JP5842925B2 - 基板処理装置、及び基板処理方法 - Google Patents
基板処理装置、及び基板処理方法 Download PDFInfo
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- JP5842925B2 JP5842925B2 JP2013541680A JP2013541680A JP5842925B2 JP 5842925 B2 JP5842925 B2 JP 5842925B2 JP 2013541680 A JP2013541680 A JP 2013541680A JP 2013541680 A JP2013541680 A JP 2013541680A JP 5842925 B2 JP5842925 B2 JP 5842925B2
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
- B65H23/188—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
- B65H23/1882—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web and controlling longitudinal register of web
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/24—Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
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- B65H2406/00—Means using fluid
- B65H2406/10—Means using fluid made only for exhausting gaseous medium
- B65H2406/11—Means using fluid made only for exhausting gaseous medium producing fluidised bed
- B65H2406/111—Means using fluid made only for exhausting gaseous medium producing fluidised bed for handling material along a curved path, e.g. fluidised turning bar
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2553/00—Sensing or detecting means
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H2601/00—Problem to be solved or advantage achieved
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H2801/00—Application field
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65H2801/00—Application field
- B65H2801/61—Display device manufacture, e.g. liquid crystal displays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
- Liquid Crystal (AREA)
- Advancing Webs (AREA)
- Electroluminescent Light Sources (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013541680A JP5842925B2 (ja) | 2011-11-04 | 2012-09-27 | 基板処理装置、及び基板処理方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011242788 | 2011-11-04 | ||
JP2011242788 | 2011-11-04 | ||
JP2013541680A JP5842925B2 (ja) | 2011-11-04 | 2012-09-27 | 基板処理装置、及び基板処理方法 |
PCT/JP2012/074830 WO2013065429A1 (ja) | 2011-11-04 | 2012-09-27 | 基板処理装置、及び基板処理方法 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014181202A Division JP5822016B2 (ja) | 2011-11-04 | 2014-09-05 | パターン露光方法、及びデバイス製造方法 |
JP2015181662A Division JP5962831B2 (ja) | 2011-11-04 | 2015-09-15 | パターン形成方法、及びパターン形成装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2013065429A1 JPWO2013065429A1 (ja) | 2015-04-02 |
JP5842925B2 true JP5842925B2 (ja) | 2016-01-13 |
Family
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Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
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JP2013541680A Active JP5842925B2 (ja) | 2011-11-04 | 2012-09-27 | 基板処理装置、及び基板処理方法 |
JP2014181202A Active JP5822016B2 (ja) | 2011-11-04 | 2014-09-05 | パターン露光方法、及びデバイス製造方法 |
JP2015181662A Active JP5962831B2 (ja) | 2011-11-04 | 2015-09-15 | パターン形成方法、及びパターン形成装置 |
JP2016121707A Active JP6308247B2 (ja) | 2011-11-04 | 2016-06-20 | パターン形成方法 |
JP2018046750A Pending JP2018109786A (ja) | 2011-11-04 | 2018-03-14 | パターン露光装置 |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
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JP2014181202A Active JP5822016B2 (ja) | 2011-11-04 | 2014-09-05 | パターン露光方法、及びデバイス製造方法 |
JP2015181662A Active JP5962831B2 (ja) | 2011-11-04 | 2015-09-15 | パターン形成方法、及びパターン形成装置 |
JP2016121707A Active JP6308247B2 (ja) | 2011-11-04 | 2016-06-20 | パターン形成方法 |
JP2018046750A Pending JP2018109786A (ja) | 2011-11-04 | 2018-03-14 | パターン露光装置 |
Country Status (5)
Country | Link |
---|---|
JP (5) | JP5842925B2 (zh) |
KR (2) | KR101623695B1 (zh) |
CN (2) | CN103958379B (zh) |
TW (1) | TWI541932B (zh) |
WO (1) | WO2013065429A1 (zh) |
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KR102096961B1 (ko) * | 2013-04-30 | 2020-04-03 | 가부시키가이샤 니콘 | 표시 패널 제조 방법 |
US10246287B2 (en) * | 2014-09-04 | 2019-04-02 | Nikon Corporation | Processing system and device manufacturing method |
JP5799181B1 (ja) * | 2015-01-07 | 2015-10-21 | 住友化学株式会社 | 有機電子素子の製造方法 |
JP6447151B2 (ja) * | 2015-01-14 | 2019-01-09 | 株式会社Ihi | テンション制御装置及び搬送装置 |
WO2016136974A1 (ja) * | 2015-02-27 | 2016-09-01 | 株式会社ニコン | 基板処理装置、デバイス製造システム及びデバイス製造方法 |
JP2019079594A (ja) * | 2016-03-18 | 2019-05-23 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子の発光パターン形成方法 |
JP2019079595A (ja) * | 2016-03-18 | 2019-05-23 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンス素子のパターニング方法及びパターニング装置 |
KR102379193B1 (ko) * | 2016-05-19 | 2022-03-28 | 가부시키가이샤 니콘 | 기판 지지 장치, 노광 장치, 및 패터닝 장치 |
CN106226968B (zh) * | 2016-09-30 | 2018-11-09 | 成都捷翼电子科技有限公司 | 一种卷对卷柔性电子纸贴合装置及贴合方法 |
JP6824713B2 (ja) * | 2016-11-30 | 2021-02-03 | キヤノン株式会社 | インプリント方法、インプリント装置、型、および物品の製造方法 |
JP6818395B2 (ja) * | 2016-12-22 | 2021-01-20 | 株式会社オーク製作所 | 露光装置 |
JP6461235B2 (ja) * | 2017-05-22 | 2019-01-30 | キヤノントッキ株式会社 | 基板載置装置、成膜装置、基板載置方法、成膜方法、および電子デバイスの製造方法 |
TWI813592B (zh) | 2017-10-30 | 2023-09-01 | 美商康寧公司 | 用於處理薄玻璃帶的系統及方法 |
KR102100550B1 (ko) * | 2018-01-29 | 2020-04-13 | 충북대학교 산학협력단 | 구리 전극 제작 방법 및 구리 전극 제작 시스템 |
JP7058385B2 (ja) * | 2018-03-23 | 2022-04-22 | 株式会社浅野研究所 | 差圧成形装置、及び、差圧成形方法 |
BR112021004355A2 (pt) * | 2018-09-10 | 2021-05-25 | Ball Corporation | método e aparelho para controlar uma operação realizada em uma folha contínua de material |
TW202100832A (zh) * | 2019-03-11 | 2021-01-01 | 以色列商核心流有限公司 | 用於卷對卷製程之流體流腹板張力裝置 |
CN109850657B (zh) * | 2019-04-15 | 2022-09-06 | 厦门前润科技有限公司 | 一种高延展柔性材料的分切机及其恒定宽度的控制方法 |
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AU2020417363B2 (en) | 2019-12-31 | 2023-03-16 | Zhejiang Shaoxing Supor Domestic Electrical Appliance Co., Ltd. | Cooking appliance |
CN112340455B (zh) * | 2020-11-10 | 2022-02-08 | 深圳市全洲自动化设备有限公司 | 一种为玻璃工件贴偏光片的贴片生产线 |
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