KR102578965B1 - Drawing apparatus - Google Patents

Abstract

The drawing device 1 includes a supply unit 51 that holds a supply roll 511 on which a long substrate 9 is wound, a table 52 that holds the substrate pulled out from the supply unit on a holding surface 521, and A recovery unit 53 that takes up the substrate that has passed the holding surface onto a recovery roll 531, and a conveyance unit that conveys the substrate along a conveyance path from the supply unit, through the holding surface, to the recovery unit when drawing the pattern. (54) and a light emitting unit 31 that emits light when drawing a pattern, and a moving mechanism 4 that moves the table in the moving direction when drawing a pattern. When viewed along the width direction of the substrate on the holding surface, the conveyance path returns with respect to the moving direction at a half position located near one end of the table in the moving direction, and the supply section and recovery section are arranged on the table side from the half position. do. Thereby, the exchange operation of the supply roll and the recovery roll can be performed efficiently.

Description

Drawing device {DRAWING APPARATUS}

The present invention relates to a drawing device.

Conventionally, drawing devices for drawing patterns on long substrates such as flexible substrates are known. In the drawing device, a supply section that holds a supply roll on which the substrate is wound, a drawing section that draws a pattern on the substrate, and a recovery section that winds the substrate onto a recovery roll are formed in this order. In the drawing section, a portion of the substrate taken out from the supply roll is held on a table, and light is irradiated to the portion while moving the table to draw a pattern. The portion on which the pattern is drawn is wound by a recovery roll. In such a drawing device, a dancer roll or the like that absorbs sagging of the substrate may be formed between the supply unit and the drawing unit, and between the drawing unit and the recovery unit.

On the other hand, when the supply unit and the recovery unit are arranged on both sides of the drawing unit via a dancer roll or the like, it is necessary to take a large installation space for the drawing device. Additionally, as the transport distance of the substrate between the supply unit and the recovery unit becomes longer, problems such as meandering of the substrate also occur. So, in Japanese Patent Laid-Open No. 2019-53140 (Document 1), a supply unit and a recovery unit are arranged on both sides of the table on a base on which a table is formed, and when the table is moved in drawing a pattern, the supply unit and the recovery unit are provided. A device for moving the float in the same direction as the table is disclosed.

However, in an apparatus in which a supply section, a drawing section, and a recovery section are formed in order along the longitudinal direction of the substrate, when exchanging the supply roll and the recovery roll, the operator needs to move between positions on both sides of the drawing section. , the exchange operation cannot be performed efficiently. Additionally, as in Document 1, the same problem occurs in devices in which the supply section and the recovery section are arranged on both sides of the table.

The present invention is for a drawing device that draws a pattern on a long substrate, and its purpose is to efficiently perform the exchange operation of the supply roll and the recovery roll.

A drawing device according to the present invention includes a supply unit that holds a supply roll on which a long substrate is wound, a table that holds the substrate drawn out from the supply unit on a holding surface, and a recovery roll that winds the substrate that has passed through the holding surface. a collection unit that takes the substrate, a transfer roller, and a transfer unit that transfers the base material along a transfer path from the supply unit, through the holding surface, to the collection unit when drawing a pattern, and a light emitting unit that emits modulated light toward the substrate on the holding surface; and, when drawing a pattern, the table is positioned on the light emitting unit in a moving direction along the longitudinal direction of the substrate held on the holding surface. It is provided with a moving mechanism that moves the base material relative to the holding surface, and when viewed along the width direction of the base material on the holding surface, the conveyance path is at a half position located near one end of the table in the moving direction. Returning with respect to the moving direction, the supply section and the recovery section are disposed closer to the table than the half position.

According to the present invention, the exchange operation of the supply roll and the recovery roll can be performed efficiently.

Preferably, the moving mechanism continuously moves the table in the moving direction, and the supply section and the recovery section are capable of moving in the moving direction.

Preferably, the drawing device further includes a base portion that supports the table, the supply portion, and the recovery portion, and the moving mechanism moves the base portion.

Preferably, the supply unit and the recovery unit are arranged adjacent to each other.

Preferably, the drawing device has a calibration detection unit whose position relative to the table is fixed, and in the calibration operation, light from the light emission unit is irradiated to the calibration detection unit, thereby causing the light emission unit and the table to It is further provided with a correction value acquisition unit that acquires a correction value related to the relative position, and the table, the half position, and the calibration detection unit are arranged in order along the movement direction.

The above-described objects and other objects, features, aspects and advantages will become clear from the detailed description of the present invention below with reference to the accompanying drawings.

