1278724 ⑴ 玖、發明說明 【發明所屬之技術領域】 本發明是有關於曝光帶狀工件兩面的曝光裝置，特別 是有關於不用整面吸附保持帶狀工件，防止因曝光中發生 熱膨脹彎曲，能同時曝光帶狀工件兩面的曝光裝置。 【先前技術】 於印刷基板等之工件的兩面製作電路等的圖案，因此 曝光裝置據知形成兩面曝光裝置。 例如日本特許文獻1記載著近接法的兩面曝光裝置 (同公報第1圖）。記載於同文獻的是指將曝光的基板（工件 w)搬入到搬入台Αθ在第一調整台B的定位Θ在第一曝 光台C的正面曝光->在反轉台〇的反轉-> 在第二調整台Ε 的定位在第二曝光台F的背面曝光―從搬出台G依搬 出順序進行處理。 另外’於日本特許文獻2也記載近接法的兩面曝光裝 置。記載於日本特許文獻2的是正面曝光用和背面曝光用 的兩個來設置保持工件（被曝光板）的工件台（工件保持基 座），在各個位置進行正面曝光和背面曝光。 再者’形成在工件兩面的圖案是於特定的位置關係， 例如只要是電路圖案，兩者就能利用通孔等被電氣連接。 S己載於上述日本特許文獻I、特許文獻2的是指有關 於在印刷基板等的工件製作電路等的圖案的近接曝光的裝 置’不過近接曝光或是接觸曝光是在工件台上載置工件， -4- 1278724 (2) 並接近掩模或是密貼掩模而予曝光的緣故，會在工件、掩 模上附著灰塵等之問題。 一方面，連針對所謂 TAB (Tape Automated Bonding)、 FPC (撓性印刷基板）的膠帶狀的連續長條工件（帶狀工 件）’同樣地期望能在其兩面形成圖案、製成製品。 於第8圖表示在兩面形成有圖案的FPC (撓性印刷基 板）1〇〇的構造例。同圖是工件寬度方向的斷面圖，爲了 易了解誇大縱方向。 在寬度100〜25 0mm、厚度20〜50μιη的聚醯亞胺、 聚酯等的樹脂薄膜101上，施加熱度、壓力而黏貼上厚度 10〜20μηι左右之銅箔1〇2等的導電體。 在其上黏貼著乾式薄膜光阻劑103 (DFR:市售之代表 性之厚度約7μιη)、PET (聚乙烯對苯二甲酸酯：市售之代表 性之厚度約21μηι)膜104。FPC100之全體的厚度爲110〜 1 80μηι 左右。 欲於DFR103形成圖案的曝光是邊安裝PET膜104邊 進行，顯影是剝離PET膜104而進行。 再者，PET膜104是屬於保護膜，只要黏則該膜，即 使將曝光的領域利用例如滾輪壓緊，還是可防止損傷。 於上述帶狀工件曝光電路等圖案的曝光裝置，據知是 例如記載於日本特許文獻3的裝置。 記載於上述日本特許文獻3的曝光裝置，是將從光源 部放出的光，經由掩模與投影透鏡照射到帶狀工件上，於 自饋送機構遞送的帶狀工件上曝光掩模圖案。 -5- 1278724 (3) 只要是如上述的投影曝光裝置，就能避免所謂如前述 的近接曝光或是接觸曝光地，於工件上附著灰麈等的問 題。 使用上述帶狀工件的曝光裝置，並對帶狀工件的兩面 曝光圖案的場合，用以下的方法進行。 於上述曝光裝置裝配帶狀工件，並用正面曝光用的掩 模將帶狀工件的第一面（表面）完全曝光。然後，翻成背面 來裝配帶狀工件，使用背面用的掩模，來曝光帶狀工件的 第二面（背面）。 上述第一面、第二面的曝光可用一台曝光裝置進行， 也可分別設置第一面（表面）曝光用的曝光裝置、第二面 (背面）曝光用的曝光裝置，來曝光第一面、第二面。 使用記載於上述日本特許文獻3的曝光裝置’進行帶 狀工件的兩面曝光的場合，有以下的問題。 進行第一面曝光之後，進行第二面曝光，對進行兩面 曝光，要花費單面曝光的一倍時間。另外，換裝捲輪需要 人力很浪費時間。 另外，進行第一面曝光後，進行第二面曝光’曝光之 時的環境條件（溫度、濕度）有微妙的差異° FPC的場合’ 如上述，基板是屬於所謂聚酯、聚醯亞胺的樹脂薄膜’根 據上述環境條件的差異，薄膜會出現伸縮量不同。 而且，形成在工件之正面的圖案和形成背面的圖案’ 如上所述互相關連，必項具有設計之特定位置關係。但疋 在正面曝光時和背面曝光時，薄膜的伸縮量不同的話’形 -6 - 1278724 (4) 成在兩面的圖案的相對位置關係會不同，有造成不良原因 的情形。 利用習知的帶狀工件的曝光裝置，單面一個個的曝 光’就會有如上述的問題，強烈希望能同時曝光兩面的帶 狀工件的曝光裝置。 [特許文獻1] 曰本特許第1 8 3 2673號公報 [特許文獻2] 曰本特開第2000 — 1 7 1 980號公報 [特許文獻3] 日本特開平第3—242651號公報 【發明內容】 [發明欲解決的課題] 欲同時兩面曝光帶狀工件，進行曝光之領域的背面 側’無法利用不透明的工件台全面地吸附保持。藉此會發 生以下的問題。 曝光時，帶狀工件會吸收曝光光，且溫度會上昇。習 知工件台是吸附保持在曝光領域的背面側，產生在工件的 熱度會傳遞到工件台而散熱，即可防止工件溫度上昇。 但是，如上述，無法利用台來吸附保持曝光領域，所 吸收的熱度無法散熱。特別是FPC爲樹脂薄膜，熱度不 易傳遞，有照射光的部分（曝光領域：1 0 0 m m X 1 0 〇 m m左右） 溫度會上昇。在一般的曝光條件（以紫外線放射照度 12787241278724 (1) BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for exposing both sides of a strip-shaped workpiece, and more particularly to a strip-shaped workpiece that is not adsorbed on the entire surface to prevent thermal expansion and bending due to exposure. An exposure device that exposes both sides of the strip-shaped workpiece. [Prior Art] Since a pattern of a circuit or the like is formed on both surfaces of a workpiece such as a printed board, the exposure apparatus is known to form a double-sided exposure apparatus. For example, Japanese Patent Application Publication No. 1 discloses a two-side exposure apparatus of the proximity method (the same as Fig. 1 of the publication). It is described in the same literature that the substrate (the workpiece w) to be exposed is carried into the loading table θ. The positioning of the first stage B is exposed on the front side of the first exposure stage C-> the inversion of the reverse stage -- > The positioning of the second adjustment stage is exposed on the back side of the second exposure stage F. The processing is performed in order from the carry-out stage G. Further, in Japanese Patent Application No. 2, a double-sided exposure apparatus of the proximity method is also described. The Japanese Patent Publication No. 2 discloses a workpiece stage (work holding base) for holding a workpiece (exposure plate) for both front side exposure and back side exposure, and front side exposure and back side exposure are performed at respective positions. Further, the pattern formed on both surfaces of the workpiece is in a specific positional relationship. For example, as long as it is a circuit pattern, both of them can be electrically connected by a through hole or the like. The above-mentioned Japanese Patent Application No. 1 and Patent Document 2 refer to a device for proximity exposure of a pattern such as a printed circuit board or the like. However, the proximity exposure or the contact exposure is to place a workpiece on the workpiece stage. -4- 1278724 (2) When exposed to a mask or a close mask, dust or the like may adhere to the workpiece or the mask. On the other hand, it is similarly desired to form a pattern on both sides of a continuous strip-shaped workpiece (tape-shaped workpiece) for a so-called TAB (Tape Automated Bonding) or FPC (Flexible Printed Substrate). Fig. 8 shows a structural example of an FPC (flexible printed circuit board) 1 形成 having a pattern formed on both sides. The same figure is a sectional view of the width direction of the workpiece, in order to easily understand the vertical direction. A conductor such as a copper foil 1〇2 having a thickness of about 10 to 20 μηη is applied to the resin film 101 such as polyimine or polyester having a width of 100 to 25 mm and a thickness of 20 to 50 μm. A dry film photoresist 103 (DFR: a commercially available representative thickness of about 7 μm) and PET (polyethylene terephthalate: a commercially available representative thickness of about 21 μm) film 104 were adhered thereto. The thickness of the entire FPC 100 is about 110 to 1 80 μm. The exposure to form a pattern on the DFR 103 is performed while the PET film 104 is attached, and the development is performed by peeling off the PET film 104. Further, the PET film 104 belongs to a protective film, and as long as the film is adhered, damage can be prevented even if the exposed area is pressed by, for example, a roller. The exposure apparatus of the above-described strip-shaped workpiece exposure circuit or the like is known as the apparatus described in Japanese Patent Laid-Open No. 3, for example. The exposure apparatus described in Japanese Laid-Open Patent Publication No. 3 discloses that the light emitted from the light source portion is irradiated onto the belt-shaped workpiece through the mask and the projection lens, and the mask pattern is exposed on the belt-shaped workpiece delivered from the feeding mechanism. -5- 1278724 (3) As long as it is the above-described projection exposure apparatus, it is possible to avoid the problem of attaching ash or the like to the workpiece as in the above-described proximity exposure or contact exposure. When the exposure apparatus of the strip-shaped workpiece described above was used and the double-sided exposure pattern of the strip-shaped workpiece was used, the following method was used. The strip-shaped workpiece was assembled to the above exposure apparatus, and the first surface (surface) of the strip-shaped workpiece was completely exposed by the mask for front exposure. Then, the strip-shaped workpiece is assembled by turning the back surface, and the second surface (back surface) of the