (en) 2018-03-19 2019-11-20 Ricoh Company, Ltd. Coating liquid for forming oxide, method for producing oxide film, and method for producing field-effect transistor
CN108933179B (zh) * 2018-07-05 2020-06-16 深圳市华星光电半导体显示技术有限公司 一种薄膜晶体管及其制作方法
EP3599646A3 (en) 2018-07-23 2020-04-01 Ricoh Company, Ltd. Metal oxide, field-effect transistor, and method for producing the same
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JP7135682B2 (ja) 2018-09-28 2022-09-13 株式会社リコー 給送装置、画像形成装置及び画像形成システム
CN112242441A (zh) * 2019-07-16 2021-01-19 联华电子股份有限公司 高电子迁移率晶体管
RU2748455C1 (ru) * 2020-07-08 2021-05-25 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чеченский государственный университет" Способ изготовления полупроводникового прибора
CN112687554B (zh) * 2020-12-28 2023-05-09 深圳市华星光电半导体显示技术有限公司 阵列基板制备方法、阵列基板及显示装置
US12439650B2 (en) * 2021-01-15 2025-10-07 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS fabrication methods for back-gate transistor

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150430A (ja) * 1983-02-17 1984-08-28 Toshiba Corp 半導体デバイス
JP3666915B2 (ja) 1993-12-17 2005-06-29 Ａｚエレクトロニックマテリアルズ株式会社 セラミックスの低温形成方法
JP4472056B2 (ja) 1999-07-23 2010-06-02 株式会社半導体エネルギー研究所 エレクトロルミネッセンス表示装置及びその作製方法
EP1434282A3 (en) * 2002-12-26 2007-06-27 Konica Minolta Holdings, Inc. Protective layer for an organic thin-film transistor
JP4278405B2 (ja) * 2003-02-28 2009-06-17 シャープ株式会社 酸化物半導体発光素子およびその製造方法
JP4108633B2 (ja) 2003-06-20 2008-06-25 シャープ株式会社 薄膜トランジスタおよびその製造方法ならびに電子デバイス
JP2007073705A (ja) 2005-09-06 2007-03-22 Canon Inc 酸化物半導体チャネル薄膜トランジスタおよびその製造方法
US20070152276A1 (en) * 2005-12-30 2007-07-05 International Business Machines Corporation High performance CMOS circuits, and methods for fabricating the same
US8173487B2 (en) * 2007-04-06 2012-05-08 Sharp Kabushiki Kaisha Semiconductor element, method for manufacturing same, and electronic device including same
KR20080099084A (ko) * 2007-05-08 2008-11-12 삼성전자주식회사 박막 트랜지스터 및 그 제조 방법
US8461583B2 (en) 2007-12-25 2013-06-11 Idemitsu Kosan Co., Ltd. Oxide semiconductor field effect transistor and method for manufacturing the same
JP5141325B2 (ja) * 2008-03-21 2013-02-13 凸版印刷株式会社 有機ｅｌディスプレイパネルの製造方法
JP5430248B2 (ja) * 2008-06-24 2014-02-26 富士フイルム株式会社 薄膜電界効果型トランジスタおよび表示装置
KR101516050B1 (ko) * 2008-08-27 2015-05-04 이데미쓰 고산 가부시키가이샤 전계 효과형 트랜지스터, 그의 제조 방법 및 스퍼터링 타겟
JP5305790B2 (ja) * 2008-08-28 2013-10-02 株式会社東芝 半導体発光素子
JP5552753B2 (ja) * 2008-10-08 2014-07-16 ソニー株式会社 薄膜トランジスタおよび表示装置
JP2010103203A (ja) 2008-10-22 2010-05-06 Konica Minolta Holdings Inc 薄膜トランジスタおよびその製造方法
WO2010053060A1 (en) 2008-11-07 2010-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP5515281B2 (ja) 2008-12-03 2014-06-11 ソニー株式会社 薄膜トランジスタ、表示装置、電子機器および薄膜トランジスタの製造方法
JP2010182819A (ja) 2009-02-04 2010-08-19 Sony Corp 薄膜トランジスタおよび表示装置
US20100308418A1 (en) 2009-06-09 2010-12-09 Knut Stahrenberg Semiconductor Devices and Methods of Manufacture Thereof
KR101269812B1 (ko) 2009-09-04 2013-05-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 표시 패널, 표시 모듈, 전자 기기 및 표시 장치
CN105070715B (zh) 2009-10-21 2018-10-19 株式会社半导体能源研究所 半导体装置
JP5633346B2 (ja) 2009-12-25 2014-12-03 株式会社リコー 電界効果型トランジスタ、半導体メモリ、表示素子、画像表示装置及びシステム
CN102782858B (zh) * 2009-12-25 2015-10-07 株式会社理光 场效应晶体管、半导体存储器、显示元件、图像显示设备和系统
JP5899615B2 (ja) * 2010-03-18 2016-04-06 株式会社リコー 絶縁膜の製造方法及び半導体装置の製造方法
TWI589042B (zh) * 2010-01-20 2017-06-21 半導體能源研究所股份有限公司 發光裝置，撓性發光裝置，電子裝置，照明設備，以及發光裝置和撓性發光裝置的製造方法
JP2012216780A (ja) 2011-03-31 2012-11-08 Ricoh Co Ltd ｐ型酸化物、ｐ型酸化物製造用組成物、ｐ型酸化物の製造方法、半導体素子、表示素子、画像表示装置、及びシステム
JP6076038B2 (ja) * 2011-11-11 2017-02-08 株式会社半導体エネルギー研究所 表示装置の作製方法
KR101942980B1 (ko) * 2012-01-17 2019-01-29 삼성디스플레이 주식회사 반도체 디바이스 및 그 형성 방법
US9653614B2 (en) * 2012-01-23 2017-05-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US9159288B2 (en) 2012-03-09 2015-10-13 Apple Inc. Gate line driver circuit for display element array
JP6043244B2 (ja) * 2012-06-06 2016-12-14 株式会社神戸製鋼所 薄膜トランジスタ
JP5562384B2 (ja) * 2012-08-28 2014-07-30 キヤノン株式会社 薄膜トランジスタおよびその製造方法
US9595544B2 (en) * 2012-08-30 2017-03-14 Sharp Kabushiki Kiasha Thin film transistor substrate and display device
US20150214374A1 (en) * 2012-08-30 2015-07-30 Sharp Kabushiki Kaisha Circuit board and display device
WO2014054569A1 (ja) * 2012-10-03 2014-04-10 シャープ株式会社 半導体装置及び表示装置
JP6015389B2 (ja) 2012-11-30 2016-10-26 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
US9035287B2 (en) * 2013-02-01 2015-05-19 Polyera Corporation Polymeric materials for use in metal-oxide-semiconductor field-effect transistors
KR20150001154A (ko) * 2013-06-26 2015-01-06 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법
KR102146070B1 (ko) * 2013-07-01 2020-08-21 삼성디스플레이 주식회사 유기 발광 표시 장치
JP6394171B2 (ja) * 2013-10-30 2018-09-26 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム

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