JP5842925B2 - Substrate processing apparatus and substrate processing method - Google Patents

Description

The present invention relates to a substrate processing apparatus for performing high-precision processing such as patterning on a web substrate such as a film or a sheet, and a web substrate transport apparatus. Another object of the present invention is to provide a substrate processing method for performing high-precision processing.
This application claims priority based on Japanese Patent Application No. 2011-242788 for which it applied on November 4, 2011, and uses the content here.

  As display elements constituting display devices such as display devices, for example, liquid crystal display elements, organic electroluminescence (organic EL) elements, electrophoretic elements used for electronic paper, and the like are known. As one of methods for manufacturing these elements, for example, a method called a roll-to-roll method (hereinafter simply referred to as “roll method”) is known (for example, refer to Patent Document 1).

  In the roll method, a single sheet-like substrate (web) wound around a roller on the substrate supply side is sent out, and the substrate is conveyed while being wound up by the roller on the substrate recovery side. In this method, a pattern such as a display circuit or a driver circuit is sequentially formed on a substrate after the film is wound up. In recent years, processing apparatuses that form highly accurate patterns have been proposed.

International Publication No. 2006/100868

  However, when dealing with further higher accuracy, it may be insufficient to obtain patterning accuracy (high resolution, low distortion of the transfer pattern, etc.) of the processing apparatus.

  An object of an aspect of the present invention is to provide a substrate processing apparatus that can perform high-precision processing or an apparatus that accurately conveys a web substrate. Another object of the present invention is to provide a substrate processing method capable of highly accurate processing.

  According to the first aspect of the present invention, in the substrate processing apparatus for transporting the belt-shaped substrate in the first direction and processing the surface to be processed of the substrate, the first guide member for guiding the substrate in the first direction. And a second guide member for guiding the substrate guided from the first guide member, and a tension between the first guide member and the second guide member for applying tension to the substrate in a second direction intersecting the first direction. There is provided a substrate processing apparatus including a tension applying mechanism that reduces the size of the substrate, and a processing apparatus that processes a surface to be processed of the substrate between a first guide member and a second guide member.

  According to a second aspect of the present invention, there is provided a substrate processing method for transporting a sheet-like long substrate in the longitudinal direction and sequentially forming a predetermined pattern on the substrate, wherein the pattern is A step of acquiring information on the degree of contraction when the partial region of the substrate to be formed is contracted in the width direction orthogonal to the longitudinal direction, and the specific 2 sandwiching the partial region of the substrate in the longitudinal direction Applying a longitudinal tension to the substrate based on the information on the degree of contraction between the positions.

  According to the aspect of the present invention, a substrate processing apparatus capable of high-precision processing can be provided. Moreover, according to another aspect of the present invention, a substrate processing method capable of highly accurate processing can be provided.

It is a schematic diagram which shows the whole structure of the substrate processing apparatus which concerns on this embodiment. It is a front view which shows the 1st structure of the processing apparatus which concerns on this embodiment. FIG. 3 is a plan view of the first configuration of FIG. 2 as viewed from above. It is a figure which shows the state of the expansion-contraction of the board | substrate by this embodiment. It is a graph which shows the change of substrate contraction by the 1st simulation. It is a graph which shows the change of substrate contraction by the 2nd simulation. It is a graph which shows the change of substrate contraction by the 3rd simulation. It is a graph showing the conditions of the board | substrate contraction calculated | required from a simulation result. It is a top view which shows the 2nd structure of the processing apparatus which concerns on this embodiment. It is a front view which shows the 3rd structure of the processing apparatus which concerns on this embodiment. It is the top view which looked at the 3rd composition of Drawing 10 from the top. It is a figure which shows the 4th structure of the processing apparatus which concerns on this embodiment. It is a figure which shows the mode of the board | substrate processed by the 4th structure of FIG. It is a top view which shows the 5th structure of the processing apparatus which concerns on this embodiment. It is a top view which shows the 6th structure of the processing apparatus which concerns on this embodiment. It is the front view which looked at the 6th structure of FIG. 15 from the side.

Hereinafter, the present embodiment will be described with reference to the drawings.
FIG. 1 is a schematic diagram showing a configuration of a substrate processing apparatus 100 according to the present embodiment.
As shown in FIG. 1, the substrate processing apparatus 100 performs processing on a substrate supply unit 2 that supplies a strip-shaped substrate (for example, a strip-shaped film member) S and a surface (surface to be processed) Sa of the substrate S. A substrate processing unit (pattern forming apparatus) 3, a substrate recovery unit 4 that recovers the substrate S, and a control unit CONT that controls these units are provided. The substrate processing unit 3 performs various processes on the surface of the substrate S from when the substrate S is sent out from the substrate supply unit 2 to when the substrate S is recovered by the substrate recovery unit 4.
The substrate processing apparatus 100 can be used when a display element (electronic device) such as an organic EL element or a liquid crystal display element is formed on the substrate S.

  In this embodiment, an XYZ coordinate system is set as shown in FIG. 1, and the following description will be given using this XYZ coordinate system as appropriate. In the XYZ coordinate system, for example, the X axis and the Y axis are set along the horizontal plane, and the Z axis is set upward along the vertical direction. The substrate processing apparatus 100 transports the substrate S from the minus side (−X axis side) to the plus side (+ X axis side) along the X axis as a whole. In that case, the width direction (short direction) of the strip | belt-shaped board | substrate S is set to the Y-axis direction.

  As the substrate S to be processed in the substrate processing apparatus 100, for example, a foil (foil) such as a resin film or stainless steel can be used. For example, the resin film is made of polyethylene resin, polypropylene resin, polyester resin, ethylene vinyl copolymer resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, polycarbonate resin, polystyrene resin, vinyl acetate resin, etc. Can be used.

  The substrate S preferably has a smaller coefficient of thermal expansion so that the dimensions do not change even when subjected to heat of about 200 ° C., for example. For example, an inorganic filler can be mixed with a resin film to reduce the thermal expansion coefficient. Examples of the inorganic filler include titanium oxide, zinc oxide, alumina, silicon oxide and the like. The substrate S may be a single piece of ultrathin glass having a thickness of about 100 μm manufactured by a float process or the like, or a laminate in which the resin film or aluminum foil is bonded to the ultrathin glass.

  The dimension in the width direction (short direction) of the substrate S is, for example, about 1 m to 2 m, and the dimension in the length direction (long direction) is, for example, 10 m or more. Of course, this dimension is only an example and is not limited thereto. For example, the dimension of the substrate S in the Y-axis direction may be 1 m or less, 50 cm or less, or 2 m or more. Further, the dimension of the substrate S in the X-axis direction may be 10 m or less.

  The substrate S is formed so as to have flexibility. Here, the term “flexibility” refers to the property that the substrate can be bent without being broken or broken even if a force of its own weight is applied to the substrate. In addition, flexibility includes a property of bending by a force of about its own weight. Further, the flexibility varies depending on the material, size, thickness, or environment such as temperature of the substrate. As the substrate S, a single strip-shaped substrate may be used, but a configuration in which a plurality of unit substrates are connected and formed in a strip shape may be used.

