JP2006098725A - Correction method of drawing position, and drawing apparatus capable of correcting drawing position - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing apparatus with improved accuracy in the drawing position and which results in proper images, by aligning a long flexible recording medium carried on a conveyance passage, correcting the difference between the aligned position and the drawing position, the difference induced during conveyance, and then drawing an image. <P>SOLUTION: While a long flexible recording medium 28 is carried in a specified carrying direction on a conveyance passage of the drawing apparatus, alignment information is obtained by deforming the drawing data so as to allow an image to be drawn to correspond to a state of the flexible recording medium 28 at a position of an alignment unit 46. Further, the position of a specified portion of the flexible recording medium 28 detected in the alignment unit 46 is compared with the position detected when the specified portion of the flexible recording medium 28 reaches a drawing unit 48 to carry out the drawing process for drawing, so as to obtain information about the amount of positional shift. The medium is subjected to the drawing process by the drawing unit 48 using a two-dimensional drawing pattern, with the alignment information corrected based on the information about the amount of the positional shift. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention corrects the drawing position generated when the flexible recording medium is transported to the rendering unit on the transport path after alignment with the long flexible recording medium by the alignment unit, The present invention relates to a drawing position correction method for drawing a predetermined pattern with high accuracy by a drawing unit, and a drawing apparatus capable of correcting the drawing position by this method.

  Among commonly used drawing apparatuses, a scanning type printed circuit board (flexible board) exposure apparatus, a laser photo plotter, a laser printer, etc. for drawing a desired image on the recording medium by scanning a recording medium with a light beam. There is an exposure apparatus.

  In such an exposure apparatus, for example, in the case of a printed circuit board exposure apparatus, drawing is performed by scanning a laser beam on a substrate material for a printed wiring board that is a recording medium. The substrate material for a printed wiring board used here is formed by forming a conductive thin film on an insulating layer and coating the conductive thin film with a photoresist.

  This printed circuit board exposure apparatus scans the substrate material with a laser beam modulated based on image data, thereby exposing a desired substrate pattern to the photoresist layer.

  The substrate material for the printed wiring board thus exposed is removed from the printed board exposure apparatus and further subjected to photoetching to complete a printed board.

  In a conventional printed circuit board (flexible substrate) exposure apparatus used in this way, a long belt-shaped recording medium (a medium between a loader for sending out a roll sheet-shaped recording medium and an unloader for collecting the recording medium) Some have a flexible substrate). In this exposure apparatus, the drawing table is configured to be slidable with high precision by the sliding means in a state where the portion of the stretched recording medium is placed and fixed on the drawing surface of the drawing table by the fixing means. Further, a scanning optical system that scans the laser beam is disposed immediately above the recording medium stretched between the loader and the unloader.

  The scanning optical system slides with the drawing table with high accuracy while the drawing table in which the stretched portion of the recording medium is fixed on the drawing surface by the fixing unit is conveyed with high accuracy by the sliding unit. Drawing is performed by scanning a laser beam modulated on the basis of image data on a moving medium.

  Further, in this conventional printed circuit board exposure apparatus, the drawing process is started again after the first drawing process is completed, so that the drawing table fixing means is released, the recording medium is fixed by the clamp roller pair of the loader, and the unloader The drawing table is moved to the loader side by the slide means after the recording medium fixed between the drive roller pair is fixed and the recording medium stretched between the loader and the unloader is set in a stationary state. Next, the recording medium is fixed on the drawing surface of the drawing table by the drawing table fixing means.

  Next, the clamp roller pair of the loader is opened, and the recording medium is fed out by the loader feeding roller pair to form a slack. Next, while the drawing table is moved to the unloader side by the sliding means, the recording medium fixed on the drawing surface of the drawing table is scanned by the scanning optical system, and the recording medium is moved by the pair of driving rollers of the unloader. The next drawing process is completed after collecting in the unloader. In addition, when performing the next drawing process, the above-described operation is repeated as many times as necessary (see, for example, Patent Document 1).

  Further, in the conventional scanning drawing apparatus, the end position of the printed wiring board or the mark position on the printed wiring board is measured, and when the printed wiring board is deviated from a predetermined standard position, the position deviation amount is corrected ( Means has been proposed for adjusting the modulation timing of laser light scanned by a polygon mirror or the like so as to perform exposure position correction (see, for example, Patent Document 2).

However, in such a conventional scanning drawing apparatus, even if the exposure position correcting means is provided, the printed wiring board is not transferred between the place where the position of the printed wiring board is measured and the place where the printed wiring board is exposed. When the position is shifted due to meandering, there is a problem that a drawing result on the printed wiring board is shifted from a predetermined drawing position.
JP 2000-235267 A Japanese Patent Laid-Open No. 2000-227661

  In view of the above-described problems, the present invention provides a drawing unit from the alignment unit while aligning a long flexible recording medium conveyed on the conveyance path based on the detection result of the alignment unit. The accuracy of the drawing position is corrected by correcting the difference between the position of the area to be aligned and the drawing position by the drawing unit on the long flexible recording medium that has been conveyed to It is an object of the present invention to newly provide a drawing position correction method and a drawing apparatus capable of correcting the drawing position by this drawing position correction method so that a good image can be obtained by increasing the image quality.

  According to a first aspect of the present invention, there is provided a method for correcting a drawing position, wherein a flexible recording medium at a position of an alignment unit is conveyed while a long flexible recording medium is conveyed in a certain conveyance direction on a conveyance path of the drawing apparatus. The drawing data is deformed so that the drawing image corresponds to the state of the recording medium to obtain alignment information, and the position of the predetermined portion of the flexible recording medium detected in the state of the alignment processing and the flexible recording are obtained. A two-dimensional image obtained by comparing the position detected in a state where the predetermined part of the medium reaches the drawing unit that performs the drawing process to obtain information on the amount of positional deviation, and correcting the alignment information based on the information on the amount of positional deviation. In this drawing pattern, the drawing unit performs drawing processing.

  According to the above-described drawing position correction method, the alignment information of the drawing data aligned by the alignment unit is transported to the long flexible recording medium on the transport path to the drawing unit. By drawing the two-dimensional drawing pattern obtained by correcting the drawing position generated at the time of the drawing by the drawing unit, it is possible to perform an appropriate drawing process with high accuracy on the flexible recording medium.

  A drawing apparatus according to claim 2 of the present invention is capable of correcting a drawing position while conveying a long flexible recording medium in a certain conveying direction on a conveying path set in a scanning conveying unit. In a drawing apparatus for drawing by a drawing unit, an alignment unit disposed corresponding to an alignment area set on a conveyance path of a scanning conveyance unit that conveys a long flexible recording medium, and a long Alignment-side position measuring means for detecting the position of a long flexible recording medium arranged corresponding to an alignment area set on the conveying path of a scanning conveying section that conveys the flexible recording medium A drawing unit arranged corresponding to a drawing position set on the downstream side in the carrying direction with respect to the alignment area set on the carrying path of the scanning carrying unit, and a drawing position set on the carrying path. Correspondingly And the position data of a predetermined portion of the flexible recording medium measured by the alignment-side position measuring unit, the data of the two-dimensional drawing pattern aligned based on the data detected by the alignment unit Control is performed to perform drawing processing by the drawing unit with a two-dimensional drawing pattern corrected in accordance with the positional deviation amount obtained by comparing the position data of a predetermined portion of the flexible recording medium measured by the drawing side position measuring means. And a control unit.

  By configuring as described above, two-dimensional drawing pattern data that is aligned by the alignment unit on a long flexible recording medium is obtained. Then, the control unit sets the position data of the predetermined portion of the flexible recording medium measured corresponding to the area to be aligned by the alignment side position measuring unit, and the drawing position set on the conveyance path by the drawing side position measuring unit. It is obtained by correcting the two-dimensional drawing pattern data aligned by the alignment unit according to the amount of positional deviation obtained by comparing the corresponding position data of the predetermined part of the flexible recording medium. With the two-dimensional drawing pattern, drawing processing is performed by the drawing unit, and appropriate and accurate drawing processing is performed on the flexible recording medium.

