JP2013254113A - Exposure device and exposure method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that in an exposure area, a film conveyed is gradually heated, so that a temperature difference occurs between an upstream side and a downstream side of the film; thus, a wrinkle is formed on the film, and the film surface is not irradiated with exposure light at a desired angle.SOLUTION: An exposure device includes a conveyance unit for conveying a long film, an exposure unit for exposing the film conveyed by the conveyance unit through a mask, and a cooling unit for cooling the film exposed by the exposure unit, by air cooling or liquid cooling.

Description

  The present invention relates to an exposure apparatus and an exposure method.

A technique for aligning an alignment film by exposing the film while transporting the film is known.
[Patent Document 1] US Patent Application Publication No. 2011/0217638

  However, since the film being conveyed is gradually heated in the exposure region where the exposure light is irradiated, a temperature difference occurs between the upstream side and the downstream side of the film. As a result, there is a problem that wrinkles are formed on the film, and exposure light is not irradiated onto the film surface at a desired angle.

  In the 1st aspect of this invention, the exposure part which exposes the said film currently conveyed by the said conveyance part through a mask in the conveyance part which conveys a elongate film, and the said exposure part exposes. An exposure apparatus is provided that includes a cooling unit that cools the film.

  In the second aspect of the present invention, the film is exposed by the transport stage for transporting the long film, the exposure stage for exposing the film transported by the transport stage through a mask, and the exposure stage. And a cooling step for cooling the film.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

It is a whole top view of optical film 100 manufactured by this embodiment. It is a longitudinal cross-sectional view along the II-II line of FIG. 1 is an exploded perspective view of a stereoscopic image display device provided with an optical film 100. FIG. 1 is an overall configuration diagram of an exposure apparatus 10 according to the present embodiment. 2 is an overall perspective view of an exposure unit 18. FIG. 4 is a bottom view of a mask 38. FIG. It is a longitudinal cross-sectional view of the mask 38 along the VII-VII line of FIG. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed some. It is a general | schematic enlarged view of the vicinity of the exposure part 18 which changed a part. It is a table | surface of the experimental result which investigated the influence of the orientation angle by film cooling. It is a graph of the experimental result which investigated the wrinkle of the film 90, and the variation of an orientation angle.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 is an overall plan view of an optical film 100 manufactured according to this embodiment. The optical film 100 is manufactured by the method for manufacturing an optical film according to the present embodiment. The optical film 100 is provided on the image output side of the image generation unit of the stereoscopic image display device, and outputs a right-eye image and a left-eye image.

  The optical film 100 is formed in a rectangular shape having a side of several centimeters to several meters. As shown in FIG. 1, the optical film 100 includes a resin base material 102, a first polarization modulation unit 104, and a second polarization modulation unit 106.

The resin base material 102 is formed by cutting a long film made of resin, which will be described later, into a certain length. The resin base material 102 transmits light. An example of the thickness of the resin base material 102 is 50 μm to 100 μm. The resin base material 102 supports the first polarization modulation unit 104 and the second polarization modulation unit 106. The resin base material 102 can be constituted by a cycloolefin-based film. A cycloolefin polymer (= COP) having a coefficient of thermal expansion of 70 × 10 ⁻⁶ / ° C., more preferably a cycloolefin copolymer (═COC), which is a copolymer of cycloolefin polymers, is used as the cycloolefin film. Can do. An example of the COP film is ZEONOR film ZF14 manufactured by Nippon Zeon. Moreover, you may comprise the resin base material 102 by the material containing a triacetyl cellulose (= TAC) whose thermal expansion coefficient is 54 * 10 < ^-6 > / degreeC. Examples of the TAC film include Fujitac T80SZ and TD80UL manufactured by Fuji Photo Film Co., Ltd. In addition, when using a cycloolefin type film, it is preferable to use a high toughness type film from a viewpoint of brittleness.

  The first polarization modulator 104 and the second polarization modulator 106 are formed in the same shape in plan view. The first polarization modulator 104 and the second polarization modulator 106 have a rectangular shape extending along the long side direction of the resin base material 102. The long side direction of the resin base material 102 here is a horizontal direction in the optical film 100 incorporated in the stereoscopic image display. Therefore, the short side direction of the resin base material 102 is the vertical direction in the optical film 100 incorporated in the stereoscopic image display. The first polarization modulator 104 and the second polarization modulator 106 are alternately arranged along the vertical direction in a state where one side is in contact with each other. The first polarization modulator 104 and the second polarization modulator 106 may be alternately arranged along the horizontal direction.

  The first polarization modulator 104 and the second polarization modulator 106 modulate the polarization state of the transmitted polarized light. The first polarization modulation unit 104 and the second polarization modulation unit 106 have a phase difference function of a quarter wavelength plate, for example. The first polarization modulator 104 and the second polarization modulator 106 may have a half-wave plate phase difference function. The first polarization modulator 104 has, for example, an optical axis oriented in a direction parallel to the arrow 110 described at the right end of the first polarization modulator 104 in FIG. Thus, for example, when linearly polarized light having a polarization direction rotated by 45 ° from the arrow 110 is input, the first polarization modulator 104 modulates the polarized light into circularly polarized light having a clockwise polarization direction indicated by the adjacent arrow 112. And output. The second polarization modulator 106 is, for example, an optical axis oriented in a direction parallel to the arrow 114 described at the right end of the second polarization modulator 106 in FIG. 1, and the optical axis of the first polarization modulator 104. Having orthogonal optical axes. Thereby, for example, when the linearly polarized light having the polarization direction rotated by 45 ° from the arrow 110 is input, the second polarization modulator 106 modulates the polarized light into the circularly polarized light having the counterclockwise polarization direction indicated by the adjacent arrow 116. And output. An example of the optical axis is a fast axis or a slow axis. Here, the variation in the orientation angle of the optical axes of the first polarization modulator 104 and the second polarization modulator 106 is ± 0.5 ° or less, more preferably ± 0.2 ° or less. The variation in the orientation angle will be described later.

  As a result, even if linearly polarized light having the same polarization direction is input to the first polarization modulator 104 and the second polarization modulator 106, the polarization direction of the polarization output from the second polarization modulator 106 and the first polarization modulation The polarization direction of the polarized light output from the unit 104 is different. For example, the polarization direction of the polarized light output from the second polarization modulation unit 106 is circularly polarized light that is reverse to the polarization direction of the polarization output from the first polarization modulation unit 104.

