CN105467773A - Direct exposure device - Google Patents
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- CN105467773A CN105467773A CN201510617271.6A CN201510617271A CN105467773A CN 105467773 A CN105467773 A CN 105467773A CN 201510617271 A CN201510617271 A CN 201510617271A CN 105467773 A CN105467773 A CN 105467773A
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Abstract
Provided is a direct exposure device can restrain increasing of the diameter of an exposure roller, expand a focus alignment area of an exposure image, and make lines depicting a pattern be thin when the pattern is exposed in the direct exposure device which is sent out from a supply reel and winded on a strip workpiece on a winding reel. The direct exposure device comprises a cylinder component, a guiding component, and an exposure component. The cylinder component is between the supply reel and the winding reel, and rotates while maintaining the strip workpiece in a certain range of the peripheral surface. The guiding component is on the off-position where the strip workpiece separates from the cylinder component, and guides the strip workpiece along a tangential direction which is vertical to the radial direction of a shaft vertical cross-section of the cylinder component. The exposure component separates the cylinder component and depicts the pattern along the strip workpiece which extends in the tangential direction in a certain range including the transmitting direction of the above off-position.
Description
Technical field
The present invention relates to the direct exposure device of so-called volume to volume mode, sending from supply spool and be wound in the conveying of strip workpiece of reel wound, a face depicting pattern positive and negative to it.
Background technology
Usually, as the base material of the electronic circuit board (tellite) for mobile phone and mobile device etc., such as use thickness for below 0.1mm and the strip workpiece (the rectangular film of photonasty (applying the synthetic resin soft film of photoreceptor at least one positive and negative face)) that length is more than 500mm (such as, 100m) is formed as the workpiece of web-like.In addition, in recent years, do not depict pattern by describing light to shine directly into substrate direct exposure device with using transfer mask emerges in the market, also adopts the requirement of this Exposure mode day by day strong to strip workpiece.
As the direct exposure device of this volume to volume mode, in order to carry out conveying and the exposure of continuous print strip workpiece, be known to following direct exposure device: utilize the flat conveyor (exposure conveyor) between supply spool and winding reel, keep strip workpiece, and carry out exposing (patent documentation 1) on this conveyor.
In addition, it is also known that following direct exposure device: expose (patent documentation 2) the strip workpiece of advancing in the barrel surface of the roller (exposure roller) between supply spool and winding reel.
[patent documentation 1] Japanese Unexamined Patent Publication 2006-098720 publication
[patent documentation 2] Japanese Unexamined Patent Publication 2014-035412 publication
If compared the mode exposed on plane conveyor and the mode exposed on the roller of cylindrical shape, conveyor mode make workpiece whole be exposed region be plane in more excellent, but, because pipeline length increases, exposure device easily maximizes, and when exposure position place local observe surface accuracy poor.On the other hand, because roller mode can shorten pipeline length, so the miniaturization of exposure device can be realized, and excellent in surface accuracy (flatness in face) and workpiece feed accuracy.On the other hand, roller mode owing to exposing in barrel surface (curved surface), so the focus alignment area that there is exposure image is narrow, and the problem that the description of fine rule is more difficult.If increase exposure roller diameter, then this problem is eased, but sacrifices miniaturization.
In addition, from the viewpoint of the feed accuracy of workpiece, in conveyor mode, due to complications or the impact such as flexible of conveying belt, feed accuracy likely reduces.On the other hand, for roller mode, although higher feed accuracy can be being obtained by absorption of workpieces to the adsorption zone on roller, as mentioned above, because adsorption zone is not plane (for barrel surface), so the problem that the focus alignment area that there is exposure image is narrow.
Summary of the invention
The first object of the present invention is to obtain a kind of directly exposure device, in the direct exposure device of exposure roller mode, while suppression exposure roller diameter increases, can expand the focus alignment area of exposure image, and the lines of depicting pattern are attenuated.
In addition, the second object of the present invention is to obtain a kind of directly exposure device, carry out in the direct exposure device of the roller mode of movement at absorption workpiece, can to apply in a flexible way the high feed accuracy of cylinder part of absorption conveying workpieces, the planarity of holding workpiece improves the precision of exposure image, and the lines of depicting pattern are attenuated.