1 is a diagram showing the configuration of a drawing device.
Fig. 2 is a block diagram showing the functional configuration of a part of the drawing device.
Fig. 3 is a top view showing the drawing device.
Figure 4 is a diagram showing the flow of operation for drawing a pattern on a substrate.
Fig. 5 is a diagram showing a drawing device of a comparative example.
Fig. 6 is a diagram showing another example of a drawing device.

1 is a diagram showing the configuration of a drawing device 1 according to one embodiment of the present invention. In Fig. 1, three directions orthogonal to each other are indicated by arrows as the X direction, Y direction, and Z direction (the same as in other drawings). In the example of Fig. 1, the X and Y directions are horizontal directions, and the Z direction is an up and down direction (vertical direction). Depending on the design of the drawing device 1, the Z direction may be an inclined direction with respect to the vertical direction, or may be a horizontal direction.

The drawing device 1 is a device that irradiates light to a photosensitive material on a long substrate 9 and draws patterns such as wiring on the photosensitive material. The base material 9 is, for example, a flexible substrate and is formed of resin or the like. The drawing device (1) includes a control unit (2), a drawing unit (3), a stage moving mechanism (4), and a stage unit (5). The control unit 2 is, for example, a computer having a CPU or the like. The control unit 2 controls the drawing unit 3, the stage moving mechanism 4, and the stage unit 5.

The drawing unit 3 is provided with a unit support part 39, a light emitting part 31, and a plurality of imaging parts 71 for correction. The unit support portion 39 is formed on the base 10 and has a door shape that spans the stage moving mechanism 4 and the stage unit 5 on the base 10. In Fig. 1, the unit support portion 39 is indicated by a broken line. The light emitting unit 31 and the plurality of correction imaging units 71 are supported by the unit support unit 39 and are disposed above ((+Z) side) the stage moving mechanism 4 and the stage unit 5.

The light emitting unit 31 is provided with a plurality of drawing heads 32. The plurality of drawing heads 32 are arranged along the X direction (hereinafter referred to as the “width direction”). In this embodiment, the plurality of drawing heads 32 are arranged in a zigzag shape along the width direction (see Fig. 3, described later). Each drawing head 32 is provided with a light source 33 and a light modulation unit 34. The light source 33 has, for example, a semiconductor laser, a solid-state laser, or a gas laser, and emits laser light toward the optical modulation unit 34. The light modulation unit 34 modulates the light from the light source 33. The light modulated by the light modulation unit 34 is emitted toward the substrate 9 held by the stage unit 5. As the optical modulation unit 34, for example, a DMD (digital mirror device) in which a plurality of optical modulation elements are arranged in two dimensions is used. The optical modulation unit 34 may be a modulator in which a plurality of optical modulation elements are arranged in one dimension. Details of the correction imaging unit 71 will be described later.

The stage moving mechanism 4 is formed on the surface plate 10 and has a guide rail, a guide block, a motor (for example, a linear motor), a linear scale, etc. The stage moving mechanism 4 moves the stage unit 5 in the Y direction (hereinafter referred to as “moving direction”). As a result, the irradiation position of light from the light emitting unit 31 (plural drawing heads 32) is scanned in the moving direction on the substrate 9 held on the table 52, which will be described later. In the drawing device 1, a pattern is drawn on the substrate 9 by controlling the light emitting unit 31 in synchronization with the movement of the stage unit 5 by the stage moving mechanism 4.

The stage unit 5 is provided with a base part 50, a supply part 51, a table 52, a recovery part 53, a conveyance part 54, and a plurality of detection parts 61 for calibration. do. The base portion 50 has a plate shape that spreads in the moving direction and the width direction, and is fixed to the moving body of the stage moving mechanism 4. A supply unit 51, a table 52, a recovery unit 53, a transport unit 54 and a plurality of calibration detection units 61 are formed on the base unit 50 and are supported by the base unit 50. .

The supply section 51 and the recovery section 53 are formed adjacent to each other on the (-Y) side portion of the base section 50. The supply unit 51 is provided with a plurality of supply rolls 511. Each supply roll 511 is formed by winding the base material 9 around a reel, and is rotatably maintained around the reel. The plurality of supply rolls 511 are formed slightly spaced apart from each other in the width direction. In the example of FIG. 1 , the plurality of supply rolls 511 are arranged at positions that are shifted in the direction of movement (the same is true for the recovery roll 531 described later).