strip-shaped workpiece is exposed using a mask for the back surface. The exposure of the first surface and the second surface may be performed by one exposure device, or the exposure device for the first surface (surface) exposure and the exposure device for the second surface (back surface) exposure may be separately provided to expose the first surface. The second side. When the exposure apparatus of the above-mentioned Japanese Patent Laid-Open No. 3 is used to expose both surfaces of a strip-shaped workpiece, there are the following problems. After the first side exposure, the second side exposure is performed, and for the double side exposure, it takes one time for the single side exposure. In addition, it takes a lot of manpower to reload the reel. In addition, after the first surface exposure, the second surface exposure is exposed to a subtle difference in environmental conditions (temperature, humidity). In the case of FPC, the substrate is a so-called polyester or polyimine. The resin film 'has a different amount of expansion and contraction depending on the above environmental conditions. Moreover, the pattern formed on the front side of the workpiece and the pattern forming the back side are interrelated as described above, and must have a specific positional relationship of design. However, when the amount of expansion and contraction of the film is different between the front side exposure and the back side exposure, the relative positional relationship between the patterns on the two sides is different, which may cause a defect. With the conventional exposure apparatus for a strip-shaped workpiece, the exposure of one side by one will have the above-mentioned problems, and it is strongly desired to expose the exposure apparatus of the strip-shaped workpiece on both sides at the same time. [Patent Document 1] Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. [The problem to be solved by the invention] The back side of the field where the strip-shaped workpiece is to be exposed at the same time and exposed is not fully absorbed and held by the opaque workpiece stage. This will cause the following problems. When exposed, the strip workpiece absorbs the exposure light and the temperature rises. It is known that the workpiece stage is adsorbed and held on the back side of the exposure field, and the heat generated in the workpiece is transmitted to the workpiece stage to dissipate heat, thereby preventing the temperature of the workpiece from rising. However, as described above, it is not possible to use the stage to adsorb and maintain the field of exposure, and the absorbed heat cannot be dissipated. In particular, FPC is a resin film, and the heat is not easily transmitted, and the portion where the light is irradiated (exposure field: about 100 m X 1 10 〇 m m) increases in temperature. Under general exposure conditions (with UV illuminance 1278724
lOOmW/cm2照射數秒鐘）曝光的話，工件曝光領域的溫度 約上昇1 0 °C。 藉此，只有曝光領域熱膨脹l〇//m〜20//m左右，帶 狀工件W乃如第9圖所不’爲了緩和該熱膨張，光軸（上 下）方向會膨脹或彎曲（移動）。因該膨脹（或彎曲）引起光軸 方向的移動達到數百// mm。 將掩模圖案利用透鏡投影到工件上並曝光的投影曝光 方式的場合，即使投影透鏡的焦點深度很大，也爲±50 左右。因而，工件在光軸方向也移動數百的話， 投影在工件上的掩模圖案影像變模糊，無法精度良好的曝 光（掩模圖案的轉印）。 爲了防止發生上述膨脹（或彎曲），考慮所謂在帶狀工 件的搬送方向和正交於搬送方向的方向（工件的寬度方 向）’邊施加拉力（不彎曲地一邊拉伸）邊曝光。 但是邊施加拉力邊曝光，是工件一邊利用熱膨脹延 伸’更一邊延伸工件，工件於曝光中會因熱膨脹的延伸不 斷延伸到1 〇 // m〜20 // m以上。工件於曝光中延伸是指於 曝光中對掩模圖案顯像而言，工件會相對性地移動，形成 在工件上的圖案晃動，無法精度良好的曝光（掩模圖案的 轉印）。 也考慮以透明的玻璃製成工件台，不過穿透屬於曝光 光的紫外線之如石英的玻璃，作爲吸附保持工件的工件台 並予加工是很困難，成本也非常高不實際。 再者’在此，將工件上的圖案影像之焦點不合、影像 -8- 1278724 (6) 輪廓不淸晰的稱爲「模糊」，但圖案影像之焦點符合，不 過於曝光中移動工件其結果模糊的圖案或不能成形的稱爲 「晃動」。 本發明是欲解決上述習知技術問題的發明，本發明之 目的是在於可對帶狀工件的兩面利用投影曝光同時曝光圖 案’於圖案曝光中，即使工件熱膨脹，防止因工件上下移 動之圖案影像模糊的同時，防止因曝光中的工件的延伸引 起晃動。 [用以解決課題的手段] 爲了解決上述課題，對帶狀工件兩面曝光掩模圖案的 帶狀工件的兩面投影曝光裝置，設有：對帶狀工件在搬送 方向施加拉力的第一手段、和在與搬送方向正交的方向施 加拉力的第二手段、和保持在上述搬送方向及與搬送方向 正交的方向施加拉力的帶狀工件的保持手段，於開始曝光 之前’對帶狀工件施加拉力，僅相當於假設在曝光中的工 件因熱膨脹引起的延伸量的部分做延伸，在其延伸量而予 固定並進行曝光。 上述第一手段、第二手段及保持手段是配置在曝光領 域外，以第一、第二手段施加拉力並以上述保持手段來固 定帶狀工件，從帶狀工件的兩面經由掩模同時照射曝光光 而進行兩面曝光。再者，上述第一手段及第二手段可兼具 上述保持手段。 施加拉力（拉伸）方向是指工件的搬送方向和正交於此 -9- 1278724 (7) (工件的寬邊）的方向，相當於搬送方向的帶狀工件的單位 長度的延伸量、和相當於正交於搬送方向的方向的單位長 、 度的的延伸量爲相等地同時施加拉力，以該狀態用保持手 段來固定。 因爲只拉伸一方向，正交於此的方向會收縮，所以兩 方向同時施加拉力。 曝光中，施加如上述的拉力狀態，在工件產生熱膨脹 的話，施加在工件的拉力（應力）會受到緩和，只要緩和應 鲁 力，就不會產因如前述第9圖所示的膨脹（或彎曲）引起的 上下動。另外，因爲工件預先延伸，所以不會產生因熱膨 脹引起的延伸。 在此，如前所述，一邊對工件施加拉伸的力一邊曝 光，會在曝光中不斷延伸工件，圖案影像會晃動。 對此，本發明於曝光中不必施加進一步拉伸工件的 力。即工件是保持預先的的拉力地被固定。因此，因熱膨 脹延伸工件時，不必作用進一步拉伸工件的力，不會在曝 φ 光中產生工件的延伸即對掩模圖案影像而言的工件的相對 性的移動。 因而，能防止因曝光中之工件彎曲引起模糊的同時’ 還能防止因工件延伸引起的晃動。 , 假設在曝光中的熱膨脹引起的延伸量，如上述’例如 1 0 // m〜20 // m，於曝光前施加拉力，藉此工件爲延伸10 // m〜2 0 // m。但是，像這樣即使工件延伸，因以下的理 由，就不會在曝光上產生格外的問題。 -10- 1278724 (8) 在工件兩面形成圖案的場合，最有問題的是形成 背的圖案的相對位置，會從設計之所希望的位置關 開。習知，因爲是單面一個個曝光，所以各個在曝光 工件的延伸量不同的話，兩者的相對位置會偏移。但 發明的場合，即使工件施加拉力而延伸，因爲兩面同 光，所以形成在正背的圖案的相對位置不會偏移。 另外，藉由工件延伸，形成在工件上的例如兩個 記號的間隔會延伸（變長），不過以透鏡投影掩模圖案 影曝光裝置的場合，設置將投影透鏡移動到光軸方向 構，或是若在透鏡設置變焦機構，即可調整投影在工 的圖案像的倍率，就能沒有問題的進行掩模和工件 整。 再者，即使形成倍率稍大的狀態所曝光的圖案， 結束後，曝光領域的溫度會下降，工件收縮的話，形 圖案也會對應於此而收縮，就能形成設計之大小的圖 【實施方式】 [發明的實施形態] 第1圖是表示本發明的實施例的帶狀工件的兩面 裝置的基本構成圖。再者，第1圖是省略在與前述搬 向正交的方向（工件的寬度方向）施加拉力的前述第 段。再者，以下第一、第二手段稱爲第一、第二賦予 手段。 於第1圖中，FPC (撓性印刷基板）等之帶狀工件 在正 係錯 時， 是本 時曝 調整 的投 的機 件上 的調 曝光 成的 案0 曝光 送方 二手 拉力 w是 1278724 (9) 滾輪狀地捲繞在捲出滾輪1。 捲出浪輪1送出的帶狀工件W是經由調整捲出量的 彎曲部A1，利用中間導輪R1做90度方向轉換，經由制 動滾輪R2輸出到曝光部5。在彎曲部A1設置光感測器 S 1，利用圖未表示控制部，以彎曲部A 1的彎曲量成爲一 定地，調整自捲出滾輪1起的送出量。 輸送到曝光部5的帶狀工件W是利用搬送滾輪R3和 壓緊滾輪R3’以及制動滾輪R2和壓緊滾輪R2’被夾持，藉 由旋轉搬送滾輪R 3被拉位，搬送到圖的右方向。 制動滾輪R2是滾輪旋轉時，產生與旋轉方向相反的 力之例如連結於像是電磁制動的制動。藉由將帶狀工件W 利用制動滾輪R2和壓緊滾輪R2 ’夾持，搬送時易發生工 件波動，防止蛇行、縐褶之發生等。 輸送到曝光部5的帶狀工件W，乃如後述，利用第一 賦予拉力手段1 1、第二賦予拉力手段（圖未表示），僅假設 曝光中的熱膨脹部分，在搬送方向和正交於此的方向施加 拉力，在該狀態保持在工件保持手段6。就該部分做後 述。 在帶狀工件W的表面側設有第一光照射部4 1、形成 工件表面側圖案的掩模Μ 1、第一投影透鏡3 1，在背面側 設有第二光照射部42、形成工件背面側圖案的掩模M2、 第二投影透鏡32。 從各個光照射部41、42，透過掩模Μ1、M2和投影 透鏡3 1、3 2，對著梯狀工件W的兩面照射曝光光，曝光 -12 - 1278724 (10) 形成在掩模Ml、M2的掩模圖案。 再者，光照射部都是一個。成爲可將從一個光照射部 射出的光，利用半反射鏡等分割光路，照射到兩方的掩模 Μ 1 及 Μ 2。 以曝光部5所曝光的帶狀工件W，乃如前述，利用搬 送滾輪R3和壓緊滾輪R3’被夾持，透過導輪R4、用來調 整捲繞量的彎曲部Α2，捲繞在捲繞滾輪2。在彎曲部Α2 設有光感測器S2，利用圖未表示的控制部，令彎曲部Α2 的彎曲量成爲一定地調整捲繞滾輪2的捲繞量。 其次，夾持工件且施加拉力的上述第一賦予拉力手段 1 1、第二賦予拉力手段，在對工件施加拉力的狀態，針對 保持曝光領域的周邊部的工件保持手段6的構成例做說 明。 (1)第一賦予拉力手段 於第2圖表示針對帶狀工件W且對工件的搬送方向 施加拉力的第一賦予拉力手段1 1的構成。同圖是表示從 正交於搬送方向的方向觀看的第一賦予拉力手段11的構 成，同圖是表示對帶狀工件W的曝光部5而言，設置在 下流側的賦予拉力手段11，不過設置在上流側的賦予拉 力手段1 1的構成，除了施加拉力的方向爲相反方向的這 點外，具有同樣的構成。 第一賦予拉力手段Π是由將帶狀工件W對搬送方向 而言夾持在直角方向（寬度方向）的夾緊部1 2、和使夾緊部 -13- 1278724 (11) 1 2特定量移動的夾緊驅動部1 3所構成。 夾緊部1 2是在帶狀工件W的表面形成屬於保護膜的 PET膜的場合，因爲以該膜保護曝光領域，所以就算是鍵 緊工件全面的形狀也沒問題。與其在該形狀方面，倒不如 針對帶狀工件W能均等的獲得拉力爲佳。 夾緊部12是設置在固定台14之上，在固定台14安 裝有夾緊驅動部1 3。夾緊驅動部1 3具備有自饋進馬達 1 3 a加以旋轉的滾珠螺桿1 3 b，利用饋進馬達1 3 a讓滾珠 螺桿1 3 b旋轉，卡合在滾珠螺桿1 3 b的夾緊部1 2會移動 到同圖的左右方向即帶狀工件W的搬送方向（同圖的虛線 所示）。 像這樣的第一賦予拉力手段，乃如前述地沿著曝光部 5的搬送方向而設置在搬送滾輪R3側（下流側）和制動滾 輪R2側（上流側）的兩方。 對帶狀工件W的曝光部5而言，將上流側和下流側 利用夾緊部1 2而夾持，且利用夾緊驅動部1 3分別使夾持 下流側的夾緊部1 2在上流側驅動，且使夾持上流部的夾 緊部在流側驅動，藉此在帶狀工件W的搬送方向施加拉 力。 於第3圖表示第一賦予拉力手段π的夾緊部1 2的構 成例。 同圖是從搬送方向觀看第一賦予拉力手段11的斷面 圖。夾緊部1 2是成爲將帶狀工件W在寬度方向以壓緊板 1 2 a和下構件丨2 b從上下夾持的構造。 -14- 1278724 (12) 下構件12b是固定在固定台上4，固定台14的一端 安裝有前述的滾珠螺桿1 3 b，在另一端安裝有直列引導部 1 3 d，藉由令上述滾珠螺桿1 3 b旋轉，讓固定台1 4移動到 同圖的紙面前後方向。 