TW201624142A - Direct exposure apparatus - Google Patents

Abstract

Provided is a direct exposure apparatus. The direct exposure device is a direct exposure device that exposes a pattern on an elongate workpiece that is fed from a supply reel and is wound up around a take-up reel so as to, on the one hand, suppress the increase of the diameter of an exposure roll and, on the other hand, expand focusing area of an exposure image to allow for line thinning of drawing pattern. A direct exposure device comprises a cylindrical member, which is arranged between the supply reel and the take-up reel for holding the elongate workpiece in a predetermined range of a circumferential surface thereof while rotating; a guide means, which guides, at a location of disengagement from the cylindrical member, the elongate workpiece in a tangential direction that is perpendicular to a radial direction in a cross-section that is normal to an axis of the cylindrical member; and an exposure means, which draws a pattern on the elongate workpiece that disengages from the cylindrical member and extends in the tangential direction within a fixed width in front of and behind the disengagement location in the conveyance direction.

Description

Direct exposure device

The present invention relates to a so-called roll to roll in which a pattern is drawn on one side of the front and back of a sheet-like workpiece that is taken up from a supply reel and wound by a reel. Direct exposure device.

In general, as a base material of an electronic circuit board (printed circuit board) used in a mobile phone or a mobile device, for example, a long-length workpiece (photosensitive long film) having a thickness of 0.1 mm or less and a length of 500 mm or more (for example, 100 mm) is used. (The synthetic resin soft film in which the photoreceptor is applied to at least one side of the front and back sides)) is formed into a roll shape. Further, in recent years, a direct exposure apparatus that draws a pattern by directly irradiating a drawing light onto a substrate without using a transfer mask has been raised in the market, and the demand for the use of this exposure method for a long-shaped workpiece has been increasing.

As such a roll-to-roll type direct exposure apparatus, a direct exposure apparatus (Patent Document 1) for transporting and exposing a continuous elongated workpiece is used, and is located in a supply reel and A flat conveyor belt (exposure conveyor belt) between the winding reels holds the elongated workpiece and is exposed on the conveyor belt.

Further, there is also known a direct exposure apparatus (Patent Document 2) which is a long workpiece which travels on a cylindrical surface of a roller (exposure roller) between a supply reel and a winding reel Exposure.

[Prior patent documents] [Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-098720

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2014-035412

When comparing the manner of exposure on a flat conveyor belt and the manner of exposure on a cylindrical roller, the conveyor belt method is excellent in making the entire exposed area of the workpiece flat, but since the length of the production line becomes long, The exposure apparatus is easily shaped, and the surface accuracy of the exposure apparatus is poor. In contrast, since the roll mode can be shortened because of the length of the production line, the exposure apparatus can be reduced in size and excellent in surface accuracy (surface smoothness) and workpiece feed accuracy. On the other hand, since the roll method is exposed on a cylindrical surface (curved surface), the area in which the exposure image is focused is narrow, and it is difficult to draw a thin line. This problem is alleviated if the exposure roll diameter is made larger, but the miniaturization is sacrificed.

Further, from the viewpoint of the feeding accuracy of the workpiece, the conveyor belt method has a possibility that the feeding accuracy is lowered due to the influence of the meandering or the expansion and contraction of the belt belt. On the other hand, the roller method can achieve high feed accuracy in the adsorption region where the roller adsorbs the workpiece, but since the adsorption region is not a flat surface (which is a cylindrical surface) as described above, the problem that the focused region of the exposure image is narrow is small. Residual.

A first object of the present invention is to provide a direct exposure apparatus in which a direct exposure apparatus of an exposure roll type can increase a focus area of an exposure image while suppressing an increase in an exposure roll diameter, thereby making the drawing pattern thin.

Moreover, the second object of the present invention is to obtain a direct exposure package. The direct exposure apparatus of the roller type that adsorbs and moves the workpiece can improve the accuracy of the exposure image and enhance the accuracy of the exposure image while utilizing the high feed precision of the cylindrical member that adsorbs and transports the workpiece while maintaining the planarity of the workpiece. The pattern is thin.