  2 is a longitudinal sectional view taken along line II-II in FIG. As shown in FIG. 2, each first polarization modulator 104 and second polarization modulator 106 includes an alignment film 120 and a liquid crystal film 122.

  The alignment film 120 is formed on the surface of the resin base material 102. A known photo-alignment compound can be applied to the alignment film 120. A photo-alignment compound is a material in which molecules are regularly aligned in the polarization direction of linearly polarized light when irradiated with linearly polarized light such as ultraviolet rays. Further, the photo-alignment compound has a function of aligning the molecules of the liquid crystal film 122 formed on the self along the self-alignment. Examples of the photo-alignment compound include photodecomposition type, photodimerization type, and photoisomerization type compounds. The alignment film 120 has a plurality of first alignment regions 124 and a plurality of second alignment regions 126. The plurality of first alignment regions 124 and the plurality of second alignment regions 126 are alternately arranged along the arrangement direction. The arrangement direction here is parallel to the vertical direction. All the second alignment regions 126 adjacent to the first alignment region 124 are in contact with each other. The first alignment region 124 constitutes a part of the first polarization modulation unit 104. The first alignment region 124 is aligned in a direction corresponding to the optical axis of the first polarization modulator 104. The second alignment region 126 constitutes a part of the second polarization modulation unit 106. The second alignment region 126 is aligned in a direction orthogonal to the alignment direction of the first alignment region 124 and corresponding to the optical axis of the second polarization modulator 106.

  The liquid crystal film 122 is formed on the alignment film 120. The liquid crystal film 122 can be formed of a liquid crystal polymer that can be cured by ultraviolet rays or heating. The liquid crystal film 122 includes a first liquid crystal region 128 and a second liquid crystal region 130. The first liquid crystal region 128 constitutes a part of the first polarization modulation unit 104. The first liquid crystal region 128 is formed on the first alignment region 124. The molecules of the first liquid crystal region 128 are aligned along the alignment of the first alignment region 124. The second liquid crystal region 130 constitutes a part of the second polarization modulation unit 106. The second liquid crystal region 130 is formed on the second alignment region 126. The molecules of the second liquid crystal region 130 are aligned along the alignment of the second alignment region 126.

  FIG. 3 is an exploded perspective view of the stereoscopic image display device provided with the optical film 100. As indicated by an arrow in FIG. 3, the direction in which the user is positioned and the direction in which the image is output is the front of the stereoscopic image display device. As illustrated in FIG. 3, the stereoscopic image display device 150 includes a light source 152, an image output unit 154, the optical film 100, and an optical function film 158.

  The light source 152 irradiates white non-polarized light with substantially uniform intensity in the plane. The light source 152 is disposed at the rear of the stereoscopic image display device 150 as viewed from the user. The light source 152 includes a light source that combines a diffuser plate and a cold cathode fluorescent lamp (CCFL), a light source that combines a prism lens and a light emitting diode (LED), an organic EL (Electro- A surface light source including Luminescence) can be applied.

  The image output unit 154 is disposed in front of the light source 152. The image output unit 154 outputs an image using light from the light source 152. The image output unit 154 includes a polarizing plate 164, a holding substrate 166, an image generation unit 168, a holding substrate 170, and a polarizing plate 174.

  The polarizing plate 164 is disposed between the light source 152 and the holding substrate 166. An example of the material constituting the polarizing plate 164 is a resin containing PVA (polyvinyl alcohol). The polarizing plate 164 has a transmission axis inclined by 45 ° from the horizontal direction and an absorption axis perpendicular to the transmission axis. As a result, among the non-polarized light output from the light source 152 and incident on the polarizing plate 164, the component whose vibration direction is parallel to the transmission axis of the polarizing plate 164 is transmitted and the component parallel to the absorption axis is absorbed and blocked. Is done. For this reason, the light output from the polarizing plate 164 becomes linearly polarized light having the transmission axis of the polarizing plate 164 as the polarization direction.

  The holding substrate 166 is disposed between the polarizing plate 164 and the image generation unit 168. The holding substrate 166 can be a transparent glass plate. The holding substrate 166 can be a transparent composite sheet using a transparent composite material including a transparent resin and glass cloth in addition to the glass plate. Thereby, weight reduction and flexibility of the stereoscopic image display device 150 can be achieved. The rear surface of the holding substrate 166 holds the polarizing plate 164 via an adhesive.

  The image generation unit 168 is disposed and held between the holding substrate 166 and the holding substrate 170. The image generation unit 168 includes a plurality of pixels (= pixels) that generate an image. The plurality of pixels are two-dimensionally arranged at a constant pitch in the vertical direction and the horizontal direction. A pixel is a unit for handling an image and outputs color information of tone and gradation. Each pixel has three sub-pixels (= sub-pixels). Each sub-pixel has a liquid crystal part and transparent electrodes formed on the front and back surfaces of the liquid crystal part. The transparent electrode applies a voltage to the liquid crystal part. The liquid crystal portion of the subpixel to which the voltage is applied rotates the polarization direction of the linearly polarized light by 90 °. Each of the three subpixels included in each pixel includes a red color filter, a green color filter, and a blue color filter. By controlling the voltage application of the transparent electrode of the sub-pixel, the red, green, and blue light output from the sub-pixel is strengthened or weakened to form an image.

  As indicated by “R” and “L” in FIG. 3, the image generation unit 168 includes a right-eye image generation unit 178 that generates a right-eye image, and a left-eye image generation unit 180 that generates a left-eye image. Have The right eye image generation unit 178 and the left eye image generation unit 180 are formed in a rectangular shape extending in the horizontal direction. The right-eye image generation unit 178 and the left-eye image generation unit 180 are alternately arranged along the vertical direction.

  The holding substrate 170 is disposed between the image generation unit 168 and the polarizing plate 174. The holding substrate 166 and the holding substrate 170 sandwich the image generation unit 168. The holding substrate 170 is made of the same material as the holding substrate 166. The front surface of the holding substrate 170 holds the polarizing plate 174 through an adhesive.