The present invention is a kind of directly exposure device, it use array of light modulation elements, by pattern exposure in sending from supply spool and being winding to the strip workpiece on winding reel, the feature of described direct exposure device is, have: cylinder part, it rotates keep strip workpiece in the certain limit of its side face while between above-mentioned supply spool and winding reel; Tangential direction guiding elements, its disengaging configuration departed from from above-mentioned cylinder part at strip workpiece, guides strip workpiece along the tangential direction vertical with the radial direction in the axle vertical cross-section of above-mentioned cylinder part; And the 1st exposes component, it is at least in the front and back certain limit of throughput direction comprising above-mentioned disengaging configuration, departs from and the strip workpiece depicting pattern extended along above-mentioned tangential direction from above-mentioned cylinder part.
Be preferably in the certain limit of above-mentioned front and back, the scope ratio from disengaging configuration to conveyance direction downstream side is from disengaging configuration to the wide ranges of throughput direction upstream side.
Direct exposure device of the present invention is also preferably, and the alignment cameras that shooting is formed at the alignment mark of above-mentioned strip workpiece is configured in the position relative with above-mentioned exposure component across above-mentioned cylinder part.
Also be preferably, the optical axis of exposure component and the optical axis of alignment cameras are towards vertical.
Above-mentioned strip workpiece, preferably at least in the exposure position of above-mentioned exposure component and the shot location of above-mentioned alignment cameras, keeps on the circumferential face by above-mentioned cylinder part.
The present invention is also preferably, and has: cylinder part, and it rotates keep strip workpiece in the certain limit of its side face while between above-mentioned supply spool and winding reel; Plane guiding elements, this strip workpiece support is plane by the downstream of its disengaging configuration departed from from above-mentioned cylinder part at strip workpiece under the state that strip workpiece does not contact with guide surface; And the 2nd exposes component, it is on above-mentioned plane guiding elements, to above-mentioned strip workpiece depicting pattern.
The position disengaging configuration and plane guiding elements that above-mentioned strip workpiece departs from from above-mentioned cylinder part, in an one mode, can be crossed in the exposure region of above-mentioned 2nd exposure component.
In fact the exposure region of above-mentioned 1st exposure component and the exposure region of the 2nd exposure component are positioned at roughly on same plane.
Specifically, above-mentioned guiding elements such as can be made up of the suspension suction guiding elements with gas blowout component and gas aspiration means.
According to the present invention, that a kind of exposure roller that uses is to the direct exposure device of strip workpiece continuous exposure, simultaneously, comprise cylinder-like part disengaging configuration throughput direction front and back certain limit in depicting pattern, so the plane area in tangent line (section) direction is included in exposure region, the focus alignment area of exposure image can be made wider than the direct exposure device of exposure roll shape in the past.Consequently, the hachure of the pattern that will expose can be realized.
In addition, this strip workpiece support is plane guiding elements by the present invention further under the downstream of cylinder part is configured in the state that strip workpiece do not contact with guide surface, what make the exposure region for strip workpiece of exposure component is positioned on guiding elements at least partially, the high feed accuracy of cylinder part and guiding elements can be utilized thus to keep the planarity of workpiece, improve the precision of exposure image, and the lines of depicting pattern are attenuated, wherein, this cylinder part is between supply spool and winding reel, rotate keep strip workpiece in the certain limit of its side face while.
Accompanying drawing explanation
Fig. 1 is the integrally-built side view that direct exposure device of the present invention is shown.
Fig. 2 is its stereographic map.
Fig. 3 is the stereographic map of the example that exposing unit is shown.
Fig. 4 is the stretch-out view of the interval example between the unit cell pattern region (alignment mark) illustrated on strip workpiece, alignment cameras and exposing unit.
Fig. 5 is the axle vertical sectional view of the details that exposure roller is shown.
Fig. 6 is the figure of an example of the exposure region illustrated relative to strip workpiece.
Fig. 7 is the stereographic map of suspension pump unit monomer.
Fig. 8 is its exploded perspective view.
Fig. 9 is the schematic diagram of the exposure status based on array of light modulation elements illustrated in exposure region.
Figure 10 is another embodiment of direct exposure device of the present invention, that be the embodiment after the exposing unit removing downstream from the structure of Fig. 1 and the suction guidance unit that suspends are shown, corresponding with Fig. 1 side view.
Figure 11 is the stereographic map corresponding with Fig. 2 of the embodiment of Figure 10.
