JP7313115B2 - 光検査装置及び光検査方法 - Google Patents
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Description
[ファブリペロー干渉フィルタ及びダミーフィルタの構成]
[ウェハの構成]
[ウェハの製造方法]
[第1実施形態の光検査装置の構成]
[第2実施形態の光検査装置の構成]
[第3実施形態の光検査装置の構成]
[第4実施形態の光検査装置の構成]
[第5実施形態の光検査装置の構成]
[電圧印加方法]
[ウェハ支持部の変形例の構成]
[ファブリペロー干渉フィルタの製造方法]
[光検出装置の構成]
[光検査装置及び光検査方法による作用及び効果]
[変形例]
Claims (8)
- 基板層と、前記基板層上に二次元に配置された複数対の第1ミラー部及び第2ミラー部と、を備えるウェハであって、互いに対向する前記第1ミラー部と前記第2ミラー部との間に空隙が形成されることで、互いに対向する前記第1ミラー部と前記第2ミラー部との間の距離が静電気力によって変化する複数のファブリペロー干渉フィルタ部が構成されたウェハを検査対象とし、複数のファブリペロー干渉フィルタになる前記複数のファブリペロー干渉フィルタ部について、前記ウェハの状態で光透過特性の検査を実施する光検査装置であって、
前記複数のファブリペロー干渉フィルタ部について前記光透過特性の検査を実施する際に、前記第1ミラー部と前記第2ミラー部とが互いに対向する方向が基準線に沿うように前記ウェハを支持するウェハ支持部と、
前記基準線に沿って前記複数のファブリペロー干渉フィルタ部のそれぞれに入射する光を出射させる光出射部と、
前記基準線に沿って前記複数のファブリペロー干渉フィルタ部のそれぞれを透過した光を検出する光検出部と、
互いに対向する前記第1ミラー部と前記第2ミラー部との間の距離が変化するように前記複数のファブリペロー干渉フィルタ部のそれぞれに電圧を印加する電圧印加部と、を備え、
前記ウェハ支持部は、前記基準線に沿って光を通過させる光通過領域を有する、光検査装置。 - 前記ウェハ支持部は、前記ウェハのうち前記複数のファブリペロー干渉フィルタ部が構成された有効エリアに臨む開口を、前記光通過領域として有する、請求項1に記載の光検査装置。
- 前記ウェハ支持部は、前記ウェハのうち前記複数のファブリペロー干渉フィルタ部が構成された有効エリアに接触する光透過部材を、前記光通過領域として有する、請求項1に記載の光検査装置。
- 前記光出射部は、複数の波長の光を同時に出射するように構成されており、
前記光検出部は、前記複数の波長の光を波長ごとに検出するように構成されている、請求項1~3のいずれか一項に記載の光検査装置。 - 前記光出射部は、複数の波長の光を波長ごとに出射するように構成されており、
前記光検出部は、前記複数の波長の光に対して感度を有するように構成されている、請求項1~3のいずれか一項に記載の光検査装置。 - 前記ウェハ支持部によって支持された前記ウェハを撮像する撮像部を更に備える、請求項1~5のいずれか一項に記載の光検査装置。
- 基板層と、前記基板層上に二次元に配置された複数対の第1ミラー部及び第2ミラー部と、を備えるウェハであって、互いに対向する前記第1ミラー部と前記第2ミラー部との間に空隙が形成されることで、互いに対向する前記第1ミラー部と前記第2ミラー部との間の距離が静電気力によって変化する複数のファブリペロー干渉フィルタ部が構成されたウェハを検査対象とし、複数のファブリペロー干渉フィルタになる前記複数のファブリペロー干渉フィルタ部について、前記ウェハの状態で光透過特性の検査を実施する光検査方法であって、
前記ウェハを用意するステップと、
前記第1ミラー部と前記第2ミラー部とが互いに対向する方向に沿って前記複数のファブリペロー干渉フィルタ部のそれぞれに入射する光を出射させるステップと、
前記第1ミラー部と前記第2ミラー部とが互いに対向する方向に沿って前記複数のファブリペロー干渉フィルタ部のそれぞれを透過した光を検出するステップと、
互いに対向する前記第1ミラー部と前記第2ミラー部との間の距離が変化するように前記複数のファブリペロー干渉フィルタ部のそれぞれに電圧を印加するステップと、を備える、光検査方法。 - 前記ウェハを撮像するステップを更に備える、請求項7に記載の光検査方法。
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JP2017226090A JP7313115B2 (ja) | 2017-11-24 | 2017-11-24 | 光検査装置及び光検査方法 |
EP18880520.4A EP3715817B1 (en) | 2017-11-24 | 2018-11-09 | Optical inspection device and optical inspection method |
PCT/JP2018/041733 WO2019102879A1 (ja) | 2017-11-24 | 2018-11-09 | 光検査装置及び光検査方法 |
FIEP18880520.4T FI3715817T3 (fi) | 2017-11-24 | 2018-11-09 | Optinen tarkastuslaite ja optinen tarkastusmenetelmä |
CN201880075330.3A CN111406206B (zh) | 2017-11-24 | 2018-11-09 | 光检查装置及光检查方法 |
KR1020207016000A KR102642774B1 (ko) | 2017-11-24 | 2018-11-09 | 광 검사 장치 및 광 검사 방법 |
US16/765,626 US11422059B2 (en) | 2017-11-24 | 2018-11-09 | Optical inspection device and optical inspection method |
TW107141580A TWI797200B (zh) | 2017-11-24 | 2018-11-22 | 光檢查裝置及光檢查方法 |
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US11303356B1 (en) | 2019-04-18 | 2022-04-12 | Raytheon Company | Methods and apparatus for maintaining receiver operating point with changing angle-of-arrival of a received signal |
US11307395B2 (en) | 2019-05-23 | 2022-04-19 | Raytheon Company | Methods and apparatus for optical path length equalization in an optical cavity |
WO2020256823A1 (en) | 2019-06-20 | 2020-12-24 | Raytheon Company | Methods and apparatus for tracking moving objects using symmetric phase change detection |
US11159245B2 (en) * | 2019-07-03 | 2021-10-26 | Raytheon Company | Methods and apparatus for cavity angle tuning for operating condition optimization |
US11199754B2 (en) | 2019-07-15 | 2021-12-14 | Raytheon Company | Demodulator with optical resonator |
KR20220009009A (ko) | 2020-07-15 | 2022-01-24 | 주식회사 엘지에너지솔루션 | 안전성이 향상된 파우치형 이차전지 및 이를 포함하는 배터리 모듈 |
CN114720097B (zh) * | 2022-04-13 | 2023-06-09 | 安徽科瑞思创晶体材料有限责任公司 | 一种用于tgg晶片检测的光学检测系统 |
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US11422059B2 (en) | 2022-08-23 |
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EP3715817B1 (en) | 2023-10-18 |
EP3715817A4 (en) | 2021-08-11 |
CN111406206B (zh) | 2022-08-09 |
JP2019095667A (ja) | 2019-06-20 |
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TW201935076A (zh) | 2019-09-01 |
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EP3715817A1 (en) | 2020-09-30 |
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