The recovery unit 53 is provided with a plurality of recovery rolls 531. Each recovery roll 531 is formed by winding the base material 9 on a reel, and is rotatably maintained around the reel. A rotation mechanism having, for example, a motor is connected to the recovery roll 531. The plurality of recovery rolls 531 are formed slightly spaced apart from each other in the width direction. With respect to the width direction, the plurality of recovery rolls 531 are each disposed at the same position as the plurality of supply rolls 511. In the example of FIG. 1, the recovery roll 531 and the supply roll 511 disposed at the same position in the width direction directly oppose each other in the moving direction (without other members intervening). In the drawing device 1, the substrate 9 taken out from each supply roll 511 passes through the table 52, etc., and then is transferred to a recovery roll disposed at the same position in the width direction as the supply roll 511 ( 531) is wound by.

The table 52 has a plate shape that spreads in the moving direction and width direction, and a table support 526 is fixed to the surface facing downward ((-Z) direction). In the table support 526, a space penetrating in the Y direction is formed as a communication path 527. The table 52 is fixed to the base portion 50 via a table support 526. In the example of FIG. 1 , no moving mechanism is provided between the table 52 and the base portion 50, and the position of the table 52 is fixed with respect to the base portion 50.

The surface of the table 52 facing upward is the holding surface 521. The holding surface 521 is a flat surface that extends in the moving direction and the width direction, and suctions and adsorbs and holds the substrate 9 drawn out from each supply roll 511. On the holding surface 521, adsorption of the base material 9 and release of adsorption can be switched. The longitudinal direction of each substrate 9 held on the holding surface 521 follows the moving direction, and on the holding surface 521, the plurality of substrates 9 drawn out from the plurality of supply rolls 511 are aligned in the width direction. It is listed as The width direction is the same as the width direction of the base material 9 held on the holding surface 521. On the holding surface 521, the base material 9 may be held using a mechanical chuck mechanism or the like.

The conveyance unit 54 includes a plurality of measuring rollers 541, a pair of lifting rollers 542, one half roller 543, one driving roller 544, and one nip. It is provided with a roller 545 and a plurality of auxiliary rollers 546. Each roller 541 to 546 is rotatably supported around an axis substantially parallel to the width direction. The portion of the substrate 9 between each supply roll 511 and the corresponding recovery roll 531 is stretched across rollers 541 to 546 and is conveyed from the supply roll 511 to the recovery roll 531. do. Rollers 541 to 546 are conveyance rollers used to convey the base material 9.

The number of measuring rollers 541 and auxiliary rollers 546 is the same as the number of supply rolls 511 and recovery rolls 531. That is, the plurality of substrates 9 drawn out from the plurality of supply rolls 511 pass through the plurality of measuring rollers 541 and the plurality of auxiliary rollers 546, respectively, and are wound on the plurality of recovery rolls 531. . In the following description, the number of each of the supply roll 511 and the recovery roll 531, that is, the number of substrates 9 lined up on the holding surface 521 of the table 52, is two. However, there may be 1 or 3 or more. The number of measuring rollers 541 and auxiliary rollers 546 is the same.

Each measuring roller 541 is disposed between the supply roll 511 and the table 52. The measuring roller 541 is equipped with a tension measuring unit including a load cell and the like, and the tension of the base material 9 applied to the measuring roller 541 can be measured. A pair of lifting rollers 542 are disposed on the (+Y) side and (-Y) side of the table 52, respectively. Two substrates 9 are placed on each lifting roller 542. A lifting mechanism 549 is connected to the pair of lifting rollers 542. The lifting mechanism 549 has an upper end of a pair of lifting rollers 542, a lower end at approximately the same height as the holding surface 521 of the table 52, and an upper end located slightly above the holding surface 521. In this position, a pair of lifting rollers 542 is optionally disposed.

The half roller 543 is disposed on the side opposite to the table 52 with respect to the lifting roller 542 on the (+Y) side. The upper end of the half roller 543 is disposed slightly below the holding surface 521 of the table 52. On the half roller 543, two substrates 9 are placed. The drive roller 544 is disposed on the (-Z) side and the (-Y) side of the half roller 543. The nip roller 545 is disposed close to the drive roller 544, and two substrates 9 are placed between the drive roller 544 and the nip roller 545. A rotation mechanism having a motor is connected to the drive roller 544. Each auxiliary roller 546 is disposed near the recovery roll 531.

