JP5616874B2 - トレンチゲートmosfet - Google Patents
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- 239000002184 metal Substances 0.000 claims description 87
- 210000000746 body region Anatomy 0.000 claims description 26
- 239000004020 conductor Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 125000004122 cyclic group Chemical group 0.000 claims 3
- 238000000034 method Methods 0.000 description 63
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 62
- 229920005591 polysilicon Polymers 0.000 description 59
- 239000000758 substrate Substances 0.000 description 31
- 230000015556 catabolic process Effects 0.000 description 15
- 238000005530 etching Methods 0.000 description 15
- 150000004767 nitrides Chemical class 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 241001354791 Baliga Species 0.000 description 4
- 238000005094 computer simulation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 241000293849 Cordylanthus Species 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Description
本発明は、トレンチに形成されるゲート電極を含む半導体デバイスに関し、特に、トレンチゲート酸化金属シリコン電界効果トランジスタ(MOSFET)およびダイオードに関する。
パワーMOSFETは、ノートブック型コンピュータおよび他の携帯式電子装置の好適なスイッチ素子であり、パワーMOSFETはまた、自動車産業において電流を切替えるために広く使用されている。MOSFETの一般的な形において、ゲート電極がチップの表面から下方へ延びる溝に形成され、チップの一方の表面上にあるソース領域とチップの他方の表面上にあるドレイン領域との間を、主に垂直方向に電流が流れる。ソース領域は、一般に、チップの上面に示され、ドレイン領域がチップの底面に示される。但し、この配位は任意のものである。溝が誘電体層(一般に二酸化シリコン)で裏打ちされ、チャネルが溝の壁に隣接したボディ領域に形成される。ゲートが適切にバイアスされる(エンハンスメント型Nチャネル素子において正であり、エンハンスメント型Pチャンネル素子において負である)場合、チャネルが反転し、ソースおよびドレイン間を電流が流れるようになる。デプレッション型素子において、ゲートの適切なバイアス(デプレッション型Nチャネル素子において負であり、デプレッション型Pチャンネル素子において正である)によって、MOSFETが通常オンの状態およびオフの状態になる。
本発明のトレンチMOSFETにおいて、溝には、ゲート電極を含む上部と、埋込みソース電極を含む下部とがある。このゲート電極は、通常は酸化膜であるゲート誘電体層によって、ボディ領域から絶縁される。埋込みソース電極が第2の誘電体層によってドリフト領域から絶縁され、第3の誘電体層によってゲート電極から絶縁されが、この誘電体層は通常は両方ともに酸化膜である。埋込みソース電極およびゲート電極の間を垂直に重ね合わせ、ボディ領域が拡散するときの誤差のマージンを設ける。
半導体基板の第1の表面で溝を形成し、基板は第1の導電型のドーパントを含むこと;
第1の表面上にマスク層を被着し、マスク層は溝の壁および床を裏打ちすること;
溝の床に隣接したマスク層の一部を除去し、マスク層の残存部分を溝の側壁に付着したままにしておくこと;
基板にキャビティを形成するために、マスク層の残存部分を溝の側壁に付着したまま、溝の底部を通って基板をエッチングすること;
第1の誘電体層をキャビティに形成するために、マスク層の残存部分を溝の側壁に付着したまま、基板を加熱すること;
マスク層の残存部分を除去すること;
キャビティに導電材料を導入し、第1の誘電体層によって導電材料が上記基板から分離されていること;