  According to a third aspect of the present invention, in the drawing apparatus capable of correcting the drawing position according to the second aspect of the invention, the control unit stores two-dimensional drawing pattern data aligned based on the data detected by the alignment unit. According to the positional deviation amount obtained by comparing the position data of the predetermined portion of the flexible recording medium measured by the alignment side position measuring means and the position data of the predetermined portion of the flexible recording medium measured by the drawing side position measuring means. Thus, at least one of correction for moving the two-dimensional drawing pattern in parallel and rotation correction for moving the two-dimensional drawing pattern in the rotation direction is performed.

  The invention according to claim 4 is the drawing apparatus according to claim 2 or 3, wherein the alignment side position measuring means and the drawing side position measuring means are each a flexible recording medium. It is comprised by the sensor which detects the position of both the lateral sides.

  The invention according to claim 5 is the drawing apparatus capable of correcting the drawing position according to claim 2 or claim 3, wherein the alignment side position measuring means is also used in the camera unit of the alignment unit, and the drawing side position measuring means is And an exposure-side measuring camera.

  According to a sixth aspect of the present invention, in the drawing apparatus capable of correcting the drawing position according to any one of the second to fifth aspects, the drawing unit comprises a laser exposure apparatus.

  According to a seventh aspect of the present invention, in the drawing apparatus capable of correcting the drawing position according to any one of the second to fifth aspects, the drawing unit modulates the light beam with a spatial light modulation element, and the second position is corrected. The dimensional pattern is configured to be exposed.

  According to the drawing position correcting method and the drawing apparatus capable of correcting the drawing position according to the present invention, based on the detection result of the alignment unit for the long flexible recording medium conveyed on the conveyance path. While aligning, correct the difference between the position of the area to be aligned and the drawing position by the drawing unit on the long flexible recording medium conveyed from the alignment unit to the drawing unit. By performing the drawing process, the accuracy of the drawing position can be improved and a good image can be obtained.

  An embodiment relating to a drawing apparatus of the present invention will be described with reference to FIGS.

  The drawing apparatus according to the embodiment of the present invention is configured to perform exposure while moving a flexible printed wiring board material, which is a flexible recording medium formed on a long belt-like sheet, automatically controlled by a control unit in the main scanning direction. As a flexible printed wiring board exposure apparatus that performs exposure processing by spatially modulating the multi-beam emitted from the light source side based on the modulation signal generated from the image data by the control unit and irradiating the flexible printed wiring board material with the head. Constitute.

  As shown in FIG. 1, this drawing apparatus arranges an exposure processing unit 12 at the center of a floor base 10, and unexposed on one side (left side as viewed in FIG. 1) of the exposure processing unit 12. The recording medium supply unit 14 is arranged, and the exposed recording medium collection unit 16 is arranged on the other side (right side as viewed in FIG. 1) of the exposure processing unit 12.

  In the exposure processing unit 12, a substrate transfer unit 22 is mounted on a plane of a device base 18 with a vibration isolation function installed on the floor base 10 via a linear moving mechanism 20.

  The linear moving mechanism 20 is configured by mounting a linear motor or other feeding means between the upper flat surface portion of the apparatus base 18 with a vibration isolation function and the moving table 21 to which the substrate transport section 22 is attached.

  When the linear moving mechanism 20 is constituted by a linear motor, for example, a rod-shaped stator portion (magnet portion) (not shown) is provided on the apparatus base 18 with a vibration isolation function along the conveying direction, and the lower surface of the moving table 21 is provided. A coil portion (not shown) arranged on the side is provided. This linear motor moves the moving table 21 in the transport direction by a driving force generated by the action of the magnetic field generated by energizing the coil part and the magnetic field of the stator part.

  This linear motor can drive and control the constant speed, positioning accuracy, torque fluctuation at the time of start or stop, etc. in the transfer operation of the substrate transfer unit 22 with high accuracy.

  The linear moving mechanism 20 moves the entire substrate transport unit 22 to the upstream or downstream side in the transport direction of the flexible printed wiring board material 28, thereby moving the alignment shown in FIG. 3 from the exposure processing position shown in FIGS. It is configured to be movable to a camera calibration position, a beam position detection position shown in FIG. 4, or an exposure surface power calibration position shown in FIG.

  As shown in FIGS. 1 and 2, the substrate transport unit 22 has a substrate thickness adjustment Z stage 24 installed on the moving table 21, and a detection unit with a detection unit is mounted on the substrate thickness adjustment Z stage 24. A scanning transport unit 26 is provided and configured.

  The substrate thickness adjusting Z stage 24 adjusts the height position (Z-axis direction) of the entire scanning transport unit 26 with the detecting unit by a fine adjustment mechanism using a slope for adjusting the height position of the exposure surface of the recording medium. It is configured to be movable in parallel.

  As shown in FIG. 2, a belt transport mechanism is mounted on the scanning transport section 26 with a detection unit in order to transport a flexible printed wiring board material 28 that is a long strip-shaped flexible recording medium. This belt conveyance mechanism is configured by arranging a nip roller pair 30 on the upstream side in the conveyance direction, a nip drive roller pair 32 on the downstream side in the conveyance direction, and winding an endless belt 33 between them.

  The nip drive roller pair 32 is composed of a plurality of (here, two) nip rollers 32B that are in rolling contact with the outer peripheral surface of the drive roller 32A via an endless belt 33. The flexible printed wiring board material 28 is sandwiched between the driving roller 32A and the nip roller 32B via the endless belt 33, and the endless belt 33 and the flexible printed wiring board material 28 are rotated by rotating the driving roller 32A. Are transported without slipping.

  A rotational driving force of a predetermined rotational speed output from the driving motor 34 and decelerated by the speed reducing mechanism 36 is transmitted to the driving roller 32A by the belt transmission mechanism. Accordingly, the nip drive roller pair 32 conveys the flexible printed wiring board material 28 at a predetermined scanning speed.

  The nip roller pair 30 disposed in the scanning conveyance unit 26 with the detection unit is configured by two nip rollers being in contact with each other via an endless belt 33, and the endless belt 33 is interposed between the nip rollers of the nip roller pair 30. The flexible printed wiring board material 28 is held in a state of being interposed, and the endless belt 33 and the flexible printed wiring board material 28 are sent out by rolling the nip roller pair 30.

  The endless belt 33 is formed with, for example, a large number of suction holes 33A, which are circular through holes, distributed on an average.

  Further, in the scanning transport section 26 with the detection unit, adjacent to the back side of the upper stretched portion of the endless belt 33 arranged along the transport path for placing the flexible printed circuit board material 28, A suction box 35 constituting the suction means is installed.

  The suction box 35 is arranged over a predetermined range including at least an alignment area and an exposure area which are positions immediately below an alignment unit 46 and an exposure head unit 48 which will be described later.

  The suction box 35 constituting the suction means is formed in a rectangular box shape without a lid, and is disposed adjacent to the back side of the upper stretched portion of the endless belt 33, whereby the endless belt 33, the suction box 35, It is configured to create a semi-enclosed space for air intake surrounded by

  Furthermore, in this suction means, the tip of an intake pipe (not shown) drawn from the blower 37 is connected to the suction box 35. The blower 37 constituting the suction means sucks air in a semi-enclosed space surrounded by the endless belt 33 and the suction box 35, and sucks air from the suction hole 33A of the endless belt 33, whereby the endless belt 33 is sucked. The operation of adsorbing the flexible printed wiring board material 28 to the surface of the substrate is configured to be performed.

  In the scanning transport unit 26 with the detection unit configured as described above, the blower 37 is driven to suck the air in the semi-enclosed space surrounded by the endless belt 33 and the suction box 35, thereby the endless belt 33. Due to the negative pressure sucked from the respective suction holes 33 </ b> A, a portion of the flexible printed wiring board material 28 carried from the nip roller pair 30 onto the transport path of the exposure processing unit 12 is attracted to the endless belt 33. In this state, the flexible printed wiring board material 28 is conveyed integrally with the endless belt 33 and is carried out from the nip drive roller pair 32.