The substrate supply unit 2 sends out and supplies the substrate S wound in a roll shape, for example, to the substrate processing unit 3. In this case, the substrate supply unit 2 is provided with a shaft around which the substrate S is wound, a rotation drive device that rotates the shaft, and the like. In addition, for example, a configuration in which a cover portion that covers the substrate S wound in a roll shape or the like may be provided.
The substrate supply unit 2 is not limited to a mechanism that sends out the substrate S wound in a roll shape, and includes a mechanism (for example, a nip-type drive roller) that sequentially feeds the belt-like substrate S in the length direction. I just need it.

  The substrate collection unit 4 collects the substrate S that has passed through the substrate processing apparatus 100, for example, in a roll shape. Similar to the substrate supply unit 2, the substrate recovery unit 4 is provided with a shaft for winding the substrate S, a rotational drive source for rotating the shaft, a cover for covering the recovered substrate S, and the like. In addition, when the substrate S is cut into a panel shape in the substrate processing unit 3, the substrate S is collected in a state different from the state wound in a roll shape, for example, the substrate S is collected in a stacked state. It does not matter.

  The substrate processing unit 3 transports the substrate S supplied from the substrate supply unit 2 to the substrate recovery unit 4 and processes the surface Sa of the substrate S during the transport. The substrate processing unit 3 includes a processing apparatus (pattern forming unit) 10 that performs processing on the surface Sa to be processed of the substrate S, and a driving roller R that sends the substrate S under conditions corresponding to the form of processing. And a transfer device (substrate transfer unit) 20.

  The processing apparatus 10 has various apparatuses for forming, for example, organic EL elements on the surface Sa to be processed of the substrate S. Examples of such an apparatus include a partition forming apparatus such as an imprint method for forming a partition on the surface Sa to be processed, an electrode forming apparatus for forming an electrode, and a light emitting layer forming apparatus for forming a light emitting layer. Etc.

  More specifically, a droplet coating apparatus (for example, an ink jet type coating apparatus), a film forming apparatus (for example, a plating apparatus, a vapor deposition apparatus, a sputtering apparatus, etc.), an exposure apparatus, a developing apparatus, a surface modifying apparatus, a cleaning apparatus, etc. Can be mentioned. Each of these apparatuses is appropriately provided along the transport path of the substrate S, and a flexible display panel or the like can be produced by a so-called roll-to-roll method. In the present embodiment, an exposure apparatus is provided as the processing apparatus 10, and apparatuses that perform processes before and after the photosensitive apparatus (photosensitive layer forming process, photosensitive layer developing process, etc.) are also provided in-line as necessary.

  The substrate processing unit 3 is provided with an alignment camera 5 that cooperates with a processing apparatus 10 as an exposure apparatus. The alignment camera 5 individually detects, for example, alignment marks ALM (see FIG. 3) formed along the −Y axis side edge and the + Y axis side edge of the substrate S, for example. The detection result by the alignment camera 5 is transmitted to the control part CONT.

2 and 3 are diagrams showing a partial configuration of the substrate processing unit 3 according to the first configuration of the present embodiment. FIG. 2 is a front view of the configuration of the substrate processing unit 3 according to the first configuration. FIG. 3 is a plan view of the configuration of the substrate processing unit 3 according to the first configuration.
As shown in FIGS. 2 and 3, the substrate processing unit 3 includes a first roller 11 (rotating roller), a nip roller 11a (rotating roller), a second roller 12 (rotating roller), a nip roller 12a (rotating roller), The housing 13 and the exposure apparatus EX as the processing apparatus 10 are included.

  The first roller 11 is a first guide member (substrate guide member) that guides the substrate S in the + X-axis direction toward the housing 13 side. The first roller 11 is provided parallel to the Y axis on the upstream side (−X axis side) in the transport direction of the substrate S with respect to the housing 13, and is driven by a motor or the like around a rotation axis parallel to the Y axis. It is provided so as to be rotatable. The substrate S is sandwiched between the first roller 11 and the nip roller 11a and supported so as to be conveyed as indicated by an arrow Dx in the + X-axis direction.

The second roller 12 is a second guide member (substrate guide member) that guides the substrate S from the housing 13 to the + X axis side.
The second roller 12 is arranged parallel to the Y axis on the downstream side (+ X axis side) in the transport direction of the substrate S with respect to the housing 13, and can be rotated by a motor or the like around a rotation axis parallel to the Y axis. Is provided. The substrate S is sandwiched between the second roller 12 and the nip roller 12a and supported so as to be conveyed as indicated by an arrow Dx in the + X axis direction.

The housing 13 is disposed between the first roller 11 and the second roller 12. The housing 13 is formed in a rectangular parallelepiped shape, for example. The housing 13 has a bottom portion 13B and a wall portion 13W. The bottom portion 13 </ b> B constitutes an end surface of the housing 13 on the −Z axis side. The wall portion 13W includes an end surface 13Wa on the −X axis side, an end surface 13Wb on the + X axis side, an end surface 13Wc on the + Y axis side, and an end surface 13Wd on the −Y axis side.
Note that the projection optical system PL is disposed on the + Z axis side of the housing 13 in the case of the projection exposure method, and the mask stage unit MST is disposed in the case of the proximity exposure method.

  A substrate stage mechanism (substrate support unit) 14 that performs processing (exposure here) on the substrate S is provided inside the storage chamber 13R surrounded by the walls 13Wa to 13Wd and the bottom 13B. Therefore, an opening 13m through which the substrate S carried in from the first roller 11 passes is formed on the end surface 13Wa on the −X axis side of the housing 13. Further, an opening 13n for carrying the substrate S from the accommodation chamber 13R (substrate stage mechanism 14) to the second roller 12 is formed on the end surface 13Wb on the + X axis side of the housing 13.

  A moving roller 17 is formed on the −Z axis side of the bottom portion 13B. The moving roller 17 is placed on the guide rail 16. The guide rail 16 is supported by a support unit (not shown) of the substrate processing unit 3, such as a factory floor. The guide rail 16 is formed along the X-axis direction (or Y-axis direction). The housing 13 is provided to be movable in the X-axis direction (or Y-axis direction) along the guide rail 16 by a drive mechanism (not shown). The movement of the casing 13 by the moving roller 17 and the guide rail 16 is not always necessary.

  A substrate stage mechanism 14 and an alignment camera 18 (corresponding to the alignment camera 5 in FIG. 1) are provided in the accommodating portion 13R. The substrate stage mechanism 14 is, for example, a cylindrical surface in order to support a part of the substrate S between the first roller 11 and the second roller 12 (hereinafter referred to as “inter-roller portion Sr”) in a non-contact manner. The outer peripheral surface 14a is formed of a pad member (such as a porous air pad) for forming a fluid bearing layer between the outer peripheral surface 14a and the substrate S.

  The substrate stage mechanism 14 is provided with a fluid control unit 115 for sucking the ejected fluid while ejecting fluid (air, nitrogen, etc.) from the pad member constituting the outer peripheral surface 14a.

  The drive unit 15 including a plurality of drive sources such as a motor changes the position and posture of the substrate stage mechanism 14 (outer peripheral surface 14a) in a small amount, and mainly in each of the Z-axis, X-axis, and Y-axis directions. And fine rotation of each rotation in the θZ direction (around the Z axis) and θX (around the X axis). The driving unit 15 adjusts the driving amount, timing, and the like in synchronization with the transport control of the substrate S by the first roller 11 and the second roller 12 under the control of the control unit CONT in FIG.