導電材料の露出表面に第2の誘電体層を形成し、溝の壁に沿ってゲート誘電体層を形成するように、基板を加熱すること;
溝に導電材料を導入すること;
基板の第1の導電型ボディ領域の反対側に第2の導電型ボディ領域を形成し、ボディ領域はゲート誘電体層に当接すること;
ゲート酸化膜に当接し、ボディ領域を有する接合部を形成する第1の導電型ソース領域を形成すること;
溝の導電材料を第3の誘電体層で覆うこと;
基板上に金属膜を被着させ、金属膜はソース領域と電気的に接触していること。
図2は、本発明によるNチャネルMOSFET20の横断面図を示す。MOSFET20は、N+基板200上で成長するエピタキシャル(エピ)層202に形成される。溝204Aおよび204Bがエピ層202に形成される。溝204Aおよび204Bがメサ206によって分離される。図2には2つの溝のみを示すが、図2に示す溝およびメサは、一般に、実際の素子における溝およびメサの総数のうちのわずかを表すものであり、その総数は100万を数え得ることが、当業者によって理解されよう。溝およびメサは、エピ層202の表面上に様々な幾何学模様に配置可能である。これらのパターンで最も一般的であるものには、メサは六角形、正方形または縦方向のストライプのものがあり、均一の幅および深さの溝によって分離される。溝204Aおよび204Bは同一であるので、単に溝204Aを詳細に記載することとする。溝204Bの構造は溝204Aの構造と同一であり、類似する付番の構成要素は同一のものであることが理解されよう。
Claims (18)
- 半導体ダイに形成されるトレンチゲートMOSFETであって、
前記MOSFETは、
前記ダイの第1の表面上における環状の溝の配置であって、各前記溝が環状のメサによって隣接した溝から分離されており、前記環状の溝が前記MOSFETの活性領域内の環状活性溝を含む、環状の溝の配置と、
前記環状活性溝内のゲート電極および埋込みソース電極とを備え、
前記埋込みソース電極は、前記ゲート電極が延在しない前記環状活性溝内の埋込みソース接触領域内を除いて、前記ゲート電極の下に位置しており、
さらに前記MOSFETは、
前記ダイの前記第1の表面で前記環状活性溝に隣接して配置された第1の導電型のソース領域と、
前記ダイの前記第1の表面上に位置する第1の誘電体層と、
前記第1の誘電体層の上に位置するソース金属膜およびゲート金属膜であって、前記ゲート金属膜は、中央領域から前記ダイの周辺に向かって半径方向に外側に延びる複数のゲート金属脚部を備え、前記ソース金属膜は、前記ゲート金属脚部の間に位置する複数の部分を備える、ソース金属膜およびゲート金属膜と、
を備え、
前記ソース金属膜は、前記第1の誘電体層の第1の開口を通じて前記ソース領域と電気的に接触しており、かつ前記第1の誘電体層の第2の開口を通じて前記埋込みソース接触領域内の前記埋込みソース電極と電気的に接触している、トレンチゲートMOSFET。 - 前記ゲート金属膜は、前記第1の誘電体層の第3の開口を通じて前記ゲート電極と電気的に接触していることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 各前記溝が正方形の輪の形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 各前記溝が丸い角部を有する正方形の輪の形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 前記MOSFETが4つの前記ゲート金属脚部を備え、各前記ゲート金属脚部が前記ダイの角部の方へ延びることを特徴とする、請求項4に記載のトレンチゲートMOSFET。
- 各前記溝が、円形リングの形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 各前記溝が、矩形の輪の形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 各前記溝が、丸い角部を有する矩形の輪の形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 各前記溝が、六角形の輪の形状であることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 請求項1に記載のトレンチゲートMOSFETであって、
前記MOSFETが、
前記環状活性溝に隣接した前記第1の導電型の反対側にあり、前記ソース領域との接合部を形成する第2の導電型のボディ領域と、
前記環状活性溝に隣接して配置され、前記ボディ領域との接合部を形成する前記第1の導電型のドリフト領域と、
前記第1の表面の反対側の前記ダイの第2の表面に隣接した前記第1の導電型のドレイン領域とを備え、
前記ゲート電極はゲート誘電体層によって前記ボディ領域から分離され、
前記埋込みソース電極が第2の誘電体層によって前記ドリフト領域から、および第3の誘電体層によって前記ゲート電極から分離されている、トレンチゲートMOSFET。 - 前記第2の誘電体層は前記ゲート誘電体層よりも厚いことを特徴とする、請求項10に記載のトレンチゲートMOSFET。
