CN103488054A - Exposure apparatus and exposure method - Google Patents

Exposure apparatus and exposure method Download PDF

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Publication number
CN103488054A
CN103488054A CN201310226565.7A CN201310226565A CN103488054A CN 103488054 A CN103488054 A CN 103488054A CN 201310226565 A CN201310226565 A CN 201310226565A CN 103488054 A CN103488054 A CN 103488054A
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CN
China
Prior art keywords
film
exposure
polarized light
mask
cooling
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Pending
Application number
CN201310226565.7A
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Chinese (zh)
Inventor
佐藤达弥
浦和宏
今吉孝二
安井亮辅
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Arisawa Mfg Co Ltd
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Arisawa Mfg Co Ltd
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Filing date
Publication date
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Publication of CN103488054A publication Critical patent/CN103488054A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/08—Web-winding mechanisms
    • B65H18/14—Mechanisms in which power is applied to web roll, e.g. to effect continuous advancement of web
    • B65H18/145—Reel-to-reel type web winding and unwinding mechanisms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3042—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations
    • G03F7/3064—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations characterised by the transport means or means for confining the different units, e.g. to avoid the overflow
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Polarising Elements (AREA)

Abstract

The invention provides an exposure apparatus and an exposure method. The exposure device includes a conveying part used for conveying long-strip-shaped film, an exposure part used for exposing the film being conveyed by the conveying part with the separation of a masking; and a cooling part utilizing air cooling and liquid cooing method for cooling the film being exposed by the exposure part. The invention solves the below technical problem that the film being conveyed is heated gradually in an exposure area, so that temperature difference is generated between the upstream side and the downstream side of the film. Therefore, drapes are formed on the film and light used for exposure cannot emit on the surface of the film in expected angles.

Description

Exposure device and exposure method
Technical field
The present invention relates to exposure device and exposure method.
Background technology
Known technology is carried film on one side, on one side it is exposed, thereby make the alignment films orientation.
Patent documentation 1: No. 2011/0217638 instructions of U.S. Patent Application Publication
Summary of the invention
the problem that invention will solve
Therefore yet, in being exposed light-struck exposure area of use, the film of carrying is heated gradually, can between the upstream side of film and downstream, produce temperature difference.Thus, there are the following problems: form fold on film, the light of exposure use can't be with the angular illumination film surface of hope.
for the scheme of dealing with problems
Provide a kind of exposure device in the first technical scheme of the present invention, it comprises: delivery section, and it is used for carrying the film of strip; Exposure section, it is used for across mask, the described film of being carried by described delivery section being exposed; And cooling end, it is used for carrying out cooling to the described film exposed by described exposure section.
Provide a kind of exposure method in the second technical scheme of the present invention, it comprises: supplying step, the film of conveying strip; Step of exposure, exposed to the described film of being carried by described supplying step across mask; And cooling step, to the described film exposed by described step of exposure, carry out cooling.
In addition, the foregoing invention content does not list whole essential feature of the present invention.In addition, the sub-portfolio of described feature group also can form invention.
The accompanying drawing explanation
Fig. 1 is the whole vertical view that utilizes the blooming 100 of present embodiment manufacturing.
Fig. 2 is the longitudinal section along the II-II line of Fig. 1.
Fig. 3 is the exploded perspective view that is provided with the stereoscopic display device of blooming 100.
Fig. 4 is the one-piece construction figure of the exposure device 10 of present embodiment.
Fig. 5 is the overall perspective view of exposure section 18.
Fig. 6 is the upward view of mask 38.
Fig. 7 is the longitudinal section of the line of the VII-VII along Fig. 6 of mask 38.
Fig. 8 is near the enlarged diagram of part exposure section 18 after changing.
Fig. 9 is near the enlarged diagram of part exposure section 18 after changing.
Figure 10 is near the enlarged diagram of part exposure section 18 after changing.
Figure 11 is near the enlarged diagram of part exposure section 18 after changing
Figure 12 is near the enlarged diagram of part exposure section 18 after changing.
Figure 13 is near the enlarged diagram of part exposure section 18 after changing.
Figure 14 is near the enlarged diagram of part exposure section 18 after changing.
Figure 15 is the table of the experimental result of the cooling impact on the angle of orientation of investigation film.
Figure 16 is the figure of experimental result of the deviation of the investigation fold of film 90 and the angle of orientation.
description of reference numerals
10 exposure devices; 12 outlet rollers; 14 alignment films coating parts; 16 alignment films drying sections; 18 exposure sections; 20 liquid crystal film coating parts; 22 liquid crystal film orientation section; 24 liquid crystal film sclerosis sections; 26 diffusion barrier supply units; 28 winding rollers; 34 polarizing light sources; 38 masks; 40 mask maintaining parts; 44 upstream side jockey pulleys; 46 downstream jockey pulleys; 48 keep roller; 50 the 1st polarized light efferents; 52 the 2nd polarized light efferents; 54 streams; 56 mask substrate; 58 light shield layers; 62 the 1st see through zone; 64 the 2nd see through zone; 90 films; 92 diffusion barriers; 100 bloomings; 102 resin base materials; 104 the 1st polarized light modulation portion; 106 the 2nd polarized light modulation portion; 110 arrows; 112 arrows; 114 arrows; 116 arrows; 120 alignment films; 122 liquid crystal films; 124 the 1st orientation area; 126 the 2nd orientation area; 128 the 1st liquid crystal regions; 130 the 2nd liquid crystal regions; 150 stereoscopic display devices; 152 light sources; 154 image efferents; 158 optically functional films; 164 polarization plates; 166 keep substrate; 168 image production parts; 170 keep substrate; 174 polarization plates; 178 right eye image production parts; 180 left eye image production parts; 190 polarised light glasses; 192 right eye modulation portion; 194 left eye modulation portion; 248 upstream side driven vollers; 249 downstream driven vollers; 250 streams; 251 streams; 348 keep face; 350 driven vollers; 352 driven vollers; 354 endless belts; 356 streams; 448 film air supplying part; 449 film air supplying part; 548 mask cooling ends; 549 mask cooling ends; 648 keep air-cooled section; 649 keep air-cooled section; 748 keep liquid cooling portions; 749 keep liquid cooling portions.
Embodiment
Below, by the working of an invention mode, the present invention will be described, but following embodiment is not to claims, related invention is limited.In addition, in embodiment illustrated all Feature Combinations to be not limited to solution of the present invention necessary.
Fig. 1 is the whole vertical view that utilizes the blooming 100 of present embodiment manufacturing.Blooming 100 is by the blooming manufacture method manufacture that utilizes this example.Blooming 100 is arranged at the image outgoing side of the image production part of stereoscopic display device, and output is image and left eye image for right eye.
Blooming 100 forms on one side for counting the oblong-shaped of cm～number m.As shown in Figure 1, blooming 100 has resin base material 102, the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106.