  As shown in FIG. 3, the two alignment cameras 18 respectively detect alignment marks ALM formed on both ends of the substrate S in the Y-axis direction (width direction). A plurality of alignment marks ALM are formed along the + Y-axis side edge and the −Y-axis side edge of the substrate S. The plurality of alignment marks ALM are arranged at an equal pitch in the X-axis direction. The alignment camera 18 is directed to a portion of the substrate S that is supported by the substrate stage mechanism 14, and is located at a position (−X axis direction) in front of the slit-shaped projection area EA (see FIG. 3) by the exposure apparatus EX. The alignment mark ALM is detected individually. That is, the alignment camera 18 individually detects the alignment mark ALM at a position upstream from the position of the projection area EA in the transport direction of the substrate S. The detection result by the alignment camera 18 is transmitted to the control part CONT.

  The alignment camera 18 is a microscope imaging system that receives an image of the alignment mark ALM enlarged by a microscope with a solid-state imaging device such as a CCD or CMOS. The observation area on the substrate S of the microscope imaging system is in the range of several tens to several hundreds of μm in length and width. Therefore, the alignment mark ALM is, for example, a linear pattern having a line width of several μm to 20 μm, or several such linear patterns in parallel so that the alignment mark ALM can be reliably observed in such a narrow observation region. It is formed on the substrate S as an arrayed grid pattern.

  By the way, as shown in FIG. 2, the exposure apparatus EX includes an illumination unit IL and a mask stage MST. The illumination unit IL irradiates slit-shaped illumination light toward the substrate S in the −Z-axis direction. Mask stage MST holds mask M on which a predetermined pattern P is formed. The mask stage MST is provided with a mask holder MH that can hold masks M having different dimensions. Mask stage MST is provided so as to be movable in the X-axis direction by a driving device (not shown), and moves at a speed synchronized with the feed speed of substrate S in the X-axis direction.

  The movement of the mask stage MST can be controlled by the control unit CONT. The exposure apparatus EX receives an image of exposure light irradiated from the illumination unit IL and passed through the mask M (a spatial image by the projection optical system PL in the case of the projection exposure method, and a shadow image in the case of the proximity exposure method) of the projection area EA ( 3). In the present embodiment, the shape of the projection area EA is a slit shape that is elongated in parallel with the ridgeline of the cylindrical outer peripheral surface 14a of the substrate stage mechanism 14.

  As shown in FIG. 2, after the substrate S is nipped by the first roller 11, wound around a predetermined angle of the outer peripheral surface 14 a of the substrate stage mechanism 14, and then nipped by the second roller 12, It is conveyed as shown by arrow Dx. In the present embodiment, as shown in FIG. 3, conveyance is performed between the first roller 11 and the second roller 12 so as to apply a tension F in the conveyance direction to the substrate S.

  Specifically, each motor is controlled by the controller CONT so that the rotational speed (circumferential speed) of the second roller 12 is slightly higher than the rotational speed (circumferential speed) of the first roller 11. In this configuration, the first roller 11 and the second roller 12, a drive motor for precisely controlling the peripheral speed (or torque) of these rollers, and an electric control system (including a program) for the motor are tension applying mechanisms. It corresponds to.

  Thus, when the tension (tension) F in the X-axis direction is applied to the substrate S, the dimension (width) in the Y-axis direction of the substrate S before entering the first roller 11 is TD0 as shown in FIG. Between the first roller 11 and the second roller 12, the dimension (width) in the Y-axis direction contracts to become TD1. That is, when the substrate S is pulled with the tension F between the first roller 11 and the second roller 12 separated by a distance L (actual length of the substrate S) in the X-axis direction, the substrate S extends in the X-axis direction, and Y There is a tendency to shrink in the axial direction.

  When the distance L is sufficiently large with respect to the initial width TD0 of the substrate S, as shown in FIG. 3, the range from the first roller 11 to the distance As in the + X-axis direction and before the second roller 12 (−X In the range up to the distance Ae in the axial direction, the rate of contraction change (Y-axis direction contraction amount per unit length in the X-axis direction (degree of contraction)) is large, but the distance As from the first roller 11 to the + X-axis direction. In the range between the range up to and the range from the second roller 12 to the distance Ae in the −X-axis direction, it is possible to obtain a stable range in which the rate of contraction change (degree of contraction) hardly changes. I understood. Therefore, in the present embodiment, a stable region where the shrinkage change rate in the Y-axis direction of the substrate S is substantially constant (substantially zero) is created, and exposure is performed by setting the projection region EA in the stable region.

  FIG. 4 is a diagram for exaggerating and explaining the expansion / contraction state of the substrate for the simulation. The distance L of the substrate S between the first roller 11 and the second roller 12 to be nipped is equal to that of the substrate S. A situation when the initial width TD0 is larger is shown. When the substrate S is pulled with the tension F in the X-axis direction, the edges Es1 and Es2 of the substrate S are deformed so as to be recessed inward from the initial width TD0 of the substrate S in the range As from the first roller 11 to the + X-axis direction. In the range from the second roller 12 to the distance Ae in the −X axis direction, the edges Ee1 and Ee2 of the substrate S are deformed so as to return to the initial width TD0 of the substrate S.

  Then, in the range of distance Wx between the range of distance As from the first roller 11 in the + X-axis direction and the range of distance Ae from the second roller 12 to the −X-axis direction, the substrate S contracts to a substantially constant width TD1. A stable region is obtained.

  The stable area is determined in accordance with the pattern transfer accuracy in the projection area EA (allowable range of relative magnification error and overlay error). In the present embodiment, as an example of the simulation, the Y-axis direction dimension of the projection area EA is about 80 to 90% of the initial width TD0 of the substrate S, and the precision exposure for transferring a fine pattern having a dimension of several μm or less is assumed. Will be described.

  For example, when the initial width TD0 is 300 mm and the design dimension in the Y-axis direction of the projection area EA is 260 mm, the projection area on the substrate S is increased by about 50 ppm as a whole by the wet process or the drying process in the previous process. The dimension in the Y-axis direction corresponding to EA is extended by 13.0 μm. This value means that a position error (alignment error) of 13.0 μm at the maximum is caused when overlaying exposure by positioning a pattern of several μm size with high accuracy, and precise exposure processing is difficult as it is. It will be something.

  In the case of a PET film, which is a typical web substrate, it may grow as much as 100 ppm depending on the process. For the manufacture of a large display, the initial width TD0 and the projection area EA of the substrate S are increased, the design Y-axis direction dimension of the projection area EA is 520 mm (TD0 = 600 mm), and the substrate S extends 100 ppm as a whole. Assuming that the maximum amount of extension in the Y-axis direction exceeds 50 μm.

  In general, it is said that an allowable range of overlay error and position error as an exposure apparatus is about a fraction of the pattern size (or line width) to be transferred. Therefore, if the minimum dimension (line width) of the pattern to be transferred is 3 μm as an example, the allowable range of the overlay error and position error is 0.6 μm. That is, at the time of actual exposure, it is necessary to make the overlay error and position error 0.6 μm or less at any point in the Y-axis direction within the projection area EA.

