JP5535475B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5535475B2 JP5535475B2 JP2008332454A JP2008332454A JP5535475B2 JP 5535475 B2 JP5535475 B2 JP 5535475B2 JP 2008332454 A JP2008332454 A JP 2008332454A JP 2008332454 A JP2008332454 A JP 2008332454A JP 5535475 B2 JP5535475 B2 JP 5535475B2
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- silicon nitride
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- 239000004065 semiconductor Substances 0.000 title claims description 157
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 131
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 131
- 239000004642 Polyimide Substances 0.000 claims description 46
- 229920001721 polyimide Polymers 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 230000001681 protective effect Effects 0.000 claims description 32
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 13
- 229910052715 tantalum Inorganic materials 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 10
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims description 7
- 230000000052 comparative effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000035515 penetration Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- -1 Pt or Ta Chemical compound 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Description
第1窒化シリコン膜 4
第2窒化シリコン膜 6
オーミック電極 8
電極パッド 10
ポリイミド層 12
第1Ti層 14
第2Ti層 16
Au層 18
ワイヤ 20
開口部 22
第3Ti層 24
Claims (5)
- GaAs系半導体、InP系半導体、及びGaN系半導体のいずれかからなる半導体層と、
前記半導体層上に設けられ、その端部が前記半導体層の表面に接する第1窒化シリコン膜と、
前記第1窒化シリコン膜の前記端部を覆うように、前記半導体層上及び前記第1窒化シリコン膜上に設けられたポリイミドまたはベンゾシクロブテンのいずれかからなる保護膜と、
前記半導体層の表面及び前記第1窒化シリコン膜の前記端部の表面に接するように、前記半導体層と前記保護膜との間から前記第1窒化シリコン膜の端部と前記保護膜との間にかけて連続的に設けられたTi、Ta及びPtのいずれかからなる第1金属層と、
前記半導体層と前記第1窒化シリコン膜との間に設けられ、その端部が前記半導体層の表面に接し、かつ前記端部が前記第1窒化シリコン膜に覆われている第2窒化シリコン膜と、を具備することを特徴とする半導体装置。 - 前記第1金属層の表面に設けられたAu層を具備することを特徴とする請求項1記載の半導体装置。
- GaAs系半導体、InP系半導体、及びGaN系半導体のいずれかからなる半導体層と、
前記半導体層上に設けられ、その端部が前記半導体層の表面に接する第1窒化シリコン膜と、
前記第1窒化シリコン膜の前記端部を覆うように、前記半導体層上及び前記第1窒化シリコン膜上に設けられたポリイミドまたはベンゾシクロブテンのいずれかからなる保護膜と、
前記半導体層の表面及び前記第1窒化シリコン膜の前記端部の表面に接するように、前記半導体層と前記保護膜との間から前記第1窒化シリコン膜の端部と前記保護膜との間にかけて連続的に設けられたTi、Ta及びPtのいずれかからなる第1金属層と、
前記半導体層と前記第1窒化シリコン膜との間に設けられ、その端部が前記半導体層の表面に接し、かつ前記端部が前記第1窒化シリコン膜に覆われている第2窒化シリコン膜と、
前記半導体層の表面及び前記第2窒化シリコン膜の前記端部の表面に接するように、前記半導体層と前記第1窒化シリコン膜との間から前記第1窒化シリコン膜と前記第2窒化シリコン膜との間にかけて連続的に設けられたTi、Ta及びPtのいずれかからなる第2金属層と、を具備することを特徴とする半導体装置。 - GaAs系半導体、InP系半導体、及びGaN系半導体のいずれかからなる半導体層と、
前記半導体層上に設けられ、その端部が前記半導体層の表面に接する第1窒化シリコン膜と、
前記第1窒化シリコン膜の前記端部を覆うように、前記半導体層上及び前記第1窒化シリコン膜上に設けられたポリイミドまたはベンゾシクロブテンのいずれかからなる保護膜と、
前記半導体層の表面及び前記第1窒化シリコン膜の前記端部の表面に接するように、前記半導体層と前記保護膜との間から前記第1窒化シリコン膜の端部と前記保護膜との間にかけて連続的に設けられたTi、Ta及びPtのいずれかからなる第1金属層と、
前記半導体層と前記第1窒化シリコン膜との間に設けられ、Auからなる電極パッドと、
前記電極パッドの上に位置する第1窒化シリコン膜の別の端部及び前記電極パッドの表面に接し、かつ前記電極パッドの表面が露出するように、前記電極パッドの表面から前記第1窒化シリコン膜と前記保護膜との間にかけて連続的に設けられたTi、Ta及びPtのいずれかからなる第3金属層と、を具備することを特徴とする半導体装置。 - 前記第3金属層と離間して、前記露出された電極パッドの表面に接続されたワイヤを具備することを特徴とする請求項4記載の半導体装置。
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