Resin base material 102 is that resinous strip film described later is cut into to certain-length and forms.Resin base material 102 makes light transmission.One example of the thickness of resin base material 102 is 50 μ m～100 μ m.Resin base material 102 supporting the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106.Resin base material 102 can consist of the film of cyclenes hydro carbons.As the cyclenes hydrocarbon membranes, can use coefficient of thermal expansion is 70 * 10 -6/ ℃ cyclic olefin polymer (=COP), more preferably can be used as the cyclic olefine copolymer (=COC) of the multipolymer of cyclic olefin polymer.As the COP film, can enumerate Japan and change into industry (Japanese: ゼ オ ノ English: Zeon) the ZEONOR film of company's system (Japanese: ゼ オ ノ ア Off ィ Le system) ZF14.In addition, resin base material 102 can be also 54 * 10 by comprising coefficient of thermal expansion -6/ ℃ the material of Triafol T (=TAC) form.The TAC film can be enumerated the FUJITACT (Japanese: Off ジ タ ッ Network) T80SZ and TD80UL etc. of Fuji Photo Film Co., Ltd.'s system.In addition, in the situation that use the cyclenes hydrocarbon membranes, from the viewpoint of fragility, preferably use the film of high-ductility sexual type.
The 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 are formed identical shape In the view of overlooking.The 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 are the oblong-shapeds along the long side direction extension of resin base material 102.Become horizontal direction in the blooming 100 of the long side direction of said resin base material 102 on being assembled into stereoscopic image display herein.Therefore, become vertical direction in the blooming 100 of the short side direction of resin base material 102 on being assembled into stereoscopic image display.The 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 are having under the contacted state in one side each other, vertically alternate configurations.In addition, the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 also can the along continuous straight runs alternate configurations.
The polarized light state of the 1st polarized light modulation portion 104 and 106 pairs of polarized lights that see through of the 2nd polarized light modulation portion is modulated.The 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 for example have the phase difference function of 1/4 wavelength plate.In addition, the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 also can have the phase difference function of 1/2 wavelength plate.The 1st polarized light modulation portion 104 has the optic axis that for example is oriented as the direction that the arrow 110 put down in writing with the right-hand member of the 1st polarized light modulation portion 104 at Fig. 1 parallels.Thus, for example have while from arrow 110, having rotated the rectilinearly polarized light of polarization direction of 45 ° when input, the 1st polarized light modulation portion 104 is modulated into the line output of going forward side by side of the circularly polarized light with the dextropolarization direction shown in adjacent arrow 112 by this polarized light.The 2nd polarized light modulation portion 106 has the optic axis that for example is oriented as the direction that the arrow 114 put down in writing with the right-hand member of the 2nd polarized light modulation portion 106 at Fig. 1 parallels, and this optic axis is vertical with the optic axis of the 1st polarized light modulation portion 104.Thus, for example there is while from arrow 110, having rotated the rectilinearly polarized light of polarization direction of 45 ° the circularly polarized light that the 2nd polarized light modulation portion 106 is modulated into by this polarized light the left-hand polarization direction had shown in adjacent arrow 116 line output of going forward side by side when input.In addition, one of optic axis example is the leading axle of phase place or phase place hysteresis axle.At this, the deviation of the angle of orientation of the optic axis of the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 is below ± 0.5 °, below more preferably ± 0.2 °.The deviation aftermentioned of the angle of orientation.
Result, even if input the rectilinearly polarized light with identical polarization direction to the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106, the polarization direction of the polarized light of the 2nd polarized light modulation portion 106 outputs is not identical with the polarization direction of the polarized light of the 1st polarized light modulation portion 104 outputs yet.For example, the circularly polarized light that the polarization direction contrary that the polarization direction of the polarized light of the 2nd polarized light modulation portion 106 outputs is the polarized light with the 1st polarized light modulation portion 104 outputs revolves.
Fig. 2 is the longitudinal section along the II-II line of Fig. 1.As shown in Figure 2, each the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 have alignment films 120 and liquid crystal film 122.
Alignment films 120 is formed on the face of resin base material 102.Alignment films 120 can application of known light orientation compound.Light orientation compound is when illuminated when ultraviolet isoline polarized light is arranged, and molecule can be along the material of the polarization direction rule orientating of this rectilinearly polarized light.And light orientation compound has the function of the molecule of the liquid crystal film 122 that on self face is formed along the orientations of self.As the example of light orientation compound, can enumerate the compounds such as light breakdown type, photodimerization type, photoisomerization type.Alignment films 120 has a plurality of the 1st orientation area 124 and a plurality of the 2nd orientation area 126.A plurality of the 1st orientation area 124 and a plurality of the 2nd orientation area 126 are along the orientation alternative arrangement.Said orientation herein is the direction parallel with vertical direction.The 1st orientation area 124 contacts with each other with adjacent all the 2nd orientation area 126.The 1st orientation area 124 forms the part of the 1st polarized light modulation portion 104.The 1st orientation area 124 is along the direction orientation corresponding with the optic axis of the 1st polarized light modulation portion 104.The 2nd orientation area 126 forms the part of the 2nd polarized light modulation portion 106.The 2nd orientation area 126 is along the direction vertical with the direction of orientation of the 1st orientation area 124, along the direction orientation corresponding with the optic axis of the 2nd polarized light modulation portion 106.
Liquid crystal film 122 is formed on alignment films 120.The liquid crystal polymer that liquid crystal film 122 can harden by utilizing ultraviolet ray or heating etc. forms.Liquid crystal film 122 has the 1st liquid crystal region 128 and the 2nd liquid crystal region 130.The 1st liquid crystal region 128 forms the part of the 1st polarized light modulation portion 104.The 1st liquid crystal region 128 is formed on the 1st orientation area 124.The molecule of the 1st liquid crystal region 128 is oriented along the orientation of the 1st orientation area 124.The 2nd liquid crystal region 130 forms the part of the 2nd polarized light modulation portion 106.The 2nd liquid crystal region 130 is formed on the 2nd orientation area 126.The molecule of the 2nd liquid crystal region 130 is oriented along the orientation of the 2nd orientation area 126.
Fig. 3 is the exploded perspective view that is provided with the stereoscopic display device of blooming 100.As shown by arrows in Figure 3, the direction of user place direction and output image is made as to the place ahead of stereoscopic display device.As shown in Figure 3, stereoscopic display device 150 comprises light source 152, image efferent 154, blooming 100 and optically functional film 158.
Light source 152 planar with roughly uniformly intensity irradiate white nonpolarized light.From the user, it seems, light source 152 is configured in the rear of stereoscopic display device 150.Light source 152 can be applied the light source combined by astigmatism plate and cathode fluorescent tube (CCFL:Cold Cathode Fluorescent Lamp) or form the light source formed, the area source that contains organic electroluminescent (EL:Electro-Luminescence) etc. by prism and light emitting diode (LED:Light Emitting Diode).