Therefore, in this embodiment, various simulations are performed by changing the distance L of the substrate S between the two rollers 11 and 12, the initial width TD0 of the substrate S, the thickness t, the tension F, the Poisson's ratio, and the Young's modulus. A range satisfying the following two conditions was defined as a stable region.
(1) From the two rollers (11, 12) toward the center of the substrate S, the amount of contraction in the Y-axis direction is obtained every 30 mm pitch in the X-axis direction, and the amount of change is 0.3 μm or less [the rate of contraction change is approximately zero〕.
(2) The change width of the absolute value of the width TD1 of the contracted substrate S is within 1.5 μm in the entire range where the change amount is 0.3 μm or less.

  These numerical conditions are examples in the simulation, and the actual numerical values are appropriately determined depending on the extension of the substrate S by the process, the minimum dimension of the pattern to be transferred, the allowable range of overlay error and position error, and the like.

  FIG. 5 shows a PET film (with a Poisson's ratio of 0.35 and a Young's modulus of 4 GPa) in which the distance L of the substrate S between the two rollers 11 and 12 is 100 cm, the initial width TD0 is 30 cm, and the thickness t of the substrate S is 100 μm. It is the graph which simulated the mode (the amount of contraction, the degree of contraction) of contraction deformation when tension F was changed into 20N, 50N, 100N, and 150N as an object. Positions 0 cm and 100 cm on the horizontal axis are nip positions by the first roller 11 and the second roller 12, respectively.

  As shown in FIG. 5, the maximum amount of contraction changes almost in proportion to the magnitude of the tension F. Further, the range in which the shrinkage amount is substantially constant, that is, the width of the stable region becomes narrower as the tension F increases. When the tension F is about 20 N, the contraction is nonlinear up to about 10 cm from both ends, and the width of the stable region is about 80 cm. When the tension F is 150 N, the shrinkage is nonlinear up to about 20 cm from both ends, and the width of the stable region is about 60 cm.

  FIG. 6 is a graph showing a simulation result with the other conditions being the same except that the distance L of the substrate S between the two rollers 11 and 12 is narrowed to 40 cm as compared with the case of FIG. . Since the distance L is reduced to 40% compared to the case of FIG. 5, the width of the stable region obtained for each tension F is correspondingly reduced. In the simulation, the range of nonlinear shrinkage on both sides tends to increase as the distance L decreases.

  For example, when the tension F is 20 N, the condition of FIG. 5 is non-linear up to about 10 cm from both ends, but in the case of FIG. 6, it is non-linear from about 14 to 15 cm from both ends.

  FIG. 7 illustrates a PET film (with a Poisson's ratio of 0.35 and a Young's modulus of 4 GPa) with a distance L of the substrate S between the two rollers 11 and 12 of 100 cm and a thickness t of the substrate S of 100 μm. It is a graph simulating the state of shrinkage deformation (shrinkage amount, degree of shrinkage) when the initial width TD0 is changed to 40 cm, 60 cm, and 100 cm at 100 N.

  When the initial width was 100 cm (that is, L = TD0), a stable region meeting the conditions was not obtained, and nonlinear shrinkage was exhibited over the entire distance L. A stable region appeared as the initial width TD0 decreased to 60 cm and 40 cm. The width Wx1 of the stable region at TD0 = 60 cm was a little less than 30 cm, and the width Wx2 of the stable region at TD0 = 40 cm was about 60 cm.

  In addition, although simulations were performed with differences in the Poisson's ratio, Young's modulus, and thickness t of the substrate S, there was no significant difference in the appearance tendency of the stable region, and the stable region was considered from the simulation results shown in FIGS. It has been found that the main factor contributing to the appearance of is the ratio of the distance L to the initial width TD0.

  FIG. 8 shows the ratio of the initial width TD0 to the distance L between nips (TD0 / L) on the vertical axis and the ratio of the width Wx of the stable region to the distance L (Wx / L) for a PET film as the substrate S. Is a graph in which some of the simulation results are plotted.

  The plotted simulation results are all when the tension F is 100 N, and a line BS connecting 1.0 on the vertical axis and 1.0 on the horizontal axis represents a theoretical boundary, and a resinous web such as a PET film is shown. In this case, the tendency appears on the lower left side of the line BS and does not appear on the upper right side.

A line Sim1 in FIG. 8 represents an average of simulation results obtained when the thickness t is 200 μm, the Poisson's ratio is 0.3, and the Young's modulus is 6 GPa. The line Sim2 has a thickness t of 100 μm and a Poisson's ratio of 0. 4 represents the average of simulation results obtained when the Young's modulus is 4 GPa. In the case of a typical PET film, the results are generally distributed between the line Sim1 and the line Sim2 in the simulation.
However, when the thickness t is extremely thin or some thin film is laminated on the surface, the result may appear at the lower left of the line Sim2, but it may appear at the upper right of the boundary line BS. Absent.

  From the above-mentioned tendency based on the simulation result, the amount of contraction in the Y-axis direction of the substrate S required in the projection area EA (shrinkage rate, contraction rate, If the degree of contraction) and the size of the tension F necessary for this are known, the relationship between the minimum stability area width, distance L, and initial width TD0 to be secured by the tension F is determined in advance. Therefore, the substrate transport path length (distance L) from the first roller 11 to the second roller 12 can be optimized.

  Next, a process of manufacturing a display element (electronic device) such as an organic EL element or a liquid crystal display element using the substrate processing apparatus 100 configured as described above will be described. The substrate processing apparatus 100 manufactures the display element according to the control of recipes (processing conditions, timing, drive parameters, etc.) set in the control unit CONT.

  First, the substrate S wound around a roller (not shown) is attached to the substrate supply unit 2. The controller CONT rotates a roller (not shown) so that the substrate S is sent out from the substrate supply unit 2 from this state. Then, the substrate S that has passed through the substrate processing unit 3 is taken up by a roller (not shown) provided in the substrate recovery unit 4.

  The control unit CONT appropriately transfers the substrate S in the substrate processing unit 3 by the transfer device 20 of the substrate processing unit 3 after the substrate S is sent out from the substrate supply unit 2 and taken up by the substrate recovery unit 4. Transport.

  When performing exposure processing on the substrate S transported in the substrate processing unit 3 using the exposure apparatus EX, the control unit CONT first holds the substrate S between the first roller 11 and the nip roller 11a. Thus, the portion of the substrate S closer to the −X axis than the first roller 11 is loosened. Further, the control unit CONT loosens the portion of the substrate S closer to the + X axis than the second roller 12 in a state where the substrate S is sandwiched between the second roller 12 and the nip roller 12a. By this operation, the tension (tension F) of the inter-roller portion Sr can be adjusted independently of the other portions of the substrate S.

  Thereafter, the control unit CONT applies the predetermined tension to the inter-roller portion Sr by the first roller 11, the nip roller 11a, the second roller 12, and the nip roller 12a, and the substrate S at the predetermined transport speed in the + X-axis direction. To transport.

  The control unit CONT irradiates the exposure light from the illumination unit IL and moves the mask stage MST in the + X-axis direction while the substrate S is transported. At this time, the control unit CONT synchronizes the moving speed of the mask stage MST and the transport speed of the substrate S.

  By this operation, the exposure light through the mask M is projected onto the projection area EA (see FIG. 3) with respect to the processing surface Sa of the substrate S moving in the + X axis direction, and the mask M is applied to the processing surface Sa. An image of the pattern P is formed by the scanning exposure method.

