JP5987573B2 - 光学モジュール、電子機器、及び駆動方法 - Google Patents

光学モジュール、電子機器、及び駆動方法 Download PDF

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Publication number
JP5987573B2
JP5987573B2 JP2012200218A JP2012200218A JP5987573B2 JP 5987573 B2 JP5987573 B2 JP 5987573B2 JP 2012200218 A JP2012200218 A JP 2012200218A JP 2012200218 A JP2012200218 A JP 2012200218A JP 5987573 B2 JP5987573 B2 JP 5987573B2
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JP
Japan
Prior art keywords
wavelength
gap
light
reflective film
order
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JP2012200218A
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English (en)
Japanese (ja)
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JP2014056073A5 (enExample
JP2014056073A (ja
Inventor
友紀 松下
友紀 松下
望 廣久保
望 廣久保
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Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012200218A priority Critical patent/JP5987573B2/ja
Priority to CN201810768082.2A priority patent/CN108955877B/zh
Priority to CN201310404583.XA priority patent/CN103675977A/zh
Priority to EP21190095.6A priority patent/EP3929545A1/en
Priority to EP13183692.6A priority patent/EP2708861B1/en
Priority to US14/025,050 priority patent/US20140071445A1/en
Publication of JP2014056073A publication Critical patent/JP2014056073A/ja
Publication of JP2014056073A5 publication Critical patent/JP2014056073A5/ja
Application granted granted Critical
Publication of JP5987573B2 publication Critical patent/JP5987573B2/ja
Priority to US15/819,227 priority patent/US20180088316A1/en
Priority to US16/788,602 priority patent/US11029509B2/en
Priority to US17/314,553 priority patent/US20210263298A1/en
Priority to US18/813,478 priority patent/US20240418981A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Micromachines (AREA)
JP2012200218A 2012-09-12 2012-09-12 光学モジュール、電子機器、及び駆動方法 Active JP5987573B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2012200218A JP5987573B2 (ja) 2012-09-12 2012-09-12 光学モジュール、電子機器、及び駆動方法
CN201810768082.2A CN108955877B (zh) 2012-09-12 2013-09-06 驱动方法以及分光测定方法
CN201310404583.XA CN103675977A (zh) 2012-09-12 2013-09-06 光学模块、电子设备以及驱动方法
EP21190095.6A EP3929545A1 (en) 2012-09-12 2013-09-10 Optical module, electronic device, and driving method
EP13183692.6A EP2708861B1 (en) 2012-09-12 2013-09-10 Electronic device and driving method
US14/025,050 US20140071445A1 (en) 2012-09-12 2013-09-12 Optical Module, Electronic Device, and Driving Method
US15/819,227 US20180088316A1 (en) 2012-09-12 2017-11-21 Optical module, electronic device, and driving method
US16/788,602 US11029509B2 (en) 2012-09-12 2020-02-12 Optical module, electronic device, and driving method
US17/314,553 US20210263298A1 (en) 2012-09-12 2021-05-07 Optical Module, Electronic Device, And Driving Method
US18/813,478 US20240418981A1 (en) 2012-09-12 2024-08-23 Optical Module, Electronic Device, And Driving Method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012200218A JP5987573B2 (ja) 2012-09-12 2012-09-12 光学モジュール、電子機器、及び駆動方法

Publications (3)

Publication Number Publication Date
JP2014056073A JP2014056073A (ja) 2014-03-27
JP2014056073A5 JP2014056073A5 (enExample) 2015-10-29
JP5987573B2 true JP5987573B2 (ja) 2016-09-07

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JP2012200218A Active JP5987573B2 (ja) 2012-09-12 2012-09-12 光学モジュール、電子機器、及び駆動方法

Country Status (4)

Country Link
US (5) US20140071445A1 (enExample)
EP (2) EP3929545A1 (enExample)
JP (1) JP5987573B2 (enExample)
CN (2) CN103675977A (enExample)

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JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6413325B2 (ja) * 2014-05-01 2018-10-31 セイコーエプソン株式会社 アクチュエーター装置、電子機器、及び制御方法
JP6394189B2 (ja) * 2014-08-29 2018-09-26 セイコーエプソン株式会社 分光画像取得装置、及び分光画像取得方法
EP3290879B1 (en) * 2015-04-28 2023-10-11 Panasonic Holdings Corporation Spectroscopic module control method
JP2017187333A (ja) * 2016-04-04 2017-10-12 パイオニア株式会社 光測定器
US10288483B2 (en) * 2017-04-09 2019-05-14 Cymer, Llc Recovering spectral shape from spatial output
JP6930869B2 (ja) * 2017-06-28 2021-09-01 パイオニア株式会社 撮像装置、撮像方法及びプログラム
JP7025903B2 (ja) * 2017-11-24 2022-02-25 浜松ホトニクス株式会社 電気的検査方法
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
JP6526771B1 (ja) * 2017-11-24 2019-06-05 浜松ホトニクス株式会社 ウェハ
JP2019109374A (ja) * 2017-12-19 2019-07-04 セイコーエプソン株式会社 光モジュール、分光測定装置、分光測定方法及び電子機器
JP7238385B2 (ja) * 2018-12-20 2023-03-14 セイコーエプソン株式会社 分光フィルターモジュール、分光カメラおよび電子機器
WO2020130940A1 (en) 2018-12-21 2020-06-25 Ams Sensors Singapore Pte. Ltd. Linear temperature calibration compensation for spectrometer systems
KR102571019B1 (ko) * 2020-02-21 2023-08-28 장민준 깊이 이미징 장치 및 입사각에 따른 크로스토크가 저감된 간섭필터
KR20240140097A (ko) * 2022-01-26 2024-09-24 트리나미엑스 게엠베하 휴대용 분광계 장치
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