JP2008053539A - 半導体光素子 - Google Patents
半導体光素子 Download PDFInfo
- Publication number
- JP2008053539A JP2008053539A JP2006229436A JP2006229436A JP2008053539A JP 2008053539 A JP2008053539 A JP 2008053539A JP 2006229436 A JP2006229436 A JP 2006229436A JP 2006229436 A JP2006229436 A JP 2006229436A JP 2008053539 A JP2008053539 A JP 2008053539A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- layer
- region
- conductivity type
- mesa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 224
- 230000003287 optical effect Effects 0.000 title claims abstract description 83
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000005253 cladding Methods 0.000 claims description 69
- 230000000903 blocking effect Effects 0.000 claims description 45
- 150000001875 compounds Chemical class 0.000 claims description 18
- 125000005842 heteroatom Chemical group 0.000 abstract description 5
- 238000005530 etching Methods 0.000 description 39
- 230000012010 growth Effects 0.000 description 29
- 239000013078 crystal Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 18
- 230000004888 barrier function Effects 0.000 description 13
- 239000012535 impurity Substances 0.000 description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000010355 oscillation Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000003071 parasitic effect Effects 0.000 description 6
- 239000000969 carrier Substances 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000005524 hole trap Effects 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- -1 for example Inorganic materials 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000005516 deep trap Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 108091006149 Electron carriers Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2304/00—Special growth methods for semiconductor lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2206—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on III-V materials
- H01S5/2209—GaInP based
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2222—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties
- H01S5/2224—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties semi-insulating semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34306—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】半導体光素子11では、第1導電型クラッド層13がGaAs基板15の主面15a上に設けられる。発光領域17は、第1導電型クラッド層13と第2導電型クラッド領域19との間に設けられる。電流ブロック領域21は、GaAs基板13上に設けられており、また半導体メサ23を埋め込む。半導体メサ23は、GaAs基板13上に設けられた発光領域17を含む。半導体メサ23は、発光領域17に加えて、第2導電型クラッド領域19のメサ部分19aを含む。電流ブロック領域21はアンドープIII−V族半導体からなる。このアンドープIII−V族半導体は600度以下で成長される。アンドープIII−V族半導体の抵抗率は印加電圧5ボルトまでにおいて105Ω・cm以上の値を有す。
【選択図】図1
Description
図1は、本実施の形態に係る半導体光素子を示す断面図である。この半導体光素子は、例えば長波長光通信のために用いられる。半導体光素子11では、第1導電型クラッド層13が、第1導電型のGaAs基板15の主面15a上に設けられている。発光領域17は、第1導電型クラッド層13と第2導電型クラッド領域19の第1の領域19aとの間に設けられている。発光領域17と第1の領域19aにより、半導体メサ23が形成されている。電流ブロック領域21は、第1導電型クラッド層13上に設けられており、また半導体メサ23を埋め込む。電流ブロック領域21は高抵抗のアンドープIII−V族半導体からなる半導体層21aを含む。