Label declaration
100: directly exposure device; 10: supply spool; 11: winding reel; 12,13,14: deflector roll (tangential direction guidance unit); 30A (30): exposing unit (exposure component, the 1st exposing unit); 30B (30): exposing unit (exposure component, the 2nd exposing unit); 36:DMD element (array of light modulation elements); 40: exposure roller; 41: perforated cylinder parts; 41a: minute aperture; 42: center fixed body; 42a: suction recess; 43: negative pressure source; 44: controller; 45: linear graduation; 46: linear transducer; 50: alignment cameras (imaging member); 60: suspend suction guidance unit (plane guiding elements); 61: guide plate; 61a: guide surface; 61b: through hole (gas blowout component); 61c: through hole (gas suction component); 62: air loop main body; 62a: air feed trough; 62b: air suction socket; 63: negative pressure source; 64: positive pressure source; MA: alignment mark; W: strip workpiece; α: between suction district.
Embodiment
Fig. 1, Fig. 2 are the overall diagram of the embodiment that direct exposure device 100 of the present invention is shown.In direct exposure device 100, exposure roller 40 is positioned at that to send the strip workpiece be wound (following, referred to as " workpiece ") between the supply spool 10 of W and the winding reel 11 that workpiece W is reeled, there is a pair exposing unit (exposure component, exposure plotting portion) 30A and 30B that the throughput direction along workpiece W separates above this exposure roller 40, thereunder there is alignment cameras 50.Workpiece W is made up of the synthetic resin soft film applying photoreceptor at least one positive and negative face, workpiece W is after being sent by supply spool 10, arrive exposure roller 40 through deflector roll 12,13, and then after deflector roll (tangential direction guidance unit) 14, be wound spool 11 reel.Guidance unit (plane guiding elements) 60 is aspirated in the suspension being provided with the lower surface being positioned at workpiece W between exposure roller 40 and deflector roll 14.
The exposing unit 30B in the downstream in a pair exposing unit 30A, 30B is configured in and suspends on suction guidance unit 60.Although this structure is conducive to utilizing the high feed accuracy of exposure roller 40 (cylinder part) and suspension suction guidance unit 60 (plane guiding elements) to keep the planarity of workpiece W, improve the precision of exposure image, the lines of depicting pattern are attenuated, but, with following characteristics without direct relation: make the plane area in tangent line (section) direction of exposure roller 40 (cylinder part) be included in the exposure region of exposing unit 30A of upstream side, thus the focus alignment area of exposure image can be made wider than the direct exposure device of exposure roll shape in the past.That is, the exposing unit 30B in downstream and the suction guidance unit 60 that suspends can be omitted.About this point, use accompanying drawing is carried out describing afterwards.
As shown in Fig. 2, Fig. 5, exposure roller 40 has: centered by the 41X of axle center, carried out the perforated cylinder parts 41 of rotary actuation by not shown drive source; And be positioned at the center fixed body 42 of these perforated cylinder parts 41, in a part for the side face of center fixed body 42, be formed with suction recess (groove) 42a, this suction recess (groove) 42a countless minute apertures (SS) 41a to the side face being formed at perforated cylinder parts 41 and apply negative pressure.Via negative pressure source 43 and controller (regulator) 44, negative pressure is applied to suction recess 42a.When rotary actuation being carried out to perforated cylinder parts 41 under the state giving negative pressure is supplied to suction recess 42a, between the suction district being formed with suction recess 42a in α (Fig. 5), from the minute aperture 41a withdrawing air of perforated cylinder parts 41, result workpiece W is held in the side face of perforated cylinder parts 41 by absorption and rotates.
The position of α and deflector roll 13 and deflector roll 14 between the suction district determining to aspirate recess 42a, make when from end on observation perforated cylinder parts 41, between the extreme higher position (uppermost position in fig-ure) and extreme lower position (lowermost position is put) of perforated cylinder parts 41, workpiece W is aspirated by perforated cylinder parts 41 and rotates.Determine the position of deflector roll 13, workpiece W is made to enter perforated cylinder parts 41 (aspirate horizontal tangent (section) direction of below and intersection point (intersecting lens) place of radial direction and keep) from tangent line (section) direction of the level of the bottom vertical with the radial direction of perforated cylinder parts 41, determine the position of deflector roll 14, make workpiece W to discharge to tangent line (section) direction of the level of the top vertical with the radial direction of perforated cylinder parts 41 (horizontal tangent (section) direction up terminate to aspirate with radial intersection point (intersecting lens) place keep).That is, between the suction district of aspirating recess 42a α be set at cross over the position that starts absorption of workpieces to depart to position and the workpiece W of perforated cylinder parts 41 from perforated cylinder parts 41 roughly (roughly 180 ゜) between half cycle.In addition, workpiece W at least between suction district α both ends, namely aspirate starting position and suction release position place is aspirated by perforated cylinder parts 41 and keeps.