Image efferent 154 is disposed at the place ahead of light source 152.Image efferent 154 utilizes the light that comes from light source 152 to carry out output image.Image efferent 154 comprises polarization plates 164, maintenance substrate 166, image production part 168, keeps substrate 170 and polarization plates 174.
Polarization plates 164 is disposed at light source 152 and keeps between substrate 166.Form the resin of an example for containing polyvinyl alcohol (PVA) (PVA:Polyvinyl alcohol) of the material of polarization plates 164.Polarization plates 164 has from horizontal direction to have tilted and seen through axle and the absorption axes vertical with seeing through axle 45 °.Thus, the nonpolarized light of exporting and incide polarization plates 164 from light source 152, the parallel composition of axle that sees through of direction of vibration and polarization plates 164 sees through, the composition parallel with absorption axes is absorbed and is blocked simultaneously.Therefore, become and take the rectilinearly polarized light that axle is polarization direction that sees through of polarization plates 164 from the light of polarization plates 164 output.
Keep substrate 166 to be disposed between polarization plates 164 and image production part 168.Keep substrate 166 can apply transparency glass plate.In addition, except glass plate, keep substrate 166 also can apply the transparent composite sheet material that has used the transparent composite that comprises transparent resin and glass cloth.Thus, can realize lightweight and the flexibility of stereoscopic display device 150.Keep polarization plates 164 by bonding agent in the back that keeps substrate 166.
Image production part 168 is configured and remains on and keeps substrate 166 and keep between substrate 170.Image production part 168 has a plurality of pixels (=pixel(Japanese: ピ Network セ Le)) for synthetic image.A plurality of pixels vertically reach horizontal direction and carry out two-dimensional arrangements with certain spacing.Pixel refers to unit when carrying out image processes, for exporting the colouring information of tone and color range.Each pixel has three sub-pixs (=sub pixel(Japanese: サ Block ピ Network セ Le)).The transparency electrode that each sub-pix has liquid crystal section and is formed at liquid crystal section front-back.Transparency electrode is for applying voltage to liquid crystal section.The liquid crystal section that is applied with the sub-pix of voltage makes the polarization direction half-twist of rectilinearly polarized light.Three sub-pixs that comprise in each pixel have respectively red colored filter, green tint colo(u)r filter and blue color filter.Voltage by the transparency electrode to imposing on sub-pix is controlled, and strengthens or weaken redness from sub-pix output, green, blue light, forms image.
As " R " in Fig. 3 reaches as shown in " L ", image production part 168 have for generate right eye with the right eye of image with image production part 178 with for generating left eye for the image production part 180 of left eye with image.Right eye is formed with image production part 180 rectangle that along continuous straight runs extends with image production part 178 and left eye.Image production part 178 and left eye vertically alternate configurations of image production part 180 for right eye.
Keep substrate 170 to be configured between image production part 168 and polarization plates 174.Keep substrate 166 and keep substrate 170 clamping image production parts 168.Keep substrate 170 to be formed by the material identical with keeping substrate 166.Keep polarization plates 174 by bonding agent in the front that keeps substrate 170.
Polarization plates 174 is placed in and keeps between substrate 170 and blooming 100.Polarization plates 174 is bonded to the contrary side of the side kept with image production part 168 that keeps substrate 170 by bonding agent.Polarization plates 174 is by containing the PVA(polyvinyl alcohol (PVA)) resin form.The thickness of polarization plates 174 is preferably thinner.The thickness of polarization plates 174 is for example 100 μ m～200 μ m.Polarization plates 174 has through axle and the absorption axes vertical with seeing through axle.Polarization plates 174 see through the vertical through axle of axle and polarization plates 164.Thus, utilize image production part 168 that polarization direction is rotated the rectilinearly polarized light of 90 ° see through polarization plates 174 and become image light, thereby form image.On the other hand, utilizing image production part 168 to make rectilinearly polarized light that polarization direction does not rotate be polarized plate 174 blocks.Thus, image efferent 154 is exported the image light that the parallel polarized light of axle forms that sees through with polarization plates 174 by polarization direction.
Blooming 100 is bonded in the place ahead of the polarization plates 174 of image efferent 154 by bonding agent.In order to suppress the change in size of blooming 100, the thickness of blooming 100 is preferably thinner.For example, preferably, the thickness of blooming 100 is 50 μ m～200 μ m.
The 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 of blooming 100 are configured on the rear surface of resin base material 102.The right eye of the shape of the 1st polarized light modulation portion 104 and image production part 168 is roughly the same by the shape of image production part 178.The 1st polarized light modulation portion 104 is configured in right eye the place ahead with image production part 178.Thus, incide the 1st polarized light modulation portion 104 by from right eye, with image production part 178, exporting and see through the right eye that the rectilinearly polarized light of polarization plates 174 forms with image light.The 1st polarized light modulation portion 104 becomes the laggard line output of right-circularly polarized light by the right eye of incident with the image optical modulation.The left eye of the shape of the 2nd polarized light modulation portion 106 and image production part 168 is roughly the same by the shape of image production part 180.The 2nd polarized light modulation portion 106 is configured in left eye the place ahead with image production part 180.Thus, incide the 2nd polarized light modulation portion 106 by from left eye, with image production part 180, exporting and see through the left eye that the rectilinearly polarized light of polarization plates 174 forms with image light.The 2nd polarized light modulation portion 106 becomes the laggard line output of left circularly polarized light by the left eye of incident with the image optical modulation.Therefore, the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 will form right eye and be for conversion into the polarization direction different laggard line output of circularly polarized light each other with image and left eye with the rectilinearly polarized light of the identical polarization direction of image.
Optically functional film 158 is disposed at the front of blooming 100.One example of optically functional film 158 is for alleviating reflectance coating or antireflection film for alleviating or suppressing from the reflection of light of the outputs such as exterior lighting.Thus, the image that optically functional film 158 will be sneaked into less exterior light offers the user.Another example of optically functional film 158 is for the antiglare film that suppresses dazzle, the hardcoat film that prevents surface damage etc.In addition, also can omit optically functional film 158.
The polarised light glasses 190 that the user uses when watching stereo-picture has right eye use modulation portion 192 and modulation portion 194 for left eye.Right eye only sees through right-circularly polarized light by modulation portion 192.Left eye only sees through left circularly polarized light by modulation portion 194.Thus, user's the right eye right eye image that only visual identity is exported from the 1st polarized light modulation portion 104, user's the left eye left eye image that only visual identity is exported from the 2nd polarized light modulation portion 106.As a result, the user can watch stereo-picture.