另外，在下構件1 2b設有欲令真空吸附以及空氣回流 之配管用的孔1 2 c，在該孔1 2 c安裝有供給空氣和真空的 配管1 2 d。 壓緊板1 2a是在工件W之寬度方向的兩側介設著汽 缸12c而安裝在固定台14，利用汽缸12e在同圖上下方 向移動。 帶狀工件W搬送時，汽缸12e會延伸，壓緊板l2a 會上昇。帶狀工件W會壓緊板12a和下構件12b的間隙 被搬送。此時，空氣會從下構件1 2b的孔1 2c回流，帶狀 工件W的背面不會摩擦到下構件1 2b的表面。 當帶狀工件W獲得搬送方向的拉力時，汽缸I2e會 收縮，壓緊板1 2a會下降，帶狀工件W就會經由壓緊板 1 2a和下構件1 2b而被夾持。此時，對著下構件1 2b的孔 1 2c供給真空，輔助帶狀工件W的夾持。 另外，在與壓緊板12a的下側、工件W的表面接觸 的部分，爲了盡量減小對工件W之表面的影響，希望預 先黏貼上像是柔軟橡膠的彈性構件1 2f。 在此種狀態，利用前述第 2圖所示的夾緊驅動部 13，夾緊部12連固定台14 一起在工件W的搬送方向移 動，使帶狀工件W獲得搬送方向的拉力。 -15- 1278724 (13) 再者，第一賦予拉力手段可兼做搬送滾輪R3和壓緊 滾輪R3 ’以及制動滾輪R2和壓緊滾輪R2 ’使用。例如，制 動滾輪R2是當電磁制動器使工件獲得拉力時，成爲能夠 得到比工件搬送時更強的制動方式被設定。 此場合，利用制動滾輪R2和壓緊滾輪R2 ’來夾持， 需要上述較強的制動，利用搬送滾輪 R3和壓緊滾輪 R3 ’，對帶狀工件W加諸搬送方向之力的話，拉力就會加 諸在抑制工件移動的搬送方向。 (2)第二賦予拉力手段 於第4圖表示對帶狀工件W而言，在工件的寬度方 向施加拉力的第二賦予拉力手段的構成。同圖是表示從搬 送方向觀看的工件保持手段6的斷面圖以及第二賦予拉力 手段2 1。 另外，同圖是表示單側的第二賦予拉力手段2 1，另 一側也設置具有同樣構成的賦予拉力手段。該第二賦予拉 力手段對工件保持手段6而言，帶狀工件W之搬送方向 的上流側、下流側分別設有一對第二賦予拉力手段2 1， 所以合計在四處設有第二賦予拉力手段2 1，夾持帶狀工 件W的四個位置，對著工件的寬度方向施加拉力。 第二賦予拉力手段2 1是由：夾持帶狀工件W之端部 的夾緊部22、和特定量移動夾緊部的夾緊驅動部23所構 成。 夾緊驅動部23具備有利用饋進馬達23 a旋轉的滾珠 -16- (14) 1278724 螺桿23b，利用饋進馬達23a讓滾珠螺桿23b旋轉，卡合 在滾珠螺桿23b的夾緊部22會在同圖的左右方向即帶狀 工件W的寬度方向移動。 夾緊部22是將帶狀工件W的周邊部利用上構件22a 的夾持部Grl和下構件22b的夾持部Gr2從上下夾住的構 造。被固定於在下構件22b安裝有中心軸22c的夾具固定 台 22d。 上構件22a是介設軸22e而安裝在下構件22b，以軸 22e爲中心旋轉。另外，在上構件22a和下構件22b的夾 持部Grl、Gr2的相反側利用彈簧22f，上構件22a和下 構件22b會被推彈到夾持部Grl、Gr2的打開方向。 在下構件22b安裝汽缸22g，汽缸229的驅動軸會貫 通下構件22b而突出，其前端是夾著上構件22a的軸22e 而抵接在與夾持部Grl相反的這側。因此，驅動汽缸22 g 的話，上構件22a就會以軸22e爲中心而轉動，關閉夾持 部 Grl 、 Gr2 。 弟5圖是由上觀看曝光部5的圖’易於了解第二賦予 拉力手段2 1和工件保持手段6的關係加以表示，第二賦 予拉力手段2 1是表示槪念構成。另外，同圖的虛線是表 示帶狀工件W及形成其圖案的曝光領域。 第二賦予拉力手段2 1是設置在帶狀工件W之周邊部 的四個位置，不過其數量、夾緊部的大小，是設計成對工 件而言，可均等地獲得拉力。對應需要而決定即可。 再者，第二賦予拉力手段2 1的夾緊部22在帶狀工件 -17- 1278724 (15) W的搬送方向拉長，利用設置在帶狀工件W之兩側的兩 處的第二賦予拉力手段，對著正交於搬送方向的方向施加 拉力亦可。 保持帶狀工件w之周邊部的工件保持手段6，乃如第 4圖、第5圖所示，在相當於帶狀工件W之曝光領域的部 分設置開口部6a，從工件保持手段6的下側，對著工件 W的背面照射光。的工件保持手段6的表面設置真空吸附 孔6b，曝光時吸附保持帶狀工件W之曝光領域以外的 周邊部。 其次，利用述第一以及第二賦予拉力手段11、12， 對帶狀工件W施加拉力，針對保持該狀態的動作做說明。 首先，以實際的曝光條件來曝光帶狀工件W，測定於 曝光中因熱膨脹而延伸的量。而且，也能預先求得能用多 少的力量來拉伸工件，使因熱膨脹引起的延伸量部分的工 件再延伸。即，於曝光中要是熱膨脹1 0 // m，就會要求第 一、第二賦予拉力手段1 1、1 2將帶狀工件W延伸1 〇 # m 所需要的力。 自第一、第二賦予拉力手段1 1、1 2施加在帶狀工件 W的拉力，乃如前述，相當於在搬送方向的延伸量和正交 於搬送方向之方向的單位長度的延伸量會成爲相等。 例如第二賦予拉力手段在前述第5圖之構成的場合， 如第6圖所示，利用設置在搬送方向之兩處的第二賦予拉 力手段2 1夾持的搬送方向的帶狀工件的長度（大致等於第 二賦予拉力手段的間隔）爲 Lx、帶狀工件W的寬度爲 -18- 1278724 (16)When exposed to lOOmW/cm2 for a few seconds, the temperature in the field of exposure of the workpiece increases by about 10 °C. Thereby, only the thermal expansion of the exposure field is about 〇//m~20//m, and the strip-shaped workpiece W is not as shown in Fig. 9 in order to alleviate the thermal expansion, the optical axis (up and down) direction expands or bends (moves). . The movement in the direction of the optical axis caused by the expansion (or bending) reached several hundred / / mm. In the case of a projection exposure method in which a mask pattern is projected onto a workpiece by a lens and exposed, even if the depth of focus of the projection lens is large, it is about ±50. Therefore, when the workpiece is moved by several hundred in the optical axis direction, the mask pattern image projected on the workpiece becomes blurred, and accurate exposure (transfer of the mask pattern) cannot be performed. In order to prevent the above-described expansion (or bending) from occurring, it is considered that exposure is performed by applying a tensile force (stretching without bending) while the conveyance direction of the belt-shaped workpiece and the direction orthogonal to the conveyance direction (the width direction of the workpiece). However, when the tension is applied while the tension is applied, the workpiece is extended by the thermal expansion to extend the workpiece, and the workpiece is extended to 1 〇 // m to 20 // m or more due to the extension of thermal expansion during exposure. The extension of the workpiece during exposure means that the workpiece is relatively moved during exposure of the mask pattern during exposure, and the pattern formed on the workpiece is shaken, and the exposure (imprint pattern transfer) cannot be performed with high precision. It is also considered to form the workpiece stage with transparent glass. However, it is difficult to penetrate the workpiece such as quartz which is exposed to ultraviolet light, and it is difficult and costly to process it. Furthermore, 'here, the focus of the pattern image on the workpiece is inconsistent, and the image -8-1278724 (6) is not clearly defined as "blur", but the focus of the pattern image matches, but the result of moving the workpiece during the exposure A blurred pattern or a shape that cannot be formed is called "shaking." The present invention is to solve the above-mentioned problems of the prior art, and an object of the present invention is to use a projection exposure on both sides of a strip-shaped workpiece to simultaneously expose a pattern 'in a pattern exposure, even if the workpiece thermally expands, preventing a pattern image from moving up and down the workpiece. At the same time of blurring, it prevents sway caused by the extension of the workpiece during exposure. [Means for Solving the Problem] In order to solve the above-described problems, a double-sided projection exposure apparatus that exposes a strip-shaped workpiece having a mask pattern on both sides of a strip-shaped workpiece is provided with a first means for applying a tensile force to a belt-shaped workpiece in a conveyance direction, and a second means for applying a pulling force in a direction orthogonal to the conveying direction, and a holding means for a belt-shaped workpiece that holds a pulling force in a direction orthogonal to the conveying direction and the conveying direction, and applies a pulling force to the belt-shaped workpiece before starting the exposure. It is only equivalent to assuming that the portion of the workpiece exposed during exposure is extended by the amount of elongation due to thermal expansion, and is fixed and exposed by the amount of extension. The first means, the second means and the holding means are disposed outside the exposure field, and the first and second means apply a pulling force to fix the strip-shaped workpiece by the holding means, and simultaneously expose the exposure from both sides of the strip-shaped workpiece via the mask. Light on both sides of the exposure. Furthermore, the first means and the second means may have the above holding means. The direction in which the tensile force (stretching) is applied refers to the direction in which the workpiece is conveyed and the direction orthogonal to this -9-1278724 (7) (wide side of the workpiece), which corresponds to the extension of the unit length of the strip-shaped workpiece in the transport direction, and The extension amount corresponding to the unit length and the degree corresponding to the direction orthogonal