JP6326487B2 - Cmos画像センサ用のゲート制御型電荷変調デバイス - Google Patents
Cmos画像センサ用のゲート制御型電荷変調デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 claims description 328
- 239000002019 doping agent Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910052732 germanium Inorganic materials 0.000 claims description 22
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000000969 carrier Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 description 46
- 238000010586 diagram Methods 0.000 description 32
- 230000008569 process Effects 0.000 description 16
- 238000005468 ion implantation Methods 0.000 description 15
- 238000009792 diffusion process Methods 0.000 description 9
- 239000012808 vapor phase Substances 0.000 description 9
- 238000002161 passivation Methods 0.000 description 6
- 238000011065 in-situ storage Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
- H01L27/14616—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor characterised by the channel of the transistor, e.g. channel having a doping gradient
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
- H01L27/14614—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor having a special gate structure
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/63—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to dark current
Description
Vtamp=VREF+R・IGCMD
更に、GCMDからの電流を、次のようにモデル化することができる:
IGCMD=Ioff (光なし)
IGCMD=IΔ+Ioff (光)
いくつかの実施形態では、ベース電流は、光検知素子が実質的に光を受けていない時に光検知素子によって供給される電流(例えば、Ioff)に対応する。Ioffが第1のトランスインピーダンス増幅器904によって変換されると、対応する電圧VBASEは、次のように決定される:
VBASE=VREF+R・Ioff
その時、VtampとVBASEとの間の電圧差は、次の通りである:
Vtamp−VBASE=R・IΔ
差動増幅器906の電圧出力Vdampは、次の通りである:
Vdamp=A・R・IΔ
ここで、Aは、差動増幅器906の差動利得である。いくつかの実施形態では、差動利得は、1、2、3、5、10、20、50、及び100のうちの一つである。
Claims (13)
- 1400nmから3000nmの波長範囲内の短波長赤外光を受けることに応じてインピーダンスが変化するデバイスであって、
第1の型のドーパントを用いてドープされた第1の半導体領域と、
第2の型のドーパントを用いてドープされた第2の半導体領域であって、
前記第2の半導体領域は、前記第1の半導体領域の上方に配置されていて、
前記第1の型は、前記第2の型とは異なる、
第2の半導体領域と、
前記第2の半導体領域の上方に配置されているゲート絶縁層と、
前記ゲート絶縁層の上方に配置されていて、前記第1の半導体領域から分離されているゲートと、
前記第2の半導体領域に電気的に接続されているソースと、
前記第2の半導体領域に電気的に接続されているドレインと、
を備え、
前記第2の半導体領域は、前記ゲート絶縁層のほうを向いて配置されている上面を有し、
前記第2の半導体領域は、前記第2の半導体領域の前記上面に対して反対側に配置されている底面を有し、
前記第2の半導体領域は、前記第2の半導体領域の前記上面を含む上側部分を有し、
前記第2の半導体領域は、前記上側部分とは相互に排他的であり前記第2の半導体領域の前記底面を含む下側部分を有し、
前記第2の半導体領域の前記上側部分は、前記ソースから前記ドレインまで延び、
前記第2の半導体領域の前記下側部分は、前記ソースから前記ドレインまで延び、
前記第1の半導体領域は、前記第2の半導体領域の前記上側部分及び前記下側部分の両方と接触していて、
前記第1の半導体領域は、少なくとも前記ゲートの下に位置する場所で前記第2の半導体領域の前記上側部分と接触していて、
前記第2の半導体領域の前記ソースと前記ドレインとの間に位置する部分の厚さは、前記ソースの部分又は前記ドレインの部分の厚さよりも小さく、
前記ゲートは直線形状で前記ソース及び前記ドレインに並んでいる、
デバイス。 - 前記第2の半導体領域は、前記上面及び前記底面とは異なり前記ソースから前記ドレインまで延びる第1の側面を有し、
前記第2の半導体領域は、前記上面及び前記底面とは異なり前記ソースから前記ドレインまで延びる第2の側面を有し、
前記第1の半導体領域は、前記第1の側面の一部を介して前記第2の半導体領域の前記上側部分と接触していて、
前記第1の半導体領域は、前記第2の側面の一部を介して前記第2の半導体領域の前記上側部分と接触している、
請求項1に記載のデバイス。 - 前記デバイスはシリコン基板を含み、
前記第1の半導体領域は前記シリコン基板の上方に配置されていて、
前記第1の半導体領域はゲルマニウムを含み、
前記第2の半導体領域はゲルマニウムを含む、請求項1又は2に記載のデバイス。 - 前記ゲート絶縁層は酸化物層を含む、請求項1から3のいずれか1項に記載のデバイス。