Fig. 4 is the one-piece construction figure of the exposure device 10 of present embodiment.Fig. 5 is the overall perspective view of exposure section 18.By the above-below direction that is made as up and down exposure device 10 shown in the arrow in Fig. 4.In addition, upstream and downstream are made as to upstream and the downstream on throughput direction.In addition, throughput direction is the direction identical with the length direction of the film 90 of strip, vertical with orientation and Width.
As shown in Figures 4 and 5, exposure device 10 comprises outlet roller 12, alignment films coating part 14, alignment films drying section 16, exposure section 18, liquid crystal film coating part 20, liquid crystal film orientation section 22, liquid crystal film sclerosis section 24, diffusion barrier supply unit 26, winding roller 28 and keeps roller 48.
Outlet roller 12 is disposed at the upstream side of the transport path of film 90.The film 90 of supplying with use is wound on the periphery of outlet roller 12.Outlet roller 12 is by rotatably mounted.Thus, outlet roller 12 can keep film 90 in the mode that can send film 90.Outlet roller 12 can be configured to the structure of the rotation such as the driving mechanism that can utilize motor, and also can be configured to can be along with the driven structure of the rotation of winding roller 28.Perhaps, also can in the way of transport path, be provided for the mechanism of drive membrane 90.
Alignment films coating part 14 is disposed at the downstream of outlet roller 12 and is disposed at the upstream side of exposure section 18.Alignment films coating part 14 is disposed at the top of the transport path of the film 90 be transferred.The aqueous alignment films 120 as an example of exposing material is supplied with and be coated with to alignment films coating part 14 for the upper surface to film 90.
Alignment films drying section 16 is disposed at the downstream of alignment films coating part 14.Alignment films drying section 16 makes to be coated on alignment films 120 dryings through on inner film 90 by heating, illumination or air-supply etc.
Exposure section 18 is exposed across 38 pairs of films of carrying 90 of mask.Exposure section 18 is disposed at the downstream of alignment films drying section 16.Exposure section 18 has polarizing light source 34, keeps mask maintaining part 40, a pair of upstream side jockey pulley 44 and the downstream jockey pulley 46 of mask 38.The polarized light that exposure section 18 irradiates by polarizing light source 34 outputs to the alignment films 120 be coated on film 90 across mask 38.Thus, exposure section 18 makes alignment films 120 orientations, thereby forms pattern.One example of the polarized light of being exported by polarizing light source 34 is the ultraviolet ray that wavelength is 280nm～340nm.
Polarizing light source 34 is disposed at the top of the transport path of film 90.Polarizing light source 34 has the 1st polarized light efferent 50 and the 2nd polarized light efferent 52.The 1st polarized light efferent 50 and the 2nd polarized light efferent 52 are disposed between upstream side jockey pulley 44 and downstream jockey pulley 46.The 2nd polarized light efferent 52 is disposed at the downstream of the 1st polarized light efferent 50.The 1st polarized light efferent 50 downstream and below output the 1st polarized light.The 1st polarized light has the polarization direction corresponding with the orientation of the 1st orientation area 124.The 1st polarized light incides film 90 from above-below direction upstream rolls oblique 45 °.The 2nd polarized light efferent 52 upstream and below output the 2nd polarized light.The 2nd polarized light has the polarization direction corresponding with the orientation of the 2nd orientation area 126.The 2nd polarized light incides film 90 from above-below direction rolls oblique 45 ° downstream.Thus, even under the situation that the 1st polarized light and the 2nd polarized light reflect at tunicle 90 and peripheral equipment etc., the probability that turns back to the alignment films 120 of coating on film 90 is also very low.As a result, can suppress the orientation confusion that causes to the not preposition on film 90 due to the 1st polarized light be reflected and the 2nd polarizing light irradiation.The illumination of the 1st polarized light of exporting from the 1st polarized light efferent 50 equates with the illumination of the 2nd polarized light from the 2nd polarized light efferent 52 outputs.Said illumination refers to the energy of the per unit area of the polarized light be output herein, and unit is mW/cm 2.When the polarized light be output is ultraviolet ray, illumination becomes UV illumination.The inclined to one side the 1st shakes the example of illumination of light and the 2nd polarized light for 78mW/cm 2.In addition, also can the appropriate change exposure method.For example, can irradiate along the vertical direction the 1st polarized light and the 2nd polarized light of polarizing light source 34.Said above-below direction is the above-below direction shown in the arrow of Fig. 4 herein.In addition, in this case, also sometimes make the 1st polarized light and the 2nd polarized light with respect to film 90 oblique incidences.In addition, also can vertically irradiate with film 90 the 1st polarized light and the 2nd polarized light of polarizing light source 34.
The polarization direction of the 2nd polarized light of the 2nd polarized light efferent 52 outputs is vertical with the polarization direction of the 1st polarized light of the 1st polarized light efferent 50 outputs.In addition, the polarization direction of the 1st polarized light of the polarization direction of the 2nd polarized light of the 2nd polarized light efferent 52 outputs and the 1st polarized light efferent 50 outputs also can be intersected with arbitrarily angled.Preferably, the shading wall that vertically extends to mask 38 is set between the 1st polarized light efferent 50 and the 2nd polarized light efferent 52.Thus, the shading wall is used for blocking mutual polarized light.In this case, the shading wall in order to suppress the 1st polarized light and the 2nd polarization reflection of light preferred black.
Mask maintaining part 40 is for keeping mask 38.Mask maintaining part 40 is held in the mode that can relatively move along the Width vertical with throughput direction with respect to film 90.Thus, mask 38 can utilize motor or actuator (Actuator) etc. jointly to move with mask maintaining part 40, thereby is adjusted at the position on the amplitude direction.
Mask 38 is kept by mask maintaining part 40, and is configured between polarizing light source 34 and film 90.As an example, mask 38 is disposed at the top of hundreds of μ m of film 90.
Upstream side jockey pulley 44 is disposed at the downstream of alignment films drying section 16 and is disposed at the upstream side that keeps roller 48, polarizing light source 34 and mask 38.Upstream side jockey pulley 44 is arranged at the top of the transport path of film 90.Upstream side jockey pulley 44 with below the film 90 carried rotate with matching.Upstream side jockey pulley 44 is pressed the film 90 in conveying downwards.
Downstream jockey pulley 46 is disposed at the upstream side of liquid crystal film coating part 20 and is disposed at the downstream that keeps roller 48, polarizing light source 34 and mask 38.Downstream jockey pulley 46 is disposed at the top of the transport path of film 90.Downstream jockey pulley 46 with below the rotation that matches of the film 90 carried.In addition, downstream jockey pulley 46 is pressed the film 90 in conveying downwards.
Upstream side jockey pulley 44 and downstream jockey pulley 46 are supported in the mode that can rotate.Upstream side jockey pulley 44 and downstream jockey pulley 46 can be configured to and can utilize driving motor etc. to carry out rotation, also can be configured to the driving force that can utilize winding roller 28 grades and driven.