  Thus, while the flexible printed wiring board material 28 is conveyed from the nip roller pair 30 to the nip drive roller pair 32, the flexible printed wiring board material 28 is continuously conveyed in a certain conveyance direction while maintaining the state of being attracted to the endless belt 33. . Therefore, the scanning transport unit 26 with the detection unit is configured such that the flexible printed wiring board material 28 is placed on the endless belt 33 and the exposure process can be performed while continuously driving the endless belt 33. Therefore, it is possible to continue the exposure process at all times and increase productivity.

  Further, in the scanning transport unit 26 with the detection unit, since the flexible printed wiring board material 28 is placed in close contact with the endless belt 33 having high flatness, the flexible printed wiring board material 28 is laser-exposed. The focal length from the exposure head unit 48 can be kept constant.

  In particular, when the endless belt 33 is formed of a metal belt instead of a cloth belt, if the endless belt 33 is configured so as to obtain a higher flatness by applying a large tension to the endless belt 33, Since the planarity of the flexible printed wiring board material 28 adsorbed on the surface can be improved, the focal length from the exposure head unit 48 can be kept constant with higher accuracy.

  Thus, according to the structure which exposes the flexible printed wiring board material 28 along the endless belt 33 on the conveyance path | route which set the continuous plane continuously, for example, it is two-dimensional by a two-dimensional spatial modulation element (DMD). When performing so-called surface exposure processing for irradiating a pattern, even if the exposure area has a width in the feeding direction of the flexible printed wiring board material 28, the flexible printed wiring board material 28 has high flatness, so that the substrate feeding in the exposure area is performed. The focal length does not change depending on the direction, and a good image can be obtained.

  Further, since the flexible printed wiring board material 28 is adsorbed by the endless belt 33 on the conveyance path of the scanning conveyance unit 26 with the detection unit, good flatness can be ensured. It is possible to prevent the flexible printed wiring board material 28 from expanding and contracting due to the tension by not applying the tension that is pulled in the conveying direction to the plate material 28 itself. Therefore, in the scanning transport unit 26 with the detection unit configured as described above, the flexible printed wiring board material 28 is subjected to an exposure process in a state where the flexible printed wiring board material 28 is elastically stretched and deformed by the tension, and then the applied tension is released. Thus, when the flexible printed wiring board material 28 returns to the original shape, it is possible to suppress the deviation of the exposed image (so-called exposure position deviation).

  Note that the endless belt 33 and the suction box 35 are not provided on the transport path of the scanning transport unit 26 with the detection unit, and only the flexible printed wiring board material 28 is provided between the nip roller pair 30 and the nip drive roller pair 32. And a predetermined tension is applied to a portion of the flexible printed wiring board material 28 stretched on the transport path of the scanning transport section 26 with the detection unit by a dancer roller mechanism using a dancer roller 68. Thus, the exposure processing may be performed while maintaining the flatness of the flexible printed wiring board material 28.

  In this drawing apparatus, the exhaust of the blower 37 is removed through the precision air conditioner 39 and then returned to the clean room in which the drawing apparatus is installed. Therefore, in addition to the exhaust pipe 41 having one end connected to the exhaust port of the blower 37 The end is connected to the inlet side of the precision air conditioner 39.

  With this configuration, the air sucked by the blower 37 to suck the flexible printed wiring board material 28 from the suction box 35 onto the endless belt 33 is regenerated to the precision air conditioner 39 through the exhaust pipe 41. Although not shown, the precision air conditioner 39 cleans the air sent from the blower 37 and the air taken in from the inside of the drawing device housing by a so-called HEPA filter and returns it to the clean room.

  Therefore, in the case of such a configuration, when a large amount of air sent from the blower 37 is exhausted outside the clean room, it is necessary to increase the air conditioning capability for supplying fresh and clean air into the clean room, which is expensive. However, this can be prevented, and if the exhaust of the blower 37 is exhausted into the clean room as it is, dust from the blower 37 will contaminate the clean room, but this can be prevented.

  A guide roller 38 is installed on the upstream side of the nip roller pair 30 and a guide roller 40 is installed on the downstream side of the nip drive roller pair 32 in the conveyance path of the scanning conveyance unit 26 with the detection unit.

  As shown in FIG. 2, on the outer side of the nip roller pair 30 in the scanning conveyance unit 26 with the detection unit, an extension on the upstream side in the conveyance direction with respect to the exposure conveyance path of the flexible printed wiring board material 28 set therein. Calibration as a calibration member at a predetermined position on the line (on the same plane as the imaging surface of the alignment mark M formed on the flexible printed wiring board material 28 on the exposure transport path in the scanning transport section 26 with the detection unit) A scale 42 is arranged.

  Further, on the outer side of the nip drive roller pair 32 in the scanning conveyance unit 26 with the detection unit, a predetermined position on the extension line on the downstream side in the conveyance direction with respect to the exposure conveyance path of the flexible printed wiring board material 28 set therein. A beam position detection device 44 and an exposure surface power measurement device 45 are arranged on the same plane as the exposure surface of the exposure area on the exposure transport path in the scanning transport section 26 with the detection unit.

  That is, in this drawing apparatus, the camera unit 52 of the alignment unit 46 serving as the alignment unit moves relative to the scanning transport unit 26 with the detection unit, and the camera unit 52 scans with the detection unit. The calibration is set in the area where the alignment is performed on the exposure conveyance path of the flexible printed wiring board material 28 set in the conveyance unit 26, and the camera unit 52 is provided in the scanning conveyance unit 26 with the detection unit. It is configured to be set at the position of the calibration scale 42 which is a member.

  In this drawing apparatus, relative movement that allows relative movement so that the camera unit 52 and the area for alignment on the exposure conveyance path correspond to each other and the camera unit 52 and the calibration scale 42 that is a calibration member correspond to each other. As long as the mechanism is used, the relative movement may be performed in any manner. For example, as shown in FIGS. 1 to 5, the camera unit 52 is fixed and the scanning transport unit 26 with a detection unit is moved by a linear movement mechanism 20 that is a relative movement mechanism, or for detection. The position of the area to be aligned and the position of the calibration scale 42 are fixed by fixing the scanning transport unit 26 with the unit, and the camera unit 52 is moved between the imaging position of the alignment mark M and the imaging position of the calibration scale 42. Alternatively, it may be configured to be movable by a relative movement mechanism (not shown).

  At the same time, in this drawing apparatus, each head assembly 54 of the exposure head unit 48 and the beam position detection device 44 correspond to each other, and each head assembly 54 and the exposure surface power measurement device 45 can be moved relative to each other. Any relative movement mechanism may be used, and the relative movement may be performed in any manner. For example, as shown in FIGS. 1 to 5, each head assembly 54 of the exposure head unit 48 is fixed to move the beam position detection device 44 to the exposure position, and the scanning transport unit 26 with the exposure surface power measurement device 45 is provided. Is moved to the exposure position, or the scanning conveyance unit 26 with the beam position detection device 44 and the exposure surface power measurement device 45 is fixed to be immovable, and the head assembly 54 side of the exposure head unit 48 is moved. You may comprise so that it may be made.

  That is, in this drawing apparatus, the linear movement mechanism 20 as a relative movement mechanism for moving the substrate transport unit 22 moves the calibration scale 42, the beam position detection device 44, and the exposure surface power measurement device 45 to predetermined positions. The means to make is comprised.

  As shown in FIGS. 1 and 2, the exposure processing unit 12 includes an alignment unit 46 that is an alignment unit on the upstream side in the transport direction above the substrate transport unit 22, and serves as a drawing unit on the downstream side in the transport direction. The exposure head unit 48 is arranged.