  The polarizing plate 174 is disposed between the holding substrate 170 and the optical film 100. The polarizing plate 174 is attached to the opposite side of the holding substrate 170 from the side where the image generation unit 168 is held with an adhesive. The polarizing plate 174 is made of a resin containing PVA (polyvinyl alcohol). The thickness of the polarizing plate 174 is preferably thinner. The thickness of the polarizing plate 174 is, for example, 100 μm to 200 μm. The polarizing plate 174 has a transmission axis and an absorption axis orthogonal to the transmission axis. The transmission axis of the polarizing plate 174 is orthogonal to the transmission axis of the polarizing plate 164. Accordingly, the linearly polarized light whose polarization direction is rotated by 90 ° by the image generation unit 168 passes through the polarizing plate 174 and becomes image light to form an image. On the other hand, linearly polarized light whose polarization direction has not been rotated by the image generation unit 168 is blocked by the polarizing plate 174. As a result, the image output unit 154 outputs image light composed of polarized light having a polarization direction parallel to the transmission axis of the polarizing plate 174.

  The optical film 100 is attached in front of the polarizing plate 174 of the image output unit 154 with an adhesive. The thickness of the optical film 100 is preferably thinner in order to suppress dimensional changes of the optical film 100. For example, the thickness of the optical film 100 is preferably 50 μm to 200 μm.

  The first polarization modulator 104 and the second polarization modulator 106 of the optical film 100 are arranged on the rear surface of the resin base material 102. The first polarization modulator 104 has substantially the same shape as the right-eye image generator 178 of the image generator 168. The first polarization modulator 104 is disposed in front of the right-eye image generator 178. As a result, right-eye image light that is output from the right-eye image generation unit 178 and transmitted through the polarizing plate 174 enters the first polarization modulation unit 104. The first polarization modulator 104 modulates the incident image light for the right eye into clockwise circularly polarized light and outputs it. The second polarization modulator 106 has substantially the same shape as the left-eye image generator 180 of the image generator 168. The second polarization modulator 106 is disposed in front of the left eye image generator 180. As a result, the left-eye image light that is output from the left-eye image generation unit 180 and transmitted through the polarizing plate 174 enters the second polarization modulator 106. The second polarization modulator 106 modulates the incident image light for the left eye into counterclockwise circularly polarized light and outputs it. Accordingly, the first polarization modulation unit 104 and the second polarization modulation unit 106 convert the linearly polarized light having the same polarization direction constituting the right-eye image and the left-eye image into circularly polarized light having different polarization directions and output the circularly-polarized light.

  The optical function film 158 is disposed on the front surface of the optical film 100. An example of the optical function film 158 is a reflection reduction film or an antireflection film that reduces or suppresses reflection of light output from external illumination or the like. Thereby, the optical function film 158 provides the user with an image with little external light contamination. Other examples of the optical functional film 158 include an antiglare film that suppresses glare and a hard coat film that prevents scratches on the surface. The optical function film 158 may be omitted.

  Polarized glasses 190 used when a user views a stereoscopic image has a right-eye modulation unit 192 and a left-eye modulation unit 194. The right-eye modulation unit 192 transmits only clockwise circularly polarized light. The left-eye modulator 194 transmits only counterclockwise circularly polarized light. Accordingly, the user's right eye visually recognizes only the image for the right eye output from the first polarization modulator 104, and the user's left eye visually recognizes only the image for the left eye output from the second polarization modulator 106. To do. As a result, the user can see a stereoscopic image.

  FIG. 4 is an overall configuration diagram of the exposure apparatus 10 according to the present embodiment. FIG. 5 is an overall perspective view of the exposure unit 18. The up and down directions indicated by arrows in FIG. Further, upstream and downstream are upstream and downstream in the transport direction. The transport direction is the same as the longitudinal direction of the long film 90 and is orthogonal to the arrangement direction and the width direction.

  As shown in FIGS. 4 and 5, the exposure apparatus 10 includes a delivery roll 12, an alignment film application unit 14, an alignment film drying unit 16, an exposure unit 18, a liquid crystal film application unit 20, and a liquid crystal film alignment unit. 22, a liquid crystal film curing unit 24, a separate film supply unit 26, a take-up roll 28, and a holding roll 48.

  The delivery roll 12 is disposed on the most upstream side of the transport path of the film 90. A supply film 90 is wound around the outer periphery of the delivery roll 12. The delivery roll 12 is rotatably supported. Thereby, the delivery roll 12 can hold | maintain the film 90 so that delivery is possible. The delivery roll 12 may be configured to be rotatable by a drive mechanism such as a motor, or may be configured to be driven in accordance with the rotation of the take-up roll 28. Or you may provide the mechanism which drives the film 90 in the middle of a conveyance path | route.

  The alignment film application unit 14 is disposed downstream of the delivery roll 12 and upstream of the exposure unit 18. The alignment film application unit 14 is disposed above the conveyance path of the film 90 to be conveyed. The alignment film application unit 14 supplies and applies a liquid alignment film 120, which is an example of an exposure material, to the upper surface of the film 90.

  The alignment film drying unit 16 is disposed on the downstream side of the alignment film application unit 14. The alignment film drying unit 16 dries the alignment film 120 applied on the film 90 passing through the inside by heating, light irradiation, or air blowing.

  The exposure unit 18 exposes the film 90 being conveyed through the mask 38. The exposure unit 18 is disposed on the downstream side of the alignment film drying unit 16. The exposure unit 18 includes a polarized light source 34, a mask holding unit 40 that holds the mask 38, and a pair of upstream tension roll 44 and downstream tension roll 46. The exposure unit 18 irradiates the alignment film 120 applied on the film 90 with the polarized light output from the polarized light source 34 through the mask 38. Thereby, the exposure unit 18 aligns the alignment film 120 to form a pattern. An example of polarized light output from the polarized light source 34 is ultraviolet light having a wavelength of 280 nm to 340 nm.

