JP4888002B2 - Film fixing and positioning device for alignment - Google Patents

Description

  The present invention provides a highly accurate, reproducible and stable positioning with an optically read alignment mark by performing film position control and tension control in the film flow direction and width direction in film supply that requires position alignment. An alignment film fixing / positioning device for fixing the film to the substrate is realized.

  As the film alignment method, the film is sucked and fixed on the alignment suction plate without applying tension to the film, and the suction plate is moved and positioned so that the alignment mark on the film is at the specified position. Yes. In this method, since the tension of the film is not applied, the positioning accuracy depends on the position of the alignment mark when the film is sucked on the suction plate. Also, the slack of the film before and after the positioning unit where the tension was released was one of the causes of the next deterioration in positioning accuracy.

  In most alignment methods when tension is applied, only the tension in the film flow direction is applied, and the strength of the tension may cause elongation in the film flow direction and wrinkles in the width direction, etc., and is stable. It is difficult to perform positioning. In addition, uneven thickness in the width direction of the film also contributes to the generation of wrinkles that occur in the flow direction, leading to a decrease in positioning accuracy.

  An object of the present invention is to provide a roll unit having a tension control function for performing position control in the film flow direction and a film for keeping the tension in the width direction constant in an alignment film fixed positioning apparatus in a film supply apparatus that requires position alignment. An object of the present invention is to provide an alignment film fixing and positioning device having a clamp unit having a pressure control function installed on both sides.

  In order to solve the above problems, the present invention has a roll unit having a tension control function for controlling the position in the film flow direction and a clamp unit having a pressure control function installed on both sides of the film for keeping the tension in the width direction constant. Thus, the tension of the film is kept constant and the positioning operation is performed. The positional accuracy and reproducibility of the alignment marks on the film can be improved by stabilizing the tension in the width direction as well as the film flow direction and keeping it constant. By improving the positional accuracy and reproducibility of the alignment mark, it is possible to increase processing accuracy such as patterning by exposure to be processed, drawing by an inkjet nozzle or the like, and transfer printing.

  Specifically, the invention according to claim 1 is the film fixing apparatus for alignment in a film supply apparatus that requires position alignment, a roll unit having a position control function in the film flow direction and a tension control function, and a width direction. Alignment film characterized by having a tension control function and a position control function clamp unit installed on both sides of the film to keep the tension of the film constant, an optical unit for checking alignment marks, and a suction table for sucking the film A fixed positioning device is provided.

According to a second aspect of the present invention, in the roll unit according to the first aspect, the film is sandwiched and held between the nip roll and the alignment roll at the upstream portion of the suction table, and the position of the alignment mark on the film is set to a predetermined position. It is an object of the present invention to provide an alignment film fixing / positioning device characterized by having a function of correcting the position of the inclination and the flow direction.

  The invention according to claim 3 is characterized in that a dancer mechanism that suppresses fluctuations in film tension due to the amount of movement corrected by the roll unit performing position control in the film flow direction according to claim 2 is provided in the downstream portion of the suction table. An alignment film fixing and positioning apparatus is provided.

  The invention according to claim 4 is characterized in that the film unit for alignment is fixed by holding the film in parallel with the clamp unit according to claim 1 and stabilizing the alignment of the film by pulling the film with a constant tension. A device is provided.

  According to a fifth aspect of the present invention, there is provided an alignment film fixing and positioning device characterized in that in the alignment table according to the first aspect, the control of the raising position of the suction table is stopped by using a change in the tension of the film as a trigger. is there.

  With the film fixing and positioning apparatus for alignment of the present invention, the positional accuracy and reproducibility of the alignment mark on the film can be enhanced. By increasing the positional accuracy and reproducibility of the alignment mark, it is possible to increase the processing accuracy of patterning by exposure to be processed, drawing by an inkjet nozzle or the like, transfer printing, and the like.

  1 and 2 show an example of an alignment film fixing device of the present invention. The configuration of the apparatus shown in the figure includes an alignment roll 1, a nip roll 2, a suction table 3, an upstream dancer roll 4, an upstream suction roll 5, a downstream dancer roll 6, a downstream suction roll 7, an alignment optical camera 8, a film 9, and a side. It consists of clamp units 10A and 10B.

  In the present invention, first, the film 9 is moved by controlling the unwinding axis and the winding axis so that the alignment marks drawn or printed at a constant pitch fall within the viewing angle of the alignment optical camera 8.

  Next, alignment in the flow direction of the film 9 is performed. At this time, the upstream suction roll 5 and the downstream suction roll 7 cut the tension so that there is no influence from the steps before and after the alignment process, and the upstream dancer roll 4 and the downstream dancer roll 6 cut the film 9 in this alignment process. The tension is kept constant.

  Next, the film 9 is nipped and held by the alignment roll 1 and the nip roll 2. In this held state, the shift and inclination of the alignment mark on the film 9 in the flow direction are confirmed with an optical camera. Based on this data, the flow direction and inclination of the film 9 are corrected by the alignment roll 1 and the nip roll 2. At this time, since there is a downstream dancer roll 6 on the downstream side, a certain tension is applied to the film 9 for alignment.

  Next, both sides of the film 9 are clamped by the side clamp units 10A and 10B shown in FIG. Finally, the alignment mark is confirmed by the alignment optical camera 8, and the position in the width direction is corrected by the clamp units 10A and 10B.

  When the positioning of the alignment mark on the film 9 is finished, the suction table 3 is raised, and when it is in contact with the film 8, the raising is stopped by using a signal due to a change in tension as a trigger. For this reason, the disturbance of the film 9 and the change of the position due to the rising of the suction table 3 can be suppressed.

It is a conceptual perspective view which shows the example of the film fixing apparatus for alignment of this invention centering on the function of a roll unit. It is a conceptual perspective view which shows the example of the film fixing apparatus for alignment of this invention centering on the function of a clamp unit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Alignment roll 2 Nip roll 3 Suction table 4 Upstream dancer roll 5 Upstream suction roll 6 Downstream dancer roll 7 Downstream suction roll 8 Optical camera for alignment 9 Film 10A, 10B Clamp unit

Claims (3)

In a film fixing and positioning device for alignment in a film supply device that requires position alignment, a roll unit with a film flow direction position control function and a tension control function is installed on both sides of the film to keep the tension in the width direction constant. clamp unit and the tension control function of the position control function, an optical unit to check an alignment mark, have a suction table for sucking the film,
The roll unit has a function of sandwiching and holding a film by a nip roll and an alignment roll located upstream of the suction table, and correcting the position of the alignment mark on the film to a predetermined position and the position in the flow direction. A film fixing and positioning device for alignment characterized by the above. A film fixing and positioning apparatus for alignment, comprising: a dancer mechanism at a downstream portion of the suction table that suppresses fluctuations in film tension due to a movement amount corrected by a roll unit that performs position control in the film flow direction according to claim 1 . In a film fixing and positioning device for alignment in a film supply device that requires position alignment, a roll unit with a film flow direction position control function and a tension control function is installed on both sides of the film to keep the tension in the width direction constant. A clamp unit with a tension control function and a position control function, an optical unit for checking an alignment mark, and a suction table for sucking a film,
The alignment film fixing positioning device, characterized in that stop and triggers the variation of the tension of the control of the raised position of the suction table the film in the alignment table.

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