JP5726413B2 - 発光素子 - Google Patents
発光素子 Download PDFInfo
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- JP5726413B2 JP5726413B2 JP2009259294A JP2009259294A JP5726413B2 JP 5726413 B2 JP5726413 B2 JP 5726413B2 JP 2009259294 A JP2009259294 A JP 2009259294A JP 2009259294 A JP2009259294 A JP 2009259294A JP 5726413 B2 JP5726413 B2 JP 5726413B2
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- carrier trap
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- emitting device
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- 239000004065 semiconductor Substances 0.000 claims description 52
- 230000004888 barrier function Effects 0.000 claims description 23
- 229910052738 indium Inorganic materials 0.000 claims description 17
- 150000001875 compounds Chemical class 0.000 claims description 15
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 12
- 230000007423 decrease Effects 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000013078 crystal Substances 0.000 description 11
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 10
- 229910002601 GaN Inorganic materials 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000000969 carrier Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- -1 gallium nitride series compound Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/341—Structures having reduced dimensionality, e.g. quantum wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1053—Comprising an active region having a varying composition or cross-section in a specific direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/341—Structures having reduced dimensionality, e.g. quantum wires
- H01S5/3412—Structures having reduced dimensionality, e.g. quantum wires quantum box or quantum dash
Description
Claims (20)
- 基板と、
前記基板上に形成された第1半導体層と、
前記第1半導体層上に形成された第2半導体層と、
前記第1半導体層と前記第2半導体層との間に介された井戸層及びバリア層を含む多重量子井戸構造と、を備え、
前記多重量子井戸構造内の少なくとも一層にキャリアトラップ部が2以上集合したキャリアトラップクラスタを複数含み、前記キャリアトラップクラスタは、隣接する他のキャリアトラップクラスタと少なくとも20nm以上離隔していることを特徴とする発光素子。 - 前記キャリアトラップ部は、外周部から中心部に向かって、直線状にバンドギャップエネルギが減少することを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、外周部から中心部に向かって、階段状にバンドギャップエネルギが減少することを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、外周部から中心部に向かって、曲線状にバンドギャップエネルギが減少することを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、外周部から中心部に向かって、バンドギャップエネルギが徐々に減少することを特徴とする請求項1乃至4の何れか一項に記載の発光素子。
- 前記キャリアトラップ部は、前記多重量子井戸構造内の前記井戸層内に形成されることを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、前記井戸層内に埋め込まれて形成されることを特徴とする請求項6に記載の発光素子。
- 前記キャリアトラップ部を含む層は、インジウムを含むことを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部を含む層は、AlInGaN系化合物半導体またはAlInGaP系化合物半導体からなることを特徴とする請求項8に記載の発光素子。
- 前記キャリアトラップ部を含む層からのインジウムの蒸発を防止するインジウム蒸発防止層を、前記多重量子井戸構造内に更に含むことを特徴とする請求項8または9に記載の発光素子。
- 前記キャリアトラップ部の外周部から中心部に向かって、インジウムの含有量が徐々に増加することを特徴とする請求項8または9に記載の発光素子。
- 前記キャリアトラップ部の最外部のインジウム含有量より、前記キャリアトラップ部の中心部のインジウム含有量が少なくとも2%以上高いことを特徴とする請求項11に記載の発光素子。
- 前記キャリアトラップ部を含む層は前記井戸層であり、前記バリア層はアルミニウムを含むことを特徴とする請求項8または9に記載の発光素子。
- 前記バリア層のAl含有量は、前記キャリアトラップ部を含む層に発生する圧縮応力を相殺可能な引張応力を発生させる含有量に調整されることを特徴とする請求項13に記載の発光素子。
- 前記バリア層は、AlGaInN系化合物半導体またはAlGaInP系化合物半導体からなることを特徴とする請求項13に記載の発光素子。
- 前記キャリアトラップ部は、前記層が成長される間に前記キャリアトラップ部を含む層と同時に形成されることを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、前記キャリアトラップ部を含む層に形成された転位の密度より高い密度で分布されることを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、1〜10nmの大きさで形成されることを特徴とする請求項1に記載の発光素子。
- 前記キャリアトラップ部は、2〜5nmの大きさで形成されることを特徴とする請求項18に記載の発光素子。
- 前記キャリアトラップクラスタは、隣接する他のキャリアトラップクラスタと少なくとも40〜120nm離隔して形成されることを特徴とする請求項1に記載の発光素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15818409P | 2009-03-06 | 2009-03-06 | |
US61/158,184 | 2009-03-06 |
Publications (2)
Publication Number | Publication Date |
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JP2010212657A JP2010212657A (ja) | 2010-09-24 |
JP5726413B2 true JP5726413B2 (ja) | 2015-06-03 |
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JP2009259294A Active JP5726413B2 (ja) | 2009-03-06 | 2009-11-12 | 発光素子 |
Country Status (8)
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US (2) | US7667225B1 (ja) |
EP (2) | EP2226854A1 (ja) |
JP (1) | JP5726413B2 (ja) |
KR (2) | KR100931483B1 (ja) |
CN (1) | CN102439740B (ja) |
DE (1) | DE102010010211B4 (ja) |
TW (1) | TWI473296B (ja) |
WO (1) | WO2010101335A1 (ja) |
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KR101874904B1 (ko) * | 2011-11-07 | 2018-08-02 | 엘지이노텍 주식회사 | 발광 소자 |
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US10490697B2 (en) | 2011-12-03 | 2019-11-26 | Sensor Electronic Technology, Inc. | Epitaxy technique for growing semiconductor compounds |
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JP2009038310A (ja) * | 2007-08-03 | 2009-02-19 | Sumitomo Electric Ind Ltd | 面発光型半導体光デバイス |
KR100877774B1 (ko) * | 2007-09-10 | 2009-01-16 | 서울옵토디바이스주식회사 | 개선된 구조의 발광다이오드 |
US8183557B2 (en) * | 2007-09-19 | 2012-05-22 | The Regents Of The University Of California | (Al,In,Ga,B)N device structures on a patterned substrate |
KR100887050B1 (ko) * | 2007-12-06 | 2009-03-04 | 삼성전기주식회사 | 질화물 반도체 소자 |
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WO2010101335A1 (en) | 2010-09-10 |
KR20100100567A (ko) | 2010-09-15 |
KR100931483B1 (ko) | 2009-12-11 |
EP2226854A1 (en) | 2010-09-08 |
US7772588B1 (en) | 2010-08-10 |
JP2010212657A (ja) | 2010-09-24 |
KR101158072B1 (ko) | 2012-06-22 |
TW201034236A (en) | 2010-09-16 |
CN102439740B (zh) | 2015-01-14 |
EP3869572A1 (en) | 2021-08-25 |
DE102010010211A1 (de) | 2010-12-09 |
CN102439740A (zh) | 2012-05-02 |
US7667225B1 (en) | 2010-02-23 |
TWI473296B (zh) | 2015-02-11 |
DE102010010211B4 (de) | 2021-10-14 |
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