As illustrated schematically in fig. 2, linear graduation 45 is formed in the periphery of the perforated cylinder parts 41 of exposure roller 40, be equipped with linear transducer 46 in the fixed position, outside of exposure roller 40, this linear transducer 46 reads this linear graduation 45 to detect the absolute rotational position of perforated cylinder parts 41.
The suction guidance unit 60 that suspends is positioned at outlet (downstream) side of exposure roller 40 (perforated cylinder parts 41), by blowout and the suction of gas, be supported for plane by long size work W in a non-contact manner, its principle of work self is well-known.
Fig. 7, Fig. 8 schematically show the suction guidance unit 60 that suspends, and the suction guidance unit 60 that suspends has guide plate 61 and air loop main body 62.Guide plate 61 has at countless through holes (blowout hole) 61b of its flat guide surface 61a upper shed and through hole (SS) 61c.Air loop main body 62 in comb teeth-shaped, and has the air feed trough 62a and air suction socket 62b that its comb carries out combining with offseting one from another, and air feed trough 62a is connected with positive pressure source 64, and air suction socket 62b is connected with negative pressure source 63.Through hole 61b is rectangular in the mode be communicated with air feed trough 62a, through hole 61c is rectangular in the mode be communicated with air suction socket 62b, and air feed trough 62a and air suction socket 62b are provided so that the row of the through hole 61b of blow out air are parallel with the direct of travel of workpiece W respectively with the row of the through hole 61c of withdrawing air.Originally, the through hole of blow out air and the through hole of withdrawing air, without the need to being column-shaped, the blowout hole (SS) at Shi Rao center can configure the mode etc. in multiple SS (blowout hole).
This suspension suction guidance unit 60 supplies forced air blowing out from through hole 61b via positive pressure source 64 to air feed trough 62a, simultaneously apply negative pressure via negative pressure source 63 to air suction socket 62b and from through hole 61c withdrawing air, the plane precision of the workpiece W passed through on guide surface 61a can be improved thus.
Specifically, the AFU1 (accurate floating type) that above suspension suction guidance unit 60 can use PISCO company limited to manufacture.
A pair exposing unit 30 is essentially identical structure, exposing unit 30A (the 1st exposing unit 30) be arranged on workpiece W from perforated cylinder parts 41 away from position near, another exposing unit 30B (the 2nd exposing unit 30) is positioned at and suspends on suction guidance unit 60.
Fig. 3 illustrates the concrete example of exposing unit 30 (30A and 30B).Exposing unit 30 has light source portion 20, and light source portion 20 is made up of two light source portion 20a and light source portion 20b with identical inner structure.Because light source portion 20a and light source portion 20b is identical structure, so, with light source portion 20a for representative is described.
Light source portion 20a is made up of UV lamp 21, the 1st completely reflecting mirror 22, collector lens 23, the 2nd completely reflecting mirror 24, fly's-eye lens 25, aperture (not shown).Light source portion 20a has UV lamp 21, penetrates from UV lamp 21 ultraviolet light that the various wavelength from 365nm to 440nm coexist.
The ultraviolet light penetrated from UV lamp 21 is irradiated by elliptical reflector 26 heavenwards direction, will towards changing into horizontal direction by the 1st completely reflecting mirror 22, assembled by collector lens 23, and will towards changing into direction, ground (direction of workpiece W) by the 2nd completely reflecting mirror 24.Change towards ultraviolet light become through fly's-eye lens 25 and aperture and be branched to four light beams.Light beam, further via 8 the 1st projecting lens 33 and 8 catoptrons 34, incides 8 DMD (DigitalMicro-mirrorDevice: digital micromirror device) element (array of light modulation elements) 36 and becomes the light beam controlled.This light beam controlled through the 2nd projection lens set 37, thus is adjusted the multiplying power of the exposure plotting that will project, and is irradiated to workpiece W.That is, as the direct exposure device 100 of drawing apparatus according to the description data of exposure picture being accommodated with expectation in advance, the ultraviolet light of light source portion 20a and light source portion 20b is controlled.