  In performing such an exposure operation, the control unit CONT gives a slight rotation speed difference between the first roller 11 and the second roller 12 to give the substrate S the necessary tension F in the X-axis direction. The initial width TD0 of S is shrunk, the dimension in the Y-axis direction of the pattern area on the mask M, and the dimension in the Y-axis direction of the pattern area (partial area of the substrate) to be transferred onto the processed surface Sa of the substrate S The relative error (relative magnification error) is adjusted.

  In the present embodiment, since the projection area EA is formed into an elongated slit extending in the Y-axis direction and scanning exposure is performed in the X-axis direction, the projection area EA is a substantial exposed area on the substrate S. It becomes. For this reason, the dimension adjustment (shrinkage correction) of the substrate S in the Y-axis direction has only to be performed on at least the exposed region (partial region of the substrate), and is not necessarily applied to one entire pattern region on the substrate S. It is not necessary to perform dimension adjustment (shrinkage correction) of the substrate S in the Y-axis direction.

  In the present embodiment, as shown in FIG. 3, the lower side of the inter-roller portion Sr is supported by the fluid bearing layer on the outer peripheral surface 14a of the substrate stage mechanism 14, so that there is almost no substantial friction there. Accordingly, the inter-roller portion Sr of the substrate S extends in the X-axis direction that is the load direction, and the initial width TD0 contracts to TD1 in the Y-axis direction that intersects the load direction.

  In FIG. 3, the contraction in the Y-axis direction of the portion Sr between the rollers of the substrate S is exaggerated, but the outer peripheral surface 14a of the substrate stage mechanism 14 is a stable region in which the contracted width TD1 can be obtained uniformly. It is set to fit within the width of.

  In addition, after passing the 2nd roller 12, since the tension F which acted on the board | substrate S is eliminated, the board | substrate S returns to the shape before tension | tensile_strength by elasticity. That is, the substrate S extends from the state of FIG. 3 in the Y-axis direction and contracts in the X-axis direction. For this reason, after transferring the pattern P of the mask M to the substrate S contracted in the Y-axis direction as shown in FIG. 3 and then releasing the tension F, the pattern region (the substrate region) transferred to the processing surface Sa is removed. The partial region) extends in the Y-axis direction at the same ratio as the substrate S and contracts in the X-axis direction.

  In the present embodiment, a method is used in which the projection area EA is formed into an elongated slit extending in the Y-axis direction, and scanning exposure is performed in the X-axis direction. Therefore, with respect to the relative magnification error (scaling error) in the X-axis direction, the original synchronous relationship between the feeding speed Sv of the substrate S and the moving speed Mv of the mask M in the projection area EA, Sv = k · Mv (k is proximity exposure) Adjustment is possible by giving a slight speed difference (corresponding to the expansion rate of the substrate S in the X-axis direction) to 1 in the case of the system and to the magnification of the projection system in the case of the projection exposure system.

  In addition, a pattern region (partial region of the substrate) serving as a base layer is formed on the surface Sa to be processed of the substrate S by a wet process (plating process, etching process, etc.), and the pattern area of the mask M is overlaid on the pattern area. In this case, the substrate S may extend relatively large in a wet process.

  In such a case, particularly in the conventional proximity exposure method, the pattern area on the mask M and the pattern area already formed on the substrate S (partial area of the substrate) are at least perpendicular to the Y-axis direction (scanning exposure direction). Direction), it was difficult to correct the scaling error in the Y-axis direction.

  In the present embodiment, the first roller 11 and the second roller 12 apply tension in the feed direction (X-axis direction) to the substrate S, so that the Y-axis direction dimension of the inter-roller portion Sr of the substrate S is within the range of elastic deformation. It becomes possible to contract, and correction of the scaling error in the Y-axis direction, which has been considered difficult, can be realized with a simple configuration.

  Accordingly, the control unit CONT changes the size of the tension F applied to the substrate S and adjusts the contraction amount of the substrate S in the Y-axis direction while ensuring a stable region, thereby adjusting the dimension of the exposure pattern in the Y-axis direction. And the relative ratio between the surface Sa of the substrate S and the dimension in the Y-axis direction can be adjusted. For this reason, the relative magnification in the Y-axis direction of the mask pattern image transferred to the substrate S can be substantially adjusted.

  The amount of contraction of the substrate S in the Y-axis direction is a value corresponding to the tension F with respect to the substrate S in the X-axis direction. Therefore, when controlling the contraction amount of the substrate S in the Y-axis direction, the tension F in the X-axis direction and the contraction in the Y-axis direction with respect to the substrate S are performed by simulations and experiments as shown in FIGS. The relationship with the amount is obtained as data, and the operations of the first roller 11 and the second roller 12 are controlled so that the tension F corresponding to the necessary shrinkage amount is applied to the substrate S.

  In performing the above operation, the control unit CONT obtains the contraction amount (or contraction rate, degree of contraction) of the substrate S as follows. First, the control unit CONT uses the alignment camera 18 to detect the alignment mark ALM formed on the −Y-axis side edge of the substrate S and the alignment mark ALM formed on the + Y-axis side edge. The control unit CONT calculates the distance in the Y-axis direction of the alignment mark ALM based on the detection result of the alignment camera 18, and based on the distance, the dimension in the Y-axis direction of the inter-roller portion Sr (width TD1 after contraction) Is calculated. Thereafter, the control unit CONT calculates the contraction amount (or contraction rate, degree of contraction) of the substrate S using the calculation result and the interval dimension of the alignment mark ALM recorded in advance in the Y-axis direction.

  Further, in the above experiments and simulations, the extension amount in the X-axis direction corresponding to the contraction amount in the Y-axis direction of the substrate S is obtained as data, and the moving speed of the mask stage MST according to the extension amount in the X-axis direction. Further, by adjusting the transport speed of the substrate S, the relative magnification (scaling error) in the X-axis direction of the mask pattern image can be substantially adjusted.

When adjusting the moving speed of the mask stage MST and the transport speed of the substrate S, the controller CONT sets the moving speed of the mask stage MST in the + X-axis direction as Mv, and the transport speed of the substrate S (the substrate stage 14). (Surrounding speed of the outer peripheral surface 14a) is Sv, and the scaling error (expansion rate) in the X-axis direction is A (ppm), the following formula (1) is satisfied.
Sv = k · Mv · (1 + A) or Sv · (1−A) = k · Mv (1)
However, k is a magnification of 1 for the proximity exposure method and a magnification of the projection system for the projection exposure method.

  If the control unit CONT is a proximity exposure method, the drive unit 15 in FIG. 2 is set so that the gap and parallelism between the projection area EA on the substrate S and the mask M are set within a certain range. Thus, the posture and position of the substrate stage mechanism 14 (outer peripheral surface 14a) are adjusted as appropriate.

  As described above, according to the present embodiment, in the substrate processing unit 3 that processes the surface Sa to be processed of the substrate S, between the first roller 11 and the second roller 12 that transport the substrate S in the X-axis direction. Since the exposure process can be performed in a state where the dimension of the substrate S in the Y-axis direction is stably contracted, the relative magnification (scaling error) can be easily adjusted, and high-accuracy patterning is possible.