The polarized light source 34 is disposed above the transport path of the film 90. The polarization light source 34 includes a first polarization output unit 50 and a second polarization output unit 52. The first polarization output unit 50 and the second polarization output unit 52 are disposed between the upstream tension roll 44 and the downstream tension roll 46. The second polarization output unit 52 is disposed on the downstream side of the first polarization output unit 50. The first polarized light output unit 50 outputs the first polarized light downstream and downward. The first polarized light has a polarization direction corresponding to the alignment of the first alignment region 124. The first polarized light is inclined 45 ° upstream from the vertical direction and is incident on the film 90. The second polarized light output unit 52 outputs the second polarized light upstream and downward. The second polarized light has a polarization direction corresponding to the alignment of the second alignment region 126. The second polarized light is inclined 45 ° downstream from the vertical direction and enters the film 90. Thereby, even if it is a case where 1st polarized light and 2nd polarized light are reflected by the film 90, peripheral equipment, etc., the probability of returning to the alignment film 120 apply | coated to the film 90 becomes low. As a result, it is possible to prevent the reflected first polarized light and second polarized light from being irradiated on unscheduled portions on the film 90 and disturbing the orientation. The illuminance of the first polarization output from the first polarization output unit 50 and the illuminance of the second polarization output from the second polarization output unit 52 are equal. Illuminance here refers to the energy per unit area of the output polarized light, and the unit is mW / cm ² . When the output polarized light is ultraviolet light, the illuminance is UV illuminance. An example of the illuminance of the first polarized light and the second polarized light is 78 mW / cm ² . The exposure method may be changed as appropriate. For example, the first polarized light and the second polarized light of the polarized light source 34 may be irradiated along the vertical direction. The up-down direction here is the up-down direction indicated by the arrow in FIG. In this case, the first polarized light and the second polarized light may be incident on the film 90 obliquely. Further, the first polarized light and the second polarized light of the polarized light source 34 may be irradiated perpendicularly to the film 90.

  The polarization direction of the second polarization output from the second polarization output unit 52 is orthogonal to the polarization direction of the first polarization output from the first polarization output unit 50. The polarization direction of the second polarization output from the second polarization output unit 52 and the polarization direction of the first polarization output from the first polarization output unit 50 may intersect at an arbitrary angle. A light shielding wall extending in the vertical direction to the mask 38 is preferably provided between the first polarization output unit 50 and the second polarization output unit 52. As a result, the light shielding walls shield each other's polarized light. In this case, the light shielding wall is preferably black in order to suppress reflection of the first polarized light and the second polarized light.

  The mask holding unit 40 holds the mask 38. The mask holding unit 40 is held so as to be relatively movable with respect to the film 90 in the width direction orthogonal to the transport direction. Thereby, the mask 38 is moved together with the mask holding unit 40 by a motor or an actuator or the like, and the position in the width direction is adjusted.

  The mask 38 is held by the mask holding unit 40 and is disposed between the polarized light source 34 and the film 90. As an example, the mask 38 is disposed several hundred μm above the film 90.

  The upstream tension roll 44 is disposed downstream of the alignment film drying unit 16 and upstream of the holding roll 48, the polarization light source 34, and the mask 38. The upstream tension roll 44 is disposed above the transport path of the film 90. The upstream tension roll 44 rotates in accordance with the film 90 conveyed below. The upstream tension roll 44 presses the film 90 being conveyed downward.

  The downstream tension roll 46 is disposed upstream of the liquid crystal film application unit 20 and downstream of the holding roll 48, the polarization light source 34, and the mask 38. The downstream tension roll 46 is disposed above the transport path of the film 90. The downstream tension roll 46 rotates in accordance with the film 90 conveyed below. Further, the downstream tension roll 46 presses the film 90 being conveyed downward.

  The upstream tension roll 44 and the downstream tension roll 46 are rotatably supported. The upstream tension roll 44 and the downstream tension roll 46 may be configured to be rotatable by a drive motor or the like, or may be configured to be driven by a driving force of the take-up roll 28 or the like.

  The liquid crystal film application unit 20 is disposed on the downstream side of the exposure unit 18. The liquid crystal film application unit 20 is disposed above the transport path of the film 90. The liquid crystal film application unit 20 supplies and applies the liquid crystal film 122 onto the alignment film 120 formed on the film 90.

  The liquid crystal film alignment unit 22 is disposed on the downstream side of the liquid crystal film application unit 20. The liquid crystal film alignment unit 22 dries the liquid crystal film 122 formed on the alignment film 120 that passes through the liquid crystal film alignment section 120 along the alignment direction of the alignment film 120 by heating, light irradiation, or air blowing. .

  The liquid crystal film curing unit 24 is disposed on the downstream side of the liquid crystal film alignment unit 22. The liquid crystal film curing unit 24 cures the liquid crystal film 122 by irradiating ultraviolet rays. Thereby, the alignment of the molecules of the liquid crystal film 122 aligned along the alignment of the alignment film 120 is fixed.

  The separate film supply unit 26 is disposed between the liquid crystal film curing unit 24 and the take-up roll 28. The separate film supply unit 26 supplies and separates the separate film 92 onto the liquid crystal film 122 of the film 90. The separate film 92 facilitates separation between the wound films 90. Note that the separate film supply unit 26 may be omitted.

  The take-up roll 28 is an example of a transport unit. The take-up roll 28 is disposed on the downstream side of the liquid crystal film curing unit 24 and on the most downstream side of the transport path. The take-up roll 28 is supported so as to be rotatable. The winding roll 28 winds the film 90 on which the alignment film 120 and the liquid crystal film 122 are formed and patterned. Thereby, the winding roll 28 conveys the elongate film 90 in a conveyance direction.

  The holding roll 48 is an example of a holding unit of the cooling unit. The holding roll 48 is disposed at a position facing the polarized light source 34. The holding roll 48 is disposed on the opposite side of the polarized light source 34 across the conveyance path of the film 90. The holding roll 48 is disposed below the conveyance path of the film 90. The holding roll 48 is disposed above the upstream tension roll 44 and the downstream tension roll 46. Thereby, the upper surface of the holding roll 48 holds the film 90 in the exposure area pressed downward by the upstream tension roll 44 and the downstream tension roll 46, so that wrinkles generated in the film 90 are suppressed. The wrinkle of the film 90 here is a shape that extends in the conveying direction and undulates in the width direction. The exposure area is an area on the film 90 that is irradiated with polarized light from the polarized light source 34 and is exposed by the exposure unit 18.