The exposure region of exposing unit 30A is determined as follows.As mentioned above, workpiece W is after departing from from perforated cylinder parts 41, suspension suction guidance unit 60 moves, move along horizontal tangent direction (the workpiece W departed from from perforated cylinder parts 41 aspirates guidance unit 60 by suspending, and is level by disengaging angular setting) at the topmost of perforated cylinder parts 41.The exposure region AE (Fig. 2, Fig. 3, Fig. 6) of exposing unit 30A is not simple rectangle strictly speaking, but, here simply by rectangle performance, this rectangle using the direction (Width of workpiece W) vertical with the throughput direction of workpiece W as length direction.And, as shown in Figure 6, for this exposure range Y, when being benchmark with intersection point (intersecting lens) S of the axle center 41X of perforated cylinder parts 41 and tangential direction, the exposure range Y2 of downstream (deflector roll 14 side) is set as the exposure range Y1 large (Y1<Y2) than the upstream side (the barrel surface sides of perforated cylinder parts 41) of intersecting lens S.
On suspension suction guidance unit 60, for aspirating guidance unit 60 by suspension, the workpiece W of (maintenance) planarity being improved to the exposing unit 30B that workpiece W exposes, exposing in exposure region AE (Fig. 2, Fig. 3, Fig. 6).The exposure range Y of this exposing unit 30B can be identical with the exposure range Y of exposing unit 30A, also can be different.Same with the exposure region of exposing unit 30A, the exposure region AE (Fig. 2, Fig. 3, Fig. 6) of exposing unit 30B is not simple rectangle strictly speaking, but, here simply by rectangle performance, this rectangle using the direction (Width of workpiece W) vertical with the throughput direction of workpiece W as length direction.Exposing unit 30A and 30B is positioned at same plane to the exposure region AE that workpiece W exposes.
Fig. 9 schematically shows the exposure status of exposing unit 30A and 30B in two exposure region AE.In fig .9,, wherein there is the actual exposure district R of DMD (DigitalMicro-mirrorDevice: the digital micromirror device) element 36 utilizing the rectangle of thick line to depict in the size of the optical system of the round C represented by double dot dash line occupied by the 1st projecting lens 33 shown in Fig. 3 of exposing unit 30A and 30B and catoptron 34.In illustrated example, in an exposure region AE, there are four actual exposure district R, the rectangle region in the direction vertical with the throughput direction of workpiece W comprising these four actual exposure district R is set to AE.In addition, exposing light beam in figure 3, branches into eight optical systems, and in the example of figure 9, branches into four optical systems.
In this embodiment, the alignment cameras 50 separated at the Width of workpiece W for a pair is possessed.This alignment cameras 50 is taken the alignment mark MA (Fig. 4) be pre-formed on the workpiecew thus is determined the description coordinate system of (correction) exposing unit 30A and 30B.Alignment cameras 50, at the absorption starting position place shooting alignment mark MA of workpiece W relative to exposure roller 40 (perforated cylinder parts 41), is adsorbed starting position and is equal to camera site.And alignment cameras 50 and exposing unit 30A are oppositely disposed across exposure roller 40, and optical axis is each other across exposure roller 40, is positioned at the roughly plumb position of contrary side.The exposure light injection direction of the shooting direction relatively referring to alignment cameras 50 here and exposing unit 30A is facing with each other, but at this moment respective optical axis, without the need to being on same axis, also can offset on substrate throughput direction.Alignment cameras 50 and exposing unit 30A be preferably arranged to wherein at least one optical axis strictly towards vertical.By configuring alignment cameras 50 and exposing unit 30A like this, the optical system of alignment cameras 50 and exposing unit 30A can be remained the most stable state, optimum optical property can be obtained.
Fig. 4 illustrates the position relationship between unit cell pattern region AP on workpiece W and two exposure region AE of alignment mark MA, alignment cameras 50 and exposing unit 30A and 30B.In illustrative example, relative to a unit cell pattern region AP (scope of once aiming at and describing), be formed with 4 (2 × 2 row) alignment mark MA, alignment cameras 50 can carry out position adjustment, makes to photograph alignment mark MA in the center of camera fields of view 50a.