The present invention is directed to a direct exposure apparatus for exposing a pattern to an array of optical modulation elements of an elongated workpiece drawn from a supply reel and wound by a reel, characterized by comprising: a cylindrical member attached to Between the supply reel and the winding reel, one side of the workpiece is fixed in a fixed range of the workpiece, and the tangential direction guiding means is in a disengaged position from the cylindrical member. a radially-oriented tangential direction of the orthogonal cross-section of the member guides the elongated workpiece; and the first exposure means is a strip-shaped workpiece that is detached from the cylindrical member and extends in the tangential direction, at least A front and rear fixed width drawing pattern including the conveyance direction of the disengagement position.

The front and rear fixed width is preferably wider from the detachment position toward the downstream side in the conveying direction than the width on the upstream side.

Further, in the direct exposure apparatus of the present invention, it is preferable that the alignment camera that photographs the alignment mark formed on the elongated workpiece is disposed at a position facing the exposure means via the cylindrical member.

Further, the optical axis of the exposure means and the optical axis of the alignment camera are preferably oriented in the vertical direction.

The cylindrical member is preferably held at least at the exposure position of the exposure means and the photographing position of the alignment camera, and the elongated workpiece is held on the circumferential surface thereof.

Preferably, the present invention further comprises: a cylindrical member between the supply reel and the winding reel, which holds a long strip on a fixed surface of the circumferential surface of the workpiece The workpiece is rotated on one side; the plane guiding means is supported on the downstream side of the disengaged position from the cylindrical member, and the elongated workpiece is planarly supported on the guide surface in a non-contact manner; and the second exposure means is attached to the plane guide A pattern is drawn on the elongated workpiece.

The exposure region of the second exposure means is in a form that can span the position of the elongated workpiece from the disengaged position of the cylindrical member and the guiding means.

It is practical that the exposure area of the first exposure means is located on substantially the same plane as the exposure area of the second exposure means.

Specifically, the guiding means may be constituted by, for example, a floating suction guiding means including a gas blowing means and a gas suction means.

According to the present invention, although the direct exposure apparatus for continuously exposing the elongated workpiece using the exposure roller has a fixed width drawing pattern at the front and rear of the conveyance direction including the detachment position of the cylindrical member, the tangential line is included in the exposure region. The area of the (cut surface) direction is wider, and the area where the exposure image is focused can be made wider than the conventional exposure roll type direct exposure apparatus. As a result, the pattern of exposure can be thinned.

Further, according to the present invention, the downstream side of the cylindrical member that rotates while the long workpiece is held in the fixed range of the circumferential surface of the workpiece is disposed between the supply reel and the winding reel, and the strip is non-contacted. The guiding means for supporting the workpiece in a planar shape on the guiding surface, by using at least a part of the exposure region of the exposed portion of the elongated workpiece on the guiding means, utilizing the high feed precision of the cylindrical member, and borrowing The planarity of the workpiece by the guiding means improves the precision of the exposed image Degree, and the drawing pattern can be thinned.

100‧‧‧Direct exposure device

10‧‧‧Supply reel

11‧‧‧Winding reel

12, 13, ‧ ‧ guide rollers (steering direction guide)

30A (30)‧‧‧Exposure unit (exposure means, first exposure unit)

30B (30)‧‧‧Exposure unit (exposure means, second exposure unit)

36‧‧‧DMD components (optical modulation element array)

40‧‧‧Exposure roller

41‧‧‧Porous cylindrical components

41a‧‧‧Micropores

42‧‧‧Center fixed body

42a‧‧‧Inhalation recess

43‧‧‧ Negative pressure source

44‧‧‧ Controller

45‧‧‧ linear scale

46‧‧‧Line sensor

50‧‧‧Aligning the camera (camera means)

60‧‧‧Floating suction guiding unit (plane guiding means)

61‧‧‧ Guide

61a‧‧‧ Guide

61b‧‧‧through holes (gas blowing means)

61c‧‧‧through holes (gas inhalation means)

62‧‧‧Air loop body

62a‧‧‧Air supply tank

62b‧‧‧Air suction slot

63‧‧‧Negative pressure source

64‧‧‧ Positive pressure source

MA‧‧‧ alignment marks

W‧‧‧ long strip workpiece

α‧‧‧Inhalation interval

Fig. 1 is a side view showing the overall configuration of a direct exposure apparatus of the present invention.