  The holding roll 48 is formed in a hollow cylindrical shape. Inside the holding roll 48, a flow path 54 through which a cooling liquid flows is formed. An example of a liquid is water. The holding roll 48 is cooled while being in contact with the film 90 in the exposure region where the temperature rises due to the radiant heat of the mask 38 or the like by the liquid supplied to the flow path 54. The holding roll 48 preferably cools the film 90 so that the temperature rise of the film 90 in the exposure region is 2 ° C. or less. The surface of the holding roll 48 is preferably coated in black in order to suppress reflection of light from the polarized light source 34. The holding roll 48 is rotatably supported. As a result, the holding roll 48 rotates with the conveyance of the film 90.

  FIG. 6 is a bottom view of the mask 38. FIG. 7 is a longitudinal sectional view of the mask 38 taken along line VII-VII in FIG. As shown in FIGS. 6 and 7, the mask 38 includes a mask base material 56 and a light shielding layer 58 formed on the lower surface of the mask base material 56.

The mask base material 56 is formed in a rectangular plate shape. The mask base material 56 is made of quartz glass having a thermal expansion coefficient of 5.6 × 10 ⁻⁷ / ° C. The mask base material 56 may be made of soda lime glass having a thermal expansion coefficient of 85 × 10 ⁻⁷ / ° C. The length of the mask base material 56 in the transport direction is about 200 mm. The length of the mask base material 56 in the width direction is appropriately set according to the width of the film 90.

  The light shielding layer 58 is formed on the lower surface of the mask base material 56. The light shielding layer 58 is made of a material capable of shielding light such as chromium. In the light shielding layer 58, a plurality of openings functioning as the first transmission region 62 and a plurality of openings functioning as the second transmission region 64 are formed. The first transmission region 62 is formed at a position different from the second transmission region 64 in the transport direction.

  Further, the first transmission region 62 is formed at a position different from the second transmission region 64 in the width direction orthogonal to the transport direction. The first transmission region 62 is disposed in the output direction of the first polarized light output from the first polarized light output unit 50. The second transmission region 64 is arranged in the output direction of the second polarized light output from the second polarized light output unit 52.

  Accordingly, the first transmission region 62 transmits the first polarized light, and the second transmission region 64 transmits the second polarized light. The polarized light that reaches the region other than the first transmission region 62 and the second transmission region 64 is shielded by the light shielding layer 58. Thereby, the alignment film 120 of the film 90 is exposed to a pattern in which the first transmission region 62 and the second transmission region 64 are overlapped by the first polarized light and the second polarized light.

  An example of the length in the width direction of the first transmission region 62 and the second transmission region 64 is 0.2 mm. An example of an interval in the width direction between the adjacent first transmission regions 62 and between the adjacent second transmission regions 64 is 0.2 mm. An example of the length of the first transmission region 62 and the second transmission region 64 in the transport direction is about 30 mm. An example of the interval between the first transmission region 62 and the second transmission region 64 in the transport direction is about 30 mm. The numerical values of the first transmission region 62 and the second transmission region 64 may be changed as appropriate.

  Next, the manufacturing method of the optical film 100 is demonstrated. First, a long film 90 wound around the feed roll 12 is prepared. Here, an example of the total length of the film 90 is about 1000 m. An example of the width of the film 90 is about 500 mm. Thereafter, one end of the film 90 is fixed to the take-up roll 28. In this state, the film 90 is disposed in a state where the lower surface of the upstream tension roll 44 and the downstream tension roll 46 are passed through and the upper surface of the holding roll 48 is passed. The cooled liquid is supplied to the flow path 54 of the holding roll 48.

  Next, rotation of the take-up roll 28 is started. As a result, the film 90 is sent out from the delivery roll 12, and the film 90 is transported along the transport direction. An example of the conveyance speed of the film 90 is 2 m / min to 10 m / min.

  The fed film 90 passes under the alignment film application unit 14. As a result, the alignment film 120 is applied to the upper surface of the film 90 by the alignment film application unit 14 over substantially the entire region in the width direction. The application of the alignment film 120 is continuously performed while the film 90 is conveyed. Therefore, the alignment film 120 is continuously applied to the upper surface of the film 90 over the entire length in the transport direction except for a part of both ends.

  The film 90 coated with the alignment film 120 is transported and passes through the alignment film drying unit 16. Thereby, the alignment film 120 applied to the upper surface of the film 90 is dried. Thereafter, the film 90 passes through the lower surface of the upstream tension roll 44.

  The film 90 in the region to which the alignment film 120 is applied passes under the first transmission region 62, thereby entering the first alignment stage. In the first alignment stage, the alignment film 120 in the region passing below the first transmission region 62 is output from the first polarization output unit 50 and the first transmission region of the mask 38 in a state where the transport of the film 90 is continued. The first polarized light having passed through 62 is exposed. Here, the film 90 is exposed while being continuously conveyed at a constant speed by the take-up roll 28. Therefore, the alignment film 120 that passes below the first transmission region 62 is exposed to the first polarized light output from the first polarized light output unit 50 continuously along the transport direction. As a result, the alignment film 120 in the region that has passed under the first transmission region 62 is exposed in a strip shape having the same width as the first transmission region 62 and extending in the transport direction. Further, since the alignment film 120 in the region is exposed by the first polarized light output from the first polarization output unit 50, the alignment film 120 in the region is aligned corresponding to the first polarized light to be exposed. . As a result, a plurality of first alignment regions 124 are formed in the alignment film 120.

  Thereafter, the film 90 in the region where the alignment film 120 is applied is transported and passes below the second transmission region 64 to enter the second alignment stage. In the second alignment stage, the second polarized light is irradiated to the alignment film 120 through the second transmission region 64 in a state where the conveyance step is continued, and a plurality of second alignment regions 126 are formed. Specifically, the alignment film of the film 90 formed in a region where the second polarized light output from the second polarization output unit 52 and transmitted through the second transmission region 64 of the mask 38 passes below the second transmission region 64. 120 is irradiated. Since the transport of the film 90 is continued, the alignment film 120 in the region is also irradiated with the second polarized light in a strip shape extending in the transport direction having the same width as the second transmission region 64.