In addition, number and the configuration of alignment mark MA suitably set according to the pattern that will describe, and number and the configuration of alignment cameras 50 can certainly correspondingly be determined.
This direct exposure device 100 of said structure carries out action as follows.Supply spool 10, exposure roller 40, winding reel 11 are carried out synchronous rotary exactly by servo-drive system and are controlled, the workpiece W that supply spool 10 reels through deflector roll 12,13, exposure roller 40, suspend suction guidance unit 60, deflector roll 14, is winding to winding reel 11.The position of rotation of the perforated cylinder parts 41 of exposure roller 40 is detected exactly by linear graduation 45, linear transducer 46.
In the conveying at this workpiece W is moved, when applying negative pressure via negative pressure source 43 and controller (regulator) 44 to suction recess 42a, workpiece W α place between suction district is attracted on the side face of perforated cylinder parts 41.That is, the disengaging configuration from the absorption starting position of the bottom of perforated cylinder parts 41 to the top, the side face that workpiece W is maintained at perforated cylinder parts 41 moves in barrel surface.Absorption starting position is the position that alignment cameras 50 takes alignment mark MA simultaneously.The absorption of workpiece W preferably in the mode that must start in shot location, from than camera site a little by upstream side (supply side) position beginning.
In addition, in the conveying of workpiece W is moved, supply forced air via positive pressure source 64 to the air feed trough 62a of the suction guidance unit 60 that suspends also blow out from the through hole 61b of guide plate 61, simultaneously via negative pressure source 63 to air suction socket 62b applying negative pressure and from through hole 61c withdrawing air.Aspirated by the blowout of this air, the plane precision of the workpiece W that guide surface 61a passes through improves.
And, when workpiece W advances, and when being taken 4 (2 × 2 row) alignment mark MA of a unit cell pattern region AP by alignment cameras 50, determine the coordinate system of this unit cell pattern region AP.At the end of the shooting of the alignment mark MA of a unit cell pattern region AP, start the shooting of the alignment mark MA of next unit cell pattern region AP continuously, determine new coordinate system.
At the end of the shooting of four alignment mark MA of unit cell pattern region AP, the position of the unit cell pattern region AP that aligning measurement section computation and measurement goes out and designed unit cell pattern region AP and scale error (aligning).Exposure control unit, according to above-mentioned error, carries out coordinate conversion to description data, and data are described in the correction generating exposing unit 30A and 30B.
When the front end of unit cell pattern region AP arrives exposing unit 30A, exposure control unit describes data according to correction, modulates, irradiation pattern light on workpiece W, the photosensitive oxidant layer of workpiece W forms pattern to the DMD element 36 of exposing unit 30A.Then, when the assigned position of unit cell pattern region AP arrives exposing unit 30B, equally, exposure control unit describes data according to correction, the DMD element 36 of exposing unit 30B is modulated, irradiation pattern light on workpiece W, the photosensitive oxidant layer of workpiece W forms pattern.This pattern formation is carried out by known multiple exposing method.
As long as workpiece W does not depart from (and being kept) from perforated cylinder parts 41 at the exposure position place of exposing unit 30A, just the absorption of workpiece W to perforated cylinder parts 41 can be removed by the position of upstream side (supply side) a little at exposure position or than exposure position.
In the above exposure actions for workpiece W, to be adsorbed by perforated cylinder parts 41 and the workpiece W of movement can its feed accuracy of higher maintenance, and its position can be detected exactly by linear graduation 45 and linear transducer 46.And, owing to performing the exposure utilizing exposing unit 30A near the position that perforated cylinder parts 41 depart from the workpiece W sent with high feed accuracy, so high description precision can be realized.In addition, due to can to send with high feed accuracy and the workpiece W that the suction guidance unit 60 that passes through to suspend maintains high planarity utilizes the exposure of exposing unit 30B, so, can realize equally highly describing precision.