- 前記第1の半導体領域の下方に配置されている基板絶縁層を含み、前記基板絶縁層は、SiO2、GeOx、ZrOx、HfOx、SixNy、SixOyNz、TaxOy、SrxOy及びAlxOyのうちの一つ又は複数を含む、請求項1から4のいずれか1項に記載のデバイス。
- 前記第2の型のドーパントを用いてドープされたゲルマニウムを含む第3の半導体領域を含み、前記第3の半導体領域は前記第1の半導体領域の下方に配置されている、請求項1から4のいずれか1項に記載のデバイス。
- 前記第2の半導体領域内の前記第2の型の前記ドーパントのドーピング濃度は、前記第3の半導体領域内の前記第2の型の前記ドーパントのドーピング濃度よりも高い、請求項6に記載のデバイス。
- 前記第1の半導体領域は、前記第1の半導体領域が前記短波長赤外光を受けている時に光生成キャリアが発生するように構成されている、請求項1から7のいずれか1項に記載のデバイス。
- 前記第2の半導体領域の前記ソースと前記ドレインとの間に位置する部分は、100nm未満の厚さを有する、請求項1から8のいずれか1項に記載のデバイス。
- 前記第1の半導体領域は、1000nm未満の厚さを有する、請求項1から9のいずれか1項に記載のデバイス。
- 画像センサ・デバイスであって、
センサのアレイと、
コンバータ回路と、
を備え、
前記センサのアレイ内のそれぞれのセンサは第1のセンサ回路を含み、前記第1のセンサ回路は、
ソース端子、ゲート端子、ドレイン端子、及びボディ端子を有し、請求項1から10のいずれか1項に記載の前記デバイスを含む、第1の光検知素子と、
ソース端子、ゲート端子、及びドレイン端子を有する選択トランジスタであって、前記選択トランジスタの前記ドレイン端子は前記第1の光検知素子の前記ソース端子に電気的に接続されている又は前記選択トランジスタの前記ソース端子は前記第1の光検知素子の前記ドレイン端子に電気的に接続されている、選択トランジスタと、を含み、
前記コンバータ回路は、
入力端子を有する第1のトランスインピーダンス増幅器であって、前記入力端子は、前記第1のセンサ回路の前記選択トランジスタの、前記第1の光検知素子の前記ソース端子又は前記ドレイン端子に電気的に接続されていない前記ソース端子又は前記ドレイン端子に電気的に接続されていて、前記第1のトランスインピーダンス増幅器は、前記第1の光検知素子からの電流入力を電圧出力へと変換するように構成されている、第1のトランスインピーダンス増幅器と、
二つの入力端子を有する差動増幅器であって、前記二つの入力端子のうちの第1の入力端子は、前記第1のトランスインピーダンス増幅器の前記電圧出力に電気的に接続されていて、前記二つの入力端子のうちの第2の入力端子は、前記第1の光検知素子によって供給されるベース電流に対応する電圧を供給するように構成されている電圧源に電気的に接続されていて、前記差動増幅器は、前記電圧出力と前記電圧源によって供給される前記電圧との間の電圧差に基づいて電圧を出力するように構成されている、差動増幅器と、を含む、
画像センサ・デバイス。 - 前記ベース電流は、前記第1の光検知素子が実質的に光を受けていない時に前記第1の光検知素子によって供給される電流に対応する、請求項11に記載の画像センサ・デバイス。
- 前記電圧源は、前記第1のセンサ回路とは異なる第2のセンサ回路に電気的に接続されている入力端子を有する第2のトランスインピーダンス増幅器であり、
前記第2のセンサ回路は、第2の光検知素子を含み、
前記第2のセンサ回路の前記第2の光検知素子は、光を受けることを妨げられるように光学的に覆われている、請求項11又は12に記載の画像センサ・デバイス。
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US201361837557P | 2013-06-20 | 2013-06-20 | |
US61/837,557 | 2013-06-20 | ||
US201462002045P | 2014-05-22 | 2014-05-22 | |
US62/002,045 | 2014-05-22 | ||
PCT/US2014/043421 WO2014205353A2 (en) | 2013-06-20 | 2014-06-20 | Gate-controlled charge modulated device for cmos image sensors |
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EP (2) | EP3528288B1 (ja) |
JP (3) | JP6326487B2 (ja) |
KR (2) | KR102246766B1 (ja) |
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JP6326487B2 (ja) * | 2013-06-20 | 2018-05-16 | ストレイティオ, インコーポレイテッドStratio, Inc. | Cmos画像センサ用のゲート制御型電荷変調デバイス |
US10553633B2 (en) * | 2014-05-30 | 2020-02-04 | Klaus Y.J. Hsu | Phototransistor with body-strapped base |
EP3147607B1 (de) | 2015-09-22 | 2020-04-22 | emz-Hanauer GmbH & Co. KGaA | Einlegeboden-baugruppe für ein kühl- oder gefriergerät |
WO2019173945A1 (zh) * | 2018-03-12 | 2019-09-19 | 中国科学院半导体研究所 | 直接带隙发光的硅基材料及制备方法、芯片上发光器件 |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3648125A (en) * | 1971-02-02 | 1972-03-07 | Fairchild Camera Instr Co | Method of fabricating integrated circuits with oxidized isolation and the resulting structure |
GB1443434A (en) * | 1973-01-22 | 1976-07-21 | Mullard Ltd | Semiconductor devices |
JPS5912031B2 (ja) * | 1974-02-27 | 1984-03-19 | 富士通株式会社 | 光検出用半導体装置 |