Figure 2 is a perspective view of the same.

Fig. 3 is a perspective view showing an example of an exposure unit.

Fig. 4 is a development view showing an example of a unit pattern area (alignment mark) on a long workpiece and an interval between the camera and the exposure unit.

Figure 5 is an orthogonal cross-sectional view showing the details of the exposure roller.

Fig. 6 is a view showing an example of an exposure region of a long workpiece.

Fig. 7 is a perspective view of the floating suction unit unit.

Fig. 8 is an exploded perspective view thereof.

Fig. 9 is a schematic view showing an exposure state of the array of light modulation elements in the exposure region.

Fig. 10 is a view showing another embodiment of the direct exposure apparatus of the present invention, which is a side view corresponding to Fig. 1 in an embodiment in which the downstream exposure unit and the floating suction guide unit are removed from the configuration of Fig. 1.

Fig. 11 is a perspective view corresponding to Fig. 2 of the embodiment of Fig. 10.

Fig. 1 and Fig. 2 are overall views showing an embodiment of the direct exposure apparatus 100 of the present invention. The direct exposure apparatus 100 is an exposure roller 40 located between the supply reel 10 that draws the wound long workpiece (hereinafter simply referred to as workpiece) W and the winding reel 11 that winds the workpiece W, and is exposed thereto. Above 40 A pair of exposure units (exposure means, exposure drawing sections) 30A and 30B that are separated in the conveyance direction of the workpiece W are provided, and an alignment camera 50 is provided below. The workpiece W is composed of a synthetic resin soft film in which the photoreceptor is applied to at least one surface of the front and back, and after leaving the supply reel 10, passes through the guide rolls 12 and 13, to the exposure roll 40, and further via the guide roller (tangential direction). The guiding means 14 is wound around the winding reel 11. Between the exposure roller 40 and the guide roller 14, a floating suction guiding unit (planar guiding means) 60 located below the workpiece W is provided.

The exposure unit 30B on the downstream side of the pair of exposure units 30A and 30B is disposed on the floating suction guiding unit 60. In this configuration, the accuracy of the exposure image is improved by the high feed precision of the exposure roller 40 (cylindrical member) and the flatness of the workpiece W by the floating suction guiding unit 60 (planar guiding means). A configuration that is useful for thinning the drawing pattern, but by focusing the area of the tangential (cut surface) direction of the exposure roller 40 (cylindrical member) by the exposure region of the upstream exposure unit 30A, the focus of the exposure image can be focused. The area has no direct relationship to the broader features of the prior exposure roll type direct exposure apparatus. That is, the exposure unit 30B on the downstream side and the floating suction guide unit 60 can be omitted. In this regard, the drawings will be described later.

As shown in FIGS. 2 and 5, the exposure roller 40 is driven by a drive source (not shown) to rotate the porous cylindrical member 41 around the axis 41X and the porous cylindrical member 41. In the center fixing body 42, a central suction body 42 is formed in a suction recessed portion in which a plurality of fine holes (suction holes) 41a formed on the circumferential surface of the porous cylindrical member 41 are negatively pressed at a portion of the circumferential surface thereof. (slot) 42a. The suction recess 42a becomes a negative pressure via the negative pressure source 43 and the controller (pressure regulator) 44. Driving the porous state in a state where the suction recess 42a is supplied with a negative pressure When the cylindrical member 41 rotates, the air is taken in from the fine hole 41a of the porous cylindrical member 41 in the suction section α (Fig. 5) formed by the suction recess 42a, and the workpiece W is on the circumferential surface of the porous cylindrical member 41. Adsorb and hold the lower rotation.