In addition, following advantage can be obtained in the exposure carried out at the exposing unit 30A of illustrated embodiment.The workpiece W aspirated by perforated cylinder parts 41 is curved surface, but, as mentioned above, excellent in surface accuracy (flatness in face) and workpiece feed accuracy on perforated cylinder parts 41.Therefore, in the AE of exposure region, comprise the exposure region (scope Y1) on the perforated cylinder parts 41 of surface accuracy and feed accuracy excellence.On the other hand, although than in the exposure region (scope Y2) of intersecting lens S downstream, suppose that workpiece W is plane, but, in fact owing to departing from from perforated cylinder parts 41, so along with away from perforated cylinder parts 41, plane precision error (the desirable focus face of exposing unit 30A and the deviation of exposure region AE) is in the trend of expansion.So, make exposure region AE cross over upstream side and the downstream of intersecting lens S.In addition, the exposure range Y2 in the downstream of intersecting lens S is set as larger than the exposure range Y1 from upstream side, can prevent the actual depth of focus (remove the plane precision error of the workpiece W of exposure region AE and obtain from the depth of focus of optical system) from shoaling thus, realize the hachure of depicting pattern.That is, by making the exposure range Y2 in the plane in downstream larger than the exposure range Y1 on curved surface, can easily depicting pattern in the depth of focus of exposing unit 30A.Specifically, be preferably more than 70% by the range set in downstream, be more preferably set as more than 80%.Specifically, when exposure range Y is 10mm, the scope of upstream side is Y1=2 ~ 3mm, and the scope in downstream is Y2=8 ~ 7mm.
During exposing unit 30A and 30B carries out exposure actions, perform alignment mark image pickup step and the data correcting step of next unit cell pattern region AP concurrently.So when the end exposure of unit cell pattern region AP, exposing unit 30 can start the exposure of next unit cell pattern region AP continuously.
In order to carry out alignment mark image pickup step and data correcting step concurrently, as shown in Figure 4, consider the size of unit cell pattern region AP, make exposing unit 30A, 30B and alignment cameras 50 be in mode (in the mode that distance is between the two longer than unit cell pattern region AP) between the two with four alignment mark MA of unit cell pattern region AP, separate its position.The exposing unit 30A of present embodiment and alignment cameras 50 are positioned at up and down, even if so will expose roller 40 miniaturization, also can guarantee its distance across exposure roller 40.In addition, exposing unit 30A and alignment cameras 50 configure along vertical side by side across exposure roller 40, so can utilize roller the most efficiently, and can improve position alignment precision and the throughput rate of workpiece W.
In above embodiment, the 1st exposing unit 30A is arranged on workpiece near the position that perforated cylinder parts 41 depart from, the 2nd exposing unit 30B is arranged on the suspension suction guidance unit 60 in the downstream being configured at perforated cylinder parts 41.On the other hand, Fig. 5 makes the exposure region AE of single exposing unit 30 cross over the embodiment of workpiece from the position the position that perforated cylinder parts 41 depart from and suspension suction guidance unit 60.Like this, can suspend on suction guidance unit 60 by being positioned at least partially of exposure region making exposing unit 30 couples of workpiece W expose, ensure that the planarity of exposure region, and by using the high workpiece feed accuracy of exposure roller, height can be realized and describe precision.
Further, as mentioned above, the exposing unit 30B in the downstream in a pair exposing unit 30A, 30B in above embodiment and the suction guidance unit 60 that suspends can be omitted.Figure 10, Figure 11 illustrate the embodiment eliminating exposing unit 30B and the suction guidance unit 60 that suspends in Fig. 1, Fig. 2.In this embodiment, deflector roll 14 forms the tangential direction guidance unit of workpiece W.Namely, workpiece W is after departing from from perforated cylinder parts 41, along with deflector roll 14, move along horizontal tangent (section) direction (disengaging angular setting is level by deflector roll (guidance unit) 14 by the workpiece W departed from from perforated cylinder parts 41) at the topmost of perforated cylinder parts 41.And, according to this embodiment, the plane area in tangent line (section) direction of exposure roller 40 (cylinder part) can be made to be included in the exposure region of exposing unit 30A of upstream side, and the focus alignment area of exposure image can be made wider than the direct exposure device of exposure roll shape in the past.This is characterized as the feature that the 1st embodiment also has.In addition, in the embodiment of Figure 10, Figure 11, the exposure region AE depicting a pair in Fig. 3, Fig. 4, Fig. 6 and Fig. 9 is only an exposure region AE based on exposing unit 30A.