  Although not shown, the alignment unit 46 serving as the alignment unit is installed by attaching the base unit 50 to a fixed structure unit such as a casing of the drawing apparatus. The base portion 50 is provided with a pair of parallel rail portions (not shown), and a lens portion at a desired position in the width direction of the flexible printed wiring board material 28 via a camera base that is moved by a ball screw mechanism. A plurality of (four in the present embodiment) camera units 52 are mounted so as to be movable so as to align the optical axes.

  Although not shown, each camera unit 52 is provided with a lens unit on the lower surface of the camera body, and a ring-shaped strobe light source (LED strobe light source) is attached to the protruding tip of the lens unit. The camera unit 52 irradiates the flexible printed wiring board material 28 with light from the strobe light source, and the reflected light is captured by the camera body via the lens unit. An end or a mark M (shown in FIG. 6) is detected.

  As shown in FIGS. 1 and 2, the exposure head unit 48 as a drawing unit disposed in the exposure processing unit 12 is not shown, but outside the both ends in the width direction of the flexible printed wiring board material 28 being conveyed. Install it on a standing column.

  The exposure head unit 48 as a drawing unit is configured as a laser exposure apparatus, and has a plurality of head assemblies 54 in a substantially matrix shape of m rows and n columns (a total of 8 in 2 rows and 4 columns in the present embodiment). The rows of the plurality of head assemblies 54 are arranged in the width direction of the flexible printed wiring board material 28 (the direction perpendicular to the conveyance direction and perpendicular to the scanning direction which is the conveyance direction of the flexible printed wiring board material 28). (Corresponding to the direction).

  As shown in FIG. 1, a light source unit 56 is installed inside the drawing apparatus main body. Although not shown, the light source unit 56 accommodates a plurality of laser (semiconductor laser) light sources, and introduces light beams emitted from the respective laser light sources into the corresponding head assemblies 54 by optical fibers.

  Each head assembly 54 modulates the introduced light beam by a not-shown digital micromirror device (DMD), which is a spatial light modulation element, and then focuses on the flexible printed wiring board material 28 by an autofocus mechanism. Thus, a two-dimensional pattern is irradiated (so-called surface exposure processing).

  The digital micromirror device (DMD) of each head assembly 54 is controlled by the image processing unit of the control unit 58 in dot units based on the image data, and exposes the dot pattern on the flexible printed wiring board material 28.

  The exposure head unit 48 as a drawing unit conveys the plurality of light beams emitted from the respective head assemblies 54 to the flexible printed wiring board material 28 at a predetermined timing while conveying the flexible printed wiring board material 28 at a constant speed. Irradiation is performed. At this time, since each head assembly 54 is exposed after being focused by an autofocus mechanism at the time of exposure, an appropriate exposure process can be performed even if there is some variation in the height position of the flexible printed wiring board material 28.

  In this exposure head unit 48, although not shown, the exposure area by one head assembly 54 is inclined at a predetermined inclination angle with respect to the scanning direction and is formed into a rectangular shape with the scanning direction as the short side, A strip-shaped exposed region is formed for each head assembly 54 on the flexible printed wiring board material 28 conveyed in the scanning direction.

  Further, in this exposure head unit 48, since the exposure area is exposed at a predetermined inclination angle with respect to the scanning direction, the exposed two-dimensional array of dot patterns is inclined with respect to the scanning direction. Since the dots arranged in the direction pass between the dots arranged in the direction intersecting the scanning direction, the substantial dot pitch is narrowed, so that high resolution can be achieved.

  As shown in FIGS. 1 and 2, in this drawing apparatus, the exposure processing unit 12 performs the exposure process continuously while transporting the flexible printed wiring board material 28 on the transport path set in the exposure processing unit 12. An unexposed recording medium supply unit 14 connected to the upstream side of the conveying path is provided, and an exposed recording medium recovery unit 16 connected to the downstream side of the conveying path of the exposure processing unit 12 is provided.

  The unexposed recording medium supply unit 14 has a supply reel 60 on which an unexposed long flexible printed wiring board material 28 is wound in a roll shape and a spacer tape take-up reel 62 mounted on a drive unit 64. Constitute.

  In the unexposed recording medium supply unit 14, a dancer which is a tension setting means for enabling the flexible printed wiring board material 28 drawn from the supply reel 60 to be transported along the endless belt 33 so as to be in close contact with the endless belt 33. It is configured to be carried into the entrance of the recording medium conveyance path of the exposure processing unit 12 via a roller mechanism.

  Although not shown, a first dancer roller mechanism for adjusting the difference in conveyance speed is disposed between the supply reel 60 and the entrance of the recording medium conveyance path of the exposure processing unit 12, and a clean roller is interposed therebetween. A second dancer roller mechanism that is tension setting means may be arranged.

  In this dancer roller mechanism, for example, a portion in which the flexible printed wiring board material 28 is loosened in a U shape between the exit side roller 66 of the unexposed recording medium supply unit 14 and the entrance guide roller 38 of the exposure processing unit 12. The dancer roller 68 is placed so as to roll. The dancer roller mechanism can be replaced by a so-called air dancer configured to suck the flexible printed wiring board material 28 with air. Further, the second dancer roller mechanism, which is a tension setting means, is configured to apply a relatively weak tension necessary to bring the flexible printed wiring board material 28 into close contact with the endless belt 33 in a planar manner.

  In the unexposed recording medium supply unit 14 configured as described above, the drive unit 64 rotates the supply reel 60 to pull out the flexible printed wiring board material 28 and the nip roller pair 30 of the exposure processing unit 12 via the dancer roller mechanism. And the endless belt 33, and the flexible printed wiring board material 28 is continuously supplied so as not to slip on the endless belt 33 on the transport path.

  In this supply reel 60, a spacer tape 61 is sandwiched and wound so that the wound flexible printed wiring board members 28 are not in direct contact with each other. For this reason, in the unexposed recording medium supply unit 14, the drive unit 64 takes up the spacer tape so that the spacer tape 61 extending along with the flexible printed wiring board material 28 to be carried out is taken up on the spacer tape take-up reel 62. The reel 62 is driven to rotate.

  The exposed recording medium recovery unit 16 is configured by mounting a take-up reel 70 around which the exposed long flexible printed wiring board material 28 is wound and a spacer tape supply reel 72 on a drive unit 74. .

  In the exposed recording medium collection unit 16, the exposed flexible medium carried out from the exposure processing unit 12 via a dancer roller mechanism as tension setting means connected to the exit of the recording medium conveyance path of the exposure processing unit 12. The printed wiring board material 28 is wound around the take-up reel 70.

  For example, the dancer roller mechanism includes a flexible printed wiring board between a holding roller 76 disposed on the downstream side in the transport direction from the exit guide roller 40 of the exposure processing unit 12 and an entrance side roller 78 of the exposed recording medium recovery unit 16. The dancer roller 68 is placed so as to roll on a portion where the plate material 28 is slackened in a U shape.

  Further, in the exposed recording medium recovery unit 16, a nip roller pair 80 is installed between the inlet side roller 78 and the take-up reel 70, and the take-up reel 70 is wound, so that the exposed flexible printed wiring board material is used. The tension applied by pulling 28 is absorbed by the nip roller pair 80 so that the tension is not transmitted to the dancer roller mechanism arranged on the upstream side of the conveyance path of the exposed recording medium collection unit 16.

  The exposed recording medium recovery unit 16 configured as described above is configured such that the flexible printed wiring board material 28 sent out from the exposure processing unit 12 via the dancer roller mechanism is driven by the drive unit 74 driving the take-up reel 70 to rotate. Are continuously wound and collected.

  Further, in the exposed recording medium recovery unit 16, when winding on the take-up reel 70, the winding surface is arranged so that the flexible printed wiring board materials 28 wound on the take-up reel 70 are not in direct contact with each other. The spacer tape 61 is sandwiched between them and wound. Therefore, in the exposed recording medium recovery unit 16, the drive unit 74 extracts the spacer tape 61 from the spacer tape supply reel 72 so that the spacer tape 61 can be wound around the flexible printed wiring board material 28 that is carried in. The spacer tape supply reel 72 is rotated.