Liquid crystal film coating part 20 is disposed at the downstream of exposure section 18.Liquid crystal film coating part 20 is disposed at the top of the transport path of film 90.Liquid crystal film coating part 20 is for supplying with and coating fluid epitaxial 122 on the alignment films 120 formed on film 90.
Liquid crystal film orientation section 22 is disposed at the downstream of liquid crystal film coating part 20.Liquid crystal film orientation section 22 is carried out drying when utilizing heating, illumination or air-supply etc. that liquid crystal film 122 through forming on inner alignment films 120 is orientated on the direction of orientation along alignment films 120.
Liquid crystal film sclerosis section 24 is disposed at the downstream of liquid crystal film orientation section 22.Liquid crystal film sclerosis section 24 makes liquid crystal film 122 sclerosis for utilizing irradiation ultraviolet radiation.Thus, make to fix along the orientation of the molecule of the liquid crystal film 122 of the direction of orientation of alignment films 120 orientation.
Diffusion barrier supply unit 26 is disposed between liquid crystal film sclerosis section 24 and winding roller 28.Diffusion barrier supply unit 26 is supplied with diffusion barrier 92 and makes its laminating on the liquid crystal film 122 of film 90.Between the film 90 that diffusion barrier 92 makes to be batched, be easy to separate.In addition, also can omit diffusion barrier supply unit 26.
The example that winding roller 28 is delivery section.Winding roller 28 is disposed at the downstream of liquid crystal film sclerosis section 24 and is disposed at the downstream of transport path.Winding roller 28 is supported in the mode that can rotarily actuate.Winding roller 28 is formed with alignment films 120 and liquid crystal film 122 and has carried out the film 90 after pattern forms for batching.Thus, winding roller 28 is carried the film 90 of strip along throughput direction.
An example that keeps the maintaining part that roller 48 is cooling end.Keep roller 48 to be disposed at the position relative with polarizing light source 34.Keep roller 48 to be disposed at the contrary side with polarizing light source 34 across the transport path of film 90.Keep roller 48 to be disposed at the below of the transport path of film 90.Keep roller 48 to be disposed at the top between upstream side jockey pulley 44 and downstream jockey pulley 46.Thus, because the top film 90 to the exposure area of being pressed by upstream side jockey pulley 44 and downstream jockey pulley 46 that keeps roller 48 is kept, therefore can be suppressed at the fold produced on film 90 downwards.The fold of said film 90 roughly extends along throughput direction herein, and on Width the undulate shape.Thereby exposure area refers to the polarizing light irradiation by from polarizing light source 34 on film 90 and is exposed the zone that section 18 is being exposed.
Keep roller 48 to form the drum of hollow.Be formed with the stream 54 for cooling liquid flow in the inside that keeps roller 48.One example of liquid is water.Keep roller 48 and radiation heat due to mask 3 etc. and the film 90 of the exposure area of temperature rising contacts and the liquid in being supplied to stream 54 carries out cooling to it.In addition, preferably keep the cooling film 90 of roller 48, making the temperature ascending amount of the film 90 at place, exposure area is below 2 ℃.In order to suppress to come from the reflection of light of polarizing light source 34, preferably keep the surface coated of roller 48 to become black.Keep roller 48 to be supported in the mode that can rotate.Thus, keep roller 48 and the conveying of film 90 to be rotated simultaneously.
Fig. 6 is the upward view of mask 38.Fig. 7 is the longitudinal section of the line of the VII-VII along Fig. 6 of mask 38.As shown in FIG. 6 and 7, the light shield layer 58 that mask 38 has mask substrate 56 and is formed at the lower surface of mask substrate 56.
Mask substrate 56 forms the tabular of rectangle.Mask substrate 56 is 5.6 * 10 by thermal expansivity -7/ ℃ quartz glass form.Mask substrate 56 can be also 85 * 10 by thermal expansivity -7/ ℃ soda-lime glass form.The length of mask substrate 56 on throughput direction is about 200mm.The length of mask substrate 56 on Width coordinates the width of film 90 suitably to set.
Light shield layer 58 be formed at mask substrate 56 below.Light shield layer 58 can shield light by chromium etc. material form.On light shield layer 58, be formed with as the 1st a plurality of openings through zone 62 its effects with as the 2nd a plurality of openings through zone 64 its effects.On throughput direction, the 1st sees through zone 62 is formed on from the 2nd through regional 64 different positions.
In addition, the 1st through zone 62, be formed on the Width vertical from throughput direction with the 2nd and see through different positions, zone 64.The 1st sees through regional 62 is disposed at the outbound course of the 1st polarized light of exporting from the 1st polarized light efferent 50.The 2nd sees through regional 64 is disposed at the outbound course of the 2nd polarized light of exporting from the 2nd polarized light efferent 52.
Thus, the 1st sees through zone 62 sees through the 1st polarized light, and the 2nd sees through zone 64 sees through the 2nd polarized light.Arriving the 1st polarized light that sees through the zone beyond regional 64 through zone the 62 and the 2nd is covered by light shield layer 58.Thus, the alignment films 120 of film 90 is exposed into and is seen through zone the 62 and the 2nd through the zone 64 overlapping patterns that form by the 1st by the 1st polarized light and the 2nd polarized light.
The 1st example that sees through zone the 62 and the 2nd length on Width through zone 64 is 0.2mm.The adjacent the 1st see through zone 62 each other and the adjacent the 2nd see through zone 64 each other an example at the interval on Width be 0.2mm.The 1st example that sees through zone the 62 and the 2nd length on throughput direction through zone 64 is about 30mm.The 1st example that sees through interval on throughput direction through zone 64, zone the 62 and the 2nd is about 30mm.In addition, the 1st each numerical value that sees through zone 64 through zone the 62 and the 2nd also can suitably change.
Then, the manufacture method of blooming 100 described.At first, prepare to be wound on the film 90 of the strip on outlet roller 12.At this, an example of the total length of film 90 is about 1000m.One example of the width of film 90 is about 500mm.Then, an end of film 90 is fixed on winding roller 28.Under this state, film 90 is configured to the following top state that simultaneously passes through to keep roller 48 by the following of upstream side jockey pulley 44 and downstream jockey pulley 46.In addition, supply with the liquid be cooled in the stream 54 that keeps roller 48.
Then, winding roller 28 starts to be rotated driving.As a result, become the supplying step that film 90 is sent and film 90 is carried along throughput direction from outlet roller 12.One example of the transporting velocity of film 90 is divided for divide～10m/ of 2m/.
The film 90 of sending is by the below of alignment films coating part 14.Thus, utilize alignment films coating part 14 coating alignment films 120 within the upper surface of film 90 spreads all over the almost whole zone of Width.Carry out continuously the coating of alignment films 120 in the conveying of film 90.Thereby, except the part at two ends, the total length that spreads all over throughput direction at the upper surface of film 90 is coated with alignment films 120 continuously.