According to the embodiment of this Figure 10, Figure 11, the diameter exposing roller 40 can be suppressed, carry out the aligning of workpiece W simultaneously accurately and describe the correction of position, and the focus alignment area of exposure image can be made wider than the direct exposure device of exposure roll shape in the past.Consequently, can obtain and save space than direct exposure device in the past and the exposure device of high-precision process can be carried out.
Claims (9)
1. a direct exposure device, it uses array of light modulation elements, and by pattern exposure in sending from supply spool and being winding to the strip workpiece on winding reel, the feature of described direct exposure device is to have:
Cylinder part, it rotates keep strip workpiece in the certain limit of its side face while between above-mentioned supply spool and winding reel;
Tangential direction guiding elements, its disengaging configuration departed from from above-mentioned cylinder part at strip workpiece, guides strip workpiece along the tangential direction vertical with the radial direction in the axle vertical cross-section of above-mentioned cylinder part; And
1st exposure component, it is at least in the front and back certain limit of throughput direction comprising above-mentioned disengaging configuration, departs from and the strip workpiece depicting pattern extended along above-mentioned tangential direction from above-mentioned cylinder part.
2. direct exposure device according to claim 1, wherein,
In the certain limit of above-mentioned front and back, the scope ratio from disengaging configuration to conveyance direction downstream side is from disengaging configuration to the wide ranges of throughput direction upstream side.
3. direct exposure device according to claim 1, wherein,
The alignment cameras that shooting is formed at the alignment mark of above-mentioned strip workpiece is configured in the position relative with above-mentioned exposure component across above-mentioned cylinder part.
4. direct exposure device according to claim 3, wherein,
The optical axis of above-mentioned 1st exposure component and the optical axis of alignment cameras are towards vertical.
5. direct exposure device according to claim 3, wherein,
Above-mentioned strip workpiece at least in the above-mentioned 1st exposure exposure position of component and the shot location of above-mentioned alignment cameras, keeps on the circumferential face by above-mentioned cylinder part.
6. direct exposure device according to claim 1, wherein,
Described direct exposure device also has: plane guiding elements, the downstream of its disengaging configuration departed from from above-mentioned cylinder part at strip workpiece, is plane under the state that strip workpiece does not contact with guide surface by this strip workpiece support; And the 2nd exposes component, it exposes above-mentioned strip workpiece on above-mentioned plane guiding elements.
7. direct exposure device according to claim 6, wherein,
The position disengaging configuration and plane guiding elements that above-mentioned strip workpiece departs from from above-mentioned cylinder part is crossed in the exposure region of above-mentioned 2nd exposure component.
8. direct exposure device according to claim 6, wherein,
The exposure region of above-mentioned 1st exposure component and the exposure region of the 2nd exposure component are present in roughly on same plane.
9. direct exposure device according to claim 6, wherein,
Above-mentioned plane guiding elements is the suspension suction guiding elements with gas blowout component and gas aspiration means.
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| JP2014-196543 | 2014-09-26 | ||
| JP2014-196544 | 2014-09-26 | ||
| JP2014196544A JP6424053B2 (en) | 2014-09-26 | 2014-09-26 | Direct exposure system |
| JP2014196543A JP6460699B2 (en) | 2014-09-26 | 2014-09-26 | Direct exposure system |
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| CN105467773A true CN105467773A (en) | 2016-04-06 |
| CN105467773B CN105467773B (en) | 2018-10-09 |
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| KR (1) | KR102352984B1 (en) |
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| WO2020051978A1 (en) * | 2018-09-14 | 2020-03-19 | 重庆惠科金渝光电科技有限公司 | Exposure method and exposure device using same |
| CN113219791A (en) * | 2021-02-04 | 2021-08-06 | 源能智创(江苏)半导体有限公司 | Exposure device for reel-to-reel base piece |
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| CN106839430B (en) * | 2017-03-30 | 2023-01-31 | 广东美的厨房电器制造有限公司 | Microwave water heater |
| JP6925921B2 (en) * | 2017-09-26 | 2021-08-25 | 株式会社アドテックエンジニアリング | Exposure equipment and exposure method |
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| KR102352984B1 (en) | 2022-01-18 |
| KR20160037080A (en) | 2016-04-05 |
| CN105467773B (en) | 2018-10-09 |
| TW201624142A (en) | 2016-07-01 |
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