  As shown in FIGS. 1 and 2, in the drawing apparatus having the above-described configuration, a belt conveyance mechanism is provided between the nip roller pair 30 and the nip drive roller pair 32 in the exposure conveyance path of the exposure processing unit 12.

  In the exposure transport path of the exposure processing unit 12, the portion of the flexible printed wiring board material 28 transported on the endless belt 33 of the belt transport mechanism drives the blower 37 and is surrounded by the endless belt 33 and the suction box 35. The rotational driving force of the pair of nip driving rollers 32 is integrally and sucked on the surface of the endless belt 33 by the action of sucking the air in the semi-sealed space and sucking it from the suction holes 33A of the endless belt 33. Thus, exposure processing is performed by the exposure head unit 48 while transporting in the main traveling direction (main scanning direction) at a predetermined speed.

  When the exposure processing unit 12 performs an exposure process, the flexible printed wiring board material 28 is positioned at a position corresponding to the position below the alignment unit 46 and a position corresponding to the position below the exposure head unit 48 on the exposure transport path. The endless belt 33 is supported in a plane. The flexible printed wiring board material 28 stretched on the exposure transport path of the exposure processing unit 12 includes a dancer roller mechanism disposed on the upstream side in the transport direction and a dancer roller mechanism disposed on the downstream side in the transport direction. As a result, a predetermined tension acts, so that the flexible printed wiring board material 28 is stably held on the endless belt 33 without being loosened.

  Therefore, in this exposure processing unit 12, the surface of the flexible printed wiring board material 28 held in a plane by the endless belt 33 is appropriately exposed in a two-dimensional pattern by each head assembly 54 of the exposure head unit 48. It can be performed.

  Further, the exposure processing unit 12 can continuously expose the flexible printed wiring board material 28 conveyed at a constant speed in the main traveling direction by the exposure head unit 48. It is possible to eliminate the operation of reciprocating directly under the exposure head unit 48 and improve the working efficiency by performing exposure processing quickly and rationally.

  Further, in this drawing apparatus, exposure processing is performed after alignment. The alignment is performed before the exposure process as described above, for example, because the flexible printed wiring board material 28 is elastically deformed so as to extend in the transport direction and contract in the width direction, for example, by the tension applied to the flexible printed wiring board material 28 for transport. When the printed wiring board material 28 is exposed to light, the tension at the time of conveyance is released from the flexible printed wiring board material 28 and the flexible printed wiring board material 28 returns to the original state, and then the two-dimensional drawing pattern at the time of exposure is obtained. This is to prevent an inappropriate two-dimensional drawing pattern such as a different position in the transport direction from remaining on the flexible printed wiring board material 28.

  That is, in this drawing apparatus, the two-dimensional drawing pattern formed on the flexible printed wiring board material 28 in a state where no load is applied from the outside is used as a predetermined appropriate image pattern to be formed, and the flexible printed wiring board material is used. Alignment is performed so that a predetermined two-dimensional drawing pattern is appropriately formed on the flexible printed wiring board material 28 in a proper state with high accuracy.

  For this reason, the control unit 58 of the drawing apparatus, for example, performs an exposure process with the exposure head unit 48 based on the mark M acquired by imaging the flexible printed wiring board material 28 by the alignment unit 46 or edge position data. The correction coefficient related to the exposure start position and the dot shift position in the width direction of the flexible printed wiring board material 28 are obtained.

  Based on the correction coefficient, the control unit 58 performs exposure data deformation processing so that the exposure image corresponds to the expansion / contraction deformation state of the flexible printed wiring board material 28, and image recording position correction (exposure start timing correction). ), The control for performing the exposure process in each head assembly 54 is executed.

  Further, in this drawing apparatus, the exposure data obtained by deforming the exposure image so as to correspond to the expansion / contraction deformation state of the substrate material in the alignment unit 46 described above, and the image recording position correction (exposure start time correction) amount are the alignment unit 46. Therefore, the flexible printed wiring board material 28 conveyed on the conveyance path of the scanning conveyance unit 26 with the detection unit reaches the exposure head unit 48 from the position of the alignment unit 46. In the meantime, if it meanders as described in an exaggerated manner in FIG. 8 or if the conveyance speed fluctuates, the position of the two-dimensional drawing pattern formed by exposure on the flexible printed wiring board material 28 will be different. May be formed on the flexible printed wiring board material 28.

  Therefore, in this drawing apparatus, it is necessary to correct an error between the conveyance state of the flexible printed wiring board material 28 at the position of the alignment unit 46 and the conveyance state of the flexible printed wiring board material 28 at the position of the exposure head unit 48. is there.

  Therefore, in this drawing apparatus, as shown in FIGS. 1, 2, 7, and 8, the alignment side position measuring means 86 of the flexible printed wiring board material 28 is provided in the vicinity of the alignment unit 46, and the exposure head unit 48 An exposure side position measuring means 88 which is a drawing side position measuring means is provided in the vicinity.

  The alignment-side position measuring means 86 and the exposure-side position measuring means 88 are, for example, both lateral side portions of the flexible printed wiring board material 28 being conveyed on the conveyance path of the scanning conveyance unit 26 with a detection unit. It is comprised with the sensor which detects the position of this.

  In this drawing apparatus, the control unit 58 detects the position in the width direction of the flexible printed wiring board material 28 in the vicinity of the alignment unit 46 detected by the alignment side position measuring means 86 and the exposure side position measuring means 88. The amount of deviation from the position in the width direction of the flexible printed wiring board material 28 in the vicinity of the exposure head unit 48 (difference between both positions) is obtained, and a two-dimensional drawing pattern corresponding to this position difference is shown in FIG. Thus, a good two-dimensional drawing pattern is corrected by making a translation from the unit exposure area L indicated by the solid line to the unit exposure area L indicated by the one-dot chain line or to the unit exposure area L indicated by the two-dot chain line. To get.

  Further, in this drawing apparatus, the flexible printed wiring board material 28 is based on the data detected by the camera unit 52 within a relatively long time until the flexible printed wiring board material 28 is conveyed from the alignment unit 46 to the exposure head unit 48. Image recording position correction is performed by performing processing that takes a long processing time such as processing the exposure data so that the exposure image corresponds to the expansion / contraction deformation state caused by the elongation or distortion of the image.

  In this drawing apparatus, when the position detected by the camera unit 52 for the alignment process in the flexible printed wiring board material 28 is detected by the exposure side position measuring means 88 in the width direction position of the flexible printed wiring board material 28. In addition, the control unit 58 performs a correction such that the two-dimensional drawing pattern exposed by the head assembly 54 is translated within a relatively short period of time, such as making a fine adjustment with a simple deformation immediately before the exposure. When the drawing pattern is scanned and exposed, control is performed so as to increase the positional accuracy of the image.

  Further, in this drawing apparatus, an error between the conveyance state of the flexible printed wiring board material 28 at the position of the alignment unit 46 and the conveyance state of the flexible printed wiring board material 28 at the position of the exposure head unit 48 is corrected. As a means, you may comprise as illustrated in FIG. The error correction means shown in FIG. 9 uses the camera unit 52 of the alignment unit 46 and an exposure side measurement camera 90 as an exposure side position measurement means in the vicinity of the exposure head unit 48.

  In the error correction means configured as described above, the position of the alignment mark M provided on the flexible printed wiring board material 28 is measured by each required camera unit 52, and the flexible printed wiring board material 28 is conveyed to be aligned. When the position of the exposure head unit 48 is reached, the position of the alignment mark M is measured by the exposure side measuring camera 90. Then, according to the positional deviation amount obtained by comparing the position data of the alignment mark M measured by the alignment side position measuring means 86 with the position data of the alignment mark M measured by the exposure side measuring camera 90, the control unit As shown in FIG. 10, for example, as shown in FIG. 10, the eccentric position correction is performed so that the unit 58 is translated from the unit exposure region L indicated by the solid line to the unit exposure region L indicated by the one-dot chain line or from the unit exposure region L indicated by the two-dot chain line Further, for example, as shown in FIG. 11, rotation correction is performed to move the exposure position in the rotation direction of the unit exposure region L, and image recording position correction (exposure start time correction) is performed according to the change in the conveyance speed. Then, an appropriate exposure process is executed on the flexible printed wiring board material 28 so as to obtain a highly accurate two-dimensional drawing pattern.