to the conveyance direction is equal to the simultaneous application of the tensile force, and is fixed by the holding means in this state. Since only one direction is stretched, the direction orthogonal thereto is contracted, so the pulling force is simultaneously applied in both directions. In the exposure, when the tensile force state as described above is applied, if the workpiece is thermally expanded, the tensile force (stress) applied to the workpiece is alleviated, and as long as the lubricity is relieved, the expansion as shown in the above FIG. 9 is not caused (or Up and down caused by bending). In addition, since the workpiece is pre-extended, no extension due to thermal expansion occurs. Here, as described above, the workpiece is exposed while applying a tensile force to the workpiece, and the workpiece is continuously extended during the exposure, and the pattern image is shaken. In this regard, the present invention does not require the application of a force to further stretch the workpiece during exposure. That is, the workpiece is fixed while maintaining a predetermined pulling force. Therefore, when the workpiece is extended by thermal expansion, it is not necessary to exert a force for further stretching the workpiece, and the relative movement of the workpiece, that is, the relative movement of the workpiece to the mask pattern image, is not generated in the exposed φ light. Therefore, it is possible to prevent blurring due to bending of the workpiece during exposure, and to prevent sway caused by the extension of the workpiece. Assuming that the amount of elongation caused by thermal expansion in the exposure, as described above, for example, 1 0 // m to 20 // m, a tensile force is applied before the exposure, whereby the workpiece is extended by 10 // m to 2 0 // m. However, even if the workpiece is stretched like this, there is no particular problem in exposure due to the following reason. -10- 1278724 (8) Where the pattern is formed on both sides of the workpiece, the most problematic is that the relative position of the pattern forming the back is closed from the desired position of the design. Conventionally, since one surface is exposed one by one, the relative positions of the exposed workpieces are shifted, and the relative positions of the two are shifted. However, in the case of the invention, even if the workpiece is stretched by applying a pulling force, since the both surfaces are the same light, the relative positions of the patterns formed on the front side are not shifted. In addition, by the extension of the workpiece, for example, the interval between the two marks formed on the workpiece extends (lengths up), but in the case of the lens projection mask pattern exposure device, the projection lens is moved to the optical axis direction, or If the zoom mechanism is provided in the lens, the magnification of the projected image can be adjusted, and the mask and the workpiece can be finished without any problem. Further, even if the pattern exposed in a state where the magnification is slightly larger is formed, the temperature in the exposure region is lowered, and when the workpiece is shrunk, the pattern is shrunk accordingly, and the size of the design can be formed. [Embodiment of the Invention] Fig. 1 is a view showing a basic configuration of a double-sided device of a belt-shaped workpiece according to an embodiment of the present invention. In addition, in the first drawing, the first stage in which the pulling force is applied in the direction orthogonal to the moving direction (the width direction of the workpiece) is omitted. Furthermore, the first and second means below are referred to as first and second means of giving. In the first figure, when the strip-shaped workpiece such as the FPC (flexible printed circuit board) is in the wrong state, it is the case where the exposure of the project is adjusted by the time exposure. The second-hand pulling force w of the exposure is 1278724 ( 9) Winding around the take-up roller 1 in a roll shape. The strip-shaped workpiece W sent out by the winding-out wheel 1 is output to the exposure unit 5 via the brake roller R2 via the curved portion A1 for adjusting the amount of winding up, by the intermediate guide wheel R1 for 90-degree direction conversion. The photo sensor S1 is provided in the curved portion A1, and the control portion is not shown, and the amount of warpage from the unwinding roller 1 is adjusted so that the amount of bending of the curved portion A1 is constant. The belt-shaped workpiece W conveyed to the exposure unit 5 is nipped by the conveyance roller R3 and the pressure roller R3', the brake roller R2, and the pressure roller R2', and is pulled by the rotation conveyance roller R3, and is conveyed to the figure. Right direction. When the roller is rotated, the brake roller R2 generates a force opposite to the direction of rotation, for example, a brake that is connected to an electromagnetic brake. By holding the belt-shaped workpiece W by the brake roller R2 and the pinch roller R2', the workpiece is likely to fluctuate during transportation, and the occurrence of meandering and creases is prevented. The strip-shaped workpiece W that has been transported to the exposure unit 5 is, as will be described later, the first applied tensile force means 1 1 and the second applied tensile force means (not shown), and only the thermal expansion portion during exposure is assumed, in the transport direction and orthogonal to In this direction, a pulling force is applied, and in this state, the workpiece holding means 6 is held. This section will be described later. On the surface side of the strip-shaped workpiece W, a first light irradiation portion 41, a mask 形成 1 for forming a pattern on the surface side of the workpiece, and a first projection lens 3 1 are provided on the back side, and a second light irradiation portion 42 is provided to form a workpiece. The mask M2 of the back side pattern and the second projection lens 32. From the respective light-irradiating portions 41 and 42, through the masks 1 and M2 and the projection lenses 3 1 and 3 2, the exposure light is applied to both surfaces of the stepped workpiece W, and the exposure -12 - 1278724 (10) is formed in the mask M1, Mask pattern of M2. Furthermore, the light irradiation sections are all one. The light that can be emitted from one light-irradiating portion is split by an optical path by a half mirror or the like, and is irradiated to both of the masks Μ 1 and Μ 2 . The strip-shaped workpiece W exposed by the exposure unit 5 is sandwiched by the transport roller R3 and the pressure roller R3' as described above, and is transmitted through the guide wheel R4 and the curved portion Α2 for adjusting the winding amount. Around the roller 2. The optical