When the transport unit 54 transports the base material 9, a pair of lifting rollers 542 are disposed at upper positions, so that the base material 9 is slightly spaced upward from the holding surface 521. In this state, the drive roller 544 rotates counterclockwise in Fig. 1, so that the longitudinally continuous portions of the substrate 9 are sequentially pulled out from each supply roll 511 of the supply unit 51. do. The substrate 9 (each part of) pulled out from the supply roll 511 immediately passes through the measuring roller 541 and is held on the table 52 through the lifting roller 542 on the (-Y) side. A position opposite to surface 521 is reached. The base material 9 facing the holding surface 521 reaches the half roller 543 through the lifting roller 542 on the (+Y) side, and the traveling direction returns along the surface of the half roller 543. The base material 9 that has passed the half roller 543 is directed to the communication path 527 below the table 52 through the drive roller 544. The substrate 9 that has passed through the communication path 527 reaches the auxiliary roller 546 and is wound around the recovery roll 531 of the recovery unit 53.

In the later-described operation of the drawing device 1, each portion of the substrate 9 is temporarily held on the holding surface 521 of the table 52, and a pattern is drawn on the portion. In other words, each part of the substrate 9 pulled out from the supply roll 511 passes through the holding surface 521 of the table 52 until it reaches the recovery roll 531. Therefore, it can be said that in the drawing device 1, a conveyance path is formed that passes from the supply unit 51 through the holding surface 521 of the table 52 and reaches the recovery unit 53. When viewed along the width direction as shown in FIG. 1, the conveyance path (base material 9) returns with respect to the moving direction with the half roller 543 at the half position. The half roller 543, which is in the half position, is located near one end (end on the (+Y) side) of the table 52 in the moving direction, and moves closer to the table 52 than the supply roll 511 and the recovery roll 531. is close to The half roller 543 is preferably closer to the table 52 than any of the conveyance rollers except the pair of lifting rollers 542.

In the conveyance unit 54, light is not emitted from the light emitting unit 31 toward the base material 9, and during the period when the pattern is not drawn on the base material 9 (i.e., when the pattern is not drawn) ), the base material (9) is conveyed along the conveyance route. In addition, depending on the design of the drawing device 1, a mechanism for moving the table 52 in the vertical direction is provided instead of the lifting mechanism 549, so that the base material 9 is maintained when the base material 9 is transported. It may be separated from face 521. In addition, depending on the materials of the base material 9 and the table 52, etc., the base material 9 may be conveyed while being in contact with the holding surface 521.

As already described, a tension measuring unit is mounted on the measuring roller 541. Additionally, in the supply section 51, a powder break is formed, for example. When transporting the base material 9, the current supplied to the powder brake is adjusted based on the measured value of the tension of the base material 9 by the tension measuring unit, so that the tension of the base material 9 in the conveyance path is determined by a predetermined amount. It remains approximately constant at the set value.

FIG. 2 is a block diagram showing a partial functional configuration of the drawing device 1. The drawing device 1 further includes a correction value acquisition unit 6, a correction value acquisition unit 7, and a drawing control unit 21. The correction value acquisition unit 6 acquires correction values regarding the relative positions of the light emitting unit 31 and the table 52. The correction value acquisition unit 6 includes the already described detection unit 61 for calibration and a correction value calculation unit 62. The correction value acquisition unit 7 acquires correction values regarding the relative positions of the base material 9 and the table 52. The correction value acquisition unit 7 includes the already described correction imaging unit 71 and a correction value calculation unit 72. In this embodiment, a plurality of detection units 61 for correction and a plurality of imaging units 71 for correction are formed, but in FIG. 2, only one detection unit 61 for correction and one image capture unit 71 for correction are shown. . The correction value calculation unit 62 and the correction value calculation unit 72 are realized by the control unit 2 together with the drawing control unit 21. All or part of these functions may be realized by dedicated electrical circuits.

FIG. 3 is a plan view showing the drawing device 1, and in FIG. 3, there is a light emitting unit 31, a plurality of image pickup units 71 for correction, a plurality of detection units 61 for correction, a half roller 543, and a table. (52), and only a plurality of descriptions (9) are shown. As shown in FIG. 1, the plurality of calibration detection units 61 of the correction value acquisition unit 6 are located on the base unit 50 on the (+Y) side of the half roller 543 and the drive roller 544. is formed in As shown in FIG. 3, the number of calibration detection units 61 is, for example, the same as the number of substrates 9 on the table 52, and in the width direction (X direction), a plurality of calibration detection units ( 61) is disposed at the same position as the plurality of substrates 9. In the example of FIG. 3, two detection units 61 for calibration are formed. No moving mechanism is provided between each calibration detection unit 61 and the base unit 50, and the position of the calibration detection unit 61 is fixed with respect to the base unit 50. In other words, the position of the calibration detection unit 61 relative to the table 52 is fixed.

Each detection unit 61 for calibration is provided with an imaging unit 616 for calibration. The light emitting unit 31 irradiates light toward the correction imaging unit 616 at any timing other than the drawing execution period. The correction imaging unit 616 performs relative position adjustment (correction operation, i.e., calibration) between the drawing head 32 and the table 52 based on the position of the light from the light emitting unit 31. The captured image acquired by the correction imaging unit 616 is output to the correction value calculation unit 62.