JPS598073B2 (ja) * | 1975-08-19 | 1984-02-22 | 松下電器産業株式会社 | 固体検出器 |
JPS60120558A (ja) * | 1983-12-02 | 1985-06-28 | ダルサ インコーポレーテッド | 集積可能な光検出器素子 |
JPS5912031A (ja) | 1982-07-13 | 1984-01-21 | Fujitsu Ltd | 紙葉斜行補正方式 |
JPS60252253A (ja) * | 1984-05-28 | 1985-12-12 | Fujitsu Ltd | Fetセンサ |
US4598305A (en) * | 1984-06-18 | 1986-07-01 | Xerox Corporation | Depletion mode thin film semiconductor photodetectors |
US4882609A (en) * | 1984-11-19 | 1989-11-21 | Max-Planck Gesellschaft Zur Forderung Der Wissenschafter E.V. | Semiconductor devices with at least one monoatomic layer of doping atoms |
JPS6230385A (ja) * | 1985-07-31 | 1987-02-09 | Fujitsu Ltd | 光伝導型検知素子 |
JP2564133B2 (ja) * | 1987-04-17 | 1996-12-18 | オリンパス光学工業株式会社 | 固体撮像装置 |
JP3246038B2 (ja) * | 1993-02-08 | 2002-01-15 | カシオ計算機株式会社 | フォトセンサ及びフォトセンサの駆動方法 |
US5341008A (en) * | 1993-09-21 | 1994-08-23 | Texas Instruments Incorporated | Bulk charge modulated device photocell with lateral charge drain |
JPH07202250A (ja) * | 1993-12-31 | 1995-08-04 | Casio Comput Co Ltd | 光電変換装置 |
JP2878137B2 (ja) * | 1994-06-29 | 1999-04-05 | シャープ株式会社 | 増幅型光電変換素子、それを用いた増幅型固体撮像装置、及び増幅型光電変換素子の製造方法 |
JPH09321276A (ja) * | 1996-05-28 | 1997-12-12 | Fujitsu Ltd | 絶縁ゲート型電界効果トランジスタ |
JP3531087B2 (ja) * | 1996-08-08 | 2004-05-24 | 富士通株式会社 | 半導体装置及びその製造方法 |
US5800494A (en) * | 1996-08-20 | 1998-09-01 | Fidus Medical Technology Corporation | Microwave ablation catheters having antennas with distal fire capabilities |
US6291314B1 (en) | 1998-06-23 | 2001-09-18 | Silicon Genesis Corporation | Controlled cleavage process and device for patterned films using a release layer |
US6235560B1 (en) * | 1999-08-16 | 2001-05-22 | Agere Systems Guardian Corp. | Silicon-germanium transistor and associated methods |
US20040224482A1 (en) | 2001-12-20 | 2004-11-11 | Kub Francis J. | Method for transferring thin film layer material to a flexible substrate using a hydrogen ion splitting technique |
FR2834123B1 (fr) | 2001-12-21 | 2005-02-04 | Soitec Silicon On Insulator | Procede de report de couches minces semi-conductrices et procede d'obtention d'une plaquette donneuse pour un tel procede de report |
IL156497A (en) | 2002-06-20 | 2007-08-19 | Samsung Electronics Co Ltd | Image sensor and method of fabricating the same |
US7184009B2 (en) * | 2002-06-21 | 2007-02-27 | Nokia Corporation | Display circuit with optical sensor |
ATE408961T1 (de) * | 2003-10-13 | 2008-10-15 | Noble Peak Vision Corp | Mit einem siliziumsubstrat und einem siliziumschaltkreis integrierte isolierte germanium-photodetektoren umfassender bildsensor |
US7176530B1 (en) * | 2004-03-17 | 2007-02-13 | National Semiconductor Corporation | Configuration and fabrication of semiconductor structure having n-channel channel-junction field-effect transistor |
US7276392B2 (en) * | 2005-07-01 | 2007-10-02 | Sharp Laboratories Of America, Inc. | Floating body germanium phototransistor with photo absorption threshold bias region |