The suction section α of the suction recess 42a and the position of the guide roller 13 and the guide roller 14 are determined so as to be at the highest position (uppermost position) and the lowest position of the porous cylindrical member 41 when the porous cylindrical member 41 is viewed from the axial direction. Between (lowest position), the workpiece W is rotated by being attracted by the porous cylindrical member 41. The guide roller 13 is positioned such that the workpiece W enters the porous cylindrical member 41 from the horizontal tangential (tangential) direction of the lowermost orthogonal to the radial direction of the porous cylindrical member 41 (in the horizontal tangential (tangential) direction and radial direction below) The intersection (tangent line) starts to be attracted and held, and the guide roller 14 is positioned such that the workpiece W goes out in the direction of the horizontal tangent (cutting plane) of the radial direction orthogonal to the porous cylindrical member 41 (the horizontal tangent at the upper side ( The intersection of the cut surface and the radial intersection (tangent line) ends the attraction and retention). In other words, the suction section α of the suction recessed portion 42a is set to span between about half a week (about 180°) of the position at which the porous cylindrical member 41 starts to adsorb the workpiece and the position where the workpiece W is separated from the porous cylindrical member 41. Further, the workpiece W may be sucked and held by the porous cylindrical member 41 at least at both end portions of the suction section α, that is, the suction start position and the suction release position.

On the outer circumference of the porous cylindrical member 41 of the exposure roller 40, as schematically shown in Fig. 2, a linear scale 45 is formed, and the line sensor 46 is disposed at an outer fixed position of the exposure roller 40, the line sensor The 46 series reads this linear dimension 45 and detects the absolute rotational position of the porous cylindrical member 41.

The floating suction guiding unit 60 is located on the outlet (downstream) side of the exposure roller 40 (the porous cylindrical member 41), and supports the elongated workpiece W in a non-contact planar manner by blowing and attracting by gas, and the operation principle itself The system is known.

FIGS. 7 and 8 schematically show the floating suction guiding unit 60, including the guide 61 and the air circuit body 62. The guide plate 61 includes an innumerable number of through holes (blowing holes) 61b and through holes (suction holes) 61c through which the flat guide surfaces 61a are opened. The air circuit body 62 includes an air supply groove 62a which is formed in a comb shape and whose comb teeth are combined to be staggered with each other, and an air suction groove 62b. The air supply groove 62a is connected to the positive pressure source 64, and the air suction groove 62b is connected to the negative pressure source. 63 connections. An array is formed so that the through hole 61b communicates with the air supply groove 62a, and the through hole 62c communicates with the air suction groove 62b, and the air supply groove 62a and the air suction groove 62b are provided in a row of the through holes 61b for blowing air and the intake air. The rows of the through holes 61c are respectively parallel to the traveling direction of the workpiece W. However, the through hole that blows out the air and the through hole that is sucked in are not necessarily in a line shape, and it is possible to arrange a plurality of suction holes (blowing holes) around the center blowing hole (suction hole).

The floating suction guiding unit 60 supplies pressurized air to the air supply tank 62a via the positive pressure source 64, and blows it out from the through hole 61b, while supplying a negative pressure to the air suction groove 62b via the negative pressure source 63. The air is taken in through the hole 61c, whereby the plane accuracy of the workpiece W passing through the guide surface 61a can be improved.

Specifically, the above-described floating suction guiding unit 60 can be AFU1 (precision floating type) manufactured by PISCO Co., Ltd.

The pair of exposure units 30 have substantially the same configuration, and one of the exposure units 30A (first exposure unit 30) is provided in the vicinity of the position where the workpiece W is separated from the porous cylindrical member 41, and the other exposure unit 30B (second The exposure unit 30) is located on the floating attraction guiding unit 60.

Fig. 3 shows a specific example of the exposure unit 30 (30A and 30B). The exposure unit 30 includes a light source unit 20, and the light source unit 20 has the same internal structure. The two light source units 20a and the light source unit 20b are formed. Since the light source unit 20a and the light source unit 20b have the same configuration, the light source unit 20a will be representatively described.

The light source unit 20a is composed of a UV bulb 21, a first total reflection mirror 22, a condenser lens 23, a second total reflection mirror 24, a fly's eye lens 25, and an aperture (not shown). The light source unit 20a includes a UV bulb 21, and ultraviolet light mixed by various wavelengths from 365 nm to 440 nm is emitted from the UV bulb 21.