As shown in FIG. 1 , the plurality of correction imaging units 71 of the correction value acquisition unit 7 are formed on the (-Y) side of the light emitting unit 31. Each correction imaging unit 71 is supported on the unit support unit 39 via an imaging unit moving mechanism 38. The imaging unit moving mechanism 38 allows the correction imaging unit 71 to move in the width direction. As shown in Fig. 3, for example, two correction imaging units 71 are formed for each base material 9. On each side (end in the width direction) of the base material 9, a plurality of reference marks (alignment marks) 96 are formed along the longitudinal direction. The two correction imaging units 71 for each substrate 9 are disposed at the same position as the reference marks 96 on both sides of the substrate 9 in the width direction. In the correction operation described later, a plurality of reference marks 96 arranged in the longitudinal direction on the base material 9 are sequentially imaged by the correction imaging unit 71.

FIG. 4 is a diagram showing the flow of operations in which the drawing device 1 draws a pattern on the substrate 9. In the drawing device 1 of FIG. 1, a pair of lifting rollers 542 are disposed at the lower teeth, and the base material 9 is adsorbed and held on the holding surface 521, and the light emitting unit 31 The stage unit 5 disposed on the (-Y) side continuously moves toward the (+Y) direction by the stage moving mechanism 4. At this time, a portion held on the holding surface 521 in the substrate 9 by each correction imaging unit 71 shown in FIG. 3 (a portion where a pattern is scheduled to be drawn, hereinafter referred to as “drawing target portion”) ) are sequentially imaged. The captured image acquired by the correction imaging unit 71 is output to the correction value calculation unit 72 in FIG. 2 . Additionally, from the linear scale of the stage moving mechanism 4, the position of the moving direction of the table 52 at the time of acquisition of each captured image is also output to the correction value calculation unit 72.

In the correction value calculation unit 72, correction values based on the positions of the plurality of reference marks 96 are acquired using a plurality of captured images (step S11). The correction value is, for example, the amount of deviation in the X and Y directions between the ideal position (design position) of each reference mark 96 and the actual position obtained based on the linear scale output value and the captured image indicates. The correction value represents the amount of deviation of the relative positions of each reference mark 96 of the table 52 and the base material 9 (the amount of deviation from the position where it should be). The correction value is a value that includes not only the positional deviation of the base material 9 with respect to the table 52, but also influences such as the inclination and elongation of the base material 9 on the table 52. The correction value is input to the drawing control unit 21.

In the drawing control unit 21, drawing data indicating the pattern to be drawn in the drawing target area is corrected based on the correction value. That is, the drawing data is corrected in accordance with the positional deviation of each substrate 9 with respect to the table 52 and the inclination, elongation, etc. of the substrate 9 on the table 52. At least part of the correction of the drawing data is preferably performed in parallel with the movement of the stage unit 5 in the (+Y) direction. As shown by the double-dot chain line in FIG. 1, when the entire table 52 (the entire drawing target area of the base material 9) passes below the light emitting portion 31, (+Y) of the stage unit 5 Movement in that direction is stopped.

Subsequently, continuous movement of the stage unit 5 in the (-Y) direction by the stage moving mechanism 4 is started. Additionally, the light emitting unit 31 is controlled in synchronization with the movement of the stage unit 5, and the modulated light is emitted toward the drawing target portion of the substrate 9. As a result, a pattern is drawn on the drawing target portion of the base material 9 (step S12). When drawing a pattern on the base material 9, the light emitting unit 31 and the stage moving mechanism 4 are driven, and the conveying unit 54 (drive roller 544) of the stage unit 5 is driven. It doesn't work. In pattern drawing, each drawing head 32 is controlled based on corrected drawing data. Additionally, correction values regarding the relative positions of the light emitting unit 31 and the table 52 are also used. When the entire drawing target portion of the base material 9 passes below the light emitting portion 31, the movement of the stage unit 5 in the (-Y) direction is stopped.

When drawing of the pattern for the area to be drawn is completed, the suction of the base material 9 on the holding surface 521 is released, and a pair of lifting rollers 542 is placed at the upper position. Additionally, if it is possible to separate the base material 9 from the holding surface 521 simply by disposing a pair of lifting rollers 542 at upper positions, suction on the holding surface 521 may be maintained. . Here, since there is a portion of the substrate 9 on which a pattern is to be drawn next (step S13), by rotating the drive roller 544, the substrate 9 is moved by the length of the portion to be drawn in the longitudinal direction. It is conveyed along the conveyance path (step S14). At this time, a part of the base material 9 on which a pattern has not yet been drawn is taken out from the supply roll 511, and a part of the base material 9 on which a pattern has already been drawn is wound around the recovery roll 531.