  Next, a calibration procedure for the alignment unit 46 used in the drawing apparatus will be described. In this drawing apparatus, the alignment unit 46 performs alignment for appropriately adjusting the relative positional relationship between the flexible printed wiring board material 28 and the exposure head unit 48.

  In the alignment of the drawing apparatus, when the size data of the flexible printed wiring board material 28 is input through an input unit (not shown), the position of the camera unit 52 of the alignment unit 46 is determined based on the input size data. Movement adjustment is performed so that the position in the width direction of the substrate material 28 is matched.

  Further, in this drawing apparatus, a predetermined range in the longitudinal direction of the flexible printed wiring board material 28 moving in the main scanning direction is photographed by each camera unit 52 and formed in advance on the flexible printed wiring board material 28 for detecting the exposure position. The detected mark M is detected and compared with the reference position of each camera unit 52 to generate exposure correction data. Based on this correction data, a pulse counter or the like (not shown) is used to detect the flexible printed wiring board material 28. The exposure processing operation is performed at the timing when the exposure start position reaches the exposure beam irradiation position of the exposure head unit 48.

  Further, in this drawing apparatus, the position of the alignment camera unit 52 is calibrated in order to achieve proper alignment. In the position calibration of the alignment camera unit 52, the position calibration is performed using the calibration scale 42.

  For this reason, in this drawing apparatus, the linear moving mechanism 20 is driven to provide the substrate transport unit 22 (moving table 21, substrate thickness adjusting Z stage 24, nip roller pair 30 and nip driving roller pair 32, and calibration scale 42. 2 is moved rightward from the exposure standby position shown in FIG. 2 toward the drawing and set at the alignment camera calibration position shown in FIG.

  That is, in this drawing apparatus, the linearly moving mechanism 20 that moves the substrate transport unit 22 causes the scanning transport unit 26 with the calibration scale 42 disposed on the substrate transport unit 22 to match the calibration scale 42 with the camera unit 52. Move.

  At the alignment camera calibration position shown in FIG. 3, the camera units 52 and the corresponding calibration scales 42 face each other. In this state, based on the width position information of the designated alignment mark M, each alignment camera unit 52 is moved in the substrate width direction.

  In this drawing apparatus, since the calibration scale 42 is arranged on the camera unit 52 side from the conveyance path of the flexible printed wiring board material 28, the flexible printed wiring board is placed on the conveyance path of the scanning conveyance section 26 with the detection unit. The position of the alignment camera unit 52 can be calibrated with the plate material 28 loaded. That is, in this drawing apparatus, the position of the alignment camera unit 52 can be calibrated without removing the flexible printed wiring board material 28 on the transport path of the scanning transport unit 26 with the detection unit.

  In this drawing apparatus, the calibration scale 42 is photographed by the alignment camera unit 52, and the positional relationship between the camera unit 52 and the calibration scale 42 is calibrated from the position where the pattern of the calibration scale 42 is photographed.

  In this drawing apparatus, after the alignment camera calibration operation is completed, the linear moving mechanism 20 is driven to move the entire substrate transport unit 22 from the alignment camera calibration position shown in FIG. 3 to the exposure standby position shown in FIG. Perform the return operation.

  Next, calibration means relating to the exposure position of each head assembly 54 used in the drawing apparatus and the power distribution in the exposure area will be described.

  In this drawing apparatus, first, in order to measure the beam position of each head assembly 54, the beam position detection device 44 corresponding to each head assembly 54 from the exposure standby position shown in FIG. 4 is moved to the beam position detection position shown in FIG.

  In this drawing apparatus, as in the case of moving the calibration scale 42 to the camera unit 52 described above, the scanning transport unit 26 with the detection unit of the substrate transport unit 22 is moved by the linear moving mechanism 20 that moves the substrate transport unit 22. The beam position detecting device 44 installed in is moved so as to match each head assembly 54.

  Then, the beam position of each head assembly 54 is measured by the beam position detector 44, and the exposure position of each head assembly 54 is calibrated.

  Next, in this drawing apparatus, in order to measure the power distribution in the exposure region of each head assembly 54, it corresponds to each head assembly 54 from the beam position detection position shown in FIG. The scanning conveyance unit 26 with a detection unit is moved to an exposure surface power calibration position where the exposure surface power measuring device 45 is opposed.

  In this drawing apparatus, similarly to the case where the calibration scale 42 is moved to the camera unit 52 described above, the scanning conveyance with the detection unit of the substrate conveyance unit 22 is performed by the linear moving mechanism 20 that moves the substrate conveyance unit 22. The exposure surface power measuring device 45 installed in the unit 26 is moved so as to match each head assembly 54.

  Then, the power distribution in the exposure area of each head assembly 54 is measured by the corresponding exposure surface power measuring device 45, the power in the entire exposure area is calibrated, and an appropriate two-dimensional pattern can be drawn.

  In this drawing apparatus, since the beam position detection device 44 and the exposure surface power measurement device 45 are arranged on the exposure head unit 48 side from the conveyance path of the flexible printed wiring board material 28, a scanning conveyance unit with a detection unit is provided. The flexible printed wiring board material 28 is interposed between each head assembly 54 and the beam position detecting device 44 or the exposure surface power measuring device 45 even in a state where the flexible printed wiring board material 28 is carried on the conveyance path 26. Therefore, calibration of the exposure position of each head assembly 54 and power calibration over the entire exposure area of each head assembly 54 can be performed.

  That is, in this drawing apparatus, the exposure position of each head assembly 54 is calibrated and the exposure area of each head assembly 54 is removed without removing the flexible printed wiring board material 28 on the transport path of the scanning transport section 26 with the detection unit. Power calibration can be performed over the entire area.

  Further, in this drawing apparatus, after completing the operation of calibrating the exposure position of each head assembly 54 and the operation of calibrating the power in the entire exposure region, the linear moving mechanism 20 is driven, and the entire substrate transport unit 22 is illustrated. An operation for returning from the exposure surface power calibration position shown in FIG. 5 to the exposure standby position shown in FIG.

  In this drawing apparatus, as described above, when performing the alignment camera calibration operation, the exposure position calibration operation, or the power calibration operation over the entire exposure region, the transport path of the scanning transport unit 26 with the detection unit. It is necessary to prevent the flexible printed wiring board material 28 on the upper side from moving. Therefore, in this drawing apparatus, when the scanning transport unit 26 with the detection unit is moved, the blower 37 of the suction means is driven to suck in the air in the semi-enclosed space surrounded by the suction box 35 and to brake the air. The flexible printed wiring board material 28 is attracted to the surface of the endless belt 33 that is restrained by the action of sucking air from the suction holes 33A of the endless belt 33, and the scanning transport unit 26 with a detection unit. The flexible printed wiring board material 28 is kept stationary on the transfer path. Alternatively, in this drawing apparatus, when the scanning conveyance unit 26 with the detection unit is moved, the nip roller pair 30 on the upstream side in the conveyance direction of the scanning conveyance unit 26 with the detection unit is braked, and the nip roller The flexible printed wiring board material 28 sandwiched between the pair 30 is restrained, and the nip driving roller pair 32 on the downstream side in the transport direction of the scanning transport unit 26 with the detection unit is braked, and this nip roller The flexible printed wiring board material 28 sandwiched between the pair 30 may be restrained.

  Next, the operation and operation of the drawing apparatus configured as described above will be described.

  In this drawing apparatus, before the exposure process is started, the calibration process for the alignment camera unit 52 and the exposure position for each head assembly 54 and the power distribution in the exposure region are calibrated. The calibration process for the alignment camera unit 52 and the calibration process for the exposure position of each head assembly 54 and the power distribution in the exposure area can be performed at any time.