  Here, the second transmission region 64 is formed at a position different from the first transmission region 62 in the width direction. Thereby, the second polarized light is irradiated to the alignment film 120 in a region different from the region irradiated by the first transmission region 62. Thereby, the second polarized light is irradiated between the first alignment region 124 aligned by the first polarization and the adjacent first alignment region 124, and all the regions of the alignment film 120 are aligned in the width region. The

  Here, the polarization direction of the second polarization output from the second polarization output unit 52 is orthogonal to the polarization direction of the first polarization output from the first polarization output unit 50. Thereby, the alignment direction of the region aligned by the first polarized light and the alignment direction of the region aligned by the second polarized light are orthogonal to each other. As a result, a pattern in which two regions including different orientations corresponding to the first polarization modulator 104 and the second polarization modulator 106 are alternately arranged is formed on the alignment film 120.

  Here, the film 90 in the exposure region is held by the holding roll 48 while being pressed downward by the upstream tension roll 44 and the downstream tension roll 46. Thereby, since the tension | tensile_strength of a conveyance direction is provided to the film 90 from the holding | maintenance roll 48 between the upstream tension | tensile_strength roll 44 and the downstream tension | tensile_strength roll 46, the wrinkle of the film 90 is reduced.

  Further, the film 90 is cooled by the liquid flowing through the flow path 54 of the holding roll 48. Thereby, even if the film 90 is heated by the radiation heat of the mask 38 heated by the polarized light from the polarized light source 34, the temperature difference of the film 90 hardly occurs between the upstream side and the downstream side of the exposure region. As a result, wrinkles of the film 90 due to a difference in thermal expansion due to a temperature difference can be further reduced. Accordingly, the alignment film 120 of the film 90 that is hardly wrinkled is exposed and irradiated with polarized light at a desired angle, and as a result, variations in the alignment angle are reduced.

  Thereafter, the film 90 on which the alignment film 120 has been exposed passes under the downstream tension roll 46 and reaches below the liquid crystal film application unit 20. Thereby, the liquid crystal film 122 is applied to the upper surface of the alignment film 120. Since the liquid crystal film 122 is continuously applied to the upper surface of the alignment film 120 of the film 90 being conveyed, the liquid crystal film 122 is applied over the entire length of the film 90 in the conveyance direction. Thereafter, the film 90 coated with the liquid crystal film 122 is conveyed and passes through the liquid crystal film alignment unit 22. As a result, the liquid crystal film 122 is heated by the liquid crystal film alignment unit 22, and the molecules of the liquid crystal film 122 are dried while being aligned along the alignment of the alignment film 120 formed on the lower surface.

  Next, the film 90 on which the applied liquid crystal film 122 is oriented passes through the liquid crystal film curing unit 24. Thereby, the liquid crystal film 122 is irradiated with ultraviolet rays, and the liquid crystal film 122 is cured in an aligned state. As a result, the molecules of the liquid crystal film 122 are aligned corresponding to the first alignment region 124 and the second alignment region 126, so that the first liquid crystal region 128 and the second liquid crystal region 130 are formed. As shown in FIGS. 1 and 2, the first polarization modulator 104 and the second polarization modulator 106 formed by the alignment film 120 and the liquid crystal film 122 are alternately formed in the width direction of the film 90. Next, a separate film 92 is supplied to the upper surface of the liquid crystal film 122 and pasted. Then, the film 90 with the separate film 92 attached to the upper surface is taken up by the take-up roll 28.

  Thereafter, the film 90 is conveyed by the take-up roll 28 and the exposure of the film 90 is continued until the supply of the film 90 wound around the feed roll 12 is completed. And if all the films 90 wound around the delivery roll 12 are supplied, the manufacturing process of the optical film 100 will be complete | finished. The film 90 may be continuously exposed by connecting the rear end of the completed film 90 to the front end of the next new film 90. Finally, the film 90 is cut to a predetermined length to complete the optical film 100 shown in FIGS.

  As described above, in the exposure apparatus 10, the exposure area of the film 90 being conveyed is exposed while being cooled by the holding roll 48, so that a temperature difference hardly occurs in the film 90 being exposed. Thereby, since the exposure apparatus 10 can suppress the wrinkle of the film 90 resulting from a temperature difference, it can suppress the variation in the alignment angle of the alignment film 120 and the liquid crystal film 122 due to the wrinkle.

  In the exposure apparatus 10, the holding roll 48 is in contact with the exposure area to apply tension to the film 90. Thereby, the holding roll 48 can further suppress the generation of wrinkles of the film 90 by the tension.

  Next, an embodiment in which a part of the exposure apparatus 10 described above is changed will be described. 8 to 14 are schematic enlarged views of the vicinity of the exposure unit 18 with a part thereof changed. 10 to 14, the holding roll 48 has a cooling function, but may function as a simple roller.

  As shown in FIG. 8, the exposure apparatus 10 has an upstream driven roll 248 and a downstream driven roll 249. The upstream driven roll 248 and the downstream driven roll 249 are examples of the holding unit of the cooling unit. The upstream driven roll 248 is disposed on the upstream side of the mask 38. The downstream driven roll 249 is disposed on the downstream side of the mask 38. Accordingly, the upstream driven roll 248 and the downstream driven roll 249 are held in contact with the film 90 in a region different from the exposure region. The upstream driven roll 248 and the downstream driven roll 249 are arranged at the same height. Accordingly, the upstream driven roll 248 and the downstream driven roll 249 hold the film 90 in parallel with the mask 38.

  Channels 250 and 251 are formed inside the upstream driven roll 248 and the downstream driven roll 249. During the conveyance of the film 90, a cooling liquid such as water is supplied to the flow paths 250 and 251. As a result, the film 90 is cooled by the liquid flowing through the upstream driven roll 248 and the downstream driven roll 249.

  In the exposure apparatus 10, the upstream driven roll 248 and the downstream driven roll 249 cool immediately before and after the film 90 in the exposure area under exposure, so that the wrinkles of the film 90 are suppressed and the variation in the orientation angle is reduced. Can be suppressed. Further, since the upstream driven roll 248 and the downstream driven roll 249 are arranged in a region different from the exposure region, the alignment film 120 is formed by the polarized light reflected by the upstream driven roll 248 and the downstream driven roll 249. Exposure can be suppressed. As a result, the exposure apparatus 10 can further suppress variations in the orientation angle.