一例の半導体光素子11では
第2導電型コンタクト層25:GaAs
絶縁層27:SiN、SiO2等の誘電体
である。
電子キャリア供給層:n型GaInP、0.5マイクロメートル厚、n型ドーパントとしてシリコンを1×1017cm−3ドープ
高抵抗層:アンドープGaInP、1.5マイクロメートル厚
正孔キャリア供給層:p型GaInP、0.5マイクロメートル厚、p型ドーパントとして亜鉛を7×1017cm−3ドープ
コンタクト層:p型GaAs、0.2マイクロメートル厚、p型ドーパントとして亜鉛を1×1019cm−3ドープ
上記各キャリア供給層より電子と正孔がアンドープGaInP高抵抗層に注入される。この成長には、例えば有機金属気相成長法を用いる。
第1導電型クラッド層13:n型GaInP下部クラッド、1.5μm厚
第1導電型GaAs基板15:n型単結晶GaAs基板、100μm厚
第2導電型クラッド領域19
第1の領域19a:p型GaInP上部クラッド、0.3μm厚
第2の領域19b:p型GaInP上部クラッド、1.2μm厚
電流ブロック領域21:アンドープGaInP、0.6μm厚
発光領域17
井戸層24a:アンドープGaInNAs、7nm厚
障壁層24b:アンドープGaAs、8nm厚
上部光閉じ込め層24c:アンドープGaAs、140nm厚
下部光閉じ込め層24d:アンドープGaAs、140nm厚
コンタクト層25:p型GaAs、0.2μm厚
絶縁層27:SiN、SiO2等の誘電体
である。この半導体レーザでは、井戸層24aにGaInNAsを用いることで、1μm以上の長波長域(例えば1μm〜1.6μmの発振波長帯)の発振波長を有する長波長半導体レーザを作製できる。図3は、この構造の半導体レーザに関してシミュレーションにより計算したI−L特性を示す図面である。但し、共振器長は300μm、また両端面はアンコートと仮定した。また電流ブロック領域21の抵抗率は、図2(A)に示される摂氏500度で成長した場合の特性を使用した。計算されたI−L特性によれば、閾値電流は低く、I−L特性の直線性は良好である。したがって、低温成長のアンドープGaInPにより良好な電流閉じ込めが可能であることが明らかとなった。
一方、本実施例では、下部クラッド層43がエッチング停止層としても働くので、エッチング停止層を別途形成する必要が無い。したがって、エッチング停止層導入に起因する、上記素子抵抗増加等の問題の発生を回避できる。
図5は、本実施の形態に係る半導体光素子の断面構造を示す図面である。半導体光素子11aでは、半導体光素子11と同様に、第1導電型クラッド層13が第1導電型GaAs基板15上に設けられ、発光領域17が第1導電型クラッド層13上に設けられている。半導体メサ81が第1導電型クラッド層13の第1のエリア13b上に位置する。半導体メサ81は発光領域17、第2導電型クラッド領域83および第2導電型コンタクト層85を含む。電流ブロック領域87は第1導電型クラッド層13の第2のエリア13c上に位置しており、また半導体メサ81を埋め込んでいる。電流ブロック領域87は、電流ブロック領域21と同様に、高抵抗のアンドープIII−V族半導体からなる半導体層21aを含む。この半導体光素子11aによれば、半導体光素子11に比べて、より少ない回数の結晶成長により、半導体レーザ等の半導体光素子を作製できる構造を提供できるので、プロセス簡略化や製造コストの削減が図れ、且つ発光領域17に与える結晶成長中の熱ストレスを低減できる。これ故に、特に熱ストレスに弱いガリウム、窒素およびヒ素を構成元素として含むIII−V族化合物半導体混晶からなる井戸層を用いる場合に好適である。
第2導電型クラッド領域83:p型GaInP上部クラッド層、1.5μm厚
電流ブロック領域87:アンドープGaInP、2μm厚
第2導電型コンタクト層85:p型GaAs、0.2μ厚
発光領域17
井戸層24a:アンドープGaInNAs、7nm厚
障壁層24b:アンドープGaAs、8nm厚
上部光閉じ込め層24c:アンドープGaAs、140nm厚
下部光閉じ込め層24d:アンドープGaAs、140nm厚
第1導電型クラッド層13:n型GaInP下部クラッド、1.5μm厚
第1導電型GaAs基板15:n型GaAs基板 100μm厚
である。
Claims (5)
- 第1導電型のGaAs基板上に設けられており、発光領域、および第1の第2導電型クラッド領域を含む半導体メサと、
前記GaAs基板上に設けられており、前記半導体メサを埋め込む電流ブロック領域と
を備え、
前記発光領域は前記GaAs基板と前記第1の第2導電型クラッド領域との間に設けられ、
前記電流ブロック領域はアンドープIII−V族化合物半導体からなる半導体層を含む、ことを特徴とする半導体光素子。 - 前記半導体層の前記アンドープIII−V族化合物半導体はGaInPまたはAlGaInPのいずれかである、ことを特徴とする請求項1に記載された半導体光素子。
- 前記アンドープIII−V族化合物半導体の抵抗率は105Ωcm以上である、ことを特徴とする請求項1または請求項2に記載された半導体光素子。
- 前記半導体メサおよび前記電流ブロック領域上に設けられた第2の第2導電型クラッド領域を更に備える、ことを特徴とする請求項1〜請求項3のいずれか一項に記載された半導体光素子。
- 前記半導体メサは第2導電型コンタクト層をさらに含み、
前記第1の第2導電型クラッド領域は前記第2導電型コンタクト層と前記発光領域との間に設けられている、ことを特徴とする請求項1〜請求項3のいずれか一項に記載された半導体光素子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006229436A JP2008053539A (ja) | 2006-08-25 | 2006-08-25 | 半導体光素子 |
US11/889,613 US20080049804A1 (en) | 2006-08-25 | 2007-08-15 | Semiconductor laser diode with a mesa stripe buried by a current blocking layer made of un-doped semiconductor grown at a low temperature and a method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006229436A JP2008053539A (ja) | 2006-08-25 | 2006-08-25 | 半導体光素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008053539A true JP2008053539A (ja) | 2008-03-06 |