  In this drawing apparatus, a flexible printed wiring board material 28 to be subjected to exposure processing is set on a conveyance path from an unexposed recording medium supply unit 14 through an exposure processing unit 12 to an exposed recording medium collection unit 16. To do. For this reason, the flexible printed wiring board material 28 as a recording medium is taken out from the supply reel 60, and the tip is fixed to the take-up reel 70 through the conveyance path in the exposure processing unit 12.

  Thereafter, in this drawing apparatus, the flexible printed wiring board material 28 set on the conveyance path is placed between the outlet roller 66 on the supply reel 60 side and the inlet guide roller 38 on the exposure processing unit 12 side. The supply reel 60 is rotated until it is detected that the most slack in the slack state reaches a predetermined amount (maximum slack value), and the dancer roller 68 is set in the slack portion. Thereafter, the supply reel 60 is driven to rotate until it is detected that the sag has reached the sag amount upper limit value when it is detected that the sag has reached the sag amount lower limit value (the least slack state). adjust.

  Next, in this drawing apparatus, the slack is the least slack in the portion between the conveyance path exit side holding roller 76 of the exposure processing unit 12 and the entrance side roller 78 of the exposed recording medium recovery unit 16. The nip drive roller pair 32 is rotationally driven until it is detected that has reached a predetermined amount (sag minimum value), and the dancer roller 68 is set in the slack portion. Thereafter, when it is detected that the sag has reached the upper limit (the most slack state), the take-up reel 70 is driven to rotate until it is detected that the sag has reached the lower limit. Adjust to.

  Next, in this drawing apparatus, the surface of the flexible printed wiring board material 28 is photographed by the alignment camera unit 52 at a predetermined interval while the flexible printed wiring board material 28 is fed by rotating the nip driving roller pair 32 and flexible printing is performed. When the exposure start position mark M provided on the wiring board material 28 is photographed (detected), the nip drive roller pair 32 is stopped to be in a standby state.

  Next, in this drawing apparatus, when the nip driving roller pair 32 is rotated and the flexible printed wiring board material 28 is fed by a predetermined amount, the alignment camera unit 52 provides the flexible printed wiring board material 28 on the flexible printed wiring board material 28 board in the previous work process. The alignment mark M in the unit exposure area L is photographed, and the position of the mark M in the unit exposure area L is measured. Note that the measurement of the mark M position in the unit exposure region L is performed at two or more locations in the unit exposure region L in the feed direction of the flexible printed wiring board material 28 shown in FIG. 6 (four or more locations around the unit exposure region L). However, in the case where the substrate is not expanded or contracted, two locations (upper and lower or left and right of the unit exposure region L) may be used.

  Further, at this time, the control unit 58 uses the alignment side position measuring means 86 to detect the positions of both lateral sides of the flexible printed wiring board material 28 corresponding to the position of the alignment unit 46, and stores the data. .

  Next, when the measurement of the mark M position in the unit exposure region L is completed, the control unit 58 performs a modification process of the exposure data so that the exposure image corresponds to the expansion / contraction deformation state from the measurement value of the mark M position in the unit exposure region L. Do. At this time, the control unit 58 may perform processing including image recording position correction (exposure start time correction).

  The control unit 58 performs control to continuously send the flexible printed wiring board material 28 while performing exposure data deformation processing, and measures the alignment mark M position of the next unit exposure region L.

  Next, the control unit 58 detects the positions of both lateral sides of the flexible printed wiring board material 28 corresponding to the position of the exposure head unit 48 using the exposure side position measuring means 88, and previously detects the position on the alignment side. Compared with the position data of both lateral sides of the substrate material on the alignment unit 46 side detected and stored by the measuring means 86, the amount of deviation from the position in the width direction of the flexible printed wiring board material 28 (the position of both) When the head of the unit exposure region L is sent to the position of the exposure head unit 48 by correcting the two-dimensional drawing pattern by parallel movement by this position difference, each head assembly 54 Exposure of the corrected two-dimensional drawing pattern to the flexible printed wiring board material 28 is started, and the rear end of the unit exposure region L is the exposure head unit. When having reached a predetermined position which has passed through the door 48, to stop the exposure to the unit exposure region L.

  When the error correcting means in this drawing apparatus is constituted by the required camera unit 52 and the exposure side measuring camera 90, a predetermined range in the longitudinal direction of the flexible printed wiring board material 28 moving in the main scanning direction is photographed. The alignment mark M formed on the flexible printed wiring board material 28 in advance for detecting the exposure position is detected, and the correction data for exposure is generated by comparing with the reference position of each camera unit 52. The correction data obtained using the error correction means is used to correct the eccentric position and the rotation of the two-dimensional drawing pattern formation position, and the exposure start position of the flexible printed wiring board material 28 is the exposure head unit 48. The exposure processing operation is performed at the timing to reach the exposure beam irradiation position.

  This exposure processing is performed when the unit exposure region L of the flexible printed wiring board material 28 passes through the exposure region by the exposure head unit 48. In this exposure processing, each head assembly 54 irradiates the DMD with laser light based on the exposure data deformed by the control unit 58, and the laser light reflected when the DMD micromirror is turned on. Is formed on the flexible printed wiring board material 28 through an optical path set by the optical system.

  In this drawing apparatus, the above-described exposure process is continuously performed. When the unit exposure region L is exposed a predetermined number of times, the nip drive roller pair 32 is stopped and the exposure process is terminated.

  As described above, in this drawing apparatus, the flexible printed wiring board material 28 is placed along the endless belt 33 of the belt conveying mechanism spanned between the nip roller pair 30 and the nip drive roller pair 32. The flexible printed wiring board material 28 is continuously fed integrally with the endless belt 33 by rotating the nip driving roller pair 32 at a constant speed. Then, the head assembly 54 continuously draws the laser beam on the stretched portion of the flexible printed wiring board material 28 that is stretched between the nip roller pair 30 and the nip drive roller pair 32 via the endless belt 33. To do. Therefore, this drawing apparatus can improve the productivity because the exposure process can always be continuously performed as compared with the recording apparatus that performs the alignment adjustment process on the recording medium in the forward path and the exposure process in the backward path.

  Further, in the drawing apparatus according to the present embodiment, a configuration for sucking the flexible printed wiring board material 28 to the endless belt 33 (a suction hole 35A, a suction hole 33A drilled in the endless belt 33, a blower 37, etc.) is provided. Even if it is configured to expose while driving the endless belt 33 with the flexible printed wiring board material 28 along the surface of the endless belt 33, the endless belt 33 is aligned with the highly flat endless belt 33. The focal length from the head assembly 54 can be kept constant.

  Furthermore, in the drawing apparatus according to the present embodiment, when the flexible printed wiring board material 28 is sucked and conveyed to the surface of the endless belt 33 without the dancer roller mechanism as the tension setting means, Good flatness can be secured without applying tension to the flexible printed wiring board material 28. In the case of such a configuration, since the tension is not applied to the flexible printed wiring board material 28 by the tension setting means, the exposure position shift due to the expansion and contraction of the flexible printed wiring board material 28 can be reduced, and the correction processing for that is simple. Can be

  In this embodiment, a DMD is used as a spatial modulation element used in the head assembly 54 of the exposure head unit 48 configured as a laser exposure apparatus, and a dot pattern is generated by turning on / off at a constant lighting time. However, pulse width modulation by on-time ratio (duty) control may be performed. Alternatively, the dot pattern may be generated according to the number of times of lighting, with one lighting time being extremely short.

  Furthermore, in the present embodiment, the head assembly 54 provided with a DMD as the spatial light modulation element has been described. However, in addition to such a reflective spatial light modulation element, for example, MEMS (Micro Electro Mechanical Systems) type spatial light Modulator (SLM), transmissive spatial light modulator (LCD), optical element that modulates transmitted light by electro-optic effect (PLZT element), liquid crystal shutter array of liquid crystal light shutter (FLC), etc. A spatial light modulator other than the MEMS type can be used in place of the DMD. Further, a plurality of grating light valves (GLVs) arranged in two dimensions can be used. In the configuration using these reflective spatial light modulator (GLV) and transmissive spatial light modulator (LCD), a lamp or the like can be used as a light source in addition to the laser described above.