  Further, even when another apparatus different from the exposure apparatus EX is used as the processing apparatus 10, the distance between the roller portion Sr of the substrate S and the range processed by the processing apparatus 10 on the transport side for transporting the substrate S. The relative dimensions of can be adjusted.

  As the processing apparatus 10 other than the exposure apparatus EX using a mask, for example, an inkjet printer, a maskless exposure machine using a DMD, a laser beam printer that scans a laser spot and draws a pattern, and the like are similarly implemented. Aspects are applicable.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
For example, in the configuration of FIGS. 2 and 3 described above, only one set of the alignment camera 18 is provided at a position in the −X axis direction of the projection area EA. However, as shown in FIG. 9, a set of alignment cameras 18a and 18d arranged at a position in the −X axis direction of the projection area EA, and a set of alignment cameras 18b arranged at substantially the same position in the X axis direction as the projection area EA. , 18e, and a pair of alignment cameras 18c, 18f arranged at a position behind the projection area EA (a position in the + X-axis direction or a downstream position of the projection area EA with respect to the transport direction of the substrate S). An alignment camera (microscope imaging system) may be provided.

  When a plurality of alignment cameras 18a to 18f are arranged as shown in FIG. 9, local surface shape distortion (slight deformation in the XY plane) of the substrate S including the projection area EA is caused in the X-axis direction of the alignment mark ALM. It becomes possible to measure continuously in real time for each pitch. Therefore, the magnitude of the tension F applied to the substrate S and the position of the substrate stage mechanism 14 are specified so that a slight distortion error or magnification error of the substrate S in the projection area EA is specified with high accuracy and the error is alleviated. It is also possible to fine-tune the position and posture in real time.

  As described above, even when a plurality of alignment cameras 18 a to 18 f are arranged, it is desirable that the mark detection position by each camera is included in the stable region Wx of the substrate S.

Further, as a drive mechanism for driving the mask stage MST of the exposure apparatus EX, a linear motor mechanism LM as shown in FIGS. 10 and 11 may be used.
10 and 11 show the configuration of a proximity-type scanning exposure apparatus, and the mask stage MST is precisely driven by a linear motor mechanism LM having a stator LMa and a mover LMb.

  The stator LMa extends along the X-axis direction. In the stator LMa, a plurality of coils (not shown) are arranged side by side along the X-axis direction. A pair of stators LMa is provided in the Y-axis direction with the mask stage MST interposed therebetween. The pair of stators LMa has a groove on the mask stage MST side. The groove is formed along the X-axis direction.

  The mover LMb is provided on each of the side surface on the + Y axis side and the side surface on the −Y axis side of the mask stage MST. Each mover LMb has a magnet. The movers LMb are inserted into the grooves of the corresponding stator LMa. The mover LMb is movable in the X-axis direction along the groove. A pair of guide surfaces 13g that support the mask stage MST is provided on the upper portion of the housing 13 so that the mover LMb moves in the X-axis direction so that the mask stage MST moves in the X-axis direction.

  In the configuration of the present embodiment, the substrate S is set so that the substrate S is transported substantially horizontally between the first roller 11 and the second roller 12, and the outer peripheral surface 14a of the substrate stage mechanism 14 configured as a rotating drum is a substrate. It is in contact with the back surface of S in a very small area. That is, the width of the projection area EA in the X-axis direction is made as small as possible, and the width of the contact area between the outer peripheral surface 14a and the substrate S in the X-axis direction is made as small as the width of the slit-shaped projection area EA in the X-axis direction. To do.

  Furthermore, in the present embodiment, the driving unit 15 is configured such that the peripheral speed of the outer peripheral surface of the substrate stage mechanism 14 (rotating cylindrical body) is synchronized with the X-axis direction transport speed of the substrate S by the first roller 11 and the second roller 12. Controlled by

  In this case, the contact area between the outer peripheral surface 14a of the substrate stage mechanism 14 and the substrate S is a slit elongated in the Y-axis direction and has a sufficiently narrow width in the X-axis direction. At the same time, the substrate stage mechanism 14 ( Since the rotating cylinder) rotates in synchronization with the transport speed of the substrate S, when the tension F in the X-axis direction is applied to the substrate S between the first roller 11 and the second roller 12, the above-described FIG. As described above, the substrate S contracts in the Y-axis direction.

  Of course, friction occurs in the slit-like region where the substrate S and the outer peripheral surface 14a of the substrate stage mechanism 14 are in contact with each other. However, if the width of the region in the X-axis direction is sufficiently small, the substrate S contracts as shown in FIG. 4 without being affected by the friction.

10 and 11, the width (Y-axis direction) of the substrate S can be contracted by controlling the tension F (X-axis direction) when the substrate S is transported. It is possible to adjust the relative dimensional error (particularly the relative scaling error in the Y-axis direction).
Further, in this configuration, since the width of the projection area EA in the X-axis direction is sufficiently reduced, the width of the stable area Wx described with reference to FIGS. 4 and 5 to 8 can be reduced. Since the space | interval (distance L) of the 2nd roller 12 can also be shortened, the whole apparatus can be reduced in size.

  Also, as shown in FIG. 12, a configuration in which a plurality of processing apparatuses are provided in the X-axis direction may be used. In FIG. 12, two processing apparatuses 10A and 10B having the same configuration as the exposure apparatus EX (the apparatus of FIGS. 2 and 3 or the apparatus of FIGS. 10 and 11) described in the above embodiment are arranged in the X-axis direction. ing. Between the processing apparatus 10A provided with the mask M1 and the processing apparatus 10B provided with the mask M2, a tension blocking mechanism (edge cutting portion) 60 that blocks the tension of the substrate S is provided.

  When performing exposure processing on the substrate S using the two processing apparatuses 10A and 10B, for example, as shown in FIG. 13, a pattern area (partial area of the substrate) PA exposed by the mask M1 of the processing apparatus 10A, and In each of the processing apparatuses 10A and 10B, exposure processing is performed at a predetermined interval so that pattern areas (partial areas of the substrate) PB exposed by the mask M2 of the processing apparatus 10B are alternately arranged in the X-axis direction. it can.

  In this case, for example, a time until the mask stage MST that reciprocates in the X-axis direction moves in the + X-axis direction during the exposure process and returns to the −X-axis direction can be secured.

  Furthermore, in such a configuration, the patterns P of the masks M1 and M2 attached to each of the processing apparatuses 10A and 10B are not necessarily the same. For example, the processing apparatus 10A may perform exposure of a 36-inch display panel pattern, and the processing apparatus 10B may perform exposure of a 40-inch display panel pattern.

  In the above embodiment, the case where the projection area EA has a single slit shape has been described as an example, but the present invention is not limited to this. For example, a plurality of slit-shaped exposure areas are formed side by side in the Y-axis direction, and the exposure areas are alternately arranged in the X-axis direction. I do not care.

  In this case, the entire plurality of exposure areas (corresponding to partial areas of the substrate) arranged in a staggered pattern are set so as to fall within the stable area Wx determined according to the assumed maximum tension F.

  By the way, as described above, the substrate transport configuration for contraction in the Y-axis direction of the substrate S described in each of the above embodiments is precise patterning such as light exposure, inkjet printing, laser drawing, electrostatic transfer, and the like. It can be applied as a transport mechanism of various processing apparatuses that require the above. However, from the viewpoint of mass productivity, light exposure using a cylindrical mask is considered promising.