Family
ID=39113401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006229436A Pending JP2008053539A (ja) | 2006-08-25 | 2006-08-25 | 半導体光素子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080049804A1 (ja) |
JP (1) | JP2008053539A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220115835A1 (en) * | 2019-01-31 | 2022-04-14 | Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik | Device for generating laser radiation |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008047672A (ja) * | 2006-08-14 | 2008-02-28 | Sumitomo Electric Ind Ltd | 半導体光素子 |
JP2008243954A (ja) * | 2007-03-26 | 2008-10-09 | Sumitomo Electric Ind Ltd | 面発光型半導体光デバイス |
JP2009038310A (ja) * | 2007-08-03 | 2009-02-19 | Sumitomo Electric Ind Ltd | 面発光型半導体光デバイス |
US8839327B2 (en) * | 2008-06-25 | 2014-09-16 | At&T Intellectual Property Ii, Lp | Method and apparatus for presenting media programs |
CN102439740B (zh) | 2009-03-06 | 2015-01-14 | 李贞勋 | 发光器件 |
DE102012111512B4 (de) * | 2012-11-28 | 2021-11-04 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterstreifenlaser |
WO2020181938A1 (zh) * | 2019-03-14 | 2020-09-17 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
JP7436881B2 (ja) * | 2019-07-09 | 2024-02-22 | 日本電信電話株式会社 | 光合波回路 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111487A (ja) * | 1990-08-31 | 1992-04-13 | Toshiba Corp | 半導体レーザの製造方法 |
JPH04174583A (ja) * | 1990-11-07 | 1992-06-22 | Oki Electric Ind Co Ltd | 半導体レーザ素子の製造方法 |
JPH0897510A (ja) * | 1994-07-25 | 1996-04-12 | Mitsubishi Electric Corp | 半導体レーザの製造方法,及び半導体レーザ |
JP2001024276A (ja) * | 1999-07-13 | 2001-01-26 | Mitsubishi Chemicals Corp | 半導体発光装置 |
JP2001068788A (ja) * | 1999-08-26 | 2001-03-16 | Sharp Corp | 埋め込みヘテロ型半導体レーザ素子およびその製造方法並びにそれを用いた光モジュール |
JP2002353553A (ja) * | 2001-05-22 | 2002-12-06 | Mitsubishi Chemicals Corp | 半導体発光装置及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722691A (ja) * | 1993-06-30 | 1995-01-24 | Mitsubishi Electric Corp | 半導体レーザとその製造方法 |
US5656539A (en) * | 1994-07-25 | 1997-08-12 | Mitsubishi Denki Kabushiki Kaisha | Method of fabricating a semiconductor laser |
JP3553147B2 (ja) * | 1994-09-05 | 2004-08-11 | 三菱電機株式会社 | 半導体層の製造方法 |
JP3625776B2 (ja) * | 2001-03-16 | 2005-03-02 | 古河電気工業株式会社 | 格子定数測定方法およびその測定装置 |
JP2003060306A (ja) * | 2001-08-13 | 2003-02-28 | Rohm Co Ltd | リッジ型半導体レーザ素子 |
JP2003152283A (ja) * | 2001-11-19 | 2003-05-23 | Mitsubishi Electric Corp | GaInNAs層の形成方法、エピタキシャルウェハ、半導体レーザ、高電子移動度トランジスタ、ヘテロ接合バイポーラトランジスタ、及び高周波集積回路 |
JP2008047672A (ja) * | 2006-08-14 | 2008-02-28 | Sumitomo Electric Ind Ltd | 半導体光素子 |
-
2006
- 2006-08-25 JP JP2006229436A patent/JP2008053539A/ja active Pending
-
2007
- 2007-08-15 US US11/889,613 patent/US20080049804A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111487A (ja) * | 1990-08-31 | 1992-04-13 | Toshiba Corp | 半導体レーザの製造方法 |