- 前記ダイは終端領域を備え、前記終端領域は環状終端溝を備え、前記環状終端溝は前記環状活性溝を取り囲み、前記環状終端溝が第2の誘電体層によって裏打ちされ、導電材料を含み、前記環状終端溝の前記導電材料が、前記ソース金属膜に電気的に接続されていることを特徴とする、請求項1に記載のトレンチゲートMOSFET。
- 前記ソース金属膜は、前記第1の誘電体層の第4の開口を通じて前記環状終端溝内の前記導電材料に接触することを特徴とする、請求項12に記載のトレンチゲートMOSFET。
- 前記環状終端溝が、前記環状活性溝よりも深いことを特徴とする、請求項12に記載のトレンチゲートMOSFET。
- 前記環状終端溝が、前記環状活性溝よりも幅の広いことを特徴とする、請求項14に記載のトレンチゲートMOSFET。
- 半導体ダイに形成されるトレンチゲートMOSFETであって、
前記ダイの第1の表面に形成された環状の溝の配置であって、各前記溝が環状のメサによって隣接した溝から分離されており、前記環状の溝が前記MOSFETの活性領域内の環状活性溝を含み、前記環状活性溝がソース電極およびゲート電極を含む、環状の溝の配置と、
前記第1の表面で前記環状活性溝に隣接して配置された第1の導電型のソース領域と、
前記環状活性溝に隣接した前記第1の導電型の反対側にあり、前記ソース領域との接合部を形成する第2の導電型のボディ領域と、
前記環状活性溝に隣接して配置され前記ボディ領域との接合部を形成する前記第1の導電型のドリフト領域と、
前記ダイの前記第1の表面の上に位置する第1の誘電体層と、
前記第1の表面の反対側にある前記ダイの第2の表面に隣接した前記第1の導電型のドレイン領域と、
前記第1の誘電体層の上に位置するソース金属膜およびゲート金属膜であって、前記ゲート金属膜は、中央領域から前記ダイの周辺に向かって半径方向に外側に延びる複数のゲート金属脚部を備え、前記ソース金属膜は、前記ゲート金属脚部の間に位置する複数の部分を備える、ソース金属膜およびゲート金属膜と、
を備え、
前記ソース金属膜は、前記第1の誘電体層の第1の開口を通じて前記ソース領域と電気的に接触しており、かつ前記第1の誘電体層の第2の開口を通じて前記ソース電極と電気的に接触しており、
前記ゲート電極は、前記環状活性溝の側壁の各々の上部を裏打ちする多重層構造に含まれ、前記多重層構造は、前記環状活性溝の前記側壁と接触する第2の誘電体層と、前記ソース電極と接触する第3の誘電体層とを備え、
前記ゲート電極は前記第2および第3の誘電体層の間に位置する、トレンチゲートMOSFET。 - 前記多重層構造が、前記ボディ領域および前記ドリフト領域間の前記接合部より下の高さまで下方に延びることを特徴とする、請求項16に記載のトレンチゲートMOSFET。
- 前記環状活性溝の床および前記側壁の下部を裏打ちする第4の誘電体層をさらに備え、
前記多重層構造の厚さが、前記第4の誘電体層の厚さとほぼ同様であることを特徴とする、請求項16に記載のトレンチゲートMOSFET。
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US20080182376A1 (en) | 2008-07-31 |
CN101002330A (zh) | 2007-07-18 |
EP2068364A3 (en) | 2010-12-08 |
WO2005112128A2 (en) | 2005-11-24 |
JP2007535822A (ja) | 2007-12-06 |
EP2068364A2 (en) | 2009-06-10 |
US7557409B2 (en) | 2009-07-07 |
US7183610B2 (en) | 2007-02-27 |
US20070187753A1 (en) | 2007-08-16 |
KR20070032653A (ko) | 2007-03-22 |
JP2012054591A (ja) | 2012-03-15 |
JP2012054592A (ja) | 2012-03-15 |
CN100533767C (zh) | 2009-08-26 |
JP5007223B2 (ja) | 2012-08-22 |
WO2005112128A3 (en) | 2006-03-09 |
KR101051507B1 (ko) | 2011-07-22 |
EP1741140A2 (en) | 2007-01-10 |
US20050242392A1 (en) | 2005-11-03 |
US7704836B2 (en) | 2010-04-27 |
US20100019316A1 (en) | 2010-01-28 |
EP2068364B1 (en) | 2013-04-03 |
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