  FIG. 14 is an example of a proximity exposure apparatus in which a transmissive cylindrical mask MD is combined with the substrate transport mechanism according to the above-described embodiments of FIGS.

  In FIG. 14, the cylindrical mask MD is a quartz hollow cylinder having a thickness of several millimeters or more, and a pattern P is formed on the cylindrical surface. The cylindrical mask MD is held in the apparatus by a pad CR or the like supported by an air bearing, and rotates in the XZ plane about the axis CC extending in the Y-axis direction. The rotation speed is set so that the conveyance speed of the substrate S and the peripheral speed of the outer peripheral surface of the cylindrical mask MD (formation surface of the pattern P) are synchronized. Inside the cylindrical mask MD, an illumination system IL that projects slit-like illumination light elongated in the Y-axis direction on the pattern P is disposed.

The substrate S is supported by a substrate stage mechanism 14 similar to that shown in FIG. 2 along a support surface 14a (convex cylindrical surface) via a gas layer (air bearing) 116, and is the lowest on the outer peripheral surface of the cylindrical mask MD. The substrate stage mechanism (support pad portion) 14 or the part Sa and the target surface Sa of the substrate S on the support surface 14a are maintained in a predetermined proximity gap (several tens μm to several hundreds μm). The position of the cylindrical mask MD in the Z-axis direction is finely adjusted.
In the present embodiment, the substrate stage mechanism 14 includes a gas supply device, a gas supply path, a plurality of supply ports, and the like as the gas layer forming unit.

  The transport mechanism of the substrate S includes a non-contact type air turn bar ATB, a first roller 11, a nip roller 11a, a second roller 12, and a nip roller 12a. In the present embodiment, the first roller 11 to the second roller 12 are also included. The substrate S is contracted in the Y-axis direction by applying tension in the X-axis direction to the substrate S. Therefore, the drive motor of each roller is controlled so that the peripheral speed (torque) of the second roller 12 is larger by a predetermined amount than the peripheral speed (torque) of the first roller 11.

  In the configuration as shown in FIG. 14, the curvature (radius) of the outer peripheral surface of the cylindrical mask MD and the curvature of the cylindrical support surface 14a of the substrate stage mechanism 14 are not necessarily matched, and the support surface 14a. Is determined so that stable support and conveyance of the substrate S can be achieved, and the diameter of the cylindrical mask MD is determined according to the size of the display panel to be exposed.

  In each embodiment described so far, the scanning exposure apparatus using the planar mask M or the cylindrical mask MD is taken as an example of the processing apparatus 10. However, the transport mechanism according to the present embodiment can also be applied to an apparatus in which the entire area on the substrate S on which the display panel is formed is temporarily attracted to a flat holder and exposed.

  FIGS. 15 and 16 show an example of an apparatus for performing exposure processing by adsorbing the substrate S to a flat holder. As shown in the plan view of FIG. 15, a plurality of panel regions (in the X-axis direction on the substrate S ( Substrate regions PD) are formed at regular intervals. In the present embodiment, the distance in the X-axis direction between the first roller 11 and the second roller 12 so that the width in the X-axis direction of one panel region PD is within the stable region Wx of contraction in the Y-axis direction of the substrate S. (Distance L) is set.

  In addition, the panel region PD is not arranged in the nonlinear region from the first roller 11 to the rear (+ X axis direction) distance As of the substrate S and the nonlinear region from the second roller 12 to the distance Ae in the −X axis direction. As described above, the panel region PD is arranged with a gap Np (Np> As, Ae) in the X-axis direction.

  In the present embodiment, when the substrate S is sent in the X-axis direction and the substrate S is positioned in the state shown in FIG. 15, that is, one panel region PD to be exposed or drawn is in the stable region Wx, the first roller 11. And the drive by the 2nd roller 12 is stopped and conveyance of the board | substrate S is stopped temporarily.

  As shown in FIG. 16, the substrate S is transported between the first roller 11 and the second roller 12 in the X-axis direction substantially parallel to the flat suction surface on the upper surface of the flat holder 120.

  In this state, as shown in FIG. 16, the width of the flat holder 120 (suction surface) in the X-axis direction is set so as to be included in the stable region Wx, and the entire panel region PD is suctioned. Has been.

  When the panel region PD is positioned above the plane holder 120, the base member 113 supporting the plane holder 120 is moved upward (+ Z axis direction) by the drive mechanism 122 in the Z axis direction, and the back surface of the substrate S Is uniformly contacted with the suction surface of the flat holder 120, the driving in the Z-axis direction is stopped.

  And the back surface part corresponding to the panel area | region PD of the board | substrate S is temporarily hold | maintained to the plane holder 120 by vacuum suction or electrostatic attraction. Immediately before the suction holding, the substrate S is given a tension F in the X-axis direction, and the stable region Wx of the substrate S is maintained in a contracted state in the Y-axis direction by a predetermined amount.

  When the entire panel region PD of the substrate S is evenly attracted to the flat holder 120, it is supported by the guide rails 113g provided at both ends of the base member 113 in the Y-axis direction, and the X-axis direction (or the Y-axis direction). The movable processing head HD moves one-dimensionally or two-dimensionally on the panel area PD, and performs necessary exposure processing and drawing printing processing.

  As the processing head HD, a maskless optical pattern generator using DMD, a head for an inkjet printer, a small mask pattern projector using a microlens array, a scanning drawing device using a laser spot, or the like can be used.

  Further, the leg 126 that supports the machining head HD from the base member 113 is vertically moved in the Z-axis direction on the micron order in order to optimally set the Z-axis direction spacing and relative inclination between the head surface and the surface of the substrate S. A moving actuator (piezo motor, voice coil motor, etc.) is incorporated, and the position of the machining head HD in the X-axis and Y-axis directions is precisely measured by a laser interferometer IFM for length measurement or a linear encoder.

  In the processing head HD, an alignment camera 18 for optically detecting an alignment mark ALM on the substrate S and a specific pattern shape in the panel region PD, and other alignment sensors can be provided.

In the case of the present embodiment, as shown in FIG. 15, the panel region PD on the substrate S is arranged with a gap (margin) Np in the X-axis direction, but the nip position by the first roller 11 and the second roller 12. Assuming that the distance from the nip position by L is L and the width of the panel region PD in the X-axis direction is Xpd, if the relationship of the following equation (2) is set, the substrate S is temporarily transported for processing. When stopped, each of the first roller 11 and the second roller 12 does not rest on the adjacent panel region PD, so that the possibility of unnecessary scratches or the like on the panel region PD can be reduced.
Xpd <L <(Xpd + 2Np) (2)

  As shown in FIGS. 15 and 16, when the entire panel area PD on the substrate S can be adsorbed to a flat surface with high accuracy, a large mask covering the entire panel area PD is prepared, and collective still exposure by the proximity method is performed. You can do it.

  As described above, in each embodiment, it is assumed that the exposure process is performed in the stable region Wx shown in FIG. 4 (or FIG. 9, FIG. 15), but the slit-shaped exposure region (projection region EA) extending in the Y-axis direction. If the width in the X-axis direction can be made sufficiently narrow, it is possible to perform exposure in a non-linear region of distance As and distance Ae in FIG.