  In the exposure apparatus 10, both the upstream driven roll 248 and the downstream driven roll 249 are provided with a cooling function, but either one may be provided with a cooling function. Further, both the upstream driven roll 248 and the downstream driven roll 249 may have a cooling function, and may be switched as appropriate.

  As shown in FIG. 9, the exposure apparatus 10 has a holding surface portion 348. The holding surface part 348 is an example of a holding part of the cooling part. The holding surface portion 348 is disposed in a region facing the polarized light source 34. The holding surface part 348 is held in contact with the film 90 in the exposure area irradiated with polarized light.

  The holding surface portion 348 includes a pair of driven rolls 350 and 352, an endless belt 354, and a flow path 356. The pair of driven rolls 350 and 352 are arranged on the upstream side and the downstream side with the exposure region interposed therebetween. The endless belt 354 is stretched over the driven roll 350 and the driven roll 352. The upper surface of the endless belt 354 is held so as to be parallel to the mask 38. Thereby, the endless belt 354 holds the film 90 in parallel with the mask 38. Thus, since the endless belt 354 is in surface contact with the film 90, the wrinkles of the film 90 can be further suppressed, and the distortion of the pattern transferred to the film 90 can be reduced. A cooling liquid is supplied to the channel 356. The upper surface of the flow path 356 is formed in a planar shape parallel to the transport path of the film 90. Thereby, since the flow path 356 is in surface contact with the film 90 via the endless belt 354, the cooling efficiency of the film 90 can be improved.

  As shown in FIG. 10, the exposure apparatus 10 has a pair of film blowers 448 and 449 whose ends are hose-shaped. One film blower 448 is disposed on the opposite side of the other film blower 449 across the center of the holding roll 48 in the transport direction. The film blower 448 blows the cooled gas to the upstream portion of the film 90 in the exposure region to air-cool the film 90 in the region. The film blower 449 blows the cooled gas to the downstream portion of the film 90 in the exposure region to air-cool the film 90 in the region. Since the film blowing parts 448 and 449 directly cool the film 90 in the entire exposure area, the cooling efficiency can be improved.

  As shown in FIG. 11, the exposure apparatus 10 includes a pair of film blowing units 448 and 449. The film blowing parts 448 and 449 are arranged in an area adjacent to the exposure area. The film blower 448 is disposed on the upstream side of the exposure area and on the exposure area side of the upstream tension roll 44. The film blower 449 is disposed on the downstream side of the exposure region and on the exposure region side of the downstream tension roll 46. Since the film blowing sections 448 and 449 blow and cool the cooled gas to the film 90 in the area adjacent to the exposure area, the turbulence of the air between the mask 38 and the film 90 due to the blowing can be suppressed. An example of the adjacent area is a roll that is outside the exposure area and closest to the exposure area, that is, an area closer to the exposure area than the upstream tension roll 44 and the downstream tension roll 46. Thereby, the film ventilation parts 448 and 449 can cool the film 90, without disturbing the characteristic of polarization.

  As shown in FIG. 12, the exposure apparatus 10 includes a pair of mask cooling units 548 and 549. One mask cooling unit 548 is disposed on the opposite side of the other mask cooling unit 549 with the mask 38 interposed therebetween in the transport direction. The mask cooling unit 548 blows air to the upstream portion of the mask 38. The mask cooling unit 549 blows air to the downstream portion of the mask 38. Thereby, the mask cooling units 548 and 549 cool the mask 38 with air. Since the mask 38 is cooled, the heating of the film 90 due to the heat of the mask 38 during exposure can be suppressed. Thereby, since the film 90 can be cooled, wrinkles of the film 90 can be suppressed. The mask 38 is preferably cooled so as not to rise in temperature by 4 ° C. or more, preferably 1 ° C. or more, compared with that before exposure. The mask 38 is preferably used in an assumed usage environment, and an example of the usage environment is preferably used at a temperature of about 23 ° C. ± 1 ° C. and a humidity of 55% to 65%.

  As illustrated in FIG. 13, the exposure apparatus 10 includes a pair of holding air cooling units 648 and 649 that are examples of a holding cooling unit. The holding air cooling unit 648 sends air to the upstream mask holding unit 40. The holding air cooling unit 649 sends air to the downstream mask holding unit 40. Thereby, the mask holding part 40 is air-cooled by the holding air cooling parts 648 and 649. As a result, since the mask 38 is cooled, the heating of the film 90 due to the heat of the mask 38 at the time of exposure can be suppressed, and the film 90 can be cooled to prevent wrinkles of the film 90.

  As illustrated in FIG. 14, the exposure apparatus 10 includes a pair of retentate cooling units 748 and 749 that are examples of a retentive cooling unit. The retentate cooling units 748 and 749 are flow paths formed inside the mask holding unit 40. Liquids such as water are supplied to the retentate cooling units 748 and 749. Accordingly, the mask holding unit 40 is cooled by the liquid supplied to the holding liquid cooling units 748 and 749. As a result, since the mask 38 is cooled, heating of the film 90 due to the heat of the mask 38 during exposure can be suppressed and the film 90 can be cooled, so that wrinkles of the film 90 can be suppressed.

The cooling method of the film 90 is not limited to the embodiment described above. For example, the film 90 may be cooled by increasing the rotation speed of the take-up roll 28 and increasing the conveyance speed of the film 90. In addition, the upper limit of the conveyance speed of the film 90 is determined considering that the alignment film 120 can be irradiated with polarized light to the extent that the film 90 can be aligned. Therefore, the upper limit of the conveyance speed can be determined based on the lower limit value of energy necessary for aligning the alignment film 120 and the illuminance of the irradiated polarized light. For example, when the lower limit value of energy required for aligning the alignment film 120 is 15 mJ / cm ^{2 and} the lengths of the first transmission region 62 and the second transmission region 64 in the transport direction are 30 mm, respectively. When the illuminance of polarized light is 100 mW / cm ² , the upper limit of the conveyance speed is 12 m / min.