When the conveyance of the base material 9 is completed, a pair of lifting rollers 542 are placed at the lower teeth, and adsorption and holding of the base material 9 on the holding surface 521 is resumed. As a result, the subtly drawn area continuing on the (-Y) side with respect to the drawing target area where the pattern was drawn immediately before is held on the holding surface 521 as a new drawing target area. Thereafter, similarly to the processing of steps S11 and S12, the stage unit 5 reciprocates in the Y direction, thereby drawing a pattern on the drawing target area.

In the base material 9, the processes of steps S14, S11, and S12 are repeated until the pattern is drawn over the entire portion to be drawn (step S13). When a pattern is drawn on the entire portion to be drawn on the substrate 9 (step S13), the supply roll 511 and the recovery roll 531 are replaced by a new supply roll 511 and a new recovery roll 531 by the operator. ) (step S15). Typically, since the same length of substrate 9 is wound around the two supply rolls 511, the two supply rolls 511 and the two recovery rolls 531 are exchanged simultaneously.

In the exchange of the supply roll 511 and the recovery roll 531, for example, the transport unit 54 transports the base material 9 with a pair of lifting rollers 542 disposed at the upper position, The entire base material 9 is wound on the recovery roll 531. Then, the recovery roll 531 is removed from the recovery section 53, and the reel that will become the new recovery roll 531 is mounted. Additionally, the supply roll 511 made of only reels is replaced with a new supply roll 511. Then, after the substrate 9 pulled out from the new supply roll 511 is draped over the rollers 541 to 546 of the conveyance section 54, the end of the substrate 9 is placed on the reel of the new recovery roll 531. Connected.

After replacement of the supply roll 511 and the recovery roll 531 is completed, the above steps S11 to S14 are performed, and a pattern is drawn on the base material 9. In addition, when drawing a pattern on both main surfaces of the base material 9, the recovery roll 531 of the base material 9 on which the pattern drawing on one main surface has been completed is used as the next supply roll 511. It may be mounted on the supply unit 51 as .

Exchange of the supply roll 511 and the recovery roll 531 may be performed by other well-known methods. For example, when a pattern is drawn on substantially the entire substrate 9 wound around the supply roll 511, the substrate 9 is cut in the vicinity of the supply roll 511. In addition, in the supply unit 51, the supply roll 511 consisting of almost a reel is replaced with a new supply roll 511, and the end of the new substrate 9 wound on the new supply roll 511 is cut. It is connected to the end of the base material 9 with a tape or the like. Subsequently, the base material 9 is conveyed by the conveyance unit 54 until the connecting portion of both base materials 9 reaches the vicinity of the recovery roll 531. When the connection portion reaches the vicinity of the recovery roll 531, both substrates 9 are separated at the connection portion, and the recovery roll 531 is separated from the recovery portion 53. Additionally, the reel that will become the new recovery roll 531 is mounted on the recovery unit 53, and the end of the new substrate 9 is connected to the reel. This completes the exchange of the supply roll 511 and the recovery roll 531. In the example of FIG. 1, since the operator's work space is formed on the (-Y) side of the stage unit 5, the supply unit 51 and the recovery unit 53 can be said to be arranged in front of the operator.

Fig. 5 is a diagram showing the drawing device 8 of a comparative example. In the drawing device 8 of the comparative example, the supply part 81, the table 82, and the recovery part 83 are formed in order on the base part 80 in the moving direction (Y direction). Additionally, the upper part of the calibration detection unit 84 is covered by the base material 9. In the drawing device 8 of the comparative example, when replacing the supply roll 811 and the recovery roll 831, the operator needs to move between positions on both sides of the table 82, making the exchange operation efficient. It cannot be carried out. Additionally, as drawing of the pattern on the substrate 9 progresses, the substrate 9 moves from the supply roll 811 to the recovery roll 831, and the weight balance of the base portion 80 changes. As a result, there are cases where the base portion 80 (stage unit) cannot be moved stably.

On the other hand, in the drawing device 1 of FIG. 1, when viewed along the width direction, the conveyance path of the base material 9 is at a half position (half roller) located near one end of the table 52 in the moving direction. Returning from (543)) with respect to the moving direction, the supply section 51 and the recovery section 53 are disposed on the table 52 side rather than the half position. As a result, the distance that the operator moves when replacing the supply roll 511 and the recovery roll 531 is shortened, and the replacement operation of the supply roll 511 and the recovery roll 531 can be performed efficiently.