The ultraviolet light emitted from the UV bulb 21 is irradiated to the zenith direction by the elliptical mirror 26, and the direction is changed to the horizontal direction by the first total reflection mirror 22, and is collected by the collecting lens 23, and then the second total reflection mirror 24 is used. Change the direction to the ground direction (workpiece W direction). The ultraviolet light that has changed direction is a four-forked beam through the fly's eye lens 25 and the aperture. The light beam system is a light beam that is controlled by eight DMD (Digital Micro-mirror Device) elements (light modulation element arrays) 36 via the eight first projection lenses 33 and eight mirrors 34. The controlled light beam is adjusted to the magnification of the exposure drawing by the second projection lens group 37, and is irradiated onto the workpiece W. In other words, the drawing device direct exposure device 100 controls the ultraviolet light of the light source unit 20a and the light source unit 20b based on the drawing data in which the desired exposure image is stored in advance.

The exposure area of the exposure unit 30A is determined in the following manner. As described above, after the workpiece W is separated from the porous cylindrical member 41, it moves on the floating suction guiding unit 60, and moves in the horizontal tangential direction at the uppermost portion of the porous cylindrical member 41 (the workpiece which has been separated from the porous cylindrical member 41) The W system adjusts the disengagement angle to a level by the floating attraction guiding unit 60. The exposure area AE (Fig. 2, Fig. 3, Fig. 6) of the exposure unit 30A is strictly not a simple rectangle, but is simplified here to be a direction orthogonal to the conveyance direction of the workpiece W (the width of the workpiece W) Degree direction) is expressed as a rectangle in the length direction. Further, as shown in FIG. 6, the exposure width Y is set so as to be the downstream side of the intersection S when the intersection (crossing line) S of the axial center 41X of the porous cylindrical member 41 and the tangential direction is used as a reference. The exposure width Y2 of the roller 14 side is larger than the exposure width Y1 of the upstream side (the cylindrical surface side of the porous cylindrical member 41) (Y1 < Y2).

In the floating suction guiding unit 60, the exposure unit 30B that exposes the workpiece W is used to raise (maintain) planarity of the workpiece W by the floating suction guiding unit 60 in the exposure area AE (Fig. 2, Fig. 3, Figure 6) Exposure. The exposure width Y of the exposure unit 30B may be the same as or different from the exposure width Y of the exposure unit 30A. The exposure area AE (Fig. 2, Fig. 3, Fig. 6) of the exposure unit 30B is the same as the exposure area of the exposure unit 30A, and is not strictly rectangular, but is simplified here to be the direction of conveyance with the workpiece W. The orthogonal direction (the width direction of the workpiece W) is expressed as a rectangle in the longitudinal direction. The exposure areas AE of the workpieces W of the exposure units 30A and 30B are located on the same plane.

Fig. 9 is a view showing the exposure states of the exposure units 30A and 30B in the two exposure areas AE in the mode. In Fig. 9, the size of the optical system occupied by one of the first projection lenses 33 and the mirrors 34 shown in Fig. 3 of the circular C-type exposure units 30A and 30B shown by the two-dot chain line is shown. The actual exposure area R of the DMD (Digital Micro-mirror Device) element 36 drawn in a thick line rectangle exists, and a rectangle including the direction orthogonal to the conveyance direction of the workpiece W of the four actual exposure areas R is present. The area is set to AE. Further, in Fig. 3, the exposure beam is branched into eight optical systems, but in the example of Fig. 9, it is bifurcated into four optical systems.

The alignment camera 50 is provided in the present embodiment, and is provided in the workpiece W. A pair of separate width directions. The alignment camera 50 captures an alignment mark MA (Fig. 4) previously formed on the workpiece W, and determines (corrects) the drawing coordinate system of the exposure units 30A and 30B. Since the alignment camera 50 photographs the alignment mark MA at the suction start position of the exposure roller 40 (the porous cylindrical member 41) of the workpiece W, the adsorption start position is equal to the shooting position. Further, the alignment camera 50 and the exposure unit 30A are disposed to face each other with the exposure roller 40, and the optical axes of the alignment unit 50 are located at substantially vertical positions on the opposite side of the exposure roller 40. Here, the relative orientation means that the photographing direction of the alignment camera 50 and the exposure light emitting direction of the exposure unit 30A face each other, but at this time, the respective optical axes are not necessarily on the same axis, and may be offset in the substrate conveyance direction. It is preferable that the alignment axis 50 and the exposure unit 30A are disposed so that at least one of the optical axes is strictly oriented in the vertical direction. By arranging the alignment camera 50 and the exposure unit 30A in this manner, the optical system of the alignment camera 50 and the exposure unit 30A can be maintained in the most stable state, and optimum optical performance can be obtained.

