JP6335436B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6335436B2
JP6335436B2 JP2013094634A JP2013094634A JP6335436B2 JP 6335436 B2 JP6335436 B2 JP 6335436B2 JP 2013094634 A JP2013094634 A JP 2013094634A JP 2013094634 A JP2013094634 A JP 2013094634A JP 6335436 B2 JP6335436 B2 JP 6335436B2
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JP
Japan
Prior art keywords
wiring pattern
forming
protective layer
heat treatment
interlayer insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013094634A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014213575A (ja
JP2014213575A5 (enExample
Inventor
政夫 吉川
政夫 吉川
圭一 佐々木
圭一 佐々木
建 安田
建 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013094634A priority Critical patent/JP6335436B2/ja
Priority to US14/247,445 priority patent/US9073318B2/en
Publication of JP2014213575A publication Critical patent/JP2014213575A/ja
Publication of JP2014213575A5 publication Critical patent/JP2014213575A5/ja
Application granted granted Critical
Publication of JP6335436B2 publication Critical patent/JP6335436B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013094634A 2013-04-26 2013-04-26 液体吐出ヘッドの製造方法 Expired - Fee Related JP6335436B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013094634A JP6335436B2 (ja) 2013-04-26 2013-04-26 液体吐出ヘッドの製造方法
US14/247,445 US9073318B2 (en) 2013-04-26 2014-04-08 Method of manufacturing liquid discharge head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013094634A JP6335436B2 (ja) 2013-04-26 2013-04-26 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014213575A JP2014213575A (ja) 2014-11-17
JP2014213575A5 JP2014213575A5 (enExample) 2016-04-14
JP6335436B2 true JP6335436B2 (ja) 2018-05-30

Family

ID=51789557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013094634A Expired - Fee Related JP6335436B2 (ja) 2013-04-26 2013-04-26 液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US9073318B2 (enExample)
JP (1) JP6335436B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102659138B1 (ko) * 2016-10-19 2024-04-22 시크파 홀딩 에스에이 열 잉크젯 프린트헤드를 형성하는 방법, 열 잉크젯 프린트헤드, 및 반도체 웨이퍼
JP7037334B2 (ja) 2017-02-17 2022-03-16 キヤノン株式会社 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置
CN108396313B (zh) * 2018-01-26 2019-11-15 华南理工大学 一种减少喷墨打印薄膜表面裂纹的热处理方法
JP7166776B2 (ja) * 2018-04-04 2022-11-08 キヤノン株式会社 液体吐出ヘッド用基板の製造方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01210352A (ja) * 1988-02-18 1989-08-23 Ricoh Co Ltd 液体噴射記録ヘッド
JPH04142942A (ja) * 1990-10-05 1992-05-15 Canon Inc 薄膜抵抗ヒータ、その製造方法、該薄膜抵抗ヒータを使用したインクジェット記録ヘッド及びインクジェット記録装置
JPH05251693A (ja) * 1992-03-04 1993-09-28 Kawasaki Steel Corp 半導体装置の製造方法
JPH05267205A (ja) * 1992-03-24 1993-10-15 Miyazaki Oki Electric Co Ltd 半導体装置の製造方法
JPH0774167A (ja) * 1993-06-30 1995-03-17 Kawasaki Steel Corp 半導体装置の製造方法
JPH09252131A (ja) * 1996-01-10 1997-09-22 Yamaha Corp 半導体装置の製法
JP2000021892A (ja) * 1998-06-26 2000-01-21 Nec Corp 半導体装置の製造方法
US6474769B1 (en) * 1999-06-04 2002-11-05 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge apparatus and method for manufacturing liquid discharge head
US6361150B1 (en) 1999-08-30 2002-03-26 Hewlett-Packard Company Electrostatic discharge protection of electrically-inactive components in a thermal ink jet printing system
US6467864B1 (en) * 2000-08-08 2002-10-22 Lexmark International, Inc. Determining minimum energy pulse characteristics in an ink jet print head
JP3503611B2 (ja) * 2001-04-13 2004-03-08 ソニー株式会社 プリンタヘッド、プリンタ及びプリンタヘッドの製造方法
JP3695530B2 (ja) * 2001-12-03 2005-09-14 ソニー株式会社 プリンタヘッドの製造方法
TW571441B (en) * 2002-12-31 2004-01-11 Ind Tech Res Inst Metal oxide semiconductor field effect transistor used in high-density device and manufacturing method of the same
JP4208793B2 (ja) 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4208794B2 (ja) 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4646602B2 (ja) 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP2006254815A (ja) * 2005-03-18 2006-09-28 Yanmar Co Ltd コンバイン
JP4810236B2 (ja) * 2006-01-12 2011-11-09 株式会社東芝 水素ガス製造装置及びその方法
JP4847360B2 (ja) * 2006-02-02 2011-12-28 キヤノン株式会社 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
WO2007148822A1 (en) * 2006-06-23 2007-12-27 Canon Kabushiki Kaisha Polyfunctional epoxy compound, epoxy resin, cationic photopolymerizable epoxy resin composition, micro structured member, producing method therefor and liquid discharge head
JP2008149687A (ja) 2006-12-20 2008-07-03 Canon Inc インクジェット記録ヘッド用基板および該基板を用いるインクジェット記録ヘッド
JP5147282B2 (ja) 2007-05-02 2013-02-20 キヤノン株式会社 インクジェット記録用基板、該基板を備えた記録ヘッド及び記録装置
JP4963679B2 (ja) 2007-05-29 2012-06-27 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法、並びに該基体を用いる液体吐出ヘッド
US8075102B2 (en) 2008-06-19 2011-12-13 Canon Kabushiki Kaisha Substrate for ink jet head and ink jet head
JP2013069804A (ja) * 2011-09-21 2013-04-18 Hitachi Kokusai Electric Inc 半導体製造装置および成膜方法

Also Published As

Publication number Publication date
JP2014213575A (ja) 2014-11-17
US20140322835A1 (en) 2014-10-30
US9073318B2 (en) 2015-07-07

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