In the preferred drawing device 1, the supply section 51 and the recovery section 53 are arranged adjacent to each other in the Y direction. Thereby, the exchange operation can be performed more efficiently. In addition, even if the base material 9 moves from the supply roll 511 to the recovery roll 531, the weight balance of the base portion 50 does not change significantly, so the base portion 50 (stage unit 5) ) can be moved stably to draw the pattern with good precision.

In the drawing device 8 of the comparative example in FIG. 5, the upper part of the detection unit 84 for calibration is covered by the base material 9, so when performing a calibration operation, the base material 9 is removed and the detection unit 84 for correction is removed. ) It is necessary to move it to a position that does not overlap with the above. Therefore, after removing the base material 9 and making the calibration detection unit 84 available, as a preliminary preparation, other calibration values regarding the relative positions of the calibration imaging unit 85 and the calibration detection unit 84 are acquired. Needs to be.

In contrast, in the drawing device 1 in FIG. 1, the table 52, the half position (half roller 543), and the detection unit 61 for correction are arranged in order along the moving direction, and the detection unit 61 for correction ) is not covered by the base material (9). Thereby, the correction operation can be easily performed without removing the base material 9.

Various modifications are possible in the drawing device 1.

In the drawing device 1 of FIG. 1, both the supply section 51 and the recovery section 53 are formed on the (-Y) side (opposite to the half position) of the table 52 with respect to the moving direction. For example, the recovery unit 53 may be disposed below the table 52 or near the drive roller 544. Even in this case, compared to the drawing device 8 of the comparative example in FIG. 5, the operator's movement distance during the exchange operation is reduced, so the exchange operation of the supply roll 511 and the recovery roll 531 can be performed efficiently. can do. As described above, in the drawing device 1, the supply section 51 and the recovery section 53 may be disposed on the table 52 side rather than the half position (half roller 543) in the moving direction.

As shown in FIG. 6 , the supply section 51 and the recovery section 53 may not be formed on the base section 50, but may be formed independently from the stage unit 5. Also in the drawing device 1a of FIG. 6, the supply unit 51 and the recovery unit 53 are arranged on the table 52 side rather than at the half position (half roller 543) in the conveyance path of the substrate 9. do. Thereby, the exchange operation of the supply roll 511 and the recovery roll 531 can be performed efficiently.

However, in the drawing device 1a of FIG. 6, as the table 52 moves in the direction of movement when drawing a pattern, there is a gap between each of the supply unit 51 and the recovery unit 53 and the table 52. Distance changes. Therefore, a structure that absorbs the sagging of the base material 9, such as dancer rolls 512 and 532, is needed between the supply section 51 and the table 52, and between the table 52 and the recovery section 53. . On the other hand, in this case, the installation space of the drawing device 1a becomes large. In addition, the length of the substrate 9 between each of the supply section 51 and the recovery section 53 and the table 52 increases, that is, the length of the substrate 9 between the supply roll 511 and the recovery roll 531 increases. ), the conveyance distance becomes longer, and meandering of the base material 9 becomes more likely to occur. Therefore, to solve these problems, as in the drawing device 1 of FIG. 1, it is possible to make the supply unit 51 and the recovery unit 53 movable in the moving direction and to omit the dancer rolls 512, 532, etc. desirable.

In the drawing device (1) in which the supply unit (51) and the recovery unit (53) are movable, the supply unit (51) and the recovery unit (53) are moved by a moving mechanism different from the stage moving mechanism (4) that moves the table (52). ) may move in the direction of movement. Additionally, without providing a driving unit such as a motor, the supply unit 51 and the recovery unit 53 may simply be supported movably in the moving direction by a guide rail or the like. In this case, when the table 52 moves in the moving direction, for example, the table 52 pulls or pushes the supply section 51 and the recovery section 53, thereby ) becomes possible to move in the same direction with the table 52.

On the other hand, in order to simplify the configuration related to the movement of the table 52, the supply section 51, and the recovery section 53, the table 52, the supply section 51, and the recovery section ( It is preferable that the base portion 50 supporting the 53) is formed, and that the base portion 50 is moved in the moving direction by the stage moving mechanism 4 in drawing the pattern.

The conveyance path of the base material 9 from the supply unit 51 through the holding surface 521 to the recovery unit 53 may be changed as appropriate. For example, in the drawing device 1 of FIG. 1, the position of the supply unit 51 and the position of the recovery unit 53 are exchanged, and the printer is drawn out from the supply roll 511 and passes below the table 52. The base material 9 may be guided onto the holding surface 521 through the half roller 543. In addition, the number and arrangement of rollers formed in the above-described conveyance unit 54 are only examples and may be changed as appropriate.