Fig. 4 shows the positional relationship between the unit pattern area AP on the workpiece W and the alignment mark MA, and the two exposure areas AE of the alignment camera 50 and the exposure units 30A and 30B. In the illustrated example, the alignment mark MA forms four (2 x 2 columns) for one unit pattern area AP (in the range of one alignment and drawing), and the alignment camera 50 can adjust the position to The center of the camera's field of view is taken with the alignment mark MA.

Further, the number and arrangement of the alignment marks MA are appropriately set in accordance with the pattern to be drawn, and the number and arrangement of the alignment cameras 50 are determined in accordance with the settings, which is of course.

The direct exposure apparatus 100 of this configuration operates as follows. The reel 10, the exposure roller 40, and the winding reel 11 are supplied by the servo system. The workpiece W wound by the supply reel 10 is controlled to rotate synchronously, and the workpiece W wound by the supply reel 10 is wound around the winding reel 11 via the guide rollers 12 and 13, the exposure roller 40, the floating suction guiding unit 60, and the guide roller 14. . The rotational position of the porous cylindrical member 41 of the exposure roller 40 is correctly detected by the linear scale 45 and the line sensor 46.

In the conveyance movement of the workpiece W, when the suction concave portion 42a is brought to a negative pressure via the negative pressure source 43 and the controller (pressure regulator) 44, the workpiece W is adsorbed by the circumferential surface of the porous cylindrical member 41 in the suction section α. In other words, the workpiece W is held by the peripheral surface of the porous cylindrical member 41 and moves on the cylindrical surface from the lowest suction start position of the porous cylindrical member 41 to the uppermost release position. The suction start position is simultaneously the photographing position of the alignment mark MA aligned with the camera 50. The adsorption of the workpiece W is preferably started at the imaging position, and is preferably from the upstream side (supply side) slightly larger than the imaging position.

Further, during the conveyance movement of the workpiece W, the pressurized air is supplied to the air supply groove 62a of the floating suction guide unit 60 via the positive pressure source 64, and is then blown out from the through hole 61b of the guide 61, while passing through the negative The pressure source 63 supplies a negative pressure to the air suction groove 62b, and then takes in air from the through hole 61c. Thereby, the air is blown in and out, and the plane accuracy of the workpiece W passing through the guide surface 61a becomes high.

Then, the workpiece W is advanced, and the coordinate system of the unit pattern area AP is determined by the alignment camera 50 taking four (2 × 2 columns) alignment marks MA of one unit pattern area AP. When the photographing of the alignment mark MA of one unit pattern area AP is completed, the photographing of the alignment mark MA of the next unit pattern area AP is started, and a new coordinate system is determined.

When the shooting of the four alignment marks MA of the unit pattern area AP is completed, the alignment measuring unit calculates the measured unit pattern area AP and designs the above. Unit pattern area AP position and scale error (alignment). The exposure control unit performs coordinate conversion on the drawing data based on the above error, and creates corrected drawing data of the exposure units 30A and 30B.

When the front end of the unit pattern area AP reaches the exposure unit 30A, the exposure control unit modulates the DMD element 36 of the exposure unit 30A based on the corrected drawing data, irradiates the pattern light onto the workpiece W, and forms a pattern on the photosensitive layer of the workpiece W. . Next, when the predetermined position of the unit pattern area AP reaches the exposure unit 30B, the exposure control unit modulates the DMD element 36 of the exposure unit 30B based on the corrected drawing data, irradiates the pattern light onto the workpiece W, and forms the pattern on The sensitizer layer of the workpiece W. This pattern formation is carried out using a known multiple exposure method.

The adsorption of the workpiece W of the porous cylindrical member 41 is released as long as the workpiece W does not detach (hold) the porous cylindrical member 41 at the exposure position of the exposure unit 30A, and may be slightly upstream (supply side) at the exposure position or the exposure position. get on.