  In the processing apparatus (exposure apparatus) shown in each of FIGS. 2, 10, 12, 14, and 15, the first roller 11 (and the nip roller 11a) as the first guide member (substrate guide member). And a second roller 12 (and nip roller 12a) as a second guide member (substrate guide member), the tension applying mechanism was configured by a method of giving a slight difference between the peripheral speeds. However, in the case of the stationary substrate processing apparatus (exposure apparatus) shown in FIG. 15, a tension applying mechanism that does not use the difference in peripheral speed between the first roller 11 and the second roller 12 can also be applied.

  Specifically, in FIGS. 15 and 16, when the substrate S is transported, the first roller 11 and the second roller 12 are controlled so that the substrate S is sent with a loose tension (for example, about 10 to 20 N). When the panel region PD of the substrate S is positioned in the upper space of the plane holder 120 and is stationary, the set of the first roller 11 and the nip roller 11a and the set of the second roller 12 and the nip roller 12a are maintained while maintaining the nip state. A drive system that moves any of the sets may be provided so that the interval in the X-axis direction increases.

  Alternatively, in FIG. 15, the entire width of the substrate S in the Y-axis direction is extended to the position immediately after the first roller 11 and the position immediately before the second roller 12 in the transport direction (+ X-axis direction) of the substrate S. When the substrate S is positioned and stationary, the gap (margin) Np portion of the substrate S is sandwiched between the two nip members, and then the nip members of both the nip members are sandwiched. Any nip member may be finely moved in the X-axis direction so that the interval in the X-axis direction is widened.

  In this case, the two nip members and the drive mechanism that changes the distance between the nip members in the X-axis direction constitute a tension applying mechanism.

  In each of the above embodiments, the image of the alignment mark ALM (for example, the crossbar shape) on the substrate S is measured using a microscope imaging system (alignment cameras 5, 18, etc.) as the mark detection system. Therefore, when the image of the mark ALM is detected while the substrate S is being conveyed at a constant speed, blurring of the image of the captured mark ALM becomes a problem. Therefore, a mark detection system that does not use an image sensor (camera) such as a CCD or CMOS may be used.

  One example is that a laser beam in a wavelength region where the light-sensitive layer of the substrate S has no sensitivity is shaped into an elongated slit shape or interference fringe shape and projected onto the substrate S, and is formed on the substrate S. This is a method of photoelectrically detecting diffracted light generated when a diffraction grating alignment mark crosses the slit or interference fringe beam. The position where the diffracted light is generated is obtained by a rotary encoder provided on the rollers 11 and 12 that convey the substrate S or the roller 14 in FIG. In the case of the embodiment as shown in FIG. 16, a mark detection system that photoelectrically detects diffracted light is incorporated in the head HD, and the position where the diffracted light is generated can be obtained by the interferometer IFM for length measurement.

  DESCRIPTION OF SYMBOLS S ... Board | substrate CONT ... Control part Sa ... To-be-processed surface ALM ... Alignment mark EX ... Exposure apparatus EA ... Projection area Sr ... Inter-roller part MST ... Mask stage P ... Pattern M ... Mask MD ... Cylindrical mask MH ... Mask holding part PA, PB ... Pattern region 5 ... Alignment camera 10, 10A, 10B ... Processing device 11 ... First roller 12 ... Second roller 14 ... Substrate stage mechanism 14a ... Outer peripheral surface 15 ... Driver 18 ... Alignment camera Wx ... Stable region

Claims (18)

In the substrate processing apparatus for transporting the substrate in the first direction and processing the processed surface of the substrate,
A first guide member for guiding the substrate in the first direction;
A second guide member that is disposed apart from the first guide member and guides the substrate guided by the first guide member;
A tension applying mechanism that applies tension to the substrate between the first guide member and the second guide member, and reduces a size of the substrate in a second direction intersecting the first direction;
A substrate processing apparatus comprising: a processing apparatus that processes a surface to be processed of the substrate between the first guide member and the second guide member.   The substrate processing apparatus according to claim 1, further comprising a substrate support portion that supports a part of the substrate transported between the first guide member and the second guide member.   The substrate processing apparatus according to claim 2, wherein the substrate support portion is formed in a shape having a cylindrical surface or a convex surface.   The substrate processing apparatus according to claim 3, wherein the substrate support portion is formed of a rotating cylindrical body.   The substrate processing apparatus according to claim 4, further comprising a drive unit that rotates the rotating cylindrical body at a peripheral speed corresponding to a transport speed of the substrate.   The substrate processing apparatus according to claim 2, wherein the substrate support unit includes a gas layer forming unit that forms a gas layer that supports the substrate between the substrate support unit and the substrate. The substrate processing apparatus according to any one of claims 1 to 6, further comprising a detection unit that detects a predetermined reference pattern. The substrate processing apparatus according to claim 1, wherein the predetermined reference pattern is provided on the substrate.   The substrate processing apparatus according to claim 7, wherein the tension applying mechanism controls a magnitude of tension applied to the substrate according to a detection result by the detection unit. The processing apparatus includes an exposure apparatus that irradiates the substrate with exposure light through a mask,
The exposure apparatus has a mask stage for moving the mask,
The substrate processing apparatus according to claim 7, further comprising a stage driving unit that moves the mask stage according to the detection result. The substrate processing apparatus according to claim 7, wherein the detection unit is capable of detecting reference patterns provided at a plurality of locations. The processing apparatus includes an exposure apparatus that irradiates the substrate with exposure light through a mask,
The exposure apparatus has a mask stage for moving the mask,
The substrate processing apparatus according to any one of claims 1 to 11, wherein the mask stage includes a mask holding unit capable of holding a plurality of types of masks having different shapes or dimensions. The first guide member and the second guide member are disposed apart from each other by a distance L with respect to the transport direction of the substrate, and each include a driving roller that is guided in frictional contact with the substrate, and the tension applying mechanism includes the drive The substrate processing apparatus according to claim 1, wherein a tension in the first direction is applied by a roller. The substrate processing apparatus according to claim 1, wherein a plurality of the processing apparatuses are provided in the first direction. A substrate processing method for conveying a sheet-like long substrate in the longitudinal direction and sequentially forming a predetermined pattern on the substrate,
Obtaining information on the degree of contraction when contracting a partial region of the substrate on which the pattern is formed in a width direction orthogonal to the longitudinal direction;
Applying a tension in the longitudinal direction to the substrate based on information on the degree of contraction between two specific positions sandwiching the partial region of the substrate in the longitudinal direction;
A substrate processing method comprising: The substrate processing method is executed by a pattern forming apparatus including a pattern forming unit that forms the pattern on the substrate, and a substrate transfer unit that transfers the substrate in the longitudinal direction with respect to the pattern forming unit.
The substrate processing method according to claim 15, wherein the pattern forming unit forms the pattern in a partial region of the substrate in the step of applying the tension. The substrate transport unit includes a substrate guide member that is disposed at each of two specific positions that sandwich the partial region of the substrate in the longitudinal direction, and that holds the substrate in contact with each other.
17. The substrate processing method according to claim 16, wherein in the step of applying the tension, a longitudinal tension is applied to the substrate between the two substrate guide members.   Each of the two substrate guide members is composed of a pair of rotating rollers that send the substrate in the longitudinal direction by frictional contact, and the step of applying the tension is provided by a difference in rotational torque between the pair of rotating rollers. The substrate processing method according to claim 17.

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