  As a light source in this embodiment, a fiber array light source provided with a plurality of combined laser light sources, one optical fiber that emits laser light incident from a single semiconductor laser having one light emitting point A fiber array light source in which the provided fiber light sources are arrayed, a light source in which a plurality of light emitting points are arranged two-dimensionally (for example, an LD array, an organic EL array, etc.), and the like can be applied.

  In this drawing apparatus, a laser exposure apparatus using, for example, a polygon mirror that performs exposure processing in a line shape may be used in addition to a head assembly that performs exposure processing by irradiating a two-dimensional pattern.

  The drawing apparatus can use either a photon mode photosensitive material in which information is directly recorded by exposure or a heat mode photosensitive material in which information is recorded by heat generated by exposure. When using a photon mode photosensitive material, a GaN-based semiconductor laser, a wavelength conversion solid-state laser, or the like is used for the laser device. When using a heat mode photosensitive material, an AlGaAs-based semiconductor laser (infrared laser), A solid state laser is used.

  Further, in the above-described embodiment, the dancer as the tension setting means in which the flexible printed wiring board material 28 stretched between the nip roller pair 30 and the nip drive roller pair 32 is arranged on the upstream side in the transport direction of the nip roller pair 30. The tension mechanism is configured to be stretched at a constant tension (tension) by the roller mechanism and the dancer roller mechanism as tension setting means disposed on the downstream side in the conveying direction of the nip driving roller pair 32. The nip roller pair and the other nip roller pair are rotationally driven at different speeds so that a constant tension is applied, or one nip roller pair is braked with a predetermined braking force, It may be configured to apply a certain tension so as to be conveyed by a pair of nip driving rollers.

  The drawing device of the present invention may be configured as a device that performs drawing processing on a display substrate in addition to drawing processing on the flexible printed wiring board material 28 as a long strip-like flexible recording medium.

  Further, the present invention is not limited to this, and it is needless to say that various other configurations can be taken without departing from the gist of the present invention.

It is a perspective view which shows schematic structure of the drawing apparatus principal part which concerns on embodiment of this invention. It is a front view which shows schematic structure of the drawing apparatus principal part which concerns on embodiment of this invention. It is a principal part schematic block diagram which shows the state which moved the scanning conveyance part with the unit for a detection of the drawing apparatus which concerns on embodiment of this invention to the position for alignment camera calibration. It is a principal part schematic block diagram which shows the state which moved the scanning conveyance part with the unit for a detection of the drawing apparatus which concerns on embodiment of this invention to the position for beam position detection. It is a principal part schematic block diagram which shows the state which moved the scanning conveyance part with the unit for a detection of the drawing apparatus which concerns on embodiment of this invention to the position for exposure surface power calibration. It is a top view of the principal part which illustrates the flexible printed wiring board material exposed by the drawing apparatus which concerns on embodiment of this invention. It is a principal part schematic plan view which shows the scanning conveyance part with the unit for a detection in the drawing apparatus which concerns on embodiment of this invention. It is a principal part schematic plan view which exaggerates and shows the state of the flexible printed wiring board material meandering by the scanning conveyance part with the unit for a detection in the drawing apparatus which concerns on embodiment of this invention. It is a principal part schematic plan view which shows the scanning conveyance part with the unit for a detection which provided the position measurement means of the other structure in the drawing apparatus which concerns on embodiment of this invention. It is a principal part schematic plan view which shows the correction | amendment which translates the two-dimensional drawing pattern performed with the exposure head unit of the drawing apparatus which concerns on embodiment of this invention. It is a principal part schematic plan view which shows the rotation correction of the two-dimensional drawing pattern performed with the exposure head unit of the drawing apparatus which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 12 Exposure processing part 14 Unexposed recording medium supply part 16 Exposed recording medium collection | recovery part 20 Linear moving mechanism 21 Movement table 22 Substrate conveyance part 24 Z stage 26 for substrate thickness adjustment Scanning conveyance part 28 with a detection unit Flexible Printed wiring board material 30 Nip roller pair 32 Nip drive roller pair 33 Endless belt 33A Adsorption hole 34 Drive motor 35 Suction box 37 Blower 38 Entrance guide roller 39 Precision air conditioner 40 Exit guide roller 42 Calibration scale 44 Beam position detection device 45 Exposure Surface power measuring device 46 Alignment unit 48 Exposure head unit 50 Base unit 52 Camera unit 54 Head assembly 58 Control unit 60 Supply reel 66 Exit side roller 68 Dancer roller 70 Take-up reel 76 Conveyance path exit side holding roller 78 Inlet Side roller 86 Alignment side position measurement means 88 Exposure side position measurement means 90 Exposure side measurement camera

Claims (7)

The drawing data is deformed so that the drawing image corresponds to the state of the flexible recording medium at the position of the alignment unit while the long flexible recording medium is conveyed in a certain conveying direction on the conveying path of the drawing apparatus. Process to get alignment information,
The position of the predetermined portion of the flexible recording medium detected in the state where the alignment processing is performed is compared with the position detected in the state where the predetermined portion of the flexible recording medium reaches the drawing unit that performs the drawing processing. Obtain information on the amount of displacement,
A drawing position correction method, wherein the drawing unit performs a drawing process with a two-dimensional drawing pattern in which the alignment information is corrected based on the positional deviation information. In a drawing apparatus that draws a long flexible recording medium with a drawing unit while carrying a long flexible recording medium in a certain carrying direction on a carrying path set in a scanning carrying unit,
An alignment unit disposed corresponding to an area for alignment that is set on the transport path of the scanning transport unit that transports the long flexible recording medium;
The position of the long flexible recording medium disposed corresponding to the alignment area set on the transport path of the scanning transport unit that transports the long flexible recording medium. Alignment side position measuring means for detecting;
A drawing unit arranged corresponding to a drawing position set on the downstream side in the conveying direction from an area for performing alignment set on the conveying path of the scanning conveying unit;
A drawing side position measuring means arranged corresponding to the drawing position set on the transport path;
The two-dimensional drawing pattern data aligned based on the data detected by the alignment unit, the position data of a predetermined portion of the flexible recording medium measured by the alignment side position measuring means, and the drawing side position measuring means A control unit for performing a drawing process by the drawing unit with a two-dimensional drawing pattern corrected in accordance with a positional deviation amount obtained by comparing the measured position data of the predetermined portion of the flexible recording medium;
A drawing apparatus capable of correcting a drawing position.   Two-dimensional drawing pattern data aligned based on the data detected by the alignment unit by the control unit is measured by the alignment-side position measuring means, and the position data of the predetermined portion of the flexible recording medium and the drawing side A correction for translating the two-dimensional drawing pattern in accordance with the amount of positional deviation obtained by comparing the position data of the predetermined portion of the flexible recording medium measured by the position measuring means, and a two-dimensional drawing pattern The drawing apparatus capable of correcting a drawing position according to claim 2, wherein at least one of rotation correction for moving in a rotation direction is performed.   The alignment side position measuring means and the drawing side position measuring means are each constituted by a sensor that detects the positions of both lateral sides of the flexible recording medium. A drawing apparatus capable of correcting the drawing position according to claim 3.   4. The drawing position according to claim 2, wherein the alignment side position measuring unit is also used as a camera unit of an alignment unit, and the drawing side position measuring unit is configured by an exposure side measuring camera. A drawing device that can correct.   6. The drawing apparatus capable of correcting a drawing position according to claim 2, wherein the drawing unit comprises a laser exposure apparatus.   6. The drawing according to claim 2, wherein the drawing unit is configured to perform exposure processing of a two-dimensional pattern by modulating a light beam with a spatial light modulation element. A drawing device capable of correcting the position.

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