Conveying is coated with the film 90 of alignment films 120, makes it pass through the inside of alignment films drying section 16.Thus, make to coat alignment films 120 dryings above film 90.Afterwards, film 90 is below upstream side jockey pulley 44.
Thereby make the zone that is coated with alignment films 120 on film 90 become the 1st orientation step by the 1st below that sees through zone 62.In the 1st orientation step, carry out under the state of transport membrane 90 continuing, export and seen through the 1st of mask 38 from the 1st polarized light efferent 50 by the 1st alignment films 120 that sees through regional 62 lower zones and exposed through regional 62 the 1st polarized light.Herein, film 90 is exposed being continued continuously conveying with certain speed by winding roller 28 when.Thereby, by the 1st alignment films 120 that sees through the below in zone 62, along throughput direction, by the 1st polarized light from the 1st polarized light efferent 50 outputs, exposed continuously.Thus, be exposed into the 1st and see through the identical and band shape that extend along throughput direction of regional 62 width by the 1st alignment films 120 that sees through the location of regional 62 belows.In addition, because this regional alignment films 120 is exposed by the 1st polarized light from the 1st polarized light efferent 50 outputs, so this regional alignment films 120 is orientated accordingly with the 1st polarized light be exposed.Thus, form a plurality of the 1st orientation area 124 in alignment films 120.
Afterwards, carry the film 90 in the zone that is coated with alignment films 120, make it pass through the 2nd and see through the below in zone 66, thereby become the 2nd orientation step.In the 2nd orientation step, continuing to carry out under the state of supplying step, the 2nd polarized light sees through zone 64 via the 2nd and shines alignment films 120, thereby forms a plurality of the 2nd orientation area 126.Specifically, export and see through from the 2nd polarized light efferent 52 the 2nd polarized light being irradiated by the 2nd alignment films 120 formed through the zone below zone 64 film 90 that the 2nd of mask 38 sees through zone 64.Owing to film 90 being continued to carry, so this regional alignment films 120 is also seen through the identical and band shape that extend along throughput direction of the width in zone 64 by the 2nd polarizing light irradiation Cheng Yu 2.
At this, the 2nd sees through zone 64 is formed on from the 1st through regional 62 different positions on Width.Thus, the 2nd polarized light is irradiated in alignment films 120 from by the 1st and sees through on different zone, regional 62 zones of irradiating.Thus, the 2nd polarized light is irradiated to by between the 1st orientation area 124 of the 1st polarized light orientation and adjacent the 1st orientation area 124, thereby in width regions, makes the Zone Full of alignment films 120 be orientated.
At this, intersect with the polarization direction of the 1st polarized light from the 1st polarized light efferent 50 outputs the polarization direction of the 2nd polarized light of exporting from the 2nd polarized light efferent 52.The direction of orientation in the zone be orientated by the 1st polarized light thus, is mutually vertical with the direction of orientation in the zone be orientated by the 2nd polarized light.As a result, form the pattern that alternative arrangement has two zones that comprise the different orientation corresponding with the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 on alignment films 120.
At this, the film 90 of exposure area is held roller 48 with the state of being pressed by upstream side jockey pulley 44 and downstream jockey pulley 46 downwards and keeps.Thus, due on film 90, by keeping roller 48 to apply the tension force on throughput direction between upstream side jockey pulley 44 and downstream jockey pulley 46, therefore reduced the fold of film 90.
And, the flowed through liquid cooling of the stream 54 that keeps roller 48 of film 90.Thus, even the radiation heat of the mask 38 heated by the polarized light that comes from polarizing light source 34 etc. are heated film 90, film 90 also is difficult on the upstream side in exposure area and downstream, to produce temperature difference.As a result, can further reduce the fold of the film 90 that the thermal expansion difference that caused by temperature difference causes.Thereby, because the alignment films 120 of the film 90 to producing hardly fold is exposed, with desirable angular illumination polarized light, therefore, result, reduce the deviation of the angle of orientation.
Afterwards, make the film 90 after alignment films 120 is exposed pass through the below of downstream jockey pulley 46, send to the below of liquid crystal film coating part 20.Thus, make liquid crystal film 122 coat the upper surface of alignment films 120.Because liquid crystal film 122 is coated the upper surface of the alignment films 120 of the film 90 in conveying continuously, therefore, on the applied whole length on the throughput direction of film 90 of liquid crystal film 122.Afterwards, the film 90 that is coated with liquid crystal film 122 is carried and made it pass through liquid crystal film orientation section 22.Thus, by 22 pairs of liquid crystal films 122 of liquid crystal film orientation section, heated, the molecule that makes liquid crystal film 122 is orientated along the orientation of the alignment films 120 that is formed on lower surface, and carries out drying simultaneously.
Then, make the film 90 of liquid crystal film 122 after being oriented of coating by liquid crystal film sclerosis section 24.Thus, to liquid crystal film 122 irradiation ultraviolet radiations, make to be hardened under the state of liquid crystal film 122 after being oriented.As a result, the molecule of liquid crystal film 122 and the 1st orientation area 124 and corresponding being orientated of the 2nd orientation area 126, thus form the 1st liquid crystal region 128 and the 2nd liquid crystal region 130.As shown in Figures 1 and 2, alternately be formed with the 1st polarized light modulation portion 104 and the 2nd polarized light modulation portion 106 formed by alignment films 120 and liquid crystal film 122 on the Width of film 90.Next, diffusion barrier 92 is supplied to the top of liquid crystal film 122 and is fitted.Then, by the film 90 that posts diffusion barrier 92 above 28 pairs of winding rollers, batched.
Afterwards, in by winding roller 28 transport membranes 90, film 90 is continued to exposure, finish until be wound on the supply of the film 90 on outlet roller 12.Then, film on being wound on outlet roller 12 90 is by all when giving, the manufacturing process of end blooming 100.In addition, also can connect the front end of the film 90 of next Zhang Xin in the rear end of the film 90 be through with, continuously film 90 be exposed.Finally, film 90 is cut into to the length of regulation, become the blooming 100 shown in Fig. 1 and Fig. 2 and complete.
As mentioned above, in exposure device 10, owing to carrying out cooling the time being exposed in the exposure area that utilize to keep 48 pairs of films of carrying 90 of roller, therefore be difficult to produce temperature difference on the film 90 in exposure.Thus, the fold of the film 90 that can suppress to be caused by temperature difference due to exposure device 10, the deviation of the alignment films 120 that therefore can suppress to be caused by fold and the angle of orientation of liquid crystal film 122.
In exposure device 10, keep roller 48 to contact with film 90 in exposure area, and film 90 is applied to tension force.Thus, keep roller 48 can utilize this tension force further to suppress the generation of the fold of film 90.