  Next, an experiment for proving the effect of the above-described embodiment will be described. FIG. 15 is a table of experimental results in which the influence of the orientation angle due to film cooling was examined. The variation in the orientation angle shown in FIG. 15 was calculated from the orientation angle measured by KOBRA-CCD manufactured by Oji Scientific Instruments. The variation in the orientation angle is a variation from a set value of 0 °. In this experiment, samples of Examples 1 to 4 manufactured by the exposure apparatus 10 of the above-described embodiment and Comparative Examples 1 and 2 to be compared with Examples 1 to 4 were prepared. The width of the film to be conveyed was 350 mm for both COP and TAC.

  As shown in FIG. 15, in the case of the first to third examples in which the mask 38 was cooled so that the temperature did not rise by 1 ° C. or more, wrinkles in the width direction were suppressed and the variation in the orientation angle was ± 0. It was possible to make it 1 ° or less. This effect shows that the film 90 does not depend on COP or TAC. In the stereoscopic image display device in which Example 1 to Example 3 were mounted, color unevenness was not visually recognized, and a favorable stereoscopic image could be obtained. On the other hand, in Comparative Examples 1 and 2 in which the mask 38 is not cooled, the orientation angle variation is ± 0.8 ° or more, which is extremely large. Furthermore, as the result of Example 4 shows, it can be seen that the variation in the orientation angle can be made ± 0.2 ° or less by increasing the conveying speed and cooling the film 90.

  FIG. 16 is a graph of experimental results obtained by examining wrinkles of film 90 and variations in orientation angle. In this experiment, the film 90 was cooled by the mask cooling shown in FIG. The horizontal axis shown in FIG. 16 indicates the position of the film 90 in the width direction.

  As shown in FIG. 16, in the film 90 in which the wrinkles are not generated in the exposure area indicated by the solid line, it is understood that the variation in the orientation angle is suppressed to ± 0.2 ° or less. On the other hand, in the film 90 in which wrinkles are generated in the exposure area indicated by the dotted line, the variation in the orientation angle is ± 0.9 ° or more. Thus, it can be seen that the variation in the orientation angle can be made extremely small by suppressing the wrinkles by cooling.

  The shape, arrangement, numerical values such as the width and length, the number, the material, and the like of the configuration of the above-described embodiment may be changed as appropriate. Moreover, you may combine each embodiment.

  For example, in the above-described embodiment, an example in which exposure is performed while continuously conveying is shown, but conveyance may be temporarily stopped in the middle of the film 90. In this case, the film 90 is intermittently conveyed in which conveyance and stop are repeated alternately.

  In the above-described embodiment, the example in which the light shielding layer 58 of the mask 38 is formed on the lower surface of the mask base material 56 is shown, but the light shielding layer 58 may be formed on the upper surface of the mask base material 56.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

  DESCRIPTION OF SYMBOLS 10 Exposure apparatus, 12 Delivery roll, 14 Orientation film application part, 16 Orientation film drying part, 18 Exposure part, 20 Liquid crystal film application part, 22 Liquid crystal film orientation part, 24 Liquid crystal film hardening part, 26 Separate film supply part, 28 Winding Take-up roll, 34 polarized light source, 38 mask, 40 mask holding section, 44 upstream tension roll, 46 downstream tension roll, 48 holding roll, 50 first polarization output section, 52 second polarization output section, 54 flow path, 56 Mask base material, 58 light shielding layer, 62 first transmission region, 64 second transmission region, 90 film, 92 separate film, 100 optical film, 102 resin base material, 104 1st polarization modulation unit, 106 2nd polarization modulation unit, 110 arrow, 112 arrow, 114 arrow, 116 arrow, 120 alignment film, 122 liquid crystal film, 124 1st alignment region, 126 2nd alignment region, 128 1st liquid crystal region, 130 second liquid crystal region, 150 stereoscopic image display device, 152 light source, 154 image output unit, 158 optical function film, 164 polarizing plate, 166 holding substrate, 168 image generating unit, 170 holding substrate, 174 polarizing plate, 178 image for right eye Generator, 180 left-eye image generator, 190 polarized glasses, 192 right-eye modulator, 194 left-eye modulator, 248 upstream driven roll, 249 downstream driven Roll, 250 flow path, 251 flow path, 348 holding surface section, 350 driven roll, 352 driven roll, 354 endless belt, 356 flow path, 448 film blowing section, 449 film blowing section, 548 mask cooling section, 549 mask cooling section, 648 Holding air cooling part, 649 Holding air cooling part, 748 Retaining liquid cooling part, 749 Retaining liquid cooling part

Claims (14)

A transport unit for transporting a long film;
An exposure unit that exposes the film being conveyed by the conveyance unit through a mask;
An exposure apparatus comprising: a cooling unit that cools the film exposed by the exposure unit. The exposure apparatus according to claim 1, wherein the cooling unit includes a holding unit that cools in contact with the film.   The exposure apparatus according to claim 2, wherein the holding unit cools in contact with the film in an exposure region exposed by the exposure unit.   The exposure apparatus according to claim 2, wherein the holding unit cools in contact with the film in a region different from an exposure region exposed by the exposure unit. The exposure apparatus according to any one of claims 2 to 4, wherein the holding unit rotates in accordance with the conveyance of the film. The exposure apparatus according to claim 1, wherein the cooling unit includes a film blowing unit that air-cools the film.   The exposure apparatus according to claim 6, wherein the film blower cools the film by air in an exposure region exposed by the exposure unit.   The exposure apparatus according to claim 6 or 7, wherein the film blowing unit air-cools the film in a region adjacent to an exposure region exposed by the exposure unit. The exposure apparatus according to claim 1, wherein the cooling unit includes a mask cooling unit that cools the mask. The exposure apparatus according to claim 9, wherein the mask cooling unit air-cools the mask. A mask holding part for holding the mask;
The exposure apparatus according to claim 1, wherein the cooling unit includes a holding cooling unit that cools the mask holding unit. The exposure apparatus according to claim 11, wherein the holding cooling unit air-cools the mask holding unit. The exposure apparatus according to claim 11, wherein the holding cooling unit cools the mask holding unit with a liquid. A transport stage for transporting a long film;
An exposure step of exposing the film being conveyed by the conveyance step through a mask;
A cooling step of cooling the film exposed by the exposure step.

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