In the above exposure operation to the workpiece W, the workpiece W moving under the adsorption by the porous cylindrical member 41 can maintain high feed accuracy, and its position can be correctly detected by the linear scale 45 and the line sensor 46. . Further, since the exposure of the exposure unit 30A is performed in the vicinity of the detachment position of the workpiece W fed by the high feed precision from the porous cylindrical member 41, high drawing accuracy can be realized. Further, since the exposure system of the exposure unit 30B can be performed on the workpiece W which is fed with high feed precision and which maintains high flatness by the floating suction guiding unit 60, high drawing accuracy can be realized in the same manner.

Further, in the exposure of the exposure unit 30A of the illustrated embodiment, the following advantages can be obtained. The workpiece W system attracted by the porous cylindrical member 41 Although the curved surface is formed, as described above, the porous cylindrical member 41 is excellent in surface precision (surface smoothness) and workpiece feeding accuracy. Therefore, in the exposure region AE, the exposure region (width Y1) on the porous cylindrical member 41 excellent in surface precision and workpiece feeding accuracy is included. On the other hand, the exposure area (width Y2) on the downstream side of the intersection line S is assumed to be a plane, but actually, since the porous cylindrical member 41 is detached, there is a plane precision error (ideal focal plane of the exposure unit 30A). The deviation from the exposure region AE tends to increase as it moves away from the porous cylindrical member 41. Therefore, the exposure area AE is made to straddle the upstream side and the downstream side of the intersection line S. Further, by setting the exposure width Y2 on the downstream side of the intersection line S to be larger than the exposure width Y1 on the upstream side, the substantial depth of focus (the plane precision error of the workpiece W from which the exposure area AE is removed from the focal depth of the optical system is prevented) Lightening, the drawing pattern can be thinned. That is, by making the exposure width Y2 on the plane on the downstream side larger than the exposure width Y1 on the curved surface, it is easy to draw a pattern in the depth of focus of the exposure unit 30A. Specifically, the width on the downstream side is set to 70% or more, and it is preferably set to 80% or more. Specifically, when the exposure width Y is 10 mm, the width on the upstream side is Y1 = 2 to 3 mm, and the width on the downstream side is Y2 = 7 to 8 mm.

Between the exposure units 30A and 30B performing the exposure operation, the alignment mark photographing step and the data correction step of the next unit pattern area AP are performed in parallel. Therefore, when the exposure of the unit pattern area AP is completed, the exposure unit 30 causes the exposure of the next unit pattern area AP to continuously start.

In order to perform the alignment mark photographing step and the data correcting step in parallel, the exposure units 30A, 30B and the alignment camera 50 are separated into a unit pattern area in consideration of the size of the unit pattern area AP as shown in FIG. The four alignment marks MA of the AP enter between the two (the distance between the two is greater than the single The bit pattern area AP is longer). Since the exposure unit 30A and the alignment camera 50 of the present embodiment are positioned above and below the exposure roller 40, the exposure roller 40 can be made smaller, and the distance can be secured. Further, since the exposure unit 30A and the alignment camera 50 are arranged in the vertical direction with the exposure roller 40 interposed therebetween, the roller can be utilized most efficiently, and the alignment accuracy and productivity of the workpiece W can be improved.

In the above embodiment, the first exposure unit 30A is disposed in the vicinity of the detachment position of the workpiece W from the porous cylindrical member 41, and the second exposure unit 30B is disposed on the downstream side of the porous cylindrical member 41. The floating attraction guide unit 60 is floated. In contrast, FIG. 5 is an embodiment in which the exposure area AE of the single exposure unit 30 is spanned over the position of the workpiece W from the disengaged position of the porous cylindrical member 41 and the position on the floating suction guiding unit 60. In this manner, by placing at least a portion of the exposed area of the workpiece W of the exposure unit 30 on the floating suction guiding unit 60, the planarity of the exposed area is ensured, and further, the workpiece feed by using the exposure roll is high. Accuracy for high drawing accuracy.