Then, the embodiment of the part that changed above-mentioned exposure device 10 described.Fig. 8～Figure 14 is near enlarged diagram exposure section after changing 18 by a part.In Figure 10～Figure 14, keep roller 48 to there is refrigerating function, but also it only can be used as simple roller.
As shown in Figure 8, exposure device 10 has upstream side driven voller 248 and downstream driven voller 249.One example of the maintaining part that upstream side driven voller 248 and downstream driven voller 249 are cooling end.Upstream side driven voller 248 is configured in the position by upstream side than mask 38.Downstream driven voller 249 is configured in than the position of mask 38 downstreams.Thereby upstream side driven voller 248 and downstream driven voller 249 contact with film 90 and keep this film 90 in the zone different from exposure area.Upstream side driven voller 248 and downstream driven voller 249 are configured in identical height.Thus, upstream side driven voller 248 and downstream driven voller 249 remain film 90 parallel with mask 38.
Be formed with stream 250,251 in the inside of upstream side driven voller 248 and downstream driven voller 249.In the course of conveying of film 90, in stream 250,251, provide the cooling liquid of using such as water.Thus, utilize flowing liquid in upstream side driven voller 248 and downstream driven voller 249 to carry out cooling film 90.
In exposure device 10, because the front and rear be close to of the film 90 that utilizes the exposure area in 249 pairs of exposures of upstream side driven voller 248 and downstream driven voller carries out coolingly, therefore suppressed the fold of film 90, thereby can suppress the deviation of the angle of orientation.And, because upstream side driven voller 248 and downstream driven voller 249 are configured in the zone different from exposure area, the polarized light that therefore utilizes upstream side driven voller 248 and downstream driven voller 249 to suppress to be reflected is exposed to alignment films 120.Thus, exposure device 10 can further suppress the deviation of the angle of orientation.
In addition, in exposure device 10, the both sides of upstream side driven voller 248 and downstream driven voller 249 all have refrigerating function, but also can any one party have refrigerating function.In addition, also can make the both sides of upstream side driven voller 248 and downstream driven voller 249 there is refrigerating function, and suitably switching is used.
As shown in Figure 9, exposure device 10 has the face of maintenance 348.An example that keeps the maintaining part that face 348 is cooling end.Keep face 348 to be configured in the zone relative with polarizing light source 34.Keep face 348 contact with the film 90 that is polarized light-struck exposure area and keep this film 90.
Keep face 348 to there is a pair of driven voller 350,352, endless belt 354 and stream 356.A pair of driven voller 350,352 is arranged at upstream side and downstream across exposure area.Endless belt 354 is erected on driven voller 350 and driven voller 352.Be retained as with mask 38 and parallel at the upper surface of endless belt 354.Thus, endless belt 354 keeps film 90 with mask 38 with paralleling.So, because endless belt 354 carries out face with film 90, contact, therefore can, when further suppressing the fold of film 90, can also reduce the distortion that is transferred to the pattern on film 90.Be supplied with the liquid of cooling use in stream 356.The upper surface of stream 356 forms parallel with the transport path of film 90 plane.Thus, because stream 356 carries out face by endless belt 354 with film 90, contact, therefore can improve the cooling effectiveness of film 90.
As shown in figure 10, exposure device 10 has a pair of film air supplying part 448,449 that top is tubulose.One film air supplying part 448 on throughput direction across the center configuration that keeps roller 48 in a side contrary with another film air supplying part 449.Film air supplying part 448 blows the gas after being cooled to the upstream side film 90 partly in exposure area, and the film 90 regional to this carries out air-cooled.Film air supplying part 449 blows the gas after being cooled to the film 90 of Zhong downstream, exposure area part, and the film 90 regional to this carries out air-cooled.Therefore film 90 is carried out directly coolingly in whole exposure area due to film air supplying part 448,449, can improve cooling effectiveness.
As shown in figure 11, exposure device 10 has a pair of film air supplying part 448,449.Film air supplying part 448,449 is disposed at the zone adjacent with exposure area.Film air supplying part 448 is configured in than exposure area and leans on upstream side and be configured in than upstream side jockey pulley 44 by the exposure area side.Film air supplying part 449 is configured in than exposure area downstream and is configured in than downstream jockey pulley 46 by the exposure area side.Because film air supplying part 448,449 blows to the film 90 with adjacent zone, exposure area the gas be cooled, therefore can suppress by the gas turbulence of sending between wind-induced mask 38 and film 90.One example in adjacent zone for than the outside that is positioned at exposure area and with the immediate roller in exposure area, upstream side jockey pulley 44 and downstream jockey pulley 46 is by the zone of exposure area side.Thus, film air supplying part 448,449 do not upset the characteristic of polarized light just can cooling film 90.
As shown in figure 12, exposure device 10 has a pair of mask cooling end 548,549.One mask cooling end 548 is configured in a side contrary with another mask cooling end 549 across mask 38 on throughput direction.Mask cooling end 548 is to the upstream portion air-supply of mask 38.Mask cooling end 549 is to the downstream part air-supply of mask 38.Thus, 548,549 pairs of masks 38 of mask cooling end carry out air-cooled.Because mask 38 is cooled, the heating of the film 90 caused by the heat of mask 38 in the time of therefore can suppressing to expose.Thus, due to can cooling film 90, therefore can suppress the fold of film 90.In addition, preferably mask 38 is carried out coolingly, so that it is compared and do not heat up more than 4 ℃ with before exposure, more preferably do not heat up more than 1 ℃.In addition, preferably, mask 38 is used in the environment for use of setting, an example of environment for use, the example preferably used in the 23 ℃ ± temperature of 1 ℃, 55%～65% humidity.
As shown in figure 13, exposure device 10 has as air-cooled 648 of a pair of maintenance of an example that keeps cooling end, 649.Keep air-cooled 648 upstream mask maintaining part 40 air-supplies of side.Keep air cooling section 649 mask maintaining part 40 air-supplies of side downstream.Thus, mask maintaining part 40 is by keeping carrying out air-cooled for air-cooled 648,649.As a result, because mask 38 is cooled, the heating of the film 90 caused by the heat of mask 38 in the time of therefore can suppressing to expose, thus can cooling film 90, suppress the fold of film 90.
As shown in figure 14, exposure device 10 has a pair of maintenance liquid cooling portions 748,749 as an example that keeps cooling end.Keep liquid cooling portions the 748, the 749th, be formed at the stream of mask maintaining part 40 inside.Be supplied with the liquid such as water in keeping liquid cooling portions 748,749.This is arranged, utilize to the liquid that keeps supplying with in liquid cooling portions 748,749 mask maintaining part 40 is cooling.As a result, because mask 38 is cooled, the heating of the film 90 caused by the heat of mask 38 while therefore having suppressed exposure, due to can cooling film 90, therefore can suppress the fold of film 90.