sensor S2 is provided in the bending portion Α2, and the amount of winding of the winding roller 2 is adjusted to a constant amount by the control portion (not shown). Next, the first biasing means 1 1 and the second biasing means for applying a tensile force, and a tensile force applied to the workpiece, will be described with respect to a configuration example of the workpiece holding means 6 for maintaining the peripheral portion of the exposure region. (1) First tension applying means Fig. 2 shows a configuration of the first applying tension means 1 1 for applying a tensile force to the belt-shaped workpiece W in the conveyance direction of the workpiece. The same figure shows the configuration of the first biasing means 11 viewed from the direction orthogonal to the transport direction, and the same figure shows the biasing means 11 provided on the downstream side of the exposed portion 5 of the strip-shaped workpiece W, but The configuration of the tension applying means 1 1 provided on the upstream side has the same configuration except that the direction in which the pulling force is applied is opposite. The first biasing means Π is a clamping portion 1 which clamps the strip-shaped workpiece W in the direction of the conveyance in the direction of the right direction (width direction) 2, and a specific amount of the clamping portion -13 - 1278724 (11) The moving clamp drive unit 13 is configured. The clamp portion 12 is a case where a PET film belonging to a protective film is formed on the surface of the strip-shaped workpiece W. Since the film is used to protect the field of exposure, there is no problem even if the shape of the workpiece is fully integrated. Rather than in terms of the shape, it is better to obtain the tensile force equally for the strip-shaped workpiece W. The clamp portion 12 is provided on the fixed table 14, and the clamp drive portion 13 is mounted on the fixed table 14. The clamp drive unit 13 is provided with a ball screw 13 b that is rotated from the feed motor 13 3 a, and the ball screw 13 3 b is rotated by the feed motor 13 3 a to be engaged with the ball screw 1 3 b. The portion 1 2 moves to the left-right direction in the same figure, that is, the transport direction of the strip-shaped workpiece W (shown by a broken line in the same figure). The first biasing means as described above is provided on both the transport roller R3 side (downstream side) and the brake roller R2 side (upstream side) along the transport direction of the exposure unit 5 as described above. In the exposure portion 5 of the strip-shaped workpiece W, the upstream side and the downstream side are sandwiched by the clamp portion 12, and the clamp portion 1 2 is clamped to the upstream side by the clamp drive portion 13 The side drive is performed, and the clamp portion that clamps the upstream portion is driven on the flow side, whereby a pulling force is applied in the conveyance direction of the belt-shaped workpiece W. Fig. 3 shows an example of the configuration of the clamp portion 1 2 to which the first pulling force means π is applied. The same figure is a cross-sectional view of the first biasing means 11 viewed from the transport direction. The clamp portion 1 2 has a structure in which the belt-shaped workpiece W is sandwiched from the upper and lower sides by the pressing plate 1 2 a and the lower member 丨 2 b in the width direction. -14- 1278724 (12) The lower member 12b is fixed to the fixed table 4, and the ball screw 13b is attached to one end of the fixing table 14, and the in-line guide portion 13d is attached to the other end by the ball The screw 1 3 b is rotated to move the fixing table 14 to the front and rear directions of the paper of the same figure. Further, the lower member 12b is provided with a hole 1 2 c for piping for vacuum suction and air recirculation, and a pipe 1 2 d for supplying air and vacuum is attached to the hole 1 2 c. The pressure plate 12a is attached to the fixed table 14 via the cylinder 12c on both sides in the width direction of the workpiece W, and is moved downward in the same drawing by the cylinder 12e. When the belt-shaped workpiece W is conveyed, the cylinder 12e is extended, and the pressing plate 12a is raised. The strip-shaped workpiece W is conveyed by the gap between the pressing plate 12a and the lower member 12b. At this time, air recirculates from the hole 12c of the lower member 12b, and the back surface of the strip-shaped workpiece W does not rub against the surface of the lower member 12b. When the belt-shaped workpiece W obtains the pulling force in the conveying direction, the cylinder I2e contracts, the pressing plate 12a is lowered, and the belt-shaped workpiece W is held by the pressing plate 12a and the lower member 12b. At this time, a vacuum is applied to the hole 1 2c of the lower member 1 2b to assist the clamping of the strip-shaped workpiece W. Further, in order to minimize the influence on the surface of the workpiece W on the lower side of the pressing plate 12a and the surface of the workpiece W, it is desirable to adhere the elastic member 12f like a soft rubber in advance. In this state, the clamp portion 12 is moved together with the fixed table 14 in the conveyance direction of the workpiece W by the clamp driving portion 13 shown in Fig. 2, and the belt-shaped workpiece W is pulled in the conveyance direction. -15- 1278724 (13) Further, the first biasing means can be used as both the transport roller R3 and the pinch roller R3', and the brake roller R2 and the pinch roller R2'. For example, when the electromagnetic brake causes the workpiece to obtain a tensile force, the brake roller R2 is set so that a stronger braking method than when the workpiece is conveyed can be obtained. In this case, the brake roller R2 and the pinch roller R2' are used for clamping, and the above-described strong braking is required. When the carrier roller W is applied to the belt-shaped workpiece W by the transport roller R3 and the pinch roller R3', the pulling force is applied. It is added to the conveying direction that suppresses the movement of the workpiece. (2) Second imparting pulling means Fig. 4 shows a configuration of the second biasing means for applying a pulling force to the width direction of the workpiece for the strip-shaped workpiece W. The same figure shows a cross-sectional view of the workpiece holding means 6 viewed from the transport direction and a second biasing means 21. Further, the same figure shows the second biasing means 2 1 on one side, and the biasing means having the same configuration is also provided on the other side. In the second workpiece biasing means 6, the pair of second biasing means 2 1 is provided on the upstream side and the downstream side of the transport direction of the strip-shaped workpiece W, so that the second biasing means is provided at four places in total. 