Further, as described above, in the above embodiment, the exposure unit 30B on the downstream side of the exposure units 30A and 30B and the floating suction guide unit 60 can be omitted. FIGS. 10 and 11 show an embodiment in which the exposure unit 30B and the floating suction guiding unit 60 are omitted in FIGS. 1 and 2 . In this embodiment, the guide roller 14 constitutes a tangential direction guiding means for the workpiece W. That is, after the workpiece W is detached from the porous cylindrical member 41, the guide roller 14 moves in the horizontal tangential (tangential) direction at the uppermost portion of the porous cylindrical member 41 (the workpiece W detached from the porous cylindrical member 41 is guided) The roller (guiding means) 14 adjusts the disengagement angle to a level). Further, according to the present embodiment, the exposure region of the upstream exposure unit 30A can be included in the tangential (cut surface) direction of the exposure roller 40 (cylindrical member). In the flat area, the area where the exposure image is focused can be expanded more than the conventional exposure roll type direct exposure apparatus. This feature is also a feature of the first embodiment. Further, in the embodiments of Figs. 10 and 11, the pair of exposure regions AE are depicted in the third, fourth, sixth, and ninth embodiments as only one exposure region AE of the exposure unit 30A.

According to the embodiment of the tenth and eleventh drawings, the alignment of the workpiece W and the correction of the drawing position can be accurately performed while suppressing the diameter of the exposure roller 40, and the area of the focus of the exposure image can be made larger. In the past, the exposure roller type direct exposure device was wider. As a result, an exposure apparatus capable of realizing high-precision processing in a space saving ratio compared with the conventional direct exposure apparatus is obtained.

100‧‧‧Direct exposure device

10‧‧‧Supply reel

11‧‧‧Winding reel

12, 13, ‧ ‧ guide rollers (steering direction guide)

30A (30)‧‧‧Exposure unit (exposure means, first exposure unit)

30B (30)‧‧‧Exposure unit (exposure means, second exposure unit)

40‧‧‧Exposure roller

41‧‧‧Porous cylindrical components

41X‧‧‧Axis

41a‧‧‧Micropores

42‧‧‧Center fixed body

45‧‧‧ linear scale

46‧‧‧Line sensor

50‧‧‧Aligning the camera (camera means)

60‧‧‧Floating suction guiding unit (plane guiding means)

W‧‧‧ long strip workpiece

AE‧‧‧Exposure area

Claims (9)

A direct exposure apparatus using an array of light-modulating elements for exposing a pattern to an elongated workpiece drawn from a supply reel and wound by a winding reel, characterized by comprising: a cylindrical member attached to the supply Between the reel and the winding reel, one side of the workpiece is fixed in a fixed range of the workpiece, and the tangential direction guiding means is in a disengaged position from the cylindrical member and the cylindrical member a radially-orthogonal tangential direction of the orthogonal cross-section of the axis guides the elongated workpiece; and the first exposure means is for at least the elongated workpiece that is detached from the cylindrical member and extends in the tangential direction The front and rear fixed width drawing patterns are separated from the conveyance direction of the position. The direct exposure apparatus according to claim 1, wherein the front and rear fixed width is wider from a disengagement position to a downstream side in the conveyance direction than to an upstream side. A direct exposure apparatus according to claim 1, wherein the alignment camera that photographs the alignment mark formed on the elongated workpiece is disposed at a position opposed to the exposure means via the cylindrical member. The direct exposure apparatus of claim 3, wherein the optical axis of the first exposure means and the optical axis of the alignment camera are oriented in a vertical direction. The direct exposure apparatus of claim 3, wherein the cylindrical member holds the elongated workpiece on a peripheral surface thereof at least at an exposure position of the first exposure means and an imaging position of the alignment camera. For example, the direct exposure device of claim 1 of the patent scope further includes: The surface guiding means supports the elongated workpiece in a planar manner on the downstream side of the disengaged position from the cylindrical member in a non-contact manner; and the second exposure means is on the plane guiding means The elongated workpiece is exposed. The direct exposure apparatus of claim 6, wherein the exposure area of the second exposure means is located at a position on the elongate workpiece from the disengaged position of the cylindrical member and the plane guiding means. The direct exposure apparatus of claim 6, wherein the exposure area of the first exposure means and the exposure area of the second exposure means are present on substantially the same plane. The direct exposure apparatus of claim 6, wherein the plane guiding means comprises a floating suction guiding means of the gas blowing means and the gas suction means.