JPH04174583A (ja) * | 1990-11-07 | 1992-06-22 | Oki Electric Ind Co Ltd | 半導体レーザ素子の製造方法 |
JPH0897510A (ja) * | 1994-07-25 | 1996-04-12 | Mitsubishi Electric Corp | 半導体レーザの製造方法,及び半導体レーザ |
JP2001024276A (ja) * | 1999-07-13 | 2001-01-26 | Mitsubishi Chemicals Corp | 半導体発光装置 |
JP2001068788A (ja) * | 1999-08-26 | 2001-03-16 | Sharp Corp | 埋め込みヘテロ型半導体レーザ素子およびその製造方法並びにそれを用いた光モジュール |
JP2002353553A (ja) * | 2001-05-22 | 2002-12-06 | Mitsubishi Chemicals Corp | 半導体発光装置及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220115835A1 (en) * | 2019-01-31 | 2022-04-14 | Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik | Device for generating laser radiation |
Also Published As
Publication number | Publication date |
---|---|
US20080049804A1 (en) | 2008-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7638792B2 (en) | Tunnel junction light emitting device | |
JP2008053539A (ja) | 半導体光素子 | |
US20080037607A1 (en) | Semiconductor laser diode with a ridge structure buried by a current blocking layer made of un-doped semiconductor grown at a low temperature and a method for producing the same | |
JPWO2006033237A1 (ja) | 電流狭窄構造および半導体レーザ | |
US20080063020A1 (en) | Group III Nitride Semiconductor Optical Device Group III Nitride Semiconductor Optical Device | |
US9595811B2 (en) | Quantum cascade semiconductor laser | |
JP2016031970A (ja) | 光半導体装置 | |
JP2008243954A (ja) | 面発光型半導体光デバイス | |
US20090041075A1 (en) | Surface-emitting type semiconductor optial device and method for manufacturing a surface-emitting type semiconductor optical device | |
JP2006253212A (ja) | 半導体レーザ | |
JP2010010622A (ja) | 半導体光素子 | |
US7215691B2 (en) | Semiconductor laser device and method for fabricating the same | |
JP2019033152A (ja) | 垂直共振型面発光レーザ、垂直共振型面発光レーザを作製する方法 | |
US20080283852A1 (en) | Light-emitting device and a method for producing the same | |
US7986721B2 (en) | Semiconductor optical device including a PN junction formed by a second region of a first conductive type semiconductor layer and a second conductive type single semiconductor layer | |
US7323722B2 (en) | Semiconductor optical device | |
US7271422B2 (en) | Semiconductor optical device | |
JP2011040632A (ja) | 半導体光素子 | |
US7838893B2 (en) | Semiconductor optical device | |
JP5181420B2 (ja) | 面発光半導体レーザ | |
JP2003008147A (ja) | 半導体レーザ素子及びその製造方法 | |
KR102440071B1 (ko) | 반도체 레이저 다이오드 소자 및 그 제조 방법 | |
US20240213744A1 (en) | Optical semiconductor element | |
JP2007005642A (ja) | 半導体発光素子 | |
US20200028328A1 (en) | Vertical cavity surface emitting laser |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080325 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080523 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090324 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090525 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100406 |