EP1894234B1 (en) | 2005-02-28 | 2021-11-03 | Silicon Genesis Corporation | Substrate stiffening method and system for a layer transfer. |
US20060234474A1 (en) | 2005-04-15 | 2006-10-19 | The Regents Of The University Of California | Method of transferring a thin crystalline semiconductor layer |
US7221006B2 (en) * | 2005-04-20 | 2007-05-22 | Freescale Semiconductor, Inc. | GeSOI transistor with low junction current and low junction capacitance and method for making the same |
JP2007123851A (ja) * | 2005-10-28 | 2007-05-17 | Sharp Corp | 光吸収しきい値バイアス領域を有するフローティングボディゲルマニウムフォトトランジスタ |
EP2126526A1 (en) * | 2007-03-05 | 2009-12-02 | Arokia Nathan | Sensor pixels, arrays and array systems and methods therefor |
KR20080083475A (ko) * | 2007-03-12 | 2008-09-18 | 삼성전자주식회사 | 픽셀의 누설전류를 방지할 수 있는 영상 촬상 장치 및 그방법 |
US8093597B2 (en) * | 2007-06-25 | 2012-01-10 | International Rectifier Corporation | In situ dopant implantation and growth of a III-nitride semiconductor body |
EP2277194A1 (en) | 2008-05-08 | 2011-01-26 | Basf Se | Layered structures comprising silicon carbide layers, a process for their manufacture and their use |
US8084739B2 (en) * | 2008-07-16 | 2011-12-27 | Infrared Newco., Inc. | Imaging apparatus and methods |
US7875918B2 (en) * | 2009-04-24 | 2011-01-25 | Omnivision Technologies, Inc. | Multilayer image sensor pixel structure for reducing crosstalk |
US8871109B2 (en) | 2009-04-28 | 2014-10-28 | Gtat Corporation | Method for preparing a donor surface for reuse |
JP5458690B2 (ja) * | 2009-06-22 | 2014-04-02 | ソニー株式会社 | 固体撮像装置およびカメラ |
JP5555864B2 (ja) * | 2009-12-22 | 2014-07-23 | 株式会社ブルックマンテクノロジ | 絶縁ゲート型半導体素子及び絶縁ゲート型半導体集積回路 |
JP2011210901A (ja) * | 2010-03-29 | 2011-10-20 | Seiko Instruments Inc | デプレッション型mosトランジスタ |
TWI414765B (zh) * | 2010-12-03 | 2013-11-11 | E Ink Holdings Inc | 光感測電路單元 |
US20130154049A1 (en) | 2011-06-22 | 2013-06-20 | George IMTHURN | Integrated Circuits on Ceramic Wafers Using Layer Transfer Technology |
JP2013084786A (ja) * | 2011-10-11 | 2013-05-09 | Sony Corp | 固体撮像素子、及び、電子機器 |
CN102881703B (zh) * | 2012-09-29 | 2016-04-06 | 中国科学院上海高等研究院 | 图像传感器及其制备方法 |
DE102013110695A1 (de) * | 2012-10-02 | 2014-04-03 | Samsung Electronics Co., Ltd. | Bildsensor, Verfahren zum Betreiben desselben und Bildverarbeitungssystem mit demselben |
US8896083B2 (en) * | 2013-03-15 | 2014-11-25 | Board Of Regents, The University Of Texas System | Depletion-mode field-effect transistor-based phototransitor |
JP6326487B2 (ja) * | 2013-06-20 | 2018-05-16 | ストレイティオ, インコーポレイテッドStratio, Inc. | Cmos画像センサ用のゲート制御型電荷変調デバイス |
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EP3528288B1 (en) | 2020-08-26 |
EP3528288A1 (en) | 2019-08-21 |
EP3011594A4 (en) | 2017-03-01 |
KR20160021289A (ko) | 2016-02-24 |
EP3011594B1 (en) | 2018-12-26 |
WO2014205353A2 (en) | 2014-12-24 |
US10109662B2 (en) | 2018-10-23 |
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