2 1. Hold the four positions of the strip-shaped workpiece W and apply a tensile force to the width direction of the workpiece. The second biasing means 2 1 is composed of a clamp portion 22 for gripping the end portion of the strip-shaped workpiece W and a clamp drive portion 23 for moving the clamp portion with a specific amount. The clamp drive unit 23 includes a ball-16-(14) 1278724 screw 23b that is rotated by the feed motor 23a, and the ball screw 23b is rotated by the feed motor 23a, and the clamp portion 22 of the ball screw 23b is engaged. The left and right direction of the same figure is the width direction of the strip-shaped workpiece W. The clamp portion 22 is configured such that the peripheral portion of the strip-shaped workpiece W is sandwiched from above and below by the sandwiching portion Gr1 of the upper member 22a and the sandwiching portion Gr2 of the lower member 22b. It is fixed to the jig fixing table 22d to which the center shaft 22c is attached to the lower member 22b. The upper member 22a is attached to the lower member 22b via a shaft 22e, and is rotated about the shaft 22e. Further, the spring 22f is applied to the opposite side of the holding portions Gr1 and Gr2 of the upper member 22a and the lower member 22b, and the upper member 22a and the lower member 22b are pushed to the opening directions of the grip portions Gr1 and Gr2. The cylinder 22g is attached to the lower member 22b, and the drive shaft of the cylinder 229 protrudes through the lower member 22b, and the front end thereof abuts against the side opposite to the nip portion Gr1 with the shaft 22e of the upper member 22a interposed therebetween. Therefore, when the cylinder 22g is driven, the upper member 22a is rotated about the shaft 22e, and the nips Grl and Gr2 are closed. The figure 5 is a view showing the relationship between the second applying tension means 2 1 and the workpiece holding means 6 by the view of the upper viewing exposure portion 5, and the second imparting pulling means 2 1 is a commemorative structure. Further, the broken line in the same figure is an area of exposure in which the strip-shaped workpiece W and its pattern are formed. The second imparting force means 2 1 is disposed at four positions of the peripheral portion of the strip-shaped workpiece W. However, the number and the size of the grip portion are designed to obtain the tensile force equally for the workpiece. It can be decided according to the needs. Further, the clamp portion 22 of the second biasing means 2 1 is elongated in the transport direction of the strip-shaped workpiece -17-1278724 (15) W, and the second imparting is provided at two places on both sides of the strip-shaped workpiece W. The pulling means may apply a pulling force to a direction orthogonal to the conveying direction. As shown in FIGS. 4 and 5, the workpiece holding means 6 for holding the peripheral portion of the strip-shaped workpiece w is provided with an opening portion 6a in a portion corresponding to the exposure region of the strip-shaped workpiece W, and is under the workpiece holding means 6. On the side, the light is irradiated against the back surface of the workpiece W. The vacuum suction hole 6b is provided on the surface of the workpiece holding means 6, and the peripheral portion other than the exposure area of the strip-shaped workpiece W is adsorbed and held during exposure. Next, the first and second biasing means 11 and 12 are applied to apply tension to the strip-shaped workpiece W, and an operation for maintaining this state will be described. First, the strip-shaped workpiece W was exposed under actual exposure conditions, and the amount of elongation due to thermal expansion during exposure was measured. Further, it is also possible to determine in advance how much force can be used to stretch the workpiece, and to re-extend the workpiece in the extension portion due to thermal expansion. That is, if the thermal expansion is 10 // m during exposure, the force required for the first and second biasing means 1 1 and 1 2 to extend the strip-shaped workpiece W by 1 〇 # m is required. The tensile force applied to the strip-shaped workpiece W by the first and second biasing means 1 1 and 1 2 is equivalent to the amount of extension in the transport direction and the amount of extension per unit length in the direction orthogonal to the transport direction. Become equal. For example, in the case where the second biasing means is in the configuration of the fifth embodiment, as shown in Fig. 6, the length of the strip-shaped workpiece in the transport direction sandwiched by the second biasing means 21 provided at two places in the transport direction is shown. (substantially equal to the interval between the second force-applying means) is Lx, and the width of the strip-shaped workpiece W is -18 - 1278724 (16)
Ly、施加在第一賦予拉力手段1 1的力爲Fx、施加在第二 賦予拉力手段21的力爲Fy的話，如Fx/Ly = Fy/Lx的施加 拉力亦可。 於前述第1圖〜第5圖中，帶狀工件W是被夾持在 搬送滾輪R3和壓緊滾輪R3 ’、以及制動滾輪R2和壓緊滾 輪R25，藉由搬送滾輪R3’的旋轉，曝光領域就會被搬送 到曝光部5。 設置在曝光部5之搬送方向兩側的第一賦予拉力手段 1 1的壓緊板12a下降，帶狀工件W就會經由壓緊板12a 和下構件1 2 b被夾持。 第一獲得接力手段1 1的夾緊驅動部1 2是將帶狀工件 延伸至搬送方向的方向加以驅動。對於帶狀工件在搬送方 向施加拉力並延伸。直到該延伸量與因熱膨脹引起的延伸 量一致爲止，針對帶狀工件施加拉力。再者，如上所述， 加大制動滾輪R2的制動的大小，藉由搬送滾輪r3和壓 緊滾輪R3 ’、以及制動滾輪R2和壓緊滾輪R2 ’，使工件獲 得拉力亦可。 其次，藉由第二賦予拉力手段21的夾緊部22，夾持 帶狀工件W的端部。讓汽缸2 2 g上昇，且讓上構件2 2 a 的夾緊部Gr 1下降，就能夾持帶狀工件W。 一旦夾緊部22夾著帶狀工件W，即驅動夾緊驅動部 2 3的饋進馬達2 3 a ’且g裊滚珠螺桿2 3 b旋轉，夾緊部2 2 就會移動到工件寬度方向外側。藉此，對著帶狀工件於寬 度方向施加拉力並延伸。直到該延伸量與因熱膨|長弓丨起的 -19- (17) 1278724 延伸量一致爲止，藉由夾緊驅動部2 3使夾緊部2 2移動， 針對帶狀工件施加拉力。 再者，利用第一賦予拉力手段1 1往搬送方向的拉 伸、和利用第二賦予拉力手段21往工件寬度方向的拉伸 是可以同時進行。 帶狀工件W的兩方向的延伸量達到因熱膨脹引起的 延伸量的話，即對工件保持手段6的真空吸附孔6 b供給 真空，將帶狀工件W吸附保持在工件保持手段6。第一賦 予拉力手段11的夾緊部12的汽缸22a會讓壓緊板12a上 昇，解除施加在帶狀工件W之搬送方向的拉力。另外， 第二賦予拉力手段22的夾緊部22的汽缸22g也會下降， 上構件22a的夾緊部Grl會上昇，解除施加在工件之寬度 方向的拉力。夾緊驅動部2 3的饋進馬達2 3 a會驅動，且 滾珠螺桿2 3 b會旋轉，夾緊部2 2會移動到工件寬度方向 內側。 再者，如上所述，帶狀工件W之兩方向的延伸量達 到因熱膨脹引起的延伸量時，不讓帶狀工件W保持在工 件保持手段6，照樣用第一賦予拉力手段1 1以及第二賦 予拉力手段22來保持亦可。 在此場合，與第一賦予拉方手段1 1、第二賦予拉力 手段22 —起，將帶狀工件W利用夾緊部12、22來保持 的狀態，夾緊驅動部13、23的饋進馬達13a、23a停止的 話，滾珠螺桿13b、23b的旋轉也會停止，帶狀工件W照 樣維持施加在工件寬度方向的拉力被保持。 -20 - 1278724 (18) 另外，如前述，作爲第一賦予拉力手段使用搬送滾輪 R3和制動滾輪R2的場合，以利用搬送滾輪R3和壓緊滾 輪R3’以及制動滾輪R2和壓緊滾輪R25夾持帶狀工件w 的狀態，停止搬送滾輪R3之旋轉的話，帶狀工件W照樣 維持施加在搬送方向的拉力被保持。 其次，針對實施例的帶狀工件的兩面曝光裝置的定位 以及曝光動作做說明。 如上述，對帶狀工件W施加拉力並利用工件保持手 段6加以固定之後，利用圖未表示的調整機構，檢測掩模 Μ 1和帶狀工件W之正面的調整記號以及掩模M2和帶狀 工件W之背面的調整記號，進行定位。定位結束後，從 光照射部4 1、42照射曝光光，就會同時曝光帶狀工件w 的正面和背面。 一旦曝光結束，即停止對工件保持手段6的真空供 給，解除帶狀工件W的保持。旋轉搬送滾輪R3，下一個 曝光領域就會被搬送到曝光部5。 於上述調整之際，如前述，使投影透鏡3 1、3 2移動 到光軸方向，或在投影透鏡設置變焦機構’藉此就能調整 投影在帶狀工件W上之圖案影像的倍率。藉此就能沒有 問題的進行掩模ΜΙ、M2和帶狀工件W的調整。 如下進行相對於延伸的帶狀工件W而定位、曝光。 藉由利用第一及第二賦予拉力手段1 1、22而施加的 拉力，延伸帶狀工件W。因而，例如帶狀工件W上的兩 個工件調整記號的間隔也會延伸（增長）。 -21 - 1278724 (19) 在掩模Μ 1、M2以與工件調整記號相同的間隔而形 掩模調整記號，以兩者成爲相同的位置來移動掩模Μ 1 M2和帶狀工件W的位置，藉此進行掩模Μ 1、M2和帶 工件2的定位。但是，一旦工件調整記號的間隔延伸， 很難精度良好的進行上述定位。 