The half position in the conveyance path does not necessarily have to be the position of the roller. For example, a non-rotating cylindrical member is formed at the half position, and the base material 9 slides against the surface of the cylindrical member in the direction of movement. You can come back about it.

In the drawing devices 1 and 1a, for example, when the table 52 continuously moves in the (+Y) direction, a pattern is drawn on the base material 9 on the table 52, and the table 52 is (-) When moving in the Y) direction, the substrate 9 may be conveyed along the conveyance path without drawing a pattern on the substrate 9. The conveyance of the base material 9 along the conveyance path may be performed at any timing as long as it is during non-drawing of the pattern.

In the drawing devices 1 and 1a, the position of the table 52 is fixed, and when drawing a pattern on the substrate 9, the light emitting unit 31 may move in the moving direction. In other words, the moving mechanism may be one that moves the table 52 in the moving direction relative to the light emitting portion 31. In addition, each time the relative movement (main scanning) of the table 52 in the moving direction is completed, the moving mechanism intermittently moves the light emitting portion 31 or the table 52 in the width direction (part By scanning, the pattern may be drawn on the drawing target portion of the base material 9.

In the calibration detection unit 61, instead of the calibration imaging unit 616, a sensor or the like capable of detecting the irradiation position of light on the light-receiving surface may be used. Even in this case, it is possible to obtain correction values regarding the relative positions of the light emitting unit 31 and the table 52.

The configurations in the above embodiment and each modification may be appropriately combined as long as they do not conflict with each other.

Although the invention has been described and explained in detail, the description already described is illustrative and not limiting. Accordingly, it can be said that many modifications and aspects are possible as long as they do not deviate from the scope of the present invention.

1, 1a: drawing device
4: Stage moving mechanism
6: Calibration value acquisition unit
9: Description
31: Light emitting unit
50: base part
51: supply department
52: table
53: recovery unit
54: transport unit
61: Calibration detection unit
71: Imaging unit for correction
96: Reference mark
511: supply roll
521: maintenance side
531: recovery roll
541 ~ 546: Roller

Claims (5)

A drawing device for drawing a pattern on a long substrate, comprising:
a supply section that holds a supply roll on which a long substrate is wound;
a table that holds the substrate drawn from the supply unit on a holding surface;
a recovery unit that takes up the substrate that has passed the holding surface with a recovery roll;
a base portion supporting the table, the supply portion, and the recovery portion;
a conveyance unit having a conveyance roller and transporting the base material along a conveyance path from the supply portion through the holding surface to the recovery portion when drawing a pattern;
a light emitting unit that emits modulated light toward the substrate on the holding surface when drawing a pattern;
When drawing a pattern, by moving the base unit relative to the light emitting unit in a moving direction along the longitudinal direction of the substrate held on the holding surface, the table, the supply unit, and the recovery unit are continuously moved in the moving direction. It is provided with a moving mechanism to move it to,
When viewed along the width direction of the base material on the holding surface, the conveyance path returns with respect to the moving direction at a return position located near one end of the table in the moving direction,
A drawing device wherein the supply unit and the recovery unit are arranged closer to the table than the return position, and the supply unit and the recovery unit are adjacent to each other in the moving direction. A drawing device for drawing a pattern on a long substrate, comprising:
a supply section that holds a supply roll on which a long substrate is wound;
a table that holds the substrate drawn from the supply unit on a holding surface;
a recovery unit that takes up the substrate that has passed the holding surface with a recovery roll;
a conveyance unit having a conveyance roller and transporting the base material along a conveyance path from the supply portion through the holding surface to the recovery portion when drawing a pattern;
a light emitting unit that emits modulated light toward the substrate on the holding surface when drawing a pattern;
a moving mechanism that moves the table relative to the light emitting unit in a moving direction along the longitudinal direction of the substrate held on the holding surface when drawing a pattern;
It has a calibration detection unit whose position relative to the table is fixed, and during a calibration operation, light from the light emission unit is irradiated to the calibration detection unit, thereby generating a correction value regarding the relative position of the light emission unit and the table. Equipped with a correction value acquisition unit for acquiring,
When viewed along the width direction of the base material on the holding surface, the conveyance path returns with respect to the moving direction at a return position located near one end of the table in the moving direction,
The supply unit and the recovery unit are disposed closer to the table than the return position,
A drawing device in which the table, the return position, and the detection unit for correction are arranged in order along the moving direction. delete delete delete