The cooling means of film 90 is not limited to above-mentioned example.For example, also can carry out cooling film 90 with the transporting velocity that improves film 90 by the rotational speed that improves winding roller 28.In addition, the upper limit of the transporting velocity of film 90 can consider that the degree being orientated decides to alignment films 120 irradiation polarized lights.Thereby the illumination of the lower limit that the upper limit of transporting velocity can be based in order to make the required energy of alignment films 120 orientation, the polarized light irradiated decides.For example, for the lower limit that makes the required energy of alignment films 120 orientations, be 15mJ/cm 2, the 1st on throughput direction see through zone the 62 and the 2nd to see through the illumination that regional 64 length is respectively 30mm and polarized light be 100mW/cm 2the time, be limited to 12m/ on transporting velocity and divide.
Then, the experiment of the effect for proving above-mentioned embodiment described.Figure 15 is the experimental result table of the cooling impact on the angle of orientation of investigation film.The deviation of the angle of orientation shown in Figure 15 is calculated by the angle of orientation of the KOBRA-CCD measurement of prince's measuring equipment (strain) system.In addition, the deviation of the angle of orientation be when setting value is 0 °, and the deviation between 0 °.In this experiment, made the embodiment 1～embodiment 4 by exposure device 10 manufacturings of above-mentioned embodiment, and the comparative example 1 compared with embodiment 1～embodiment 4, the sample of comparative example 2.No matter the width of the film be transferred is that COP or TAC are 350mm.
As shown in figure 15, in order to heat up on not more than 1 ℃, mask 38 is carried out cooling in, in the situation of the embodiment 1～embodiment 3 exposed, can suppress the fold on Width, by the deviation of the angle of orientation, be below ± 0.1 °.Can learn its effect, film 90 does not also rely on COP or TAC.In the stereoscopic display device that embodiment 1～embodiment 3 is installed, do not have visual identity to go out color spot, therefore can access good stereo-picture.On the other hand, can learn, in the situation that mask 38 is not carried out to cooling comparative example 1,2, the deviation of the angle of orientation is more than ± 0.8 °, greatly.And, as shown in the result of embodiment 4, can learn, also improve transporting velocity and carry out cooling film 90, can be below ± 0.2 ° by the deviation of the angle of orientation.
Figure 16 is the figure to the experimental result after the deviation investigation of the fold of film 90 and the angle of orientation.In addition, in this experiment, by the mask shown in Figure 12 is cooling, film 90 is carried out to the cooling fold with removal film 90.Transverse axis shown in Figure 16 means the position of film 90 on Width.
As shown in figure 16, can learn, not occur in the exposure area with shown in solid line in the film 90 of fold, the deviation of the angle of orientation is suppressed in ± below 0.2 °.On the other hand, in the exposure area with shown in dotted line, occurred in the film 90 of fold, the deviation of the angle of orientation is more than ± 0.9 °.Thus, can learn, by the cooling fold that suppresses, thereby make the deviation of the angle of orientation become minimum.
The numerical value such as the shape of the structure of above-mentioned embodiment, configuration, width and length, number, material etc. also can suitably change.In addition, also can be combined each embodiment.
For example, in the above-described embodiment, meaned continuous conveying the example that simultaneously exposed, also can film 90 stop midway temporarily carry.In this case, become and alternately repeatedly carry out the conveying of film 90 and the intermittent delivery stopped.
In the above-described embodiment, meaned the light shield layer of mask 38 58 is formed at the example of the lower surface of mask substrate 56, also light shield layer 58 can be formed to the upper surface of mask substrate 56.
Above, use embodiment to describe the present invention, but protection scope of the present invention is not limited to the scope that above-mentioned embodiment is put down in writing.It will be apparent to those skilled in the art that on the basis of above-mentioned embodiment and can carry out various changes or improvement.From the record of claims, carry out various changes or improved embodiment is also contained in protection scope of the present invention.
Should be noted that, action in device shown in claims, instructions and accompanying drawing, system, program and method, sequentially, the execution sequence of each processing such as step and stage do not express especially for " more early ", " early than " etc., perhaps as long as, in the not postpose processing of output of previous processed, can realize with random order.About the motion flow in claims, instructions and accompanying drawing, even use for convenience's sake " at first ", " next " etc. to be illustrated, but also and do not mean that and must implement in this order.

Claims (14)

1. an exposure device, it comprises:
Delivery section, it is used for carrying the film of strip;
Exposure section, it is used for across mask, the described film of being carried by described delivery section being exposed; And
Cooling end, it is used for carrying out cooling to the described film exposed by described exposure section.
2. exposure device according to claim 1, wherein,
Described cooling end has and contacts with described film and described film is carried out to cooling maintaining part.
3. exposure device according to claim 2, wherein,
Described maintaining part contacts with described film and carries out cooling to described film in the exposure area of being exposed by described exposure section.
4. exposure device according to claim 2, wherein,
Described maintaining part contacts with described film and carries out cooling to described film in the zone different in the exposure area from being exposed by described exposure section.
5. exposure device according to claim 2, wherein,
Described maintaining part is rotated with the conveying of described film with matching.
6. exposure device according to claim 1, wherein,
Described cooling end has described film is carried out to air-cooled film air supplying part.
7. exposure device according to claim 6, wherein,
Described film air supplying part is carried out air-cooled to described film in the exposure area of being exposed by described exposure section.
8. according to the described exposure device of claim 6 or 7, wherein,
Described film air supplying part is carried out air-cooled to described film in the zone adjacent in the exposure area with being exposed by described exposure section.
9. exposure device according to claim 1, wherein,
Described cooling end has for described mask being carried out to cooling mask cooling end.
10. exposure device according to claim 9, wherein,
Described mask cooling end carries out air-cooled to described mask.
11. exposure device according to claim 1, wherein,
This exposure device also comprises for keeping the mask maintaining part of described mask,
Described cooling end has for described mask maintaining part is carried out to cooling maintenance cooling end.
12. exposure device according to claim 11, wherein,
Described maintenance cooling end carries out air-cooled to described mask maintaining part.
13. according to the described exposure device of claim 11 or 12, wherein,
Described maintenance cooling end utilizes liquid to carry out cooling to described mask maintaining part.
14. an exposure method, it comprises:
Supplying step, the film of conveying strip;
Step of exposure, exposed to the described film of being carried by described supplying step across mask; And cooling step, to the described film exposed by described step of exposure, carry out cooling.
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Publication number Priority date Publication date Assignee Title
CN105467773A (en) * 2014-09-26 2016-04-06 株式会社Orc制作所 Direct exposure device
CN105467773B (en) * 2014-09-26 2018-10-09 株式会社Orc制作所 direct exposure device
WO2023134662A1 (en) * 2022-01-14 2023-07-20 宁德时代新能源科技股份有限公司 Apparatus for substrate processing

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