CN103675977A - 光学模块、电子设备以及驱动方法 - Google Patents

光学模块、电子设备以及驱动方法 Download PDF

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Publication number
CN103675977A
CN103675977A CN201310404583.XA CN201310404583A CN103675977A CN 103675977 A CN103675977 A CN 103675977A CN 201310404583 A CN201310404583 A CN 201310404583A CN 103675977 A CN103675977 A CN 103675977A
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CN
China
Prior art keywords
wavelength
gap
light
reflectance coating
measurement target
Prior art date
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Pending
Application number
CN201310404583.XA
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English (en)
Chinese (zh)
Inventor
松下友纪
广久保望
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Seiko Epson Corp
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Seiko Epson Corp
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Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to CN201810768082.2A priority Critical patent/CN108955877B/zh
Publication of CN103675977A publication Critical patent/CN103675977A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Micromachines (AREA)
CN201310404583.XA 2012-09-12 2013-09-06 光学模块、电子设备以及驱动方法 Pending CN103675977A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810768082.2A CN108955877B (zh) 2012-09-12 2013-09-06 驱动方法以及分光测定方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-200218 2012-09-12
JP2012200218A JP5987573B2 (ja) 2012-09-12 2012-09-12 光学モジュール、電子機器、及び駆動方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201810768082.2A Division CN108955877B (zh) 2012-09-12 2013-09-06 驱动方法以及分光测定方法

Publications (1)

Publication Number Publication Date
CN103675977A true CN103675977A (zh) 2014-03-26

Family

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CN201310404583.XA Pending CN103675977A (zh) 2012-09-12 2013-09-06 光学模块、电子设备以及驱动方法
CN201810768082.2A Active CN108955877B (zh) 2012-09-12 2013-09-06 驱动方法以及分光测定方法

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US (5) US20140071445A1 (enExample)
EP (2) EP3929545A1 (enExample)
JP (1) JP5987573B2 (enExample)
CN (2) CN103675977A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105045292A (zh) * 2014-05-01 2015-11-11 精工爱普生株式会社 致动器装置、电子设备、以及控制方法
CN110494722A (zh) * 2017-04-09 2019-11-22 西默有限公司 从空间输出中恢复光谱形状
CN111352283A (zh) * 2018-12-20 2020-06-30 精工爱普生株式会社 分光滤光器模块、分光相机以及电子机器
CN111406228A (zh) * 2017-11-24 2020-07-10 浜松光子学株式会社 电气检查方法
CN111406206A (zh) * 2017-11-24 2020-07-10 浜松光子学株式会社 光检查装置及光检查方法
CN114582991A (zh) * 2022-02-22 2022-06-03 南京信息工程大学 一种量子点集成微型紫外光谱传感芯片及其制备方法
CN115291384A (zh) * 2017-11-24 2022-11-04 浜松光子学株式会社 晶圆

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JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6394189B2 (ja) * 2014-08-29 2018-09-26 セイコーエプソン株式会社 分光画像取得装置、及び分光画像取得方法
EP3290879B1 (en) * 2015-04-28 2023-10-11 Panasonic Holdings Corporation Spectroscopic module control method
JP2017187333A (ja) * 2016-04-04 2017-10-12 パイオニア株式会社 光測定器
JP6930869B2 (ja) * 2017-06-28 2021-09-01 パイオニア株式会社 撮像装置、撮像方法及びプログラム
JP2019109374A (ja) * 2017-12-19 2019-07-04 セイコーエプソン株式会社 光モジュール、分光測定装置、分光測定方法及び電子機器
WO2020130940A1 (en) 2018-12-21 2020-06-25 Ams Sensors Singapore Pte. Ltd. Linear temperature calibration compensation for spectrometer systems
KR102571019B1 (ko) * 2020-02-21 2023-08-28 장민준 깊이 이미징 장치 및 입사각에 따른 크로스토크가 저감된 간섭필터
KR20240140097A (ko) * 2022-01-26 2024-09-24 트리나미엑스 게엠베하 휴대용 분광계 장치
WO2025248169A1 (en) * 2024-05-31 2025-12-04 Teknologian Tutkimuskeskus Vtt Oy Fabry-perot interferometer having a wide tuning range

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