於是，如前述，使投影透鏡3 1、3 2移動到光軸方 的機構，或在投影透鏡3 1、3 2設置變焦機構，來調整 影到帶狀工件W上的掩模圖案影像的倍率。 放大工件調整記號之間隔延伸的部分（如上述1 0〜 // m)、掩模圖案影像的倍率進行投影。倍率變大，藉此 影在工件上的掩模調整記號的間隔也會變長，就能與工 調整記號一致，完成上述之掩模和工件的定位。放大倍 投影圖案，被曝光的圖案會成爲略大於設計値的圖案。 是，曝光結束後，解除拉力的話，工件會回到原來的 小，對應於此，圖案的大小也會縮小，就不會有問題。 另外，兩面同時曝光，兩面也以相同的倍率投影圖 影像，縮小時也縮小到相同的大小，兩者的相對位置關 就不會偏移。 於第7圖表示對前述第8圖的帶狀工件，使用上述 置施加拉力進行曝光時的結果。 第7圖（a)的橫軸是表示施加在帶狀工件W之拉力 大小，例如3 000g(3kg)的話，工件的搬送方向或寬度方 也分別施加3 k g的拉力。 縱軸是利用曝光所形成的圖案間隔（線寬）之誤差。 成 \ 狀 就 向 投 20 投 件 率 但 大 案 係 裝 的 向 具 1278724 (20) 體上疋表不如问圖（b)、（c)所不’在約lOOmmxlOOmm的 曝光領域中的二十五處，曝光形成間隔之設計値爲i 5 μ m 的圖案，顯影後，在上述二十五處測定上述圖案的間隔， 且最寬的圖案間隔減去最窄的圖案間隔的値。 如前述，於曝光中，帶狀工件W彎曲的話，就會產 生模糊、振動。會有所謂圖案間隔誤差大、模糊、振動大 的情形，即曝光時，會在帶狀工件產生很大的彎曲、延伸。 若根據第7圖，施加在帶狀工件w的拉力愈大，圖 案間隔的誤差愈小，即曝光中的工件的彎曲、延伸很小， 可完成精度良好的曝光。 [發明效果] 如以上說明，在本發明中，可得到以下的效果。 (1) 曝光中，帶狀工件會吸收曝光光，且曝光領域的 溫度會上昇、熱膨脹，不過因爲事先延伸其延伸量部分的 工件，故只要緩和應力，工件就不會產生膨脹或彎曲。因 此’帶狀工件不會向光軸方向移動，圖案影像就不會產生 模糊，就能精度良好的進行曝光（掩模圖案的轉印）。 (2) 另外，帶狀工件是保持曝光領域的周邊部，於曝 光中，更沒有所謂工件延伸的情形，能防止產生振動。因 而’能進行精度良好的曝光。 (3 )施行投影曝光，調整所投影的掩模圖案影像的倍 率，就能對應工件的延伸來投影掩模圖案，進行精度良好 的定位。 -23- 1278724 (21) 【圖式簡單說明】 第1圖是表示本發明之實施例的帶狀工件的兩面曝光 裝置的基本構成圖。 第2圖是表示第一賦予拉力手段的構成圖。 第3圖是表示第一賦予拉力手段的夾緊部的構成例圖。 第4圖是表示第二賦予拉力手段的構成圖。 第5圖是從上方觀看曝光部的圖。 第6圖是說明施加在帶狀工件的拉力的圖。 第7圖是表示施加拉力並進行曝光時的圖案的間隔寬 度之誤差的圖。 第8圖是表示在兩面形成圖案的F p C (撓性印刷基板） 的構造例圖。 第9圖是表示曝光時因熱膨脹帶狀工件彎曲狀態的圖。 [圖號說明] 1捲出滾輪 2捲繞滾輪 5曝光部 6工件保持手段 1 1第一賦予拉力手段 12夾緊部 1 3夾緊驅動部 2 1第二賦予拉力手段 -24- 1278724 (22) 22夾緊部 23夾緊驅動部 3 1、3 2投影透鏡 41、42第一光照射部 W帶狀工件 Μ 1、Μ 2 掩模 Al 、 Α2 彎曲部 R1中間導輪 R2制動滾輪 R3搬送滾輪 R3’壓緊滾輪 R4導輪Ly, the force applied to the first biasing means 11 is Fx, and the force applied to the second biasing means 21 is Fy, and the pulling force of Fx/Ly = Fy/Lx may be applied. In the first to fifth figures, the strip-shaped workpiece W is sandwiched between the transport roller R3 and the pinch roller R3', and the brake roller R2 and the pinch roller R25, and is exposed by the rotation of the transport roller R3'. The field will be transferred to the exposure department 5. The pressing plate 12a of the first biasing means 1 1 provided on both sides in the conveying direction of the exposure unit 5 is lowered, and the strip-shaped workpiece W is nipped via the pressing plate 12a and the lower member 1 2 b. The first clamping drive unit 12 for obtaining the relay means 1 1 is driven in a direction in which the strip-shaped workpiece is extended to the conveying direction. The belt-shaped workpiece is pulled and extended in the conveying direction. A tensile force is applied to the strip-shaped workpiece until the amount of extension coincides with the amount of elongation due to thermal expansion. Further, as described above, the size of the brake of the brake roller R2 is increased, and the workpiece can be pulled by the conveyance roller r3 and the pressure roller R3', and the brake roller R2 and the pressure roller R2'. Next, the end portion of the strip-shaped workpiece W is held by the clamp portion 22 to which the second force applying means 21 is applied. The strip-shaped workpiece W can be held by raising the cylinder 2 2 g and lowering the clamp portion Gr1 of the upper member 2 2 a. Once the clamping portion 22 sandwiches the strip-shaped workpiece W, that is, the feed motor 2 3 a ' that drives the clamp drive portion 23 and the ball screw 2 3 b rotates, the clamp portion 2 2 moves to the width direction of the workpiece. Outside. Thereby, a tensile force is applied to the strip-shaped workpiece in the width direction and extended. Until the amount of extension coincides with the amount of extension of -19-(17) 1278724 due to the thermal expansion|longitudinal bow, the clamp portion 2 2 is moved by the clamp drive portion 23, and a tensile force is applied to the strip-shaped workpiece. Further, the stretching by the first biasing means 1 1 in the conveying direction and the stretching by the second biasing means 21 in the width direction of the workpiece can be simultaneously performed. When the amount of extension of the strip-shaped workpiece W in both directions reaches the amount of elongation due to thermal expansion, that is, vacuum is supplied to the vacuum suction hole 6b of the workpiece holding means 6, and the strip-shaped workpiece W is adsorbed and held by the workpiece holding means 6. The cylinder 22a of the clamp portion 12 of the first biasing means 11 lifts the pressure plate 12a to release the tension applied in the conveying direction of the belt-shaped workpiece W. Further, the cylinder 22g of the clamp portion 22 to which the second force applying means 22 is applied is also lowered, and the clamp portion Gr1 of the upper member 22a is raised to release the tensile force applied in the width direction of the workpiece. The feed motor 2 3 a of the clamp drive unit 23 is driven, and the ball screw 2 3 b is rotated, and the clamp portion 2 2 is moved to the inner side in the width direction of the workpiece. Further, as described above, when the amount of extension of the strip-shaped workpiece W in both directions reaches the amount of elongation due to thermal expansion, the strip-shaped workpiece W is not held by the workpiece holding means 6, and the first biasing means 1 1 and the first Second, the pulling means 22 is given to hold it. In this case, in the state in which the strip-shaped workpiece W is held by the clamp portions 12 and 22 together with the first biasing means 1 1 and the second biasing means 22, the feeding of the chucking driving portions 13, 23 is performed. When the motors 13a and 23a are stopped, the rotation of the ball screws 13b and 23b is also stopped, and the belt-shaped workpiece W is maintained while maintaining the pulling force applied in the width direction of the workpiece. -20 - 1278724 (18) As described above, when the transport roller R3 and the brake roller R2 are used as the first biasing means, the transport roller R3 and the pinch roller R3' and the brake roller R2 and the pinch roller R25 are used. When the rotation of the conveyance roller R3 is stopped in the state in which the belt-shaped workpiece w is held, the belt-shaped workpiece W maintains the tension applied in the conveyance direction as it is. Next, the positioning and exposure operation of the double-sided exposure apparatus for the strip-shaped workpiece of the embodiment will be described. As described above, after the tensile force is applied to the strip-shaped workpiece W and fixed by the workpiece holding means 6, the adjustment marks of the front side of the mask Μ 1 and the strip-shaped workpiece W, and the mask M2 and the strip shape are detected by an adjustment mechanism not shown. The adjustment mark on the back side of the workpiece W is positioned. After the positioning is completed, the exposure light is irradiated from the light irradiation portions 4 1 and 42 to simultaneously expose the front surface and the back surface of the strip-shaped workpiece w. When the exposure is completed, the vacuum supply to the workpiece holding means 6 is stopped, and the holding of the strip-shaped workpiece W is released. When the transport roller R3 is rotated, the next exposure area is transported to the exposure unit 5. At the time of the above adjustment, as described above, the projection lenses 3 1 and 3 2 are moved to the optical axis direction, or the zoom mechanism is provided on the projection lens, whereby the magnification of the pattern image projected on the strip-shaped workpiece W can be adjusted. Thereby, the adjustment of the mask ΜΙ, M2 and the strip workpiece W can be performed without problems. Positioning and exposure are performed with respect to the extended strip-shaped workpiece W as follows. The strip-shaped workpiece W is stretched by the pulling force applied by the first and second biasing means 1 1 and 22. Thus, for example, the interval of the two workpiece adjustment marks on the strip-shaped workpiece W also extends (grows). -21 - 1278724 (19) In the mask Μ 1, M2, the mask adjustment mark is formed at the same interval as the workpiece adjustment mark, and the positions of the mask Μ 1 M2 and the strip workpiece W are moved at the same position. Thereby, the masks 、 1, M2 and the positioning of the tape workpiece 2 are performed. However, once the interval of the workpiece adjustment marks is extended, it is difficult to perform the above positioning with high precision. Then, as described above, the projection lens 3 1 , 3 2 is moved to the optical axis side, or the projection lens 3 1 , 3 2 is provided with a zoom mechanism to adjust the magnification of the mask pattern image which is incident on the strip-shaped workpiece W. . The portion where the interval between the workpiece adjustment marks is extended (such as the above 1 0 to // m) and the magnification of the mask pattern image is projected. The magnification is increased, whereby the interval between the mask adjustment marks on the workpiece is also lengthened, and the mask and the workpiece can be positioned in accordance with the adjustment marks. Magnification Projection pattern, the exposed pattern will become slightly larger than the design 値 pattern. Yes, after the exposure is over, if the tension is released, the workpiece will return to the original size. Corresponding to this, the size of the pattern will be reduced, and there will be no problem. In addition, the two sides are simultaneously exposed, and the image is projected at the same magnification on both sides, and is reduced to the same size when zoomed out, and the relative positions of the two are not offset. Fig. 7 shows the results of the exposure of the strip-shaped workpiece of the above-mentioned Fig. 8 by applying the above-described tensile force. The horizontal axis of Fig. 7(a) shows the tensile force applied to the strip-shaped workpiece W, for example, 3 000 g (3 kg), and a tensile force of 3 k g is applied to the transport direction or width of the workpiece. The vertical axis is the error of the pattern interval (line width) formed by exposure. In the case of a cast of 20, the ratio of the cast is 20, and the size of the case is not as good as that of the 1278724 (20). (b), (c) is not in the exposure field of about 100 mm x 100 mm. At the same time, the design of the exposure forming interval is i 5 μm, and after development, the interval of the pattern is measured at the above twenty-five places, and the widest pattern interval is subtracted from the narrowest pattern interval. As described above, when the strip-shaped workpiece W is bent during exposure, blurring and vibration are generated. There is a case where the pattern interval error is large, the blur, and the vibration are large, that is, when the exposure is performed, the strip-shaped workpiece is greatly bent and extended. According to Fig. 7, the greater the tensile force applied to the strip-shaped workpiece w, the smaller the error of the pattern interval, that is, the bending and extension of the workpiece during exposure are small, and the accurate exposure can be completed. [Effect of the Invention] As described above, in the present invention, the following effects can be obtained. (1) During exposure, the strip-shaped workpiece absorbs the exposure light, and the temperature in the exposure field rises and thermally expands. However, since the workpiece of the extension portion is extended in advance, the workpiece does not expand or bend as long as the stress is relieved. Therefore, the strip-shaped workpiece does not move in the direction of the optical axis, and the pattern image is not blurred, and exposure can be performed with high precision (transfer of the mask pattern). (2) In addition, the strip-shaped workpiece is a peripheral portion that maintains the field of exposure. In the case of exposure, there is no such thing as a workpiece extension, and vibration can be prevented. Therefore, it is possible to perform accurate exposure. (3) By performing projection exposure and adjusting the magnification of the projected mask pattern image, the mask pattern can be projected corresponding to the extension of the workpiece, and the positioning with high precision can be performed. -23- 1278724 (21) [Brief Description of the Drawings] Fig. 1 is a view showing the basic configuration of a double-sided exposure apparatus for a belt-shaped workpiece according to an embodiment of the present invention. Fig. 2 is a view showing the configuration of the first biasing means. Fig. 3 is a view showing an example of the configuration of a clamp portion to which the first biasing means is applied. Fig. 4 is a view showing the configuration of the second biasing means. Fig. 5 is a view of the exposure portion viewed from above. Fig. 6 is a view for explaining the pulling force applied to the belt-shaped workpiece. Fig. 7 is a view showing an error in the width of the interval of the pattern when the tensile force is applied and exposure is performed. Fig. 8 is a view showing an example of the structure of F p C (flexible printed circuit board) which is patterned on both sides. Fig. 9 is a view showing a state in which a strip-shaped workpiece is bent due to thermal expansion during exposure. [Description of Drawing Number] 1 Roll-out roller 2 Winding roller 5 Exposure portion 6 Workpiece holding means 1 First first tensioning means 12 Clamping part 1 3 Clamping driving part 2 1 Secondly-applied pulling means - 24 - 1278724 (22 22 clamp portion 23 clamp drive portion 3 1 , 3 2 projection lens 41, 42 first light irradiation portion W strip workpiece Μ 1, Μ 2 mask Al, Α 2 bending portion R1 intermediate guide wheel R2 brake roller R3 transport Roller R